{"id":"https://openalex.org/W2421582407","doi":"https://doi.org/10.1109/amc.2016.7496404","title":"Decoupling control by the center of rotation and gravity hybrid-driven method for high-precision scan stage with multiple actuators","display_name":"Decoupling control by the center of rotation and gravity hybrid-driven method for high-precision scan stage with multiple actuators","publication_year":2016,"publication_date":"2016-04-01","ids":{"openalex":"https://openalex.org/W2421582407","doi":"https://doi.org/10.1109/amc.2016.7496404","mag":"2421582407"},"language":"en","primary_location":{"id":"doi:10.1109/amc.2016.7496404","is_oa":false,"landing_page_url":"https://doi.org/10.1109/amc.2016.7496404","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE 14th International Workshop on Advanced Motion Control (AMC)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5024663550","display_name":"Wataru Ohnishi","orcid":"https://orcid.org/0000-0002-4221-9305"},"institutions":[{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Wataru Ohnishi","raw_affiliation_strings":["The University of Tokyo, Chiba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The University of Tokyo, Chiba, Japan","institution_ids":["https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013219761","display_name":"Hiroshi Fujimoto","orcid":"https://orcid.org/0000-0002-0979-5992"},"institutions":[{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hiroshi Fujimoto","raw_affiliation_strings":["The University of Tokyo, Chiba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The University of Tokyo, Chiba, Japan","institution_ids":["https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108254245","display_name":"Koichi Sakata","orcid":null},"institutions":[{"id":"https://openalex.org/I4210106587","display_name":"Nikon (Japan)","ror":"https://ror.org/01bvqg661","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210106587"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Koichi Sakata","raw_affiliation_strings":["Nikon Corporation, Yokohama, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nikon Corporation, Yokohama, Japan","institution_ids":["https://openalex.org/I4210106587"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030878699","display_name":"Kazuhiro Suzuki","orcid":"https://orcid.org/0000-0002-0038-4329"},"institutions":[{"id":"https://openalex.org/I4210106587","display_name":"Nikon (Japan)","ror":"https://ror.org/01bvqg661","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210106587"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuhiro Suzuki","raw_affiliation_strings":["Nikon Corporation, Yokohama, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nikon Corporation, Yokohama, Japan","institution_ids":["https://openalex.org/I4210106587"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5102092021","display_name":"Kazuaki Saiki","orcid":null},"institutions":[{"id":"https://openalex.org/I4210106587","display_name":"Nikon (Japan)","ror":"https://ror.org/01bvqg661","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210106587"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuaki Saiki","raw_affiliation_strings":["Nikon Corporation, Yokohama, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nikon Corporation, Yokohama, Japan","institution_ids":["https://openalex.org/I4210106587"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4404,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.46022984,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"3","issue":null,"first_page":"528","last_page":"532"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13644","display_name":"Control Systems in Engineering","score":0.9969000220298767,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/decoupling","display_name":"Decoupling (probability)","score":0.853756844997406},{"id":"https://openalex.org/keywords/center-of-gravity","display_name":"Center of gravity","score":0.7733738422393799},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.7016938924789429},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.6903166770935059},{"id":"https://openalex.org/keywords/coupling","display_name":"Coupling (piping)","score":0.5848061442375183},{"id":"https://openalex.org/keywords/cog","display_name":"Cog","score":0.5820783972740173},{"id":"https://openalex.org/keywords/point","display_name":"Point (geometry)","score":0.4496498703956604},{"id":"https://openalex.org/keywords/rotation","display_name":"Rotation (mathematics)","score":0.4244599938392639},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4229682385921478},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.40215203166007996},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2525564730167389},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.15365070104599},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.12866130471229553},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.12343862652778625},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.06990313529968262},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.06674087047576904}],"concepts":[{"id":"https://openalex.org/C205606062","wikidata":"https://www.wikidata.org/wiki/Q5249645","display_name":"Decoupling (probability)","level":2,"score":0.853756844997406},{"id":"https://openalex.org/C132668919","wikidata":"https://www.wikidata.org/wiki/Q1110236","display_name":"Center of gravity","level":2,"score":0.7733738422393799},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.7016938924789429},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6903166770935059},{"id":"https://openalex.org/C131584629","wikidata":"https://www.wikidata.org/wiki/Q4308705","display_name":"Coupling (piping)","level":2,"score":0.5848061442375183},{"id":"https://openalex.org/C4661277","wikidata":"https://www.wikidata.org/wiki/Q1054157","display_name":"Cog","level":2,"score":0.5820783972740173},{"id":"https://openalex.org/C28719098","wikidata":"https://www.wikidata.org/wiki/Q44946","display_name":"Point (geometry)","level":2,"score":0.4496498703956604},{"id":"https://openalex.org/C74050887","wikidata":"https://www.wikidata.org/wiki/Q848368","display_name":"Rotation (mathematics)","level":2,"score":0.4244599938392639},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4229682385921478},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.40215203166007996},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2525564730167389},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.15365070104599},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.12866130471229553},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.12343862652778625},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.06990313529968262},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.06674087047576904},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C187736073","wikidata":"https://www.wikidata.org/wiki/Q2920921","display_name":"Management","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/amc.2016.7496404","is_oa":false,"landing_page_url":"https://doi.org/10.1109/amc.2016.7496404","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE 14th International Workshop on Advanced Motion Control (AMC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8199999928474426,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W791128552","https://openalex.org/W1597896605","https://openalex.org/W1974984002","https://openalex.org/W1981868892","https://openalex.org/W1990737560","https://openalex.org/W2042437082","https://openalex.org/W2052789462","https://openalex.org/W2061688412","https://openalex.org/W2094697179","https://openalex.org/W2098860323","https://openalex.org/W2129815740","https://openalex.org/W2161567298","https://openalex.org/W2162806844","https://openalex.org/W2306742826","https://openalex.org/W2541177715","https://openalex.org/W2593039133","https://openalex.org/W2945699574","https://openalex.org/W6734249991"],"related_works":["https://openalex.org/W1988603010","https://openalex.org/W2898815460","https://openalex.org/W4302290647","https://openalex.org/W2319797310","https://openalex.org/W2698593353","https://openalex.org/W2997045072","https://openalex.org/W2996378207","https://openalex.org/W272057031","https://openalex.org/W1527333012","https://openalex.org/W2756268232"],"abstract_inverted_index":{"In":[0,17],"a":[1,20,24,34,82,95,110],"multi-input":[2],"multi-output":[3],"control":[4,13],"system,":[5],"coupling":[6,58,88,101],"force":[7,63],"between":[8,39],"multiple":[9,28],"axes":[10],"can":[11,67,85,98],"deteriorate":[12],"performance":[14],"and":[15,53,94,112,127,132],"stability.":[16],"this":[18],"paper,":[19],"decoupling":[21],"method":[22,84,97,115,142],"utilizing":[23],"high-precision":[25],"stage":[26],"with":[27],"actuators":[29],"is":[30,143],"proposed.":[31],"According":[32],"to":[33,64,119],"model":[35,79],"considering":[36],"the":[37,40,45,50,54,57,61,65,72,75,87,90,100,103,121,125,128,140],"misalignment":[38],"center":[41,46],"of":[42,47,74,139],"gravity":[43],"(CoG),":[44],"rotation":[48],"(CoR),":[49],"actuation":[51,76,122],"point,":[52,56],"measurement":[55],"characteristics":[59],"from":[60],"translational":[62],"angle":[66],"be":[68],"changed":[69],"by":[70,145],"varying":[71],"height":[73],"point.":[77],"The":[78,137],"indicates":[80],"that":[81],"CoR-driven":[83],"suppress":[86,99],"in":[89,102,130],"low":[91,131],"frequency":[92,105,134],"range":[93],"CoG-driven":[96],"high":[104,133],"range.":[106],"This":[107],"paper":[108],"proposes":[109],"CoR":[111,126],"CoG":[113,129],"hybrid-driven":[114],"using":[116],"complementary":[117],"filters":[118],"place":[120],"point":[123],"at":[124],"ranges,":[135],"respectively.":[136],"effectiveness":[138],"proposed":[141],"verified":[144],"experiments.":[146]},"counts_by_year":[{"year":2019,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}