{"id":"https://openalex.org/W2149573311","doi":"https://doi.org/10.1109/cca.2007.4389412","title":"Control of a high precision stage using a walking piezo actuator","display_name":"Control of a high precision stage using a walking piezo actuator","publication_year":2007,"publication_date":"2007-10-01","ids":{"openalex":"https://openalex.org/W2149573311","doi":"https://doi.org/10.1109/cca.2007.4389412","mag":"2149573311"},"language":"en","primary_location":{"id":"doi:10.1109/cca.2007.4389412","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cca.2007.4389412","pdf_url":null,"source":{"id":"https://openalex.org/S4210212887","display_name":"\u0098The \u009cproceedings of the IEEE Conference on Control Applications/\u0098The \u009cproceedings of the ... IEEE Conference on Control Applications","issn_l":"1085-1992","issn":["1085-1992","2576-3210"],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 IEEE International Conference on Control Applications","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5110272227","display_name":"Roel Merry","orcid":null},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":true,"raw_author_name":"Roel Merry","raw_affiliation_strings":["Department of Mechanical Engineering, Control Systems Technology Group, Eindhovan University of Technology, Eindhoven, Netherlands"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Control Systems Technology Group, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060355677","display_name":"Niels de Kleijn","orcid":null},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Niels de Kleijn","raw_affiliation_strings":["Department of Mechanical Engineering, Control Systems Technology Group, Eindhovan University of Technology, Eindhoven, Netherlands"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Control Systems Technology Group, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033596147","display_name":"Ren\u00e9 van de Molengraft","orcid":"https://orcid.org/0000-0002-5095-4297"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Rene van de Molengraft","raw_affiliation_strings":["Department of Mechanical Engineering, Control Systems Technology Group, Eindhovan University of Technology, Eindhoven, Netherlands"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Control Systems Technology Group, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5026038138","display_name":"M. Steinbuch","orcid":"https://orcid.org/0000-0002-1469-1696"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Maarten Steinbuch","raw_affiliation_strings":["Department of Mechanical Engineering, Control Systems Technology Group, Eindhovan University of Technology, Eindhoven, Netherlands"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Control Systems Technology Group, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5110272227"],"corresponding_institution_ids":["https://openalex.org/I83019370"],"apc_list":null,"apc_paid":null,"fwci":0.5492,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.61712963,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"36","issue":null,"first_page":"1285","last_page":"1290"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.8849022388458252},{"id":"https://openalex.org/keywords/feed-forward","display_name":"Feed forward","score":0.7372970581054688},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.7005823850631714},{"id":"https://openalex.org/keywords/encoder","display_name":"Encoder","score":0.5893614292144775},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.46631938219070435},{"id":"https://openalex.org/keywords/tracking-error","display_name":"Tracking error","score":0.44722405076026917},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.4297904372215271},{"id":"https://openalex.org/keywords/motion-control","display_name":"Motion control","score":0.4291929304599762},{"id":"https://openalex.org/keywords/rotary-encoder","display_name":"Rotary encoder","score":0.4103334844112396},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.31480029225349426},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.27649667859077454},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.25601884722709656},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.24564728140830994},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.20131254196166992},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.14313772320747375},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.12047064304351807}],"concepts":[{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.8849022388458252},{"id":"https://openalex.org/C38858127","wikidata":"https://www.wikidata.org/wiki/Q5441228","display_name":"Feed forward","level":2,"score":0.7372970581054688},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.7005823850631714},{"id":"https://openalex.org/C118505674","wikidata":"https://www.wikidata.org/wiki/Q42586063","display_name":"Encoder","level":2,"score":0.5893614292144775},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.46631938219070435},{"id":"https://openalex.org/C183356978","wikidata":"https://www.wikidata.org/wiki/Q1779213","display_name":"Tracking error","level":3,"score":0.44722405076026917},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.4297904372215271},{"id":"https://openalex.org/C145565327","wikidata":"https://www.wikidata.org/wiki/Q852514","display_name":"Motion control","level":3,"score":0.4291929304599762},{"id":"https://openalex.org/C37488316","wikidata":"https://www.wikidata.org/wiki/Q53699","display_name":"Rotary encoder","level":3,"score":0.4103334844112396},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.31480029225349426},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.27649667859077454},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.25601884722709656},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.24564728140830994},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.20131254196166992},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.14313772320747375},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.12047064304351807},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cca.2007.4389412","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cca.2007.4389412","pdf_url":null,"source":{"id":"https://openalex.org/S4210212887","display_name":"\u0098The \u009cproceedings of the IEEE Conference on Control Applications/\u0098The \u009cproceedings of the ... IEEE Conference on Control Applications","issn_l":"1085-1992","issn":["1085-1992","2576-3210"],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 IEEE International Conference on Control Applications","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.5299999713897705}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W65153156","https://openalex.org/W646034058","https://openalex.org/W1521562387","https://openalex.org/W1544439962","https://openalex.org/W1984810834","https://openalex.org/W2018146940","https://openalex.org/W2038730444","https://openalex.org/W2123215831","https://openalex.org/W2158271989","https://openalex.org/W2164808908","https://openalex.org/W2167781903","https://openalex.org/W4250464919"],"related_works":["https://openalex.org/W2092896760","https://openalex.org/W2068021791","https://openalex.org/W2373662871","https://openalex.org/W2168195809","https://openalex.org/W998225366","https://openalex.org/W2313879336","https://openalex.org/W4205612800","https://openalex.org/W2322736329","https://openalex.org/W1972118934","https://openalex.org/W2334580170"],"abstract_inverted_index":{"Piezoelectric":[0],"actuators":[1,14],"are":[2,18,145],"commonly":[3],"used":[4,30,56],"for":[5,12],"positioning":[6],"high":[7],"precision":[8],"stages.":[9],"The":[10,29],"need":[11],"new":[13,84],"and":[15,27,69,77,99,102,110],"drive":[16,41,47,58,85,97],"principles":[17],"being":[19],"invoked":[20],"by":[21],"the":[22,52,67,70,96,106,115,139,143,153],"increasing":[23],"demands":[24],"regarding":[25],"speed":[26],"accuracy.":[28],"walking":[31],"piezo":[32,53,71],"actuator":[33,38,54,72],"is":[34,55,123],"a":[35,42,59,79,100,126,148],"non-resonant":[36],"piezoelectric":[37,46],"that":[39],"can":[40],"stage":[43,60,68,144],"through":[44],"four":[45],"legs.":[48],"In":[49],"this":[50],"paper,":[51],"to":[57,75,120,138],"with":[61,125,147],"one":[62],"degree-of-freedom.":[63],"A":[64,83],"model":[65],"of":[66,95,105,134,142],"was":[73,87],"made":[74],"develop":[76],"test":[78],"feedback":[80],"control":[81,109],"strategy.":[82],"principle":[86],"developed,":[88],"which":[89],"results":[90],"in":[91],"overlapping":[92],"tip":[93],"trajectories":[94],"legs":[98],"continuous":[101],"smooth":[103],"motion":[104,118],"stage.":[107],"Feedforward":[108],"gain":[111],"scheduling":[112],"further":[113],"improve":[114],"performance.":[116],"Constant":[117],"up":[119,137],"2":[121],"mm/s":[122],"performed":[124,146],"tracking":[127],"error":[128,151],"below":[129,152],"400":[130],"nm.":[131],"Point-to-point":[132],"movements":[133],"5":[135],"nm":[136],"complete":[140],"stroke":[141],"final":[149],"static":[150],"encoder":[154],"resolution.":[155]},"counts_by_year":[{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":5},{"year":2012,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}