{"id":"https://openalex.org/W3194986362","doi":"https://doi.org/10.1109/aim46487.2021.9517484","title":"The Sensitivity of Subsurface Contact Resonance Atomic Force Microscopy to Changes in the Depth of Buried Features: a Nonlinear Approach","display_name":"The Sensitivity of Subsurface Contact Resonance Atomic Force Microscopy to Changes in the Depth of Buried Features: a Nonlinear Approach","publication_year":2021,"publication_date":"2021-07-12","ids":{"openalex":"https://openalex.org/W3194986362","doi":"https://doi.org/10.1109/aim46487.2021.9517484","mag":"3194986362"},"language":"en","primary_location":{"id":"doi:10.1109/aim46487.2021.9517484","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim46487.2021.9517484","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5088479024","display_name":"Marinus Hoogesteger","orcid":"https://orcid.org/0000-0003-4421-9293"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"M.M. Hoogesteger","raw_affiliation_strings":["Eindhoven University of Technology, Eindhoven, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Eindhoven University of Technology, Eindhoven, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045965307","display_name":"Hamed Sadeghian","orcid":"https://orcid.org/0000-0003-3639-5094"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"H. Sadeghian","raw_affiliation_strings":["Eindhoven University of Technology, Eindhoven, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Eindhoven University of Technology, Eindhoven, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5022300438","display_name":"Henk Nijmeijer","orcid":"https://orcid.org/0000-0001-5883-6191"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"H. Nijmeijer","raw_affiliation_strings":["Eindhoven University of Technology, Eindhoven, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Eindhoven University of Technology, Eindhoven, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I83019370"],"apc_list":null,"apc_paid":null,"fwci":1.3326,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.77283779,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"110","last_page":"115"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12466","display_name":"Near-Field Optical Microscopy","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11799","display_name":"Adhesion, Friction, and Surface Interactions","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.7523322105407715},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.6707895994186401},{"id":"https://openalex.org/keywords/stiffness","display_name":"Stiffness","score":0.5669534802436829},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5420471429824829},{"id":"https://openalex.org/keywords/microscopy","display_name":"Microscopy","score":0.5374470353126526},{"id":"https://openalex.org/keywords/resonance","display_name":"Resonance (particle physics)","score":0.5166804790496826},{"id":"https://openalex.org/keywords/limiting","display_name":"Limiting","score":0.5021231174468994},{"id":"https://openalex.org/keywords/feature","display_name":"Feature (linguistics)","score":0.4953845739364624},{"id":"https://openalex.org/keywords/work","display_name":"Work (physics)","score":0.46207359433174133},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.44345778226852417},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.4268163740634918},{"id":"https://openalex.org/keywords/image-resolution","display_name":"Image resolution","score":0.42220914363861084},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.19517335295677185},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.15413647890090942},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.1357899010181427},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.12445151805877686},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.10182178020477295},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.08264225721359253}],"concepts":[{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.7523322105407715},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.6707895994186401},{"id":"https://openalex.org/C2779372316","wikidata":"https://www.wikidata.org/wiki/Q569057","display_name":"Stiffness","level":2,"score":0.5669534802436829},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5420471429824829},{"id":"https://openalex.org/C147080431","wikidata":"https://www.wikidata.org/wiki/Q1074953","display_name":"Microscopy","level":2,"score":0.5374470353126526},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.5166804790496826},{"id":"https://openalex.org/C188198153","wikidata":"https://www.wikidata.org/wiki/Q1613840","display_name":"Limiting","level":2,"score":0.5021231174468994},{"id":"https://openalex.org/C2776401178","wikidata":"https://www.wikidata.org/wiki/Q12050496","display_name":"Feature (linguistics)","level":2,"score":0.4953845739364624},{"id":"https://openalex.org/C18762648","wikidata":"https://www.wikidata.org/wiki/Q42213","display_name":"Work (physics)","level":2,"score":0.46207359433174133},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.44345778226852417},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4268163740634918},{"id":"https://openalex.org/C205372480","wikidata":"https://www.wikidata.org/wiki/Q210521","display_name":"Image resolution","level":2,"score":0.42220914363861084},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.19517335295677185},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.15413647890090942},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.1357899010181427},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.12445151805877686},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.10182178020477295},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.08264225721359253},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C109214941","wikidata":"https://www.wikidata.org/wiki/Q18334","display_name":"Particle physics","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/aim46487.2021.9517484","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim46487.2021.9517484","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":34,"referenced_works":["https://openalex.org/W1987571651","https://openalex.org/W1991540081","https://openalex.org/W1994253480","https://openalex.org/W1995891757","https://openalex.org/W1996073606","https://openalex.org/W2001601438","https://openalex.org/W2005752803","https://openalex.org/W2013613342","https://openalex.org/W2016446956","https://openalex.org/W2024380425","https://openalex.org/W2024637648","https://openalex.org/W2025737724","https://openalex.org/W2051313057","https://openalex.org/W2061468668","https://openalex.org/W2101762431","https://openalex.org/W2119323118","https://openalex.org/W2132632330","https://openalex.org/W2197883630","https://openalex.org/W2318980335","https://openalex.org/W2407192175","https://openalex.org/W2512573141","https://openalex.org/W2514999610","https://openalex.org/W2583162281","https://openalex.org/W2583445535","https://openalex.org/W2605556207","https://openalex.org/W2759215635","https://openalex.org/W2793138798","https://openalex.org/W2803346865","https://openalex.org/W2901375480","https://openalex.org/W2922388716","https://openalex.org/W2965509064","https://openalex.org/W2981758585","https://openalex.org/W3046924435","https://openalex.org/W3119654069"],"related_works":["https://openalex.org/W4243145179","https://openalex.org/W4255875982","https://openalex.org/W4244853958","https://openalex.org/W2029404707","https://openalex.org/W585100505","https://openalex.org/W4285325679","https://openalex.org/W4247719608","https://openalex.org/W4237439661","https://openalex.org/W1928239295","https://openalex.org/W4394584065"],"abstract_inverted_index":{"The":[0,41],"development":[1],"of":[2,19,24,43,61,77,100,104,116,135,154],"non-destructive":[3],"subsurface":[4,155],"imaging":[5],"methods":[6],"has":[7,47,65,84],"been":[8,66,87],"a":[9,48,53,97,126,144],"major":[10],"research":[11],"topic":[12],"in":[13,34,68,106,149],"the":[14,22,44,57,75,78,93,102,114,119,136,151],"past":[15],"two":[16,137],"decades.":[17],"One":[18],"these":[20],"is":[21,52,92,122,141,147],"use":[23],"Contact":[25],"Resonance":[26],"Atomic":[27],"Force":[28],"Microscopy":[29],"(CR-AFM)":[30],"to":[31,37,80,108],"measure":[32],"changes":[33],"contact":[35],"stiffness":[36],"detect":[38],"buried":[39,45],"features.":[40],"depth":[42,82,103,117],"feature":[46,81],"large":[49],"influence":[50,115],"(or":[51],"limiting":[54],"factor)":[55],"on":[56,118],"sensitivity":[58,76,91],"and":[59,71,128,131],"resolution":[60],"this":[62,112],"method,":[63],"which":[64],"shown":[67],"theoretical,":[69],"numerical":[70],"experimental":[72],"research.":[73],"However,":[74],"method":[79,98],"itself":[83],"not":[85],"yet":[86],"thoroughly":[88],"investigated.":[89],"This":[90],"first":[94],"step":[95],"towards":[96],"capable":[99],"measuring":[101],"features":[105],"addition":[107],"detecting":[109],"them.":[110],"In":[111],"work,":[113],"probe":[120],"dynamics":[121],"investigated":[123],"using":[124,157],"both":[125],"linear":[127],"nonlinear":[129,145],"model":[130],"simulation":[132],"based":[133],"results":[134],"are":[138],"compared.":[139],"It":[140],"argued":[142],"that":[143],"approach":[146],"essential":[148],"estimating":[150],"potential":[152],"performance":[153],"measurements":[156],"CRAFM":[158],"methods.":[159]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2022,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}