{"id":"https://openalex.org/W4391952746","doi":"https://doi.org/10.1109/anzcc59813.2024.10432897","title":"Measurement of electromagnetic force using a feedback-controlled MEMS force sensor<sup>*</sup>","display_name":"Measurement of electromagnetic force using a feedback-controlled MEMS force sensor<sup>*</sup>","publication_year":2024,"publication_date":"2024-02-01","ids":{"openalex":"https://openalex.org/W4391952746","doi":"https://doi.org/10.1109/anzcc59813.2024.10432897"},"language":"en","primary_location":{"id":"doi:10.1109/anzcc59813.2024.10432897","is_oa":false,"landing_page_url":"https://doi.org/10.1109/anzcc59813.2024.10432897","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 Australian &amp; New Zealand Control Conference (ANZCC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102893835","display_name":"K. S. Vikrant","orcid":null},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"K. S. Vikrant","raw_affiliation_strings":["The University of Texas at Dallas,Department of Systems Engineering,USA","Department of Systems Engineering, The University of Texas at Dallas, USA"],"affiliations":[{"raw_affiliation_string":"The University of Texas at Dallas,Department of Systems Engineering,USA","institution_ids":["https://openalex.org/I162577319"]},{"raw_affiliation_string":"Department of Systems Engineering, The University of Texas at Dallas, USA","institution_ids":["https://openalex.org/I162577319"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5092581267","display_name":"Diyako Dadkhah","orcid":"https://orcid.org/0009-0007-3149-3230"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. Dadkhah","raw_affiliation_strings":["The University of Texas at Dallas,Department of Systems Engineering,USA","Department of Systems Engineering, The University of Texas at Dallas, USA"],"affiliations":[{"raw_affiliation_string":"The University of Texas at Dallas,Department of Systems Engineering,USA","institution_ids":["https://openalex.org/I162577319"]},{"raw_affiliation_string":"Department of Systems Engineering, The University of Texas at Dallas, USA","institution_ids":["https://openalex.org/I162577319"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061619957","display_name":"S. O. Reza Moheimani","orcid":"https://orcid.org/0000-0002-1225-4126"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S.O.R. Moheimani","raw_affiliation_strings":["The University of Texas at Dallas,Department of Systems Engineering,USA","Department of Systems Engineering, The University of Texas at Dallas, USA"],"affiliations":[{"raw_affiliation_string":"The University of Texas at Dallas,Department of Systems Engineering,USA","institution_ids":["https://openalex.org/I162577319"]},{"raw_affiliation_string":"Department of Systems Engineering, The University of Texas at Dallas, USA","institution_ids":["https://openalex.org/I162577319"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5102893835"],"corresponding_institution_ids":["https://openalex.org/I162577319"],"apc_list":null,"apc_paid":null,"fwci":0.6688,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.66673886,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":96},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9979000091552734,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6910901069641113},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.4994218349456787},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3876086175441742},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3216283321380615},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2498077154159546},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2290077805519104}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6910901069641113},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.4994218349456787},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3876086175441742},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3216283321380615},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2498077154159546},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2290077805519104}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/anzcc59813.2024.10432897","is_oa":false,"landing_page_url":"https://doi.org/10.1109/anzcc59813.2024.10432897","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 Australian &amp; New Zealand Control Conference (ANZCC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W2791173595","https://openalex.org/W3016070936","https://openalex.org/W4281651942"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2748952813","https://openalex.org/W2935759653","https://openalex.org/W3105167352","https://openalex.org/W54078636","https://openalex.org/W2954470139","https://openalex.org/W1501425562","https://openalex.org/W2902782467","https://openalex.org/W3084825885","https://openalex.org/W2298861036"],"abstract_inverted_index":{"Quantifying":[0],"the":[1,12,16,26,65],"forces":[2,28],"generated":[3,17,29],"by":[4,30],"miniature":[5],"electromagnetic":[6,27,32],"actuators":[7],"is":[8,39],"challenging":[9],"because":[10],"of":[11,15,25,56,72],"small":[13],"magnitude":[14],"forces.":[18],"In":[19],"this":[20],"paper,":[21],"we":[22],"report":[23],"measurement":[24],"planar":[31],"coil":[33],"employed":[34],"in":[35,49],"micro-robotics.":[36],"The":[37,59],"force":[38,45],"measured":[40],"using":[41],"a":[42,50,54],"microelectromechanical":[43],"system-based":[44],"sensor":[46],"which":[47],"operates":[48],"feedback":[51],"loop":[52],"providing":[53],"resolution":[55],"4":[57],"nN.":[58],"experimentally":[60],"obtained":[61,67],"results":[62],"matche":[63],"with":[64,69],"numerically":[66],"value":[68],"an":[70],"error":[71],"less":[73],"than":[74],"10%.":[75]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}