{"id":"https://openalex.org/W4391183570","doi":"https://doi.org/10.1109/asicon58565.2023.10396461","title":"Loop Oscillation Analysis of MEMS Resonant Pressure Sensor Readout Circuit","display_name":"Loop Oscillation Analysis of MEMS Resonant Pressure Sensor Readout Circuit","publication_year":2023,"publication_date":"2023-10-24","ids":{"openalex":"https://openalex.org/W4391183570","doi":"https://doi.org/10.1109/asicon58565.2023.10396461"},"language":"en","primary_location":{"id":"doi:10.1109/asicon58565.2023.10396461","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/asicon58565.2023.10396461","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE 15th International Conference on ASIC (ASICON)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100583372","display_name":"Tao Lu","orcid":"https://orcid.org/0009-0007-5590-4604"},"institutions":[{"id":"https://openalex.org/I120825670","display_name":"Yunnan Normal University","ror":"https://ror.org/00sc9n023","country_code":"CN","type":"education","lineage":["https://openalex.org/I120825670"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210149211","display_name":"Institute of Semiconductors","ror":"https://ror.org/048dd0611","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210149211"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Tao Lu","raw_affiliation_strings":["Yunnan Normal University,Institute of Semiconductors, Chinese Academy of Sciences,Beijing,China","Institute of Semiconductors, Chinese Academy of Sciences, Yunnan Normal University, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Yunnan Normal University,Institute of Semiconductors, Chinese Academy of Sciences,Beijing,China","institution_ids":["https://openalex.org/I4210149211"]},{"raw_affiliation_string":"Institute of Semiconductors, Chinese Academy of Sciences, Yunnan Normal University, Beijing, China","institution_ids":["https://openalex.org/I120825670","https://openalex.org/I19820366","https://openalex.org/I4210149211"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100709661","display_name":"Huanming Wu","orcid":"https://orcid.org/0000-0002-3530-1781"},"institutions":[{"id":"https://openalex.org/I109935558","display_name":"Ningbo University","ror":"https://ror.org/03et85d35","country_code":"CN","type":"education","lineage":["https://openalex.org/I109935558"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Huan-Ming Wu","raw_affiliation_strings":["Ningbo University,Faculty of Electrical Engineering and Computer Science,Ningbo,China","Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo, China"],"affiliations":[{"raw_affiliation_string":"Ningbo University,Faculty of Electrical Engineering and Computer Science,Ningbo,China","institution_ids":["https://openalex.org/I109935558"]},{"raw_affiliation_string":"Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo, China","institution_ids":["https://openalex.org/I109935558"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037551819","display_name":"Tao Yin","orcid":"https://orcid.org/0000-0001-5908-8279"},"institutions":[{"id":"https://openalex.org/I4210149211","display_name":"Institute of Semiconductors","ror":"https://ror.org/048dd0611","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210149211"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tao Yin","raw_affiliation_strings":["University of Chinese Academy of Sciences,Institute of Semiconductors, Chinese Academy of Sciences,Beijing,China","Institute of Semiconductors, Chinese Academy of Sciences, University of Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"University of Chinese Academy of Sciences,Institute of Semiconductors, Chinese Academy of Sciences,Beijing,China","institution_ids":["https://openalex.org/I4210149211"]},{"raw_affiliation_string":"Institute of Semiconductors, Chinese Academy of Sciences, University of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210149211","https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068957580","display_name":"Liyuan Liu","orcid":"https://orcid.org/0000-0002-1737-1727"},"institutions":[{"id":"https://openalex.org/I4210149211","display_name":"Institute of Semiconductors","ror":"https://ror.org/048dd0611","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210149211"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Li-Yuan Liu","raw_affiliation_strings":["University of Chinese Academy of Sciences,Institute of Semiconductors, Chinese Academy of Sciences,Beijing,China","Institute of Semiconductors, Chinese Academy of Sciences, University of Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"University of Chinese Academy of Sciences,Institute of Semiconductors, Chinese Academy of Sciences,Beijing,China","institution_ids":["https://openalex.org/I4210149211"]},{"raw_affiliation_string":"Institute of Semiconductors, Chinese Academy of Sciences, University of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210149211","https://openalex.org/I4210165038"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5012331397","display_name":"Wei Wang","orcid":"https://orcid.org/0000-0003-1766-1764"},"institutions":[{"id":"https://openalex.org/I120825670","display_name":"Yunnan Normal University","ror":"https://ror.org/00sc9n023","country_code":"CN","type":"education","lineage":["https://openalex.org/I120825670"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wei Wang","raw_affiliation_strings":["Yunnan Normal University,Yunnan,China","Yunnan Normal University, Yunnan, China"],"affiliations":[{"raw_affiliation_string":"Yunnan Normal University,Yunnan,China","institution_ids":["https://openalex.org/I120825670"]},{"raw_affiliation_string":"Yunnan Normal University, Yunnan, China","institution_ids":["https://openalex.org/I120825670"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5100583372"],"corresponding_institution_ids":["https://openalex.org/I120825670","https://openalex.org/I19820366","https://openalex.org/I4210149211"],"apc_list":null,"apc_paid":null,"fwci":0.1306,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.48235457,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/oscillation","display_name":"Oscillation (cell signaling)","score":0.6373923420906067},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.6251938343048096},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.6049052476882935},{"id":"https://openalex.org/keywords/parasitic-capacitance","display_name":"Parasitic capacitance","score":0.5983385443687439},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.5297174453735352},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.4944145679473877},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.4790133833885193},{"id":"https://openalex.org/keywords/electrical-impedance","display_name":"Electrical impedance","score":0.46896424889564514},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4618901312351227},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.44118624925613403},{"id":"https://openalex.org/keywords/output-impedance","display_name":"Output impedance","score":0.4197673499584198},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3193427324295044},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3008418679237366},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.29214033484458923},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.24721425771713257},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.23198392987251282},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.17469540238380432}],"concepts":[{"id":"https://openalex.org/C2778439541","wikidata":"https://www.wikidata.org/wiki/Q7106412","display_name":"Oscillation (cell signaling)","level":2,"score":0.6373923420906067},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.6251938343048096},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.6049052476882935},{"id":"https://openalex.org/C154318817","wikidata":"https://www.wikidata.org/wiki/Q2157249","display_name":"Parasitic capacitance","level":4,"score":0.5983385443687439},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.5297174453735352},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.4944145679473877},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.4790133833885193},{"id":"https://openalex.org/C17829176","wikidata":"https://www.wikidata.org/wiki/Q179043","display_name":"Electrical impedance","level":2,"score":0.46896424889564514},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4618901312351227},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.44118624925613403},{"id":"https://openalex.org/C58112919","wikidata":"https://www.wikidata.org/wiki/Q631203","display_name":"Output impedance","level":3,"score":0.4197673499584198},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3193427324295044},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3008418679237366},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.29214033484458923},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.24721425771713257},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.23198392987251282},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.17469540238380432},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C54355233","wikidata":"https://www.wikidata.org/wiki/Q7162","display_name":"Genetics","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/asicon58565.2023.10396461","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/asicon58565.2023.10396461","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE 15th International Conference on ASIC (ASICON)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8799999952316284,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W746267584","https://openalex.org/W1954875177","https://openalex.org/W2001630762","https://openalex.org/W2113987131","https://openalex.org/W3088864528","https://openalex.org/W4321022108"],"related_works":["https://openalex.org/W2058545256","https://openalex.org/W4396689093","https://openalex.org/W2394034449","https://openalex.org/W2904654231","https://openalex.org/W4210807885","https://openalex.org/W2051045034","https://openalex.org/W2248915580","https://openalex.org/W2999380399","https://openalex.org/W4304890870","https://openalex.org/W2126779451"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,115],"CMOS":[4],"automatic":[5],"gain":[6,61],"control":[7],"(AGC)":[8],"readout":[9],"circuit":[10,95,101],"for":[11,22],"Micro":[12],"Electro-Mechanical":[13],"System":[14],"(MEMS)":[15],"resonant":[16],"pressure":[17],"sensor.":[18],"The":[19,35,57,100],"oscillation":[20,52],"conditions":[21,58],"MEMS":[23],"loop":[24,60],"and":[25,41,53],"the":[26,39,45,50,69,94],"accompanying":[27],"parasitic":[28,36],"loops":[29],"are":[30,73],"analyzed":[31],"in":[32,93],"this":[33],"paper.":[34],"capacitance":[37],"between":[38],"driving":[40],"sensing":[42],"electrodes":[43],"of":[44,59,108],"sensor":[46],"will":[47],"lead":[48],"to":[49,64,67,83,96],"electrical":[51],"prevent":[54],"electrical-mechanical":[55],"oscillation.":[56],"that":[62],"need":[63],"be":[65],"met":[66],"solve":[68],"above":[70],"negative":[71],"effects":[72],"discussed.":[74],"A":[75],"low":[76],"noise":[77,86,107],"Trans-Impedance":[78],"Amplifier":[79],"(TIA)":[80],"is":[81,91],"proposed":[82],"improve":[84],"system":[85],"performance.":[87],"Fully":[88],"differential":[89],"structure":[90],"adopted":[92],"reduce":[97],"common-mode":[98],"interference.":[99],"achieves":[102],"an":[103],"equivalent":[104],"input":[105],"current":[106,113],"0.41":[109],"pA/\u221aHz@100kHz,":[110],"consumed":[111],"4.3mA":[112],"under":[114],"5-V":[116],"supply":[117],"voltage.":[118]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-03-25T13:04:00.132906","created_date":"2025-10-10T00:00:00"}