{"id":"https://openalex.org/W4389332373","doi":"https://doi.org/10.1109/cce60043.2023.10332912","title":"Significance of the substrate temperature on the physical properties of RF sputtered Sb<sub>2</sub>Te<sub>3</sub> thin films","display_name":"Significance of the substrate temperature on the physical properties of RF sputtered Sb<sub>2</sub>Te<sub>3</sub> thin films","publication_year":2023,"publication_date":"2023-10-25","ids":{"openalex":"https://openalex.org/W4389332373","doi":"https://doi.org/10.1109/cce60043.2023.10332912"},"language":"en","primary_location":{"id":"doi:10.1109/cce60043.2023.10332912","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/cce60043.2023.10332912","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 20th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5064091237","display_name":"N.E. V\u00e1zquez-Barrag\u00e1n","orcid":"https://orcid.org/0009-0004-4128-8052"},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"N.E. V\u00e1zquez-Barrag\u00e1n","raw_affiliation_strings":["UAQ,Facultad de Qu&#x00ED;mica,Santiago de Quer&#x00E9;taro,Qro.,M&#x00E9;xico"],"affiliations":[{"raw_affiliation_string":"UAQ,Facultad de Qu&#x00ED;mica,Santiago de Quer&#x00E9;taro,Qro.,M&#x00E9;xico","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036335465","display_name":"J. Santos\u2010Cruz","orcid":"https://orcid.org/0000-0002-3619-1713"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Santos-Cruz","raw_affiliation_strings":["UAQ,Facultad de Qu&#x00ED;mica,Santiago de Quer&#x00E9;taro,Qro.,M&#x00E9;xico"],"affiliations":[{"raw_affiliation_string":"UAQ,Facultad de Qu&#x00ED;mica,Santiago de Quer&#x00E9;taro,Qro.,M&#x00E9;xico","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012908947","display_name":"C.E. P\u00e9rez-Garc\u00eda","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"C.E. P\u00e9rez-Garc\u00eda","raw_affiliation_strings":["UAQ,Facultad de Qu&#x00ED;mica,Santiago de Quer&#x00E9;taro,Qro.,M&#x00E9;xico"],"affiliations":[{"raw_affiliation_string":"UAQ,Facultad de Qu&#x00ED;mica,Santiago de Quer&#x00E9;taro,Qro.,M&#x00E9;xico","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029661659","display_name":"S.A. May\u00e9n-Hern\u00e1ndez","orcid":"https://orcid.org/0000-0002-0951-1531"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"S. A. May\u00e9n-Hern\u00e1ndez","raw_affiliation_strings":["UAQ,Facultad de Qu&#x00ED;mica,Santiago de Quer&#x00E9;taro,Qro.,M&#x00E9;xico"],"affiliations":[{"raw_affiliation_string":"UAQ,Facultad de Qu&#x00ED;mica,Santiago de Quer&#x00E9;taro,Qro.,M&#x00E9;xico","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055438494","display_name":"M. Mel\u00e9ndez\u2010Lira","orcid":"https://orcid.org/0000-0001-9799-8337"},"institutions":[{"id":"https://openalex.org/I68368234","display_name":"Center for Research and Advanced Studies of the National Polytechnic Institute","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"M. Mel\u00e9ndez-Lira","raw_affiliation_strings":["CINVESTAV-IPN,Departamento de F&#x00ED;sica,CDMX,M&#x00E9;xico"],"affiliations":[{"raw_affiliation_string":"CINVESTAV-IPN,Departamento de F&#x00ED;sica,CDMX,M&#x00E9;xico","institution_ids":["https://openalex.org/I68368234"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5049167599","display_name":"F. de Moure-Flores","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"F. de Moure-Flores","raw_affiliation_strings":["UAQ,Facultad de Qu&#x00ED;mica,Santiago de Quer&#x00E9;taro,Qro.,M&#x00E9;xico"],"affiliations":[{"raw_affiliation_string":"UAQ,Facultad de Qu&#x00ED;mica,Santiago de Quer&#x00E9;taro,Qro.,M&#x00E9;xico","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5064091237"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.15175011,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"5"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10590","display_name":"Chalcogenide Semiconductor Thin Films","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10590","display_name":"Chalcogenide Semiconductor Thin Films","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11315","display_name":"Phase-change materials and chalcogenides","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.7536768317222595},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.7078782320022583},{"id":"https://openalex.org/keywords/raman-spectroscopy","display_name":"Raman spectroscopy","score":0.5926651954650879},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.5894177556037903},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5451833009719849},{"id":"https://openalex.org/keywords/sputtering","display_name":"Sputtering","score":0.5209051966667175},{"id":"https://openalex.org/keywords/electrical-resistivity-and-conductivity","display_name":"Electrical resistivity and conductivity","score":0.4557584822177887},{"id":"https://openalex.org/keywords/sputter-deposition","display_name":"Sputter deposition","score":0.4517303705215454},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2589687705039978},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.24056455492973328},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.23800337314605713},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.2064724564552307},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.0716668963432312}],"concepts":[{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.7536768317222595},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.7078782320022583},{"id":"https://openalex.org/C40003534","wikidata":"https://www.wikidata.org/wiki/Q862228","display_name":"Raman spectroscopy","level":2,"score":0.5926651954650879},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.5894177556037903},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5451833009719849},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.5209051966667175},{"id":"https://openalex.org/C69990965","wikidata":"https://www.wikidata.org/wiki/Q65402698","display_name":"Electrical resistivity and conductivity","level":2,"score":0.4557584822177887},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.4517303705215454},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2589687705039978},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.24056455492973328},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.23800337314605713},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2064724564552307},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0716668963432312},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cce60043.2023.10332912","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/cce60043.2023.10332912","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 20th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":25,"referenced_works":["https://openalex.org/W1615026536","https://openalex.org/W1998045687","https://openalex.org/W2001513828","https://openalex.org/W2003031782","https://openalex.org/W2017374398","https://openalex.org/W2022311315","https://openalex.org/W2045558303","https://openalex.org/W2058124894","https://openalex.org/W2059126100","https://openalex.org/W2060859416","https://openalex.org/W2067314196","https://openalex.org/W2079979161","https://openalex.org/W2138802646","https://openalex.org/W2152819609","https://openalex.org/W2583939474","https://openalex.org/W2605395723","https://openalex.org/W2608136284","https://openalex.org/W2610138767","https://openalex.org/W2790090641","https://openalex.org/W2979459226","https://openalex.org/W3006911182","https://openalex.org/W3007707863","https://openalex.org/W3087518916","https://openalex.org/W3155289093","https://openalex.org/W3187003387"],"related_works":["https://openalex.org/W2058864804","https://openalex.org/W2035249489","https://openalex.org/W1967383351","https://openalex.org/W850150341","https://openalex.org/W142388841","https://openalex.org/W2066362799","https://openalex.org/W2295922851","https://openalex.org/W2035813632","https://openalex.org/W2481797925","https://openalex.org/W2082528703"],"abstract_inverted_index":{"Sb2Te3":[0,65,129],"thin":[1,41,84],"films":[2,42,85],"were":[3,26,125],"grown":[4],"by":[5],"RF":[6],"magnetron":[7],"sputtering":[8],"at":[9],"a":[10,29,113],"substrate":[11,33],"temperature":[12],"of":[13,31,54,105,120],"300":[14],"\u00b0C":[15],"and":[16,23,46,112],"350":[17],"\u00b0C.":[18],"The":[19,35,56],"structural,":[20],"morphological,":[21],"optical":[22,60],"electrical":[24,115],"properties":[25],"evaluated":[27],"as":[28,70],"function":[30,67],"the":[32,40,51,59,64,75,80,83,103,118,128],"temperature.":[34],"structural":[36],"analysis":[37],"revealed":[38],"that":[39,63],"exhibited":[43],"diffraction":[44],"planes":[45],"Raman":[47],"modes":[48],"attributed":[49],"to":[50,79],"rhombohedral":[52],"phase":[53],"Sb2Te3.":[55],"results":[57],"from":[58],"characterization":[61],"indicated":[62],"samples":[66],"exceptionally":[68],"well":[69],"an":[71],"absorber":[72],"layer":[73],"in":[74,96,117,127],"UV-Vis":[76],"region.":[77],"According":[78],"morphological":[81],"study,":[82],"grew":[86],"with":[87],"densely":[88],"packed":[89],"grains,":[90],"each":[91],"measuring":[92],"around":[93],"100":[94],"nm":[95],"size.":[97],"A":[98],"high":[99],"carrier":[100],"concentration":[101],"on":[102],"order":[104],"10<sup":[106,121],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[107,110,122],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">19</sup>":[108],"cm<sup":[109],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-3</sup>":[111],"low":[114],"resistivity":[116],"range":[119],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-2</sup>":[123],"\u03a9\u2219cm":[124],"obtained":[126],"material.":[130]},"counts_by_year":[],"updated_date":"2025-12-25T23:11:45.687758","created_date":"2025-10-10T00:00:00"}