{"id":"https://openalex.org/W2028048986","doi":"https://doi.org/10.1109/cca.2011.6044458","title":"Design and implementation of an electromagnetically damped positioner with flexure suspension","display_name":"Design and implementation of an electromagnetically damped positioner with flexure suspension","publication_year":2011,"publication_date":"2011-09-01","ids":{"openalex":"https://openalex.org/W2028048986","doi":"https://doi.org/10.1109/cca.2011.6044458","mag":"2028048986"},"language":"en","primary_location":{"id":"doi:10.1109/cca.2011.6044458","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cca.2011.6044458","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE International Conference on Control Applications (CCA)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5032718790","display_name":"Kuan\u2010lin Huang","orcid":"https://orcid.org/0000-0002-5537-5817"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Kuan-Lin Huang","raw_affiliation_strings":["National Taiwan University, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065782106","display_name":"Yuan-Zhi Peng","orcid":null},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yuan-Zhi Peng","raw_affiliation_strings":["National Taiwan University, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064385770","display_name":"Jim\u2010Wei Wu","orcid":"https://orcid.org/0000-0001-8332-768X"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Jim-Wei Wu","raw_affiliation_strings":["National Taiwan University, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045416183","display_name":"Mei-Yung Chen","orcid":"https://orcid.org/0000-0002-3410-8373"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Mei-Yung Chen","raw_affiliation_strings":["Department of Mechatronic Engineering"],"affiliations":[{"raw_affiliation_string":"Department of Mechatronic Engineering","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101925654","display_name":"Li\u2010Chen Fu","orcid":"https://orcid.org/0000-0002-6947-7646"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Li-Chen Fu","raw_affiliation_strings":["National Taiwan University, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5032718790"],"corresponding_institution_ids":["https://openalex.org/I16733864"],"apc_list":null,"apc_paid":null,"fwci":1.9717,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.88140905,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"1062","last_page":"1067"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/robustness","display_name":"Robustness (evolution)","score":0.6300204992294312},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.5833767652511597},{"id":"https://openalex.org/keywords/damper","display_name":"Damper","score":0.46655386686325073},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4655144214630127},{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.41526955366134644},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.3970814645290375},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.36573582887649536},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.27990999817848206},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.27811700105667114},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2762458622455597},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.21287578344345093}],"concepts":[{"id":"https://openalex.org/C63479239","wikidata":"https://www.wikidata.org/wiki/Q7353546","display_name":"Robustness (evolution)","level":3,"score":0.6300204992294312},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.5833767652511597},{"id":"https://openalex.org/C140096630","wikidata":"https://www.wikidata.org/wiki/Q3423628","display_name":"Damper","level":2,"score":0.46655386686325073},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4655144214630127},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.41526955366134644},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.3970814645290375},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.36573582887649536},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.27990999817848206},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.27811700105667114},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2762458622455597},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.21287578344345093},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C104317684","wikidata":"https://www.wikidata.org/wiki/Q7187","display_name":"Gene","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cca.2011.6044458","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cca.2011.6044458","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE International Conference on Control Applications (CCA)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1508110748","https://openalex.org/W1975845848","https://openalex.org/W1998097459","https://openalex.org/W2018709745","https://openalex.org/W2047970238","https://openalex.org/W2058209887","https://openalex.org/W2088751074","https://openalex.org/W2096168689","https://openalex.org/W2143862071","https://openalex.org/W6630287647"],"related_works":["https://openalex.org/W2744870258","https://openalex.org/W1988809445","https://openalex.org/W2112026144","https://openalex.org/W2045753504","https://openalex.org/W2363021795","https://openalex.org/W2417714018","https://openalex.org/W2589078217","https://openalex.org/W4317391030","https://openalex.org/W2382163245","https://openalex.org/W3024069089"],"abstract_inverted_index":{"In":[0],"this":[1,173],"paper,":[2],"a":[3,10,104,112,136],"novel":[4],"design,":[5,38],"control":[6],"and":[7,27,49,59,68,75,86,106,130,154,186],"implementation":[8],"of":[9,23,46,53,56,91,124,132,150,172],"three":[11],"degree-of-freedom":[12],"(DOF)":[13],"compact":[14],"positioner":[15,64],"is":[16,101,117],"presented":[17],"with":[18],"high":[19],"resolution":[20,123,185],"in":[21,72,79],"tens":[22],"nanometer-scale":[24],"precision":[25,63,134],"positioning":[26,122,184],"millimeter-level":[28],"long":[29],"travel":[30],"range.":[31],"According":[32],"to":[33,81,87,109,119,145],"the":[34,43,47,50,62,83,89,92,121,125,133,147,158,169],"serial":[35],"flexure":[36,48,93],"mechanism":[37],"whose":[39],"motion":[40],"comes":[41],"from":[42],"elastic":[44],"deformation":[45],"force":[51],"allocation":[52],"five":[54],"pairs":[55],"electromagnetic":[57],"coils":[58],"permanent":[60],"magnets,":[61],"enables":[65],"both":[66],"horizontal":[67],"vertical":[69],"actuations":[70],"resulting":[71],"x-,":[73],"y-,":[74],"z-motions":[76],"respectively.":[77],"Next,":[78],"order":[80],"improve":[82,120],"transient":[84],"response":[85],"suppress":[88],"vibration":[90],"suspension":[94],"mechanism,":[95],"an":[96],"eddy":[97],"current":[98],"damper":[99],"(ECD)":[100],"applied":[102],"as":[103],"passive":[105],"noncontact":[107],"resistance":[108],"vibration.":[110],"Moreover,":[111],"laser":[113],"interferometer":[114],"sensing":[115],"system":[116,152],"implemented":[118,144],"stage.":[126],"To":[127],"maintain":[128],"stability":[129],"robustness":[131],"system,":[135],"decentralized":[137],"adaptive":[138],"sliding":[139],"mode":[140],"controller":[141],"(DASMC)":[142],"was":[143],"overcome":[146],"overall":[148],"situations":[149],"unmodeled":[151],"dynamics":[153],"external":[155],"noises.":[156],"From":[157],"experimental":[159],"results,":[160],"satisfactory":[161],"performance":[162],"has":[163],"been":[164,176],"observed,":[165],"which":[166],"means":[167],"that":[168],"designated":[170],"objectives":[171],"research":[174],"have":[175],"successfully":[177],"attained,":[178],"namely,":[179],"(1)long":[180],"working":[181],"range,":[182],"(2)high":[183],"(3)compact":[187],"design.":[188]},"counts_by_year":[{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}