{"id":"https://openalex.org/W4403675361","doi":"https://doi.org/10.1109/case59546.2024.10711364","title":"Cyclic Scheduling of Single-arm Cluster Tools with Equipment Front-End Module and One-in-one-out Loadlocks","display_name":"Cyclic Scheduling of Single-arm Cluster Tools with Equipment Front-End Module and One-in-one-out Loadlocks","publication_year":2024,"publication_date":"2024-08-28","ids":{"openalex":"https://openalex.org/W4403675361","doi":"https://doi.org/10.1109/case59546.2024.10711364"},"language":"en","primary_location":{"id":"doi:10.1109/case59546.2024.10711364","is_oa":false,"landing_page_url":"https://doi.org/10.1109/case59546.2024.10711364","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE 20th International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Bao Ying Huang","orcid":null},"institutions":[{"id":"https://openalex.org/I111950717","display_name":"Macau University of Science and Technology","ror":"https://ror.org/03jqs2n27","country_code":"MO","type":"education","lineage":["https://openalex.org/I111950717","https://openalex.org/I4391767947"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"Bao Ying Huang","raw_affiliation_strings":["Macau University of Science and Technology,Macao Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems,China,999078"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macau University of Science and Technology,Macao Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems,China,999078","institution_ids":["https://openalex.org/I111950717"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111690899","display_name":"Nai Qi Wu","orcid":null},"institutions":[{"id":"https://openalex.org/I111950717","display_name":"Macau University of Science and Technology","ror":"https://ror.org/03jqs2n27","country_code":"MO","type":"education","lineage":["https://openalex.org/I111950717","https://openalex.org/I4391767947"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"Nai Qi Wu","raw_affiliation_strings":["Macau University of Science and Technology,Macao Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems,China,999078"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macau University of Science and Technology,Macao Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems,China,999078","institution_ids":["https://openalex.org/I111950717"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044196048","display_name":"Yan Qiao","orcid":"https://orcid.org/0000-0001-5162-0224"},"institutions":[{"id":"https://openalex.org/I111950717","display_name":"Macau University of Science and Technology","ror":"https://ror.org/03jqs2n27","country_code":"MO","type":"education","lineage":["https://openalex.org/I111950717","https://openalex.org/I4391767947"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"Yan Qiao","raw_affiliation_strings":["Macau University of Science and Technology,Macao Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems,China,999078"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macau University of Science and Technology,Macao Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems,China,999078","institution_ids":["https://openalex.org/I111950717"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100328855","display_name":"Shuai Zhang","orcid":"https://orcid.org/0000-0001-9723-9832"},"institutions":[{"id":"https://openalex.org/I111950717","display_name":"Macau University of Science and Technology","ror":"https://ror.org/03jqs2n27","country_code":"MO","type":"education","lineage":["https://openalex.org/I111950717","https://openalex.org/I4391767947"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"Si Wei Zhang","raw_affiliation_strings":["Macau University of Science and Technology,Macao Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems,China,999078"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macau University of Science and Technology,Macao Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems,China,999078","institution_ids":["https://openalex.org/I111950717"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I111950717"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"3412","last_page":"3417"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9934999942779541,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9934999942779541,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9911999702453613,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.9728999733924866,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5668494701385498},{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.562481164932251},{"id":"https://openalex.org/keywords/front-and-back-ends","display_name":"Front and back ends","score":0.5544200539588928},{"id":"https://openalex.org/keywords/cluster","display_name":"Cluster (spacecraft)","score":0.5101092457771301},{"id":"https://openalex.org/keywords/processor-scheduling","display_name":"Processor scheduling","score":0.4793411195278168},{"id":"https://openalex.org/keywords/operating-system","display_name":"Operating system","score":0.28561729192733765},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.27153533697128296},{"id":"https://openalex.org/keywords/operations-management","display_name":"Operations management","score":0.12418955564498901},{"id":"https://openalex.org/keywords/schedule","display_name":"Schedule","score":0.08180677890777588}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5668494701385498},{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.562481164932251},{"id":"https://openalex.org/C53016008","wikidata":"https://www.wikidata.org/wiki/Q620167","display_name":"Front and back ends","level":2,"score":0.5544200539588928},{"id":"https://openalex.org/C164866538","wikidata":"https://www.wikidata.org/wiki/Q367351","display_name":"Cluster (spacecraft)","level":2,"score":0.5101092457771301},{"id":"https://openalex.org/C2984822820","wikidata":"https://www.wikidata.org/wiki/Q1123036","display_name":"Processor scheduling","level":3,"score":0.4793411195278168},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.28561729192733765},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.27153533697128296},{"id":"https://openalex.org/C21547014","wikidata":"https://www.wikidata.org/wiki/Q1423657","display_name":"Operations management","level":1,"score":0.12418955564498901},{"id":"https://openalex.org/C68387754","wikidata":"https://www.wikidata.org/wiki/Q7271585","display_name":"Schedule","level":2,"score":0.08180677890777588}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/case59546.2024.10711364","is_oa":false,"landing_page_url":"https://doi.org/10.1109/case59546.2024.10711364","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE 20th International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W1481260476","https://openalex.org/W2014532218","https://openalex.org/W2053195438","https://openalex.org/W2086414784","https://openalex.org/W2104772533","https://openalex.org/W2314363278","https://openalex.org/W2529540870","https://openalex.org/W2597321818","https://openalex.org/W2607187813","https://openalex.org/W2776443426","https://openalex.org/W2915806045","https://openalex.org/W2964578842","https://openalex.org/W3002552579","https://openalex.org/W3034457223","https://openalex.org/W3038129514","https://openalex.org/W3092035490","https://openalex.org/W3150389572","https://openalex.org/W4205418041","https://openalex.org/W4226092206","https://openalex.org/W4234423367","https://openalex.org/W4251585772","https://openalex.org/W4386698307"],"related_works":["https://openalex.org/W2128410848","https://openalex.org/W2118368532","https://openalex.org/W2102390841","https://openalex.org/W3047653192","https://openalex.org/W2096289371","https://openalex.org/W2126232624","https://openalex.org/W2434525066","https://openalex.org/W3140149227","https://openalex.org/W2946406471","https://openalex.org/W2130555437"],"abstract_inverted_index":{"Scheduling":[0],"cluster":[1,143],"tools":[2],"with":[3],"EFEM":[4],"involves":[5],"collaborative":[6,59,64],"scheduling":[7,94],"among":[8,70],"several":[9],"modules,":[10],"i.e.,":[11],"a":[12,16,42,84,99,105,109],"vacuum":[13],"module":[14,18,24,37,44],"(VM),":[15],"loadlock":[17],"(LLM),":[19],"and":[20,73],"an":[21],"equipment":[22],"front-end":[23],"(EFEM).":[25],"Typically,":[26],"one-in-one-out":[27],"loadlocks":[28],"are":[29],"widely":[30],"employed":[31],"in":[32,47],"wafer":[33],"fabrication.":[34],"Additionally,":[35],"for":[36,58,127],"cooperation,":[38],"LLM":[39,50],"functioning":[40],"as":[41],"shared":[43],"is":[45,102],"essential":[46],"collaboration.":[48],"However,":[49],"has":[51],"pressure":[52],"management":[53],"capabilities,":[54],"introducing":[55],"additional":[56],"challenges":[57],"scheduling.":[60],"To":[61],"address":[62],"such":[63],"scheduling,":[65],"we":[66,82],"analyze":[67],"interaction":[68],"behaviors":[69],"VM,":[71],"EFEM,":[72],"LLM,":[74],"focusing":[75],"on":[76,97],"the":[77,93,117,120,135,142,147,150],"robot":[78,88],"cooperative":[79],"relationship.":[80],"Then,":[81],"introduce":[83],"timeliness":[85],"analysis":[86],"of":[87,122,149],"activities,":[89],"providing":[90,125],"insights":[91],"into":[92,141],"problem.":[95],"Based":[96],"these,":[98],"closed-form":[100],"algorithm":[101,118,137],"derived,":[103],"offering":[104],"methodology":[106],"to":[107,130],"ascertain":[108],"schedule":[110],"that":[111],"minimizes":[112],"tool":[113,144],"cycle":[114],"time.":[115],"Moreover,":[116],"facilitates":[119],"identification":[121],"system":[123,132],"bottlenecks,":[124],"guidance":[126],"systematic":[128],"improvements":[129],"enhance":[131],"performance.":[133],"Furthermore,":[134],"developed":[136],"can":[138],"be":[139],"embedded":[140],"controller,":[145],"enabling":[146],"implementation":[148],"obtained":[151],"schedules.":[152]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}