{"id":"https://openalex.org/W7134972285","doi":"https://doi.org/10.1109/asp-dac66049.2026.11420290","title":"REDM: Regression-Guided Diffusion Modeling for Universal Soft Sensor Enhancement in Semiconductor Process Control","display_name":"REDM: Regression-Guided Diffusion Modeling for Universal Soft Sensor Enhancement in Semiconductor Process Control","publication_year":2026,"publication_date":"2026-01-19","ids":{"openalex":"https://openalex.org/W7134972285","doi":"https://doi.org/10.1109/asp-dac66049.2026.11420290"},"language":null,"primary_location":{"id":"doi:10.1109/asp-dac66049.2026.11420290","is_oa":false,"landing_page_url":"https://doi.org/10.1109/asp-dac66049.2026.11420290","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2026 31st Asia and South Pacific Design Automation Conference (ASP-DAC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5128800179","display_name":"Weiping Xie","orcid":null},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Weiping Xie","raw_affiliation_strings":["Zhejiang University,College of Integrated Circuits,Hangzhou,China"],"affiliations":[{"raw_affiliation_string":"Zhejiang University,College of Integrated Circuits,Hangzhou,China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001967719","display_name":"Ying Shi","orcid":"https://orcid.org/0000-0002-6240-8795"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yumeng Shi","raw_affiliation_strings":["Zhejiang University,College of Integrated Circuits,Hangzhou,China"],"affiliations":[{"raw_affiliation_string":"Zhejiang University,College of Integrated Circuits,Hangzhou,China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101830211","display_name":"Pang Guo","orcid":"https://orcid.org/0009-0003-8067-0484"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Pang Guo","raw_affiliation_strings":["Zhejiang University,College of Integrated Circuits,Hangzhou,China"],"affiliations":[{"raw_affiliation_string":"Zhejiang University,College of Integrated Circuits,Hangzhou,China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5080027678","display_name":"Yining Chen","orcid":"https://orcid.org/0000-0001-9302-6696"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yining Chen","raw_affiliation_strings":["Zhejiang University,College of Integrated Circuits,Hangzhou,China"],"affiliations":[{"raw_affiliation_string":"Zhejiang University,College of Integrated Circuits,Hangzhou,China","institution_ids":["https://openalex.org/I76130692"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5128800179"],"corresponding_institution_ids":["https://openalex.org/I76130692"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.90423427,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"8","last_page":"14"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.2718999981880188,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},"topics":[{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.2718999981880188,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.13099999725818634,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12676","display_name":"Machine Learning and ELM","score":0.041600000113248825,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5026000142097473},{"id":"https://openalex.org/keywords/process-control","display_name":"Process control","score":0.4372999966144562},{"id":"https://openalex.org/keywords/soft-sensor","display_name":"Soft sensor","score":0.352400004863739},{"id":"https://openalex.org/keywords/control-system","display_name":"Control system","score":0.34290000796318054},{"id":"https://openalex.org/keywords/diffusion","display_name":"Diffusion","score":0.30000001192092896},{"id":"https://openalex.org/keywords/work","display_name":"Work (physics)","score":0.2867000102996826}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5062999725341797},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5026000142097473},{"id":"https://openalex.org/C155386361","wikidata":"https://www.wikidata.org/wiki/Q1649571","display_name":"Process control","level":3,"score":0.4372999966144562},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.38350000977516174},{"id":"https://openalex.org/C115575686","wikidata":"https://www.wikidata.org/wiki/Q18822403","display_name":"Soft sensor","level":3,"score":0.352400004863739},{"id":"https://openalex.org/C17500928","wikidata":"https://www.wikidata.org/wiki/Q959968","display_name":"Control system","level":2,"score":0.34290000796318054},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3328999876976013},{"id":"https://openalex.org/C69357855","wikidata":"https://www.wikidata.org/wiki/Q163214","display_name":"Diffusion","level":2,"score":0.30000001192092896},{"id":"https://openalex.org/C18762648","wikidata":"https://www.wikidata.org/wiki/Q42213","display_name":"Work (physics)","level":2,"score":0.2867000102996826},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.2581000030040741},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2547999918460846},{"id":"https://openalex.org/C68710425","wikidata":"https://www.wikidata.org/wiki/Q5275442","display_name":"Diffusion process","level":3,"score":0.25220000743865967},{"id":"https://openalex.org/C9652623","wikidata":"https://www.wikidata.org/wiki/Q190109","display_name":"Field (mathematics)","level":2,"score":0.25060001015663147}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/asp-dac66049.2026.11420290","is_oa":false,"landing_page_url":"https://doi.org/10.1109/asp-dac66049.2026.11420290","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2026 31st Asia and South Pacific Design Automation Conference (ASP-DAC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W2068574400","https://openalex.org/W2126105956","https://openalex.org/W2147973445","https://openalex.org/W2148143831","https://openalex.org/W2898227265","https://openalex.org/W2919356438","https://openalex.org/W2978187484","https://openalex.org/W3189069319","https://openalex.org/W3208373590","https://openalex.org/W4225975221","https://openalex.org/W4233762729","https://openalex.org/W4365459769","https://openalex.org/W4378974543","https://openalex.org/W4379379509","https://openalex.org/W4386565252","https://openalex.org/W4387587589","https://openalex.org/W4391164493","https://openalex.org/W4399396015","https://openalex.org/W4399647672","https://openalex.org/W4400762160"],"related_works":[],"abstract_inverted_index":{"In":[0],"semiconductor":[1,116],"manufacturing,":[2],"soft":[3,54,136,160],"sensors":[4],"play":[5],"a":[6,41,73,154],"key":[7],"role":[8],"in":[9,163],"Advanced":[10],"Process":[11],"Control":[12],"(APC)":[13],"by":[14,25,67],"enabling":[15],"realtime":[16],"wafer-to-wafer":[17],"monitoring.":[18],"However,":[19],"their":[20],"performance":[21],"is":[22],"often":[23],"limited":[24],"sparse":[26],"labeled":[27],"data,":[28],"process":[29,117],"variability,":[30],"and":[31,51,71,82,99,124,156],"model-specific":[32],"tuning.":[33],"To":[34],"address":[35],"these":[36],"challenges,":[37],"we":[38],"propose":[39],"REDM:":[40],"Regression-Guided":[42],"Diffusion":[43],"Modeling":[44],"framework":[45],"designed":[46],"to":[47],"boost":[48],"the":[49],"accuracy":[50],"robustness":[52],"of":[53,144],"sensor":[55,137,161],"prediction":[56],"across":[57],"diverse":[58],"fabrication":[59],"stages.":[60],"REDM":[61,90,109,133,153],"generates":[62],"highfidelity":[63],"virtual":[64,93],"data":[65],"guided":[66],"predictive":[68],"regression":[69,131],"objectives":[70],"incorporates":[72],"quality-aware":[74],"filtering":[75],"mechanism":[76],"based":[77],"on":[78,110],"Sliced":[79],"Wasserstein":[80],"Distance":[81],"intra-subset":[83],"Cosine":[84],"Similarity.":[85],"Through":[86],"multi-objective":[87],"selection":[88],"techniques,":[89],"identifies":[91],"informative":[92],"samples":[94],"that":[95],"balance":[96],"distributional":[97],"similarity":[98],"internal":[100],"diversity,":[101],"thereby":[102],"enhancing":[103],"downstream":[104],"model":[105],"training.":[106],"We":[107],"evaluate":[108],"real-world":[111],"datasets":[112],"from":[113,149],"three":[114],"major":[115],"stages:":[118],"Chemical":[119,125],"Vapor":[120],"Deposition":[121],"(CVD),":[122],"Etching,":[123],"Mechanical":[126],"Polishing":[127],"(CMP).":[128],"Across":[129],"various":[130],"models,":[132],"consistently":[134],"enhances":[135],"performance,":[138],"with":[139],"an":[140],"average":[141],"$\\mathbf{R}^{2}$":[142],"improvement":[143],"$3.27":[145],"\\%$.":[146],"Its":[147],"independence":[148],"process-specific":[150],"customization":[151],"makes":[152],"scalable":[155],"process-aware":[157],"solution":[158],"for":[159],"enhancement":[162],"smart":[164],"manufacturing.":[165]},"counts_by_year":[],"updated_date":"2026-03-13T14:20:09.374765","created_date":"2026-03-12T00:00:00"}