{"id":"https://openalex.org/W4414432545","doi":"https://doi.org/10.1109/case58245.2025.11163803","title":"Collaborative Scheduling of Start-up Transient Process for Cluster Tools with Equipment Front-End Module","display_name":"Collaborative Scheduling of Start-up Transient Process for Cluster Tools with Equipment Front-End Module","publication_year":2025,"publication_date":"2025-08-17","ids":{"openalex":"https://openalex.org/W4414432545","doi":"https://doi.org/10.1109/case58245.2025.11163803"},"language":"en","primary_location":{"id":"doi:10.1109/case58245.2025.11163803","is_oa":false,"landing_page_url":"https://doi.org/10.1109/case58245.2025.11163803","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE 21st International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101408350","display_name":"Mingyao Li","orcid":"https://orcid.org/0000-0003-0930-3414"},"institutions":[{"id":"https://openalex.org/I4510145","display_name":"Jiangxi University of Science and Technology","ror":"https://ror.org/03q0t9252","country_code":"CN","type":"education","lineage":["https://openalex.org/I4510145"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Mingyao Li","raw_affiliation_strings":["Jiangxi University of Science and Technology,School of Mechanical and Electrical Engineering,GanZhou,China,341000"],"affiliations":[{"raw_affiliation_string":"Jiangxi University of Science and Technology,School of Mechanical and Electrical Engineering,GanZhou,China,341000","institution_ids":["https://openalex.org/I4510145"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009709906","display_name":"Wenqing Xiong","orcid":"https://orcid.org/0000-0003-0381-3499"},"institutions":[{"id":"https://openalex.org/I4510145","display_name":"Jiangxi University of Science and Technology","ror":"https://ror.org/03q0t9252","country_code":"CN","type":"education","lineage":["https://openalex.org/I4510145"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenqing Xiong","raw_affiliation_strings":["Jiangxi University of Science and Technology,School of Mechanical and Electrical Engineering,GanZhou,China,341000"],"affiliations":[{"raw_affiliation_string":"Jiangxi University of Science and Technology,School of Mechanical and Electrical Engineering,GanZhou,China,341000","institution_ids":["https://openalex.org/I4510145"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5074774843","display_name":"Chunrong Pan","orcid":"https://orcid.org/0000-0002-2239-9126"},"institutions":[{"id":"https://openalex.org/I4510145","display_name":"Jiangxi University of Science and Technology","ror":"https://ror.org/03q0t9252","country_code":"CN","type":"education","lineage":["https://openalex.org/I4510145"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chunrong Pan","raw_affiliation_strings":["Jiangxi University of Science and Technology,School of Mechanical and Electrical Engineering,GanZhou,China,341000"],"affiliations":[{"raw_affiliation_string":"Jiangxi University of Science and Technology,School of Mechanical and Electrical Engineering,GanZhou,China,341000","institution_ids":["https://openalex.org/I4510145"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5101408350"],"corresponding_institution_ids":["https://openalex.org/I4510145"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.30999824,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"3480","last_page":"3485"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T14306","display_name":"Technology Assessment and Management","score":0.9693999886512756,"subfield":{"id":"https://openalex.org/subfields/2213","display_name":"Safety, Risk, Reliability and Quality"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T14306","display_name":"Technology Assessment and Management","score":0.9693999886512756,"subfield":{"id":"https://openalex.org/subfields/2213","display_name":"Safety, Risk, Reliability and Quality"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.95169997215271,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10763","display_name":"Digital Transformation in Industry","score":0.9196000099182129,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.6794000267982483},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.5802000164985657},{"id":"https://openalex.org/keywords/workload","display_name":"Workload","score":0.5681999921798706},{"id":"https://openalex.org/keywords/wafer-fabrication","display_name":"Wafer fabrication","score":0.5411999821662903},{"id":"https://openalex.org/keywords/transient","display_name":"Transient (computer programming)","score":0.4790000021457672},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.4399000108242035},{"id":"https://openalex.org/keywords/job-shop-scheduling","display_name":"Job shop scheduling","score":0.4255000054836273},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.420199990272522}],"concepts":[{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.6794000267982483},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.5802000164985657},{"id":"https://openalex.org/C2778476105","wikidata":"https://www.wikidata.org/wiki/Q628539","display_name":"Workload","level":2,"score":0.5681999921798706},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5511999726295471},{"id":"https://openalex.org/C35750839","wikidata":"https://www.wikidata.org/wiki/Q7959421","display_name":"Wafer fabrication","level":3,"score":0.5411999821662903},{"id":"https://openalex.org/C2780799671","wikidata":"https://www.wikidata.org/wiki/Q17087362","display_name":"Transient (computer programming)","level":2,"score":0.4790000021457672},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.4399000108242035},{"id":"https://openalex.org/C55416958","wikidata":"https://www.wikidata.org/wiki/Q6206757","display_name":"Job shop scheduling","level":3,"score":0.4255000054836273},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.420199990272522},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.37959998846054077},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.36039999127388},{"id":"https://openalex.org/C107568181","wikidata":"https://www.wikidata.org/wiki/Q5319000","display_name":"Dynamic priority scheduling","level":3,"score":0.35519999265670776},{"id":"https://openalex.org/C120314980","wikidata":"https://www.wikidata.org/wiki/Q180634","display_name":"Distributed computing","level":1,"score":0.3513999879360199},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.32749998569488525},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.3257000148296356},{"id":"https://openalex.org/C174998907","wikidata":"https://www.wikidata.org/wiki/Q357662","display_name":"Work in process","level":2,"score":0.28780001401901245},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.2775999903678894},{"id":"https://openalex.org/C164866538","wikidata":"https://www.wikidata.org/wiki/Q367351","display_name":"Cluster (spacecraft)","level":2,"score":0.2768000066280365},{"id":"https://openalex.org/C119948110","wikidata":"https://www.wikidata.org/wiki/Q7858726","display_name":"Two-level scheduling","level":4,"score":0.2727999985218048},{"id":"https://openalex.org/C115874739","wikidata":"https://www.wikidata.org/wiki/Q825377","display_name":"Critical path method","level":2,"score":0.2648000121116638},{"id":"https://openalex.org/C45374587","wikidata":"https://www.wikidata.org/wiki/Q12525525","display_name":"Computation","level":2,"score":0.2621000111103058},{"id":"https://openalex.org/C14036430","wikidata":"https://www.wikidata.org/wiki/Q3736076","display_name":"Function (biology)","level":2,"score":0.26179999113082886},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.2572999894618988},{"id":"https://openalex.org/C41045048","wikidata":"https://www.wikidata.org/wiki/Q202843","display_name":"Linear programming","level":2,"score":0.2547000050544739},{"id":"https://openalex.org/C31689143","wikidata":"https://www.wikidata.org/wiki/Q733809","display_name":"Fair-share scheduling","level":3,"score":0.2535000145435333}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/case58245.2025.11163803","is_oa":false,"landing_page_url":"https://doi.org/10.1109/case58245.2025.11163803","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE 21st International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320324981","display_name":"Jiangxi University of Science and Technology","ror":"https://ror.org/03q0t9252"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":23,"referenced_works":["https://openalex.org/W1481260476","https://openalex.org/W2014660552","https://openalex.org/W2021474164","https://openalex.org/W2041266349","https://openalex.org/W2117906302","https://openalex.org/W2529540870","https://openalex.org/W2562649913","https://openalex.org/W2597321818","https://openalex.org/W2730944878","https://openalex.org/W2776443426","https://openalex.org/W2783835517","https://openalex.org/W2884307365","https://openalex.org/W2915806045","https://openalex.org/W2964578842","https://openalex.org/W3058230660","https://openalex.org/W3092035490","https://openalex.org/W3134776935","https://openalex.org/W4205418041","https://openalex.org/W4285210261","https://openalex.org/W4312606920","https://openalex.org/W4385153833","https://openalex.org/W4400315082","https://openalex.org/W4403675361"],"related_works":[],"abstract_inverted_index":{"Wafer":[0],"fabrication":[1],"is":[2,92,119],"a":[3,26,96,102,114],"critical":[4],"process":[5,64],"in":[6,19,99,105],"semiconductor":[7],"manufacturing.":[8],"Cluster":[9],"tools":[10,23],"with":[11,107],"Equipment":[12],"Front-End":[13],"Module":[14,28,31],"(EFEM)":[15],"are":[16,129],"widely":[17],"used":[18],"wafer":[20],"fabrication.":[21],"These":[22],"consist":[24],"of":[25,37,51,57,135],"Vacuum":[27],"(VM),":[29],"LoadLock":[30],"(LLM),":[32],"and":[33,45,86,101],"EFEM.":[34],"The":[35,54],"function":[36],"the":[38,43,49,58,61,67,87,108,123,133,136],"LLM":[39],"to":[40,94,121,131],"switch":[41],"between":[42,84],"atmospheric":[44],"vacuum":[46],"environments":[47],"increases":[48],"complexity":[50],"collaborative":[52,81],"scheduling.":[53],"dynamic":[55],"variation":[56],"workload":[59],"during":[60],"start-up":[62,124],"transient":[63,125],"also":[65],"makes":[66],"problem":[68],"even":[69],"more":[70],"difficult.":[71],"To":[72],"address":[73],"these":[74],"issues,":[75],"this":[76,112],"study":[77],"focuses":[78],"on":[79,111],"their":[80],"scheduling":[82,90],"mechanisms":[83],"robots":[85],"LLM.":[88,109],"A":[89],"sequence":[91],"proposed":[93,137],"coordinate":[95],"single-arm":[97],"robot":[98,104],"EFEM":[100],"dual-arm":[103],"VM":[106],"Based":[110],"sequence,":[113],"Linear":[115],"Programming":[116],"Model":[117],"(LPM)":[118],"developed":[120],"optimize":[122],"process.":[126],"Finally,":[127],"experiments":[128],"conducted":[130],"verify":[132],"effectiveness":[134],"method.":[138]},"counts_by_year":[],"updated_date":"2026-04-09T08:11:56.329763","created_date":"2025-10-10T00:00:00"}