{"id":"https://openalex.org/W3092218738","doi":"https://doi.org/10.1109/case48305.2020.9216997","title":"Intelligent Scheduling Methods for Challenges of Cluster Tools with Concurrent Processing of Multiple Wafer Types","display_name":"Intelligent Scheduling Methods for Challenges of Cluster Tools with Concurrent Processing of Multiple Wafer Types","publication_year":2020,"publication_date":"2020-08-01","ids":{"openalex":"https://openalex.org/W3092218738","doi":"https://doi.org/10.1109/case48305.2020.9216997","mag":"3092218738"},"language":"en","primary_location":{"id":"doi:10.1109/case48305.2020.9216997","is_oa":false,"landing_page_url":"https://doi.org/10.1109/case48305.2020.9216997","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE 16th International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5074775966","display_name":"Jinchao Fu","orcid":null},"institutions":[{"id":"https://openalex.org/I4510145","display_name":"Jiangxi University of Science and Technology","ror":"https://ror.org/03q0t9252","country_code":"CN","type":"education","lineage":["https://openalex.org/I4510145"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jinchao Fu","raw_affiliation_strings":["School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou, China","institution_ids":["https://openalex.org/I4510145"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074774843","display_name":"Chunrong Pan","orcid":"https://orcid.org/0000-0002-2239-9126"},"institutions":[{"id":"https://openalex.org/I4510145","display_name":"Jiangxi University of Science and Technology","ror":"https://ror.org/03q0t9252","country_code":"CN","type":"education","lineage":["https://openalex.org/I4510145"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chunrong Pan","raw_affiliation_strings":["School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou, China","institution_ids":["https://openalex.org/I4510145"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5009709906","display_name":"Wenqing Xiong","orcid":"https://orcid.org/0000-0003-0381-3499"},"institutions":[{"id":"https://openalex.org/I111950717","display_name":"Macau University of Science and Technology","ror":"https://ror.org/03jqs2n27","country_code":"MO","type":"education","lineage":["https://openalex.org/I111950717","https://openalex.org/I4391767947"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"Wenqing Xiong","raw_affiliation_strings":["Institute of Systems Engineering, Macau University of Science and Technology, Macau, China"],"affiliations":[{"raw_affiliation_string":"Institute of Systems Engineering, Macau University of Science and Technology, Macau, China","institution_ids":["https://openalex.org/I111950717"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5074775966"],"corresponding_institution_ids":["https://openalex.org/I4510145"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.16963624,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"7","issue":null,"first_page":"173","last_page":"178"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.7296298742294312},{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.6909681558609009},{"id":"https://openalex.org/keywords/distributed-computing","display_name":"Distributed computing","score":0.6366428136825562},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.5699220895767212},{"id":"https://openalex.org/keywords/job-shop-scheduling","display_name":"Job shop scheduling","score":0.5429354906082153},{"id":"https://openalex.org/keywords/dynamic-priority-scheduling","display_name":"Dynamic priority scheduling","score":0.5132834911346436},{"id":"https://openalex.org/keywords/cluster","display_name":"Cluster (spacecraft)","score":0.4885781705379486},{"id":"https://openalex.org/keywords/two-level-scheduling","display_name":"Two-level scheduling","score":0.46459341049194336},{"id":"https://openalex.org/keywords/wafer-fabrication","display_name":"Wafer fabrication","score":0.4456961154937744},{"id":"https://openalex.org/keywords/fair-share-scheduling","display_name":"Fair-share scheduling","score":0.42635518312454224},{"id":"https://openalex.org/keywords/parallel-computing","display_name":"Parallel computing","score":0.3280037045478821},{"id":"https://openalex.org/keywords/real-time-computing","display_name":"Real-time computing","score":0.3247866630554199},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.2513572573661804},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.18021118640899658},{"id":"https://openalex.org/keywords/computer-network","display_name":"Computer network","score":0.11636340618133545},{"id":"https://openalex.org/keywords/operating-system","display_name":"Operating system","score":0.08371293544769287},{"id":"https://openalex.org/keywords/schedule","display_name":"Schedule","score":0.07995352149009705},{"id":"https://openalex.org/keywords/routing","display_name":"Routing (electronic design automation)","score":0.06540253758430481}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7296298742294312},{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.6909681558609009},{"id":"https://openalex.org/C120314980","wikidata":"https://www.wikidata.org/wiki/Q180634","display_name":"Distributed computing","level":1,"score":0.6366428136825562},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5699220895767212},{"id":"https://openalex.org/C55416958","wikidata":"https://www.wikidata.org/wiki/Q6206757","display_name":"Job shop scheduling","level":3,"score":0.5429354906082153},{"id":"https://openalex.org/C107568181","wikidata":"https://www.wikidata.org/wiki/Q5319000","display_name":"Dynamic priority scheduling","level":3,"score":0.5132834911346436},{"id":"https://openalex.org/C164866538","wikidata":"https://www.wikidata.org/wiki/Q367351","display_name":"Cluster (spacecraft)","level":2,"score":0.4885781705379486},{"id":"https://openalex.org/C119948110","wikidata":"https://www.wikidata.org/wiki/Q7858726","display_name":"Two-level scheduling","level":4,"score":0.46459341049194336},{"id":"https://openalex.org/C35750839","wikidata":"https://www.wikidata.org/wiki/Q7959421","display_name":"Wafer fabrication","level":3,"score":0.4456961154937744},{"id":"https://openalex.org/C31689143","wikidata":"https://www.wikidata.org/wiki/Q733809","display_name":"Fair-share scheduling","level":3,"score":0.42635518312454224},{"id":"https://openalex.org/C173608175","wikidata":"https://www.wikidata.org/wiki/Q232661","display_name":"Parallel computing","level":1,"score":0.3280037045478821},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.3247866630554199},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.2513572573661804},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.18021118640899658},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.11636340618133545},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.08371293544769287},{"id":"https://openalex.org/C68387754","wikidata":"https://www.wikidata.org/wiki/Q7271585","display_name":"Schedule","level":2,"score":0.07995352149009705},{"id":"https://openalex.org/C74172769","wikidata":"https://www.wikidata.org/wiki/Q1446839","display_name":"Routing (electronic design automation)","level":2,"score":0.06540253758430481},{"id":"https://openalex.org/C21547014","wikidata":"https://www.wikidata.org/wiki/Q1423657","display_name":"Operations management","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/case48305.2020.9216997","is_oa":false,"landing_page_url":"https://doi.org/10.1109/case48305.2020.9216997","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE 16th International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6200000047683716,"id":"https://metadata.un.org/sdg/8","display_name":"Decent work and economic growth"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":37,"referenced_works":["https://openalex.org/W1970782286","https://openalex.org/W1988796610","https://openalex.org/W2002235729","https://openalex.org/W2016649692","https://openalex.org/W2019063470","https://openalex.org/W2021474164","https://openalex.org/W2026048895","https://openalex.org/W2031275947","https://openalex.org/W2041853864","https://openalex.org/W2051673624","https://openalex.org/W2053195438","https://openalex.org/W2055364613","https://openalex.org/W2073229720","https://openalex.org/W2089091940","https://openalex.org/W2095626931","https://openalex.org/W2104772533","https://openalex.org/W2106659191","https://openalex.org/W2109199307","https://openalex.org/W2110050374","https://openalex.org/W2115936082","https://openalex.org/W2117906302","https://openalex.org/W2144283213","https://openalex.org/W2150109156","https://openalex.org/W2151862830","https://openalex.org/W2157758041","https://openalex.org/W2160324664","https://openalex.org/W2342897103","https://openalex.org/W2511769035","https://openalex.org/W2739664263","https://openalex.org/W2776443426","https://openalex.org/W2804741661","https://openalex.org/W2896759506","https://openalex.org/W2901776478","https://openalex.org/W2922346524","https://openalex.org/W2945320416","https://openalex.org/W4234309741","https://openalex.org/W6816881549"],"related_works":["https://openalex.org/W2184166483","https://openalex.org/W2106332846","https://openalex.org/W2372008037","https://openalex.org/W2397293317","https://openalex.org/W2978148977","https://openalex.org/W3036719625","https://openalex.org/W2545511463","https://openalex.org/W1545991362","https://openalex.org/W4386128920","https://openalex.org/W2225350526"],"abstract_inverted_index":{"With":[0],"the":[1,31,53,62,70,96,103,121],"trends":[2],"of":[3,34,40,55,74,106,109],"larger":[4],"wafer":[5,42,78,111],"diameters":[6],"and":[7,72,88,98,116],"smaller":[8],"lot":[9],"sizes,":[10],"cluster":[11,35,56,75],"tools":[12,36,57,76],"are":[13],"forced":[14],"to":[15,23,94,101],"work":[16],"during":[17],"long":[18],"transient":[19],"processes.":[20],"In":[21],"order":[22,93],"improve":[24],"productivity,":[25],"there":[26,45],"has":[27],"growing":[28],"concern":[29],"about":[30],"scheduling":[32,54,73,104],"problem":[33,105],"with":[37,77],"concurrent":[38,107],"processing":[39,108],"multiple":[41,110],"types.":[43],"Since":[44],"is":[46,58,120],"no":[47],"intermediate":[48],"buffer":[49],"between":[50],"process":[51,85],"modules,":[52],"more":[59],"complicated":[60],"than":[61],"traditional":[63],"mixed":[64],"assembly":[65],"line.":[66],"This":[67],"paper":[68],"reviews":[69],"modeling":[71],"residency":[79],"time":[80,83],"constraints,":[81],"activity":[82],"variation,":[84],"module":[86],"failure":[87],"multi-cluster":[89],"tools.":[90],"Then,":[91],"in":[92],"find":[95],"off-line":[97],"dynamic":[99],"method":[100],"solve":[102],"types,":[112],"intelligent":[113],"search":[114],"algorithm":[115,119],"reinforcement":[117],"learning":[118],"future":[122],"research":[123],"directions,":[124],"respectively.":[125]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}