{"id":"https://openalex.org/W2125398708","doi":"https://doi.org/10.1109/apccas.2010.5774934","title":"Impact of HALO structure on threshold voltage and leakage current in 45nm NMOS device","display_name":"Impact of HALO structure on threshold voltage and leakage current in 45nm NMOS device","publication_year":2010,"publication_date":"2010-12-01","ids":{"openalex":"https://openalex.org/W2125398708","doi":"https://doi.org/10.1109/apccas.2010.5774934","mag":"2125398708"},"language":"en","primary_location":{"id":"doi:10.1109/apccas.2010.5774934","is_oa":false,"landing_page_url":"https://doi.org/10.1109/apccas.2010.5774934","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE Asia Pacific Conference on Circuits and Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5000527233","display_name":"F. Salehuddin","orcid":"https://orcid.org/0000-0003-4136-5092"},"institutions":[{"id":"https://openalex.org/I79156528","display_name":"Universiti Tenaga Nasional","ror":"https://ror.org/03kxdn807","country_code":"MY","type":"education","lineage":["https://openalex.org/I79156528","https://openalex.org/I874769580"]}],"countries":["MY"],"is_corresponding":true,"raw_author_name":"F. Salehuddin","raw_affiliation_strings":["College of Engineering, Universiti Tenaga Malaysia (UNITEN), Kajang, Selangor Darul Ehsan, Malaysia","College of Engineering, Universiti Tenaga Nasional (UNITEN), 43009 Kajang, Selangor, Malaysia"],"affiliations":[{"raw_affiliation_string":"College of Engineering, Universiti Tenaga Malaysia (UNITEN), Kajang, Selangor Darul Ehsan, Malaysia","institution_ids":["https://openalex.org/I79156528"]},{"raw_affiliation_string":"College of Engineering, Universiti Tenaga Nasional (UNITEN), 43009 Kajang, Selangor, Malaysia","institution_ids":["https://openalex.org/I79156528"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049304885","display_name":"Ibrahim Ahmad","orcid":"https://orcid.org/0000-0002-1649-2658"},"institutions":[{"id":"https://openalex.org/I79156528","display_name":"Universiti Tenaga Nasional","ror":"https://ror.org/03kxdn807","country_code":"MY","type":"education","lineage":["https://openalex.org/I79156528","https://openalex.org/I874769580"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"I. Ahmad","raw_affiliation_strings":["College of Engineering, Universiti Tenaga Malaysia (UNITEN), Kajang, Selangor Darul Ehsan, Malaysia","College of Engineering, Universiti Tenaga Nasional (UNITEN), 43009 Kajang, Selangor, Malaysia"],"affiliations":[{"raw_affiliation_string":"College of Engineering, Universiti Tenaga Malaysia (UNITEN), Kajang, Selangor Darul Ehsan, Malaysia","institution_ids":["https://openalex.org/I79156528"]},{"raw_affiliation_string":"College of Engineering, Universiti Tenaga Nasional (UNITEN), 43009 Kajang, Selangor, Malaysia","institution_ids":["https://openalex.org/I79156528"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037123371","display_name":"Fazrena Azlee Hamid","orcid":"https://orcid.org/0000-0002-7227-5420"},"institutions":[{"id":"https://openalex.org/I79156528","display_name":"Universiti Tenaga Nasional","ror":"https://ror.org/03kxdn807","country_code":"MY","type":"education","lineage":["https://openalex.org/I79156528","https://openalex.org/I874769580"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"F.A. Hamid","raw_affiliation_strings":["College of Engineering, Universiti Tenaga Malaysia (UNITEN), Kajang, Selangor Darul Ehsan, Malaysia","College of Engineering, Universiti Tenaga Nasional (UNITEN), 43009 Kajang, Selangor, Malaysia"],"affiliations":[{"raw_affiliation_string":"College of Engineering, Universiti Tenaga Malaysia (UNITEN), Kajang, Selangor Darul Ehsan, Malaysia","institution_ids":["https://openalex.org/I79156528"]},{"raw_affiliation_string":"College of Engineering, Universiti Tenaga Nasional (UNITEN), 43009 Kajang, Selangor, Malaysia","institution_ids":["https://openalex.org/I79156528"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111379171","display_name":"Azami Zaharim","orcid":null},"institutions":[{"id":"https://openalex.org/I885383172","display_name":"National University of Malaysia","ror":"https://ror.org/00bw8d226","country_code":"MY","type":"education","lineage":["https://openalex.org/I885383172"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"A. Zaharim","raw_affiliation_strings":["Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia, Bangi, Selangor Darul Ehsan, Malaysia","Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia (UKM), Bangi, Selangor, Malaysia"],"affiliations":[{"raw_affiliation_string":"Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia, Bangi, Selangor Darul Ehsan, Malaysia","institution_ids":["https://openalex.org/I885383172"]},{"raw_affiliation_string":"Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia (UKM), Bangi, Selangor, Malaysia","institution_ids":["https://openalex.org/I885383172"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5000527233"],"corresponding_institution_ids":["https://openalex.org/I79156528"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.15954249,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1147","last_page":"1150"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nmos-logic","display_name":"NMOS logic","score":0.6822715401649475},{"id":"https://openalex.org/keywords/halo","display_name":"Halo","score":0.5331358909606934},{"id":"https://openalex.org/keywords/leakage","display_name":"Leakage (economics)","score":0.47945916652679443},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.40038710832595825},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3641095757484436},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3538798689842224},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3358667492866516},{"id":"https://openalex.org/keywords/topology","display_name":"Topology (electrical circuits)","score":0.32855743169784546},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.294840931892395},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.20313096046447754},{"id":"https://openalex.org/keywords/astrophysics","display_name":"Astrophysics","score":0.06954792141914368}],"concepts":[{"id":"https://openalex.org/C197162436","wikidata":"https://www.wikidata.org/wiki/Q83908","display_name":"NMOS logic","level":4,"score":0.6822715401649475},{"id":"https://openalex.org/C184665706","wikidata":"https://www.wikidata.org/wiki/Q186310","display_name":"Halo","level":3,"score":0.5331358909606934},{"id":"https://openalex.org/C2777042071","wikidata":"https://www.wikidata.org/wiki/Q6509304","display_name":"Leakage (economics)","level":2,"score":0.47945916652679443},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.40038710832595825},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3641095757484436},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3538798689842224},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3358667492866516},{"id":"https://openalex.org/C184720557","wikidata":"https://www.wikidata.org/wiki/Q7825049","display_name":"Topology (electrical circuits)","level":2,"score":0.32855743169784546},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.294840931892395},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.20313096046447754},{"id":"https://openalex.org/C44870925","wikidata":"https://www.wikidata.org/wiki/Q37547","display_name":"Astrophysics","level":1,"score":0.06954792141914368},{"id":"https://openalex.org/C139719470","wikidata":"https://www.wikidata.org/wiki/Q39680","display_name":"Macroeconomics","level":1,"score":0.0},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C98444146","wikidata":"https://www.wikidata.org/wiki/Q318","display_name":"Galaxy","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/apccas.2010.5774934","is_oa":false,"landing_page_url":"https://doi.org/10.1109/apccas.2010.5774934","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE Asia Pacific Conference on Circuits and Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.5099999904632568,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320322873","display_name":"Universiti Teknikal Malaysia Melaka","ror":"https://ror.org/01xb6rs26"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W2060135116","https://openalex.org/W2067292693","https://openalex.org/W2109647217","https://openalex.org/W2119469502","https://openalex.org/W2696947040","https://openalex.org/W2789952880","https://openalex.org/W4285719527","https://openalex.org/W6740154501"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W2217098757","https://openalex.org/W3208688275","https://openalex.org/W2088771128","https://openalex.org/W2263373136","https://openalex.org/W2796085262","https://openalex.org/W190245591","https://openalex.org/W1650778624","https://openalex.org/W2545385022","https://openalex.org/W2095798024"],"abstract_inverted_index":{"In":[0,97],"this":[1,98],"paper,":[2],"we":[3],"investigate":[4],"the":[5,49,94,100,125,160,164,171],"impact":[6],"of":[7,35,71],"process":[8,36,51,73,95,103],"parameter":[9],"like":[10],"halo":[11,47,140,145],"structure":[12],"on":[13,163],"threshold":[14,108],"voltage":[15,109],"(V":[16],"<sub":[17,25,131,136,173,190],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[18,26,132,137,174,191],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">TH</sub>":[19,133,175],")":[20,28],"and":[21,59,76,92,110,118,134,144,155],"leakage":[22,111],"current":[23,112],"(I":[24],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">Leak</sub>":[27,138,192],"in":[29,90],"45nm":[30],"NMOS":[31,177],"device.":[32],"The":[33,167,185],"settings":[34],"parameters":[37,52,104],"were":[38,55,83],"determined":[39],"by":[40],"using":[41,67],"Taguchi":[42,86],"experimental":[43],"design":[44,91],"method.":[45],"Besides":[46],"implant,":[48],"other":[50],"which":[53],"used":[54],"Source/Drain":[56],"(S/D)":[57],"implant":[58,120,141,146,153],"oxide":[60,114,156],"growth":[61,115,157],"temperature.":[62],"This":[63],"work":[64],"was":[65],"done":[66],"TCAD":[68],"simulator,":[69,74,78],"consisting":[70],"a":[72],"ATHENA":[75],"device":[77,178],"ATLAS.":[79],"These":[80],"two":[81],"simulators":[82],"combined":[84],"with":[85,105],"method":[87],"to":[88,107,180],"aid":[89],"optimize":[93],"parameters.":[96],"research,":[99],"most":[101],"effective":[102],"respect":[106],"are":[113,139],"temperature":[116,158],"(71%)":[117],"S/D":[119,152],"dose":[121,147,154],"(47%)":[122],"respectively.":[123,149],"Whereas":[124],"second":[126],"ranking":[127],"factor":[128],"affecting":[129],"V":[130,172],"I":[135,189],"tilt":[142],"(15%)":[143],"(35%)":[148],"As":[150],"conclusions,":[151],"have":[159],"strongest":[161],"effect":[162],"response":[165],"characteristics.":[166],"results":[168,186],"show":[169,187],"that":[170,188],"for":[176],"equal":[179],"0.150V":[181],"at":[182],"tox=":[183],"1.1nm.":[184],"after":[193],"optimizations":[194],"approaches":[195],"is":[196],"51.8\u03bcA/\u03bcm.":[197]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}