{"id":"https://openalex.org/W2186263319","doi":"https://doi.org/10.1109/biocas.2015.7348428","title":"Fabrication of and cell growth on \u2018silicon membranes\u2019 with high density TSVs for bio-sensing applications","display_name":"Fabrication of and cell growth on \u2018silicon membranes\u2019 with high density TSVs for bio-sensing applications","publication_year":2015,"publication_date":"2015-10-01","ids":{"openalex":"https://openalex.org/W2186263319","doi":"https://doi.org/10.1109/biocas.2015.7348428","mag":"2186263319"},"language":"en","primary_location":{"id":"doi:10.1109/biocas.2015.7348428","is_oa":false,"landing_page_url":"https://doi.org/10.1109/biocas.2015.7348428","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE Biomedical Circuits and Systems Conference (BioCAS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5063939006","display_name":"Muneeb Zia","orcid":"https://orcid.org/0000-0001-7734-5670"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Muneeb Zia","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101820629","display_name":"Chaoqi Zhang","orcid":"https://orcid.org/0000-0002-6907-2542"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Chaoqi Zhang","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080867898","display_name":"Paragkumar A. Thadesar","orcid":"https://orcid.org/0000-0001-5179-4734"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Paragkumar Thadesar","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024749463","display_name":"Tracy A. Hookway","orcid":"https://orcid.org/0000-0003-2781-0911"},"institutions":[{"id":"https://openalex.org/I1321430492","display_name":"Gladstone Institutes","ror":"https://ror.org/038321296","country_code":"US","type":"nonprofit","lineage":["https://openalex.org/I1321430492"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Tracy Hookway","raw_affiliation_strings":["Gladstone Institute of Cardiovascular Disease, San Francisco, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Gladstone Institute of Cardiovascular Disease, San Francisco, CA, USA","institution_ids":["https://openalex.org/I1321430492"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014439819","display_name":"Taiyun Chi","orcid":"https://orcid.org/0000-0003-3286-1262"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Taiyun Chi","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037756033","display_name":"Joe L. Gonzalez","orcid":"https://orcid.org/0000-0003-2514-576X"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Joe Gonzalez","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024616884","display_name":"Todd C. McDevitt","orcid":"https://orcid.org/0000-0002-8905-4931"},"institutions":[{"id":"https://openalex.org/I1321430492","display_name":"Gladstone Institutes","ror":"https://ror.org/038321296","country_code":"US","type":"nonprofit","lineage":["https://openalex.org/I1321430492"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Todd McDevitt","raw_affiliation_strings":["Gladstone Institutes, San Francisco, CA, US"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Gladstone Institutes, San Francisco, CA, US","institution_ids":["https://openalex.org/I1321430492"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100646268","display_name":"Hua Wang","orcid":"https://orcid.org/0000-0003-4952-5505"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Hua Wang","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5044507102","display_name":"Muhannad S. Bakir","orcid":"https://orcid.org/0000-0002-0380-0842"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Muhannad S. Bakir","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"7","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},"topics":[{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T11190","display_name":"3D Printing in Biomedical Research","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7590452432632446},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.7553764581680298},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5833417177200317},{"id":"https://openalex.org/keywords/membrane","display_name":"Membrane","score":0.5751054286956787},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.5490310192108154},{"id":"https://openalex.org/keywords/surface-roughness","display_name":"Surface roughness","score":0.5107345581054688},{"id":"https://openalex.org/keywords/interface","display_name":"Interface (matter)","score":0.48780205845832825},{"id":"https://openalex.org/keywords/surface-finish","display_name":"Surface finish","score":0.44949787855148315},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.4312473237514496},{"id":"https://openalex.org/keywords/polystyrene","display_name":"Polystyrene","score":0.4266166687011719},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.37360039353370667},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.12895289063453674},{"id":"https://openalex.org/keywords/polymer","display_name":"Polymer","score":0.12283647060394287},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.11796608567237854},{"id":"https://openalex.org/keywords/contact-angle","display_name":"Contact angle","score":0.0665036141872406}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7590452432632446},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.7553764581680298},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5833417177200317},{"id":"https://openalex.org/C41625074","wikidata":"https://www.wikidata.org/wiki/Q176088","display_name":"Membrane","level":2,"score":0.5751054286956787},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5490310192108154},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.5107345581054688},{"id":"https://openalex.org/C113843644","wikidata":"https://www.wikidata.org/wiki/Q901882","display_name":"Interface (matter)","level":4,"score":0.48780205845832825},{"id":"https://openalex.org/C71039073","wikidata":"https://www.wikidata.org/wiki/Q3439090","display_name":"Surface finish","level":2,"score":0.44949787855148315},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.4312473237514496},{"id":"https://openalex.org/C2777922577","wikidata":"https://www.wikidata.org/wiki/Q146243","display_name":"Polystyrene","level":3,"score":0.4266166687011719},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.37360039353370667},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.12895289063453674},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.12283647060394287},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.11796608567237854},{"id":"https://openalex.org/C6556556","wikidata":"https://www.wikidata.org/wiki/Q899239","display_name":"Contact angle","level":2,"score":0.0665036141872406},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C54517805","wikidata":"https://www.wikidata.org/wiki/Q7456118","display_name":"Sessile drop technique","level":3,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/biocas.2015.7348428","is_oa":false,"landing_page_url":"https://doi.org/10.1109/biocas.2015.7348428","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE Biomedical Circuits and Systems Conference (BioCAS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":28,"referenced_works":["https://openalex.org/W1529995164","https://openalex.org/W1588894294","https://openalex.org/W1971248547","https://openalex.org/W1971982506","https://openalex.org/W1982415122","https://openalex.org/W1995007073","https://openalex.org/W2001486639","https://openalex.org/W2036493022","https://openalex.org/W2043705908","https://openalex.org/W2049751616","https://openalex.org/W2058945390","https://openalex.org/W2078060525","https://openalex.org/W2087417986","https://openalex.org/W2116790557","https://openalex.org/W2119683187","https://openalex.org/W2126555345","https://openalex.org/W2140680308","https://openalex.org/W2148056525","https://openalex.org/W2150123483","https://openalex.org/W2155969942","https://openalex.org/W2174225487","https://openalex.org/W2180930892","https://openalex.org/W2277483030","https://openalex.org/W3143902630","https://openalex.org/W4232769132","https://openalex.org/W6643239646","https://openalex.org/W6670175445","https://openalex.org/W6682107583"],"related_works":["https://openalex.org/W2386922414","https://openalex.org/W4313638943","https://openalex.org/W1966522691","https://openalex.org/W4304014137","https://openalex.org/W3034740403","https://openalex.org/W2032025132","https://openalex.org/W4297916609","https://openalex.org/W2349732462","https://openalex.org/W2783679862","https://openalex.org/W1988381798"],"abstract_inverted_index":{"A":[0],"silicon":[1,44],"membrane":[2],"acting":[3],"as":[4],"an":[5],"interface":[6,22,66],"layer":[7],"between":[8],"live":[9],"cells":[10,106],"and":[11,36,47,100,109],"the":[12,21,50,61,65,77,112,117,122],"sensing":[13,113],"electronics":[14],"enabling":[15,127],"low-cost,":[16],"high-throughput":[17],"bio-sensing":[18],"is":[19,23,70],"proposed;":[20],"capable":[24],"of":[25,64,79,88],"supporting":[26],"high":[27,130],"pixel":[28,131],"density":[29,132],"allowing":[30],"accurate":[31],"image":[32],"mapping.":[33],"Cell":[34],"attachment":[35],"growth":[37],"was":[38],"carried":[39],"out":[40],"on":[41,85,97],"five":[42],"different":[43,80],"based":[45],"surfaces":[46,118],"compared":[48],"to":[49,59,75,94],"standard":[51],"Tissue":[52],"Culture":[53],"Polystyrene":[54],"(TCPS)":[55],"surface":[56,81,91],"in":[57],"order":[58],"optimize":[60],"selection":[62],"process":[63],"material;":[67],"cell":[68,98],"imaging":[69],"performed":[71],"after":[72,121],"48":[73,124],"hours":[74],"study":[76],"effect":[78],"variations":[82],"(different":[83],"materials":[84],"silicon,":[86],"presence":[87],"metal,":[89],"increased":[90],"roughness":[92],"due":[93],"CMP,":[95],"etc.)":[96],"adhesion":[99],"growth.":[101],"The":[102],"results":[103],"show":[104],"that":[105],"successfully":[107],"adhere":[108],"grow":[110],"onto":[111],"electrodes":[114],"for":[115,129],"all":[116],"under":[119],"test":[120],"first":[123],"hours.":[125],"Key":[126],"technologies":[128],"membranes":[133],"are":[134],"also":[135],"presented.":[136]},"counts_by_year":[{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":1}],"updated_date":"2026-07-29T09:40:50.615796","created_date":"2025-10-10T00:00:00"}