{"id":"https://openalex.org/W4200182588","doi":"https://doi.org/10.1109/cce53527.2021.9633065","title":"Effect of argon plasma treatment on electronic properties of doped hydrogenated Silicon thin films for photovoltaic applications","display_name":"Effect of argon plasma treatment on electronic properties of doped hydrogenated Silicon thin films for photovoltaic applications","publication_year":2021,"publication_date":"2021-11-10","ids":{"openalex":"https://openalex.org/W4200182588","doi":"https://doi.org/10.1109/cce53527.2021.9633065"},"language":"en","primary_location":{"id":"doi:10.1109/cce53527.2021.9633065","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cce53527.2021.9633065","pdf_url":null,"source":{"id":"https://openalex.org/S4363608599","display_name":"2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102389461","display_name":"Manmohan Jain","orcid":null},"institutions":[{"id":"https://openalex.org/I88910343","display_name":"CSIR National Physical Laboratory of India","ror":"https://ror.org/0307k1x46","country_code":"IN","type":"facility","lineage":["https://openalex.org/I2799351866","https://openalex.org/I4210134808","https://openalex.org/I66760702","https://openalex.org/I88910343"]},{"id":"https://openalex.org/I68368234","display_name":"Center for Research and Advanced Studies of the National Polytechnic Institute","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]},{"id":"https://openalex.org/I94616015","display_name":"Punjab Technical University","ror":"https://ror.org/025kz2973","country_code":"IN","type":"education","lineage":["https://openalex.org/I94616015"]}],"countries":["IN","MX"],"is_corresponding":true,"raw_author_name":"Manmohan Jain","raw_affiliation_strings":["IRC-UHVE, I K Gujral Punjab Technical University, Punjab, India","Photovoltaic Metrology Section, Advanced Materials & Device Metrology Division, CSIR-National Physical Laboratory, New Delhi, India","SEES, Electrical Engineering Department, CINVESTAV-IPN, Mexico City, Mexico"],"affiliations":[{"raw_affiliation_string":"IRC-UHVE, I K Gujral Punjab Technical University, Punjab, India","institution_ids":["https://openalex.org/I94616015"]},{"raw_affiliation_string":"Photovoltaic Metrology Section, Advanced Materials & Device Metrology Division, CSIR-National Physical Laboratory, New Delhi, India","institution_ids":["https://openalex.org/I88910343"]},{"raw_affiliation_string":"SEES, Electrical Engineering Department, CINVESTAV-IPN, Mexico City, Mexico","institution_ids":["https://openalex.org/I68368234"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076580109","display_name":"S. Juneja","orcid":"https://orcid.org/0000-0001-7415-7180"},"institutions":[{"id":"https://openalex.org/I88910343","display_name":"CSIR National Physical Laboratory of India","ror":"https://ror.org/0307k1x46","country_code":"IN","type":"facility","lineage":["https://openalex.org/I2799351866","https://openalex.org/I4210134808","https://openalex.org/I66760702","https://openalex.org/I88910343"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Sucheta Juneja","raw_affiliation_strings":["Photovoltaic Metrology Section, Advanced Materials & Device Metrology Division, CSIR-National Physical Laboratory, New Delhi, India"],"affiliations":[{"raw_affiliation_string":"Photovoltaic Metrology Section, Advanced Materials & Device Metrology Division, CSIR-National Physical Laboratory, New Delhi, India","institution_ids":["https://openalex.org/I88910343"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046952451","display_name":"Kalpana Lodhi","orcid":null},"institutions":[{"id":"https://openalex.org/I88910343","display_name":"CSIR National Physical Laboratory of India","ror":"https://ror.org/0307k1x46","country_code":"IN","type":"facility","lineage":["https://openalex.org/I2799351866","https://openalex.org/I4210134808","https://openalex.org/I66760702","https://openalex.org/I88910343"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Kalpana Lodhi","raw_affiliation_strings":["Photovoltaic Metrology Section, Advanced Materials & Device Metrology Division, CSIR-National Physical Laboratory, New Delhi, India"],"affiliations":[{"raw_affiliation_string":"Photovoltaic Metrology Section, Advanced Materials & Device Metrology Division, CSIR-National Physical Laboratory, New Delhi, India","institution_ids":["https://openalex.org/I88910343"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112955861","display_name":"Chander Kant","orcid":null},"institutions":[{"id":"https://openalex.org/I88910343","display_name":"CSIR National Physical Laboratory of India","ror":"https://ror.org/0307k1x46","country_code":"IN","type":"facility","lineage":["https://openalex.org/I2799351866","https://openalex.org/I4210134808","https://openalex.org/I66760702","https://openalex.org/I88910343"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Chander Kant","raw_affiliation_strings":["Photovoltaic Metrology Section, Advanced Materials & Device Metrology Division, CSIR-National Physical Laboratory, New Delhi, India"],"affiliations":[{"raw_affiliation_string":"Photovoltaic Metrology Section, Advanced Materials & Device Metrology Division, CSIR-National Physical Laboratory, New Delhi, India","institution_ids":["https://openalex.org/I88910343"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079073294","display_name":"Sushil Kumar","orcid":"https://orcid.org/0000-0003-2927-1392"},"institutions":[{"id":"https://openalex.org/I88910343","display_name":"CSIR National Physical Laboratory of India","ror":"https://ror.org/0307k1x46","country_code":"IN","type":"facility","lineage":["https://openalex.org/I2799351866","https://openalex.org/I4210134808","https://openalex.org/I66760702","https://openalex.org/I88910343"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Sushil Kumar","raw_affiliation_strings":["Photovoltaic Metrology Section, Advanced Materials & Device Metrology Division, CSIR-National Physical Laboratory, New Delhi, India"],"affiliations":[{"raw_affiliation_string":"Photovoltaic Metrology Section, Advanced Materials & Device Metrology Division, CSIR-National Physical Laboratory, New Delhi, India","institution_ids":["https://openalex.org/I88910343"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113787422","display_name":"Mohit Jain","orcid":"https://orcid.org/0009-0003-9379-8583"},"institutions":[{"id":"https://openalex.org/I68368234","display_name":"Center for Research and Advanced Studies of the National Polytechnic Institute","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]},{"id":"https://openalex.org/I94616015","display_name":"Punjab Technical University","ror":"https://ror.org/025kz2973","country_code":"IN","type":"education","lineage":["https://openalex.org/I94616015"]},{"id":"https://openalex.org/I88910343","display_name":"CSIR National Physical Laboratory of India","ror":"https://ror.org/0307k1x46","country_code":"IN","type":"facility","lineage":["https://openalex.org/I2799351866","https://openalex.org/I4210134808","https://openalex.org/I66760702","https://openalex.org/I88910343"]}],"countries":["IN","MX"],"is_corresponding":false,"raw_author_name":"Mohit Jain","raw_affiliation_strings":["IRC-UHVE, I K Gujral Punjab Technical University, Punjab, India","Photovoltaic Metrology Section, Advanced Materials & Device Metrology Division, CSIR-National Physical Laboratory, New Delhi, India","SEES, Electrical Engineering Department, CINVESTAV-IPN, Mexico City, Mexico"],"affiliations":[{"raw_affiliation_string":"IRC-UHVE, I K Gujral Punjab Technical University, Punjab, India","institution_ids":["https://openalex.org/I94616015"]},{"raw_affiliation_string":"Photovoltaic Metrology Section, Advanced Materials & Device Metrology Division, CSIR-National Physical Laboratory, New Delhi, India","institution_ids":["https://openalex.org/I88910343"]},{"raw_affiliation_string":"SEES, Electrical Engineering Department, CINVESTAV-IPN, Mexico City, Mexico","institution_ids":["https://openalex.org/I68368234"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028303417","display_name":"Ateet Dutt","orcid":"https://orcid.org/0000-0002-8106-3120"},"institutions":[{"id":"https://openalex.org/I8961855","display_name":"Universidad Nacional Aut\u00f3noma de M\u00e9xico","ror":"https://ror.org/01tmp8f25","country_code":"MX","type":"education","lineage":["https://openalex.org/I8961855"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"Ateet Dutt","raw_affiliation_strings":["Instituto de Investigaciones en Materiales, Universidad Nacional Aut\u00f3noma de M\u00e9xico, Mexico City, Mexico"],"affiliations":[{"raw_affiliation_string":"Instituto de Investigaciones en Materiales, Universidad Nacional Aut\u00f3noma de M\u00e9xico, Mexico City, Mexico","institution_ids":["https://openalex.org/I8961855"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5055026455","display_name":"Yasuhiro Matsumoto","orcid":"https://orcid.org/0000-0003-1160-9324"},"institutions":[{"id":"https://openalex.org/I68368234","display_name":"Center for Research and Advanced Studies of the National Polytechnic Institute","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"Yasuhiro Matsumoto","raw_affiliation_strings":["SEES, Electrical Engineering Department, CINVESTAV-IPN, Mexico City, Mexico"],"affiliations":[{"raw_affiliation_string":"SEES, Electrical Engineering Department, CINVESTAV-IPN, Mexico City, Mexico","institution_ids":["https://openalex.org/I68368234"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5102389461"],"corresponding_institution_ids":["https://openalex.org/I68368234","https://openalex.org/I88910343","https://openalex.org/I94616015"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.17435929,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7662012577056885},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.7429558634757996},{"id":"https://openalex.org/keywords/argon","display_name":"Argon","score":0.6870864629745483},{"id":"https://openalex.org/keywords/plasma-enhanced-chemical-vapor-deposition","display_name":"Plasma-enhanced chemical vapor deposition","score":0.6653172969818115},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6208876371383667},{"id":"https://openalex.org/keywords/plasma","display_name":"Plasma","score":0.49370893836021423},{"id":"https://openalex.org/keywords/doping","display_name":"Doping","score":0.46681663393974304},{"id":"https://openalex.org/keywords/carbon-film","display_name":"Carbon film","score":0.43498694896698},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.4168587923049927},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.360540509223938},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.2751709818840027},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.12811380624771118}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7662012577056885},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.7429558634757996},{"id":"https://openalex.org/C547737533","wikidata":"https://www.wikidata.org/wiki/Q696","display_name":"Argon","level":2,"score":0.6870864629745483},{"id":"https://openalex.org/C38347018","wikidata":"https://www.wikidata.org/wiki/Q905958","display_name":"Plasma-enhanced chemical vapor deposition","level":3,"score":0.6653172969818115},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6208876371383667},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.49370893836021423},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.46681663393974304},{"id":"https://openalex.org/C75937256","wikidata":"https://www.wikidata.org/wiki/Q1440781","display_name":"Carbon film","level":3,"score":0.43498694896698},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4168587923049927},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.360540509223938},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2751709818840027},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.12811380624771118},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cce53527.2021.9633065","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cce53527.2021.9633065","pdf_url":null,"source":{"id":"https://openalex.org/S4363608599","display_name":"2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 18th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8199999928474426,"display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G2511075688","display_name":null,"funder_award_id":"967775","funder_id":"https://openalex.org/F4320321739","funder_display_name":"Consejo Nacional de Ciencia y Tecnolog\u00eda"}],"funders":[{"id":"https://openalex.org/F4320321739","display_name":"Consejo Nacional de Ciencia y Tecnolog\u00eda","ror":"https://ror.org/059ex5q34"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W827565635","https://openalex.org/W1978219590","https://openalex.org/W1981525157","https://openalex.org/W1995362112","https://openalex.org/W2003051327","https://openalex.org/W2012836344","https://openalex.org/W2023165116","https://openalex.org/W2024526395","https://openalex.org/W2044967390","https://openalex.org/W2052258539","https://openalex.org/W2182775064","https://openalex.org/W2316698995","https://openalex.org/W2341493459","https://openalex.org/W2467632288","https://openalex.org/W2545277394","https://openalex.org/W2580098391","https://openalex.org/W2603260850","https://openalex.org/W2604100391","https://openalex.org/W2608762196","https://openalex.org/W2765643983","https://openalex.org/W2768184272","https://openalex.org/W2769063420"],"related_works":["https://openalex.org/W2315275742","https://openalex.org/W1963703370","https://openalex.org/W142624727","https://openalex.org/W2124081025","https://openalex.org/W1992220684","https://openalex.org/W2032818549","https://openalex.org/W2016996349","https://openalex.org/W2131940479","https://openalex.org/W1673820877","https://openalex.org/W315591560"],"abstract_inverted_index":{"Argon":[0,91],"plasma":[1,42,92,124],"treatment":[2,125],"was":[3,88,160],"performed":[4],"on":[5],"doped":[6],"silicon":[7,27,137],"thin":[8,28,138],"films":[9,29,40,65,94,139],"using":[10,50,68],"a":[11,19,45,78,96,150,163],"plasma-enhanced":[12],"chemical":[13],"vapor":[14],"deposition":[15],"(PECVD)":[16],"process":[17],"under":[18,35,44],"microwave":[20],"frequency":[21],"of":[22,48,80,99,105,136],"2.45":[23],"GHz.":[24],"Initially,":[25],"deposited":[26],"were":[30,41,66],"annealed":[31,62,111],"for":[32,55,131,153],"1":[33],"hour":[34],"vacuum":[36],"and":[37,63,73,112],"then":[38],"these":[39,116],"treated":[43,93],"gaseous":[46],"environment":[47],"argon":[49],"optimized":[51],"conditions":[52],"(power,":[53],"pressure)":[54],"30":[56],"minutes":[57],"time":[58],"duration.":[59],"These":[60],"as-deposited,":[61],"plasma-treated":[64],"characterized":[67],"atomic":[69],"force":[70],"microscopy":[71],"(AFM)":[72],"electrical":[74],"conductivity":[75,100],"extensively":[76],"as":[77,108],"function":[79],"temperature":[81],"measured":[82],"in":[83],"vacuum.":[84],"The":[85],"activation":[86,106],"energy":[87,107],"also":[89],"estimated.":[90],"show":[95],"higher":[97],"value":[98,104],"with":[101,162],"the":[102,123,133],"improved":[103],"compared":[109],"to":[110,149],"as-deposited":[113],"films.":[114],"From":[115],"inferences;":[117],"it":[118],"can":[119,126],"be":[120,127],"concluded":[121],"that":[122],"an":[128],"in-situ":[129],"tool":[130],"improving":[132],"electronic":[134],"properties":[135],"by":[140],"allowing":[141],"probable":[142],"surface":[143],"atom":[144],"rearrangement.":[145],"This":[146],"may":[147],"lead":[148],"smoother":[151],"interface":[152],"devices":[154],"like":[155],"hetero-junction":[156],"solar":[157],"cells":[158],"which":[159],"discussed":[161],"typical":[164],"model.":[165]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}