{"id":"https://openalex.org/W2086051720","doi":"https://doi.org/10.1109/case.2011.6042531","title":"Automation of assembly and packaging at the micro/nano-scale","display_name":"Automation of assembly and packaging at the micro/nano-scale","publication_year":2011,"publication_date":"2011-08-01","ids":{"openalex":"https://openalex.org/W2086051720","doi":"https://doi.org/10.1109/case.2011.6042531","mag":"2086051720"},"language":"en","primary_location":{"id":"doi:10.1109/case.2011.6042531","is_oa":false,"landing_page_url":"https://doi.org/10.1109/case.2011.6042531","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE International Conference on Automation Science and Engineering","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019160451","display_name":"Micky Rakotondrabe","orcid":"https://orcid.org/0000-0002-6413-7271"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I37553959","display_name":"Universit\u00e9 de technologie de belfort-montb\u00e9liard","ror":"https://ror.org/05bn3m307","country_code":"FR","type":"education","lineage":["https://openalex.org/I37553959"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Micky Rakotondrabe","raw_affiliation_strings":["FEMTO-ST Institute, UMR CNRS-6174, UFC, ENSMM, Automatic Control and Micro-Mechatronic Systems Department (AS2M Department), UTBM, Besancon, France","FEMTO-st Institute, UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems department (AS2M department), 25000 Besan\u00e7on - France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEMTO-ST Institute, UMR CNRS-6174, UFC, ENSMM, Automatic Control and Micro-Mechatronic Systems Department (AS2M Department), UTBM, Besancon, France","institution_ids":["https://openalex.org/I2802759292","https://openalex.org/I53262699","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"FEMTO-st Institute, UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems department (AS2M department), 25000 Besan\u00e7on - France","institution_ids":["https://openalex.org/I37553959","https://openalex.org/I1294671590","https://openalex.org/I2802759292"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018599664","display_name":"Yassine Haddab","orcid":"https://orcid.org/0000-0001-7931-2645"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I37553959","display_name":"Universit\u00e9 de technologie de belfort-montb\u00e9liard","ror":"https://ror.org/05bn3m307","country_code":"FR","type":"education","lineage":["https://openalex.org/I37553959"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Yassine Haddab","raw_affiliation_strings":["FEMTO-ST Institute, UMR CNRS-6174, UFC, ENSMM, Automatic Control and Micro-Mechatronic Systems Department (AS2M Department), UTBM, Besancon, France","FEMTO-st Institute, UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems department (AS2M department), 25000 Besan\u00e7on - France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEMTO-ST Institute, UMR CNRS-6174, UFC, ENSMM, Automatic Control and Micro-Mechatronic Systems Department (AS2M Department), UTBM, Besancon, France","institution_ids":["https://openalex.org/I2802759292","https://openalex.org/I53262699","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"FEMTO-st Institute, UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems department (AS2M department), 25000 Besan\u00e7on - France","institution_ids":["https://openalex.org/I37553959","https://openalex.org/I1294671590","https://openalex.org/I2802759292"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083374059","display_name":"C\u00e9dric Cl\u00e9vy","orcid":"https://orcid.org/0000-0002-7881-4245"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I37553959","display_name":"Universit\u00e9 de technologie de belfort-montb\u00e9liard","ror":"https://ror.org/05bn3m307","country_code":"FR","type":"education","lineage":["https://openalex.org/I37553959"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Cedric Clevy","raw_affiliation_strings":["FEMTO-ST Institute, UMR CNRS-6174, UFC, ENSMM, Automatic Control and Micro-Mechatronic Systems Department (AS2M Department), UTBM, Besancon, France","FEMTO-st Institute, UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems department (AS2M department), 25000 Besan\u00e7on - France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEMTO-ST Institute, UMR CNRS-6174, UFC, ENSMM, Automatic Control and Micro-Mechatronic Systems Department (AS2M Department), UTBM, Besancon, France","institution_ids":["https://openalex.org/I2802759292","https://openalex.org/I53262699","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"FEMTO-st Institute, UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems department (AS2M department), 25000 Besan\u00e7on - France","institution_ids":["https://openalex.org/I37553959","https://openalex.org/I1294671590","https://openalex.org/I2802759292"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5074838137","display_name":"Philippe Lutz","orcid":"https://orcid.org/0000-0002-8918-8155"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I37553959","display_name":"Universit\u00e9 de technologie de belfort-montb\u00e9liard","ror":"https://ror.org/05bn3m307","country_code":"FR","type":"education","lineage":["https://openalex.org/I37553959"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Philippe Lutz","raw_affiliation_strings":["FEMTO-ST Institute, UMR CNRS-6174, UFC, ENSMM, Automatic Control and Micro-Mechatronic Systems Department (AS2M Department), UTBM, Besancon, France","FEMTO-st Institute, UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems department (AS2M department), 25000 Besan\u00e7on - France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEMTO-ST Institute, UMR CNRS-6174, UFC, ENSMM, Automatic Control and Micro-Mechatronic Systems Department (AS2M Department), UTBM, Besancon, France","institution_ids":["https://openalex.org/I2802759292","https://openalex.org/I53262699","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"FEMTO-st Institute, UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems department (AS2M department), 25000 Besan\u00e7on - France","institution_ids":["https://openalex.org/I37553959","https://openalex.org/I1294671590","https://openalex.org/I2802759292"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"5"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10783","display_name":"Additive Manufacturing and 3D Printing Technologies","score":0.9943000078201294,"subfield":{"id":"https://openalex.org/subfields/2203","display_name":"Automotive Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.992900013923645,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/automation","display_name":"Automation","score":0.8126305937767029},{"id":"https://openalex.org/keywords/scale","display_name":"Scale (ratio)","score":0.5139941573143005},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.5002927780151367},{"id":"https://openalex.org/keywords/field","display_name":"Field (mathematics)","score":0.47049689292907715},{"id":"https://openalex.org/keywords/manufacturing-engineering","display_name":"Manufacturing engineering","score":0.42567726969718933},{"id":"https://openalex.org/keywords/nano","display_name":"Nano-","score":0.4240327477455139},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.39509135484695435},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3719848394393921},{"id":"https://openalex.org/keywords/systems-engineering","display_name":"Systems engineering","score":0.35427796840667725},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.23497894406318665},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.2138303518295288},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08052393794059753}],"concepts":[{"id":"https://openalex.org/C115901376","wikidata":"https://www.wikidata.org/wiki/Q184199","display_name":"Automation","level":2,"score":0.8126305937767029},{"id":"https://openalex.org/C2778755073","wikidata":"https://www.wikidata.org/wiki/Q10858537","display_name":"Scale (ratio)","level":2,"score":0.5139941573143005},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.5002927780151367},{"id":"https://openalex.org/C9652623","wikidata":"https://www.wikidata.org/wiki/Q190109","display_name":"Field (mathematics)","level":2,"score":0.47049689292907715},{"id":"https://openalex.org/C117671659","wikidata":"https://www.wikidata.org/wiki/Q11049265","display_name":"Manufacturing engineering","level":1,"score":0.42567726969718933},{"id":"https://openalex.org/C2780357685","wikidata":"https://www.wikidata.org/wiki/Q154357","display_name":"Nano-","level":2,"score":0.4240327477455139},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.39509135484695435},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3719848394393921},{"id":"https://openalex.org/C201995342","wikidata":"https://www.wikidata.org/wiki/Q682496","display_name":"Systems engineering","level":1,"score":0.35427796840667725},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.23497894406318665},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.2138303518295288},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08052393794059753},{"id":"https://openalex.org/C202444582","wikidata":"https://www.wikidata.org/wiki/Q837863","display_name":"Pure mathematics","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/case.2011.6042531","is_oa":false,"landing_page_url":"https://doi.org/10.1109/case.2011.6042531","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE International Conference on Automation Science and Engineering","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","score":0.49000000953674316,"display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2519676117","https://openalex.org/W4392633724","https://openalex.org/W2218202131","https://openalex.org/W84108837","https://openalex.org/W4403260262","https://openalex.org/W2004288825","https://openalex.org/W2370405293","https://openalex.org/W4210295735","https://openalex.org/W2567211024","https://openalex.org/W4388916722"],"abstract_inverted_index":{"This":[0],"paper":[1],"provides":[2],"a":[3],"general":[4],"overview":[5],"of":[6,22],"the":[7,11,15,20,29],"material":[8],"covered":[9],"in":[10,24],"fullday":[12],"workshop":[13],"with":[14],"same":[16],"title":[17],"devoted":[18],"to":[19],"field":[21],"automation":[23],"microassembly":[25],"and":[26],"packaging":[27],"at":[28],"micro/nanoscale.":[30]},"counts_by_year":[{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}