{"id":"https://openalex.org/W7084073811","doi":"https://doi.org/10.1109/case58245.2025.11164008","title":"Image Denoising for Wafer Transmission Electron Microscopy Using Segment Anything-Guided Optimization","display_name":"Image Denoising for Wafer Transmission Electron Microscopy Using Segment Anything-Guided Optimization","publication_year":2025,"publication_date":"2025-08-17","ids":{"openalex":"https://openalex.org/W7084073811","doi":"https://doi.org/10.1109/case58245.2025.11164008"},"language":"en","primary_location":{"id":"doi:10.1109/case58245.2025.11164008","is_oa":false,"landing_page_url":"https://doi.org/10.1109/case58245.2025.11164008","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE 21st International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Sungsu Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I4210161052","display_name":"Korea University","ror":"https://ror.org/05m1gnk07","country_code":"JP","type":"education","lineage":["https://openalex.org/I4210161052"]},{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]}],"countries":["JP","KR"],"is_corresponding":true,"raw_author_name":"Sungsu Kim","raw_affiliation_strings":["Korea University,Department of Industrial and Management Engineering,Seoul,Republic of Korea,02841"],"affiliations":[{"raw_affiliation_string":"Korea University,Department of Industrial and Management Engineering,Seoul,Republic of Korea,02841","institution_ids":["https://openalex.org/I197347611","https://openalex.org/I4210161052"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Gunhui Jang","orcid":null},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]},{"id":"https://openalex.org/I4210161052","display_name":"Korea University","ror":"https://ror.org/05m1gnk07","country_code":"JP","type":"education","lineage":["https://openalex.org/I4210161052"]}],"countries":["JP","KR"],"is_corresponding":false,"raw_author_name":"Gunhui Jang","raw_affiliation_strings":["Korea University,Department of Industrial and Management Engineering,Seoul,Republic of Korea,02841"],"affiliations":[{"raw_affiliation_string":"Korea University,Department of Industrial and Management Engineering,Seoul,Republic of Korea,02841","institution_ids":["https://openalex.org/I197347611","https://openalex.org/I4210161052"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Hansam Cho","orcid":null},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]},{"id":"https://openalex.org/I4210161052","display_name":"Korea University","ror":"https://ror.org/05m1gnk07","country_code":"JP","type":"education","lineage":["https://openalex.org/I4210161052"]}],"countries":["JP","KR"],"is_corresponding":false,"raw_author_name":"Hansam Cho","raw_affiliation_strings":["Korea University,Department of Industrial and Management Engineering,Seoul,Republic of Korea,02841"],"affiliations":[{"raw_affiliation_string":"Korea University,Department of Industrial and Management Engineering,Seoul,Republic of Korea,02841","institution_ids":["https://openalex.org/I197347611","https://openalex.org/I4210161052"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Heejoong Roh","orcid":null},"institutions":[{"id":"https://openalex.org/I10654025","display_name":"SK Group (United States)","ror":"https://ror.org/00qajw440","country_code":"US","type":"company","lineage":["https://openalex.org/I10654025","https://openalex.org/I134353371"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Heejoong Roh","raw_affiliation_strings":["SK Hynix Inc.,Republic of Korea,17336"],"affiliations":[{"raw_affiliation_string":"SK Hynix Inc.,Republic of Korea,17336","institution_ids":["https://openalex.org/I10654025"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Kyunghye Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I10654025","display_name":"SK Group (United States)","ror":"https://ror.org/00qajw440","country_code":"US","type":"company","lineage":["https://openalex.org/I10654025","https://openalex.org/I134353371"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Kyunghye Kim","raw_affiliation_strings":["SK Hynix Inc.,Republic of Korea,17336"],"affiliations":[{"raw_affiliation_string":"SK Hynix Inc.,Republic of Korea,17336","institution_ids":["https://openalex.org/I10654025"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Munki Jo","orcid":null},"institutions":[{"id":"https://openalex.org/I10654025","display_name":"SK Group (United States)","ror":"https://ror.org/00qajw440","country_code":"US","type":"company","lineage":["https://openalex.org/I10654025","https://openalex.org/I134353371"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Munki Jo","raw_affiliation_strings":["SK Hynix Inc.,Republic of Korea,17336"],"affiliations":[{"raw_affiliation_string":"SK Hynix Inc.,Republic of Korea,17336","institution_ids":["https://openalex.org/I10654025"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Jaeung Tae","orcid":null},"institutions":[{"id":"https://openalex.org/I10654025","display_name":"SK Group (United States)","ror":"https://ror.org/00qajw440","country_code":"US","type":"company","lineage":["https://openalex.org/I10654025","https://openalex.org/I134353371"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jaeung Tae","raw_affiliation_strings":["SK Hynix Inc.,Republic of Korea,17336"],"affiliations":[{"raw_affiliation_string":"SK Hynix Inc.,Republic of Korea,17336","institution_ids":["https://openalex.org/I10654025"]}]},{"author_position":"last","author":{"id":null,"display_name":"Seoung Bum Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]},{"id":"https://openalex.org/I4210161052","display_name":"Korea University","ror":"https://ror.org/05m1gnk07","country_code":"JP","type":"education","lineage":["https://openalex.org/I4210161052"]}],"countries":["JP","KR"],"is_corresponding":false,"raw_author_name":"Seoung Bum Kim","raw_affiliation_strings":["Korea University,Department of Industrial and Management Engineering,Seoul,Republic of Korea,02841"],"affiliations":[{"raw_affiliation_string":"Korea University,Department of Industrial and Management Engineering,Seoul,Republic of Korea,02841","institution_ids":["https://openalex.org/I197347611","https://openalex.org/I4210161052"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":8,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I197347611","https://openalex.org/I4210161052"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.52738599,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"2796","last_page":"2801"},"is_retracted":false,"is_paratext":false,"is_xpac":true,"primary_topic":{"id":"https://openalex.org/T10298","display_name":"Urban Transport and Accessibility","score":0.22169999778270721,"subfield":{"id":"https://openalex.org/subfields/3313","display_name":"Transportation"},"field":{"id":"https://openalex.org/fields/33","display_name":"Social Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},"topics":[{"id":"https://openalex.org/T10298","display_name":"Urban Transport and Accessibility","score":0.22169999778270721,"subfield":{"id":"https://openalex.org/subfields/3313","display_name":"Transportation"},"field":{"id":"https://openalex.org/fields/33","display_name":"Social Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T10841","display_name":"Economic and Environmental Valuation","score":0.05009999871253967,"subfield":{"id":"https://openalex.org/subfields/2002","display_name":"Economics and Econometrics"},"field":{"id":"https://openalex.org/fields/20","display_name":"Economics, Econometrics and Finance"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T12546","display_name":"Smart Parking Systems Research","score":0.031099999323487282,"subfield":{"id":"https://openalex.org/subfields/2215","display_name":"Building and Construction"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/noise-reduction","display_name":"Noise reduction","score":0.6814000010490417},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.675599992275238},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.6132000088691711},{"id":"https://openalex.org/keywords/hyperparameter","display_name":"Hyperparameter","score":0.5455999970436096},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4505999982357025},{"id":"https://openalex.org/keywords/pattern-recognition","display_name":"Pattern recognition (psychology)","score":0.4357999861240387},{"id":"https://openalex.org/keywords/transmission","display_name":"Transmission (telecommunications)","score":0.43540000915527344},{"id":"https://openalex.org/keywords/image-quality","display_name":"Image quality","score":0.4016999900341034}],"concepts":[{"id":"https://openalex.org/C163294075","wikidata":"https://www.wikidata.org/wiki/Q581861","display_name":"Noise reduction","level":2,"score":0.6814000010490417},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.675599992275238},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.644599974155426},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.6132000088691711},{"id":"https://openalex.org/C8642999","wikidata":"https://www.wikidata.org/wiki/Q4171168","display_name":"Hyperparameter","level":2,"score":0.5455999970436096},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.5281999707221985},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5232999920845032},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4505999982357025},{"id":"https://openalex.org/C153180895","wikidata":"https://www.wikidata.org/wiki/Q7148389","display_name":"Pattern recognition (psychology)","level":2,"score":0.4357999861240387},{"id":"https://openalex.org/C761482","wikidata":"https://www.wikidata.org/wiki/Q118093","display_name":"Transmission (telecommunications)","level":2,"score":0.43540000915527344},{"id":"https://openalex.org/C55020928","wikidata":"https://www.wikidata.org/wiki/Q3813865","display_name":"Image quality","level":3,"score":0.4016999900341034},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.39399999380111694},{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.383899986743927},{"id":"https://openalex.org/C9417928","wikidata":"https://www.wikidata.org/wiki/Q1070689","display_name":"Image processing","level":3,"score":0.3619999885559082},{"id":"https://openalex.org/C35772409","wikidata":"https://www.wikidata.org/wiki/Q1323086","display_name":"Image noise","level":3,"score":0.33559998869895935},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.3321000039577484},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.31790000200271606},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.30709999799728394},{"id":"https://openalex.org/C111335779","wikidata":"https://www.wikidata.org/wiki/Q3454686","display_name":"Reduction (mathematics)","level":2,"score":0.30489999055862427},{"id":"https://openalex.org/C2777402240","wikidata":"https://www.wikidata.org/wiki/Q6783436","display_name":"Masking (illustration)","level":2,"score":0.3005000054836273},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.25999999046325684},{"id":"https://openalex.org/C29265498","wikidata":"https://www.wikidata.org/wiki/Q7047719","display_name":"Noise measurement","level":3,"score":0.25290000438690186}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/case58245.2025.11164008","is_oa":false,"landing_page_url":"https://doi.org/10.1109/case58245.2025.11164008","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE 21st International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.42928600311279297}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W1451881698","https://openalex.org/W2056370875","https://openalex.org/W2145023731","https://openalex.org/W3114731248","https://openalex.org/W3178192988","https://openalex.org/W4224104371","https://openalex.org/W4251932919","https://openalex.org/W4312575110","https://openalex.org/W4318952653","https://openalex.org/W4390190100","https://openalex.org/W4390874575","https://openalex.org/W4390971106","https://openalex.org/W4391109864","https://openalex.org/W4396604908","https://openalex.org/W4400475666","https://openalex.org/W4400736802","https://openalex.org/W4411012701"],"related_works":[],"abstract_inverted_index":{"Wafer":[0],"transmission":[1],"electron":[2],"microscopy":[3],"(TEM)":[4],"images":[5,99],"have":[6],"gained":[7],"significant":[8],"attention":[9],"for":[10,38],"analyzing":[11],"the":[12,65,72,107,115],"internal":[13],"structure":[14],"of":[15,27,41,61,67,74,139],"wafers.":[16],"However,":[17],"accurate":[18],"measurements":[19,40],"are":[20],"often":[21],"hindered":[22],"by":[23,114],"substantial":[24],"errors":[25,123],"because":[26,53],"unknown":[28],"noise":[29,55,140],"in":[30],"these":[31],"images.":[32,44,63,129],"Therefore,":[33],"image":[34,69,91],"denoising":[35,92],"is":[36,50],"essential":[37],"reliable":[39],"wafer":[42,46,89],"TEM":[43,47,90],"Denoising":[45],"images,":[48],"however,":[49],"particularly":[51],"challenging":[52],"their":[54],"characteristics":[56,141],"differ":[57],"significantly":[58],"from":[59],"those":[60],"typical":[62],"Moreover,":[64],"absence":[66],"clean-noisy":[68],"pairs":[70],"reduces":[71,121],"effectiveness":[73],"machine":[75],"learning-based":[76],"methods.":[77],"To":[78],"address":[79],"this":[80],"challenge,":[81],"we":[82],"propose":[83],"a":[84],"Segment":[85],"Anything":[86],"(SAM)-guided":[87],"optimization-based":[88],"framework":[93],"(SAMOD)":[94],"that":[95],"combines":[96],"filter-based":[97],"denoised":[98],"generated":[100],"with":[101],"various":[102],"hyperparameter":[103,146],"settings.":[104],"By":[105],"optimizing":[106],"combination":[108],"weights":[109],"using":[110],"pseudo-measurement":[111],"points":[112],"identified":[113],"vision":[116],"foundation":[117],"model":[118,149],"SAM,":[119],"SAMOD":[120,131],"measurement":[122,143],"across":[124],"six":[125],"different":[126],"semiconductor":[127],"process":[128],"Notably,":[130],"achieved":[132],"competitive":[133],"performance":[134],"without":[135],"requiring":[136],"prior":[137],"knowledge":[138],"or":[142,148],"information,":[144],"time-consuming":[145],"searches,":[147],"training,":[150],"ensuring":[151],"both":[152],"practicality":[153],"and":[154],"robustness.":[155]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}