{"id":"https://openalex.org/W4385482498","doi":"https://doi.org/10.1109/aim46323.2023.10196218","title":"Multi-axis Active Vibration Suppression for Wafer Transfer Systems","display_name":"Multi-axis Active Vibration Suppression for Wafer Transfer Systems","publication_year":2023,"publication_date":"2023-06-28","ids":{"openalex":"https://openalex.org/W4385482498","doi":"https://doi.org/10.1109/aim46323.2023.10196218"},"language":"en","primary_location":{"id":"doi:10.1109/aim46323.2023.10196218","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim46323.2023.10196218","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5079007587","display_name":"Jiajie Qiu","orcid":"https://orcid.org/0000-0001-9047-1479"},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jiajie Qiu","raw_affiliation_strings":["Massachusetts Institute of Technology Mechatronics Research Laboratory,Cambridge,MA,USA,02139"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Massachusetts Institute of Technology Mechatronics Research Laboratory,Cambridge,MA,USA,02139","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016378339","display_name":"Hongjin Kim","orcid":"https://orcid.org/0000-0002-5965-8339"},"institutions":[{"id":"https://openalex.org/I2250650973","display_name":"Samsung (South Korea)","ror":"https://ror.org/04w3jy968","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Hongjin Kim","raw_affiliation_strings":["Samsung Electronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Samsung Electronics","institution_ids":["https://openalex.org/I2250650973"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049403879","display_name":"Fangzhou Xia","orcid":"https://orcid.org/0000-0002-6314-3717"},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Fangzhou Xia","raw_affiliation_strings":["Massachusetts Institute of Technology Mechatronics Research Laboratory,Cambridge,MA,USA,02139"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Massachusetts Institute of Technology Mechatronics Research Laboratory,Cambridge,MA,USA,02139","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5086271665","display_name":"Kamal Youcef\u2010Toumi","orcid":"https://orcid.org/0000-0001-6755-1534"},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Kamal Youcef-Toumi","raw_affiliation_strings":["Massachusetts Institute of Technology Mechatronics Research Laboratory,Cambridge,MA,USA,02139"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Massachusetts Institute of Technology Mechatronics Research Laboratory,Cambridge,MA,USA,02139","institution_ids":["https://openalex.org/I63966007"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.947,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.83791944,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"1108","last_page":"1114"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10690","display_name":"Vibration Control and Rheological Fluids","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2205","display_name":"Civil and Structural Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10690","display_name":"Vibration Control and Rheological Fluids","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2205","display_name":"Civil and Structural Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12206","display_name":"Vibration and Dynamic Analysis","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.991100013256073,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.6421322822570801},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.5803120732307434},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.4036162197589874},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.37132585048675537},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.363023042678833},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.32222557067871094},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.25565385818481445},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2066296935081482},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1768571436405182}],"concepts":[{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.6421322822570801},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5803120732307434},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4036162197589874},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.37132585048675537},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.363023042678833},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.32222557067871094},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.25565385818481445},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2066296935081482},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1768571436405182}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/aim46323.2023.10196218","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim46323.2023.10196218","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.6600000262260437}],"awards":[],"funders":[{"id":"https://openalex.org/F4320332195","display_name":"Samsung","ror":"https://ror.org/04w3jy968"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W846836738","https://openalex.org/W1969341775","https://openalex.org/W2001240038","https://openalex.org/W2048879479","https://openalex.org/W2129086875","https://openalex.org/W2439768945","https://openalex.org/W2562708904","https://openalex.org/W2602514152","https://openalex.org/W2763764255","https://openalex.org/W4231503517","https://openalex.org/W4316806147"],"related_works":["https://openalex.org/W4246450666","https://openalex.org/W2898370298","https://openalex.org/W4388998267","https://openalex.org/W4390401159","https://openalex.org/W2744391499","https://openalex.org/W3120461830","https://openalex.org/W4230250635","https://openalex.org/W3041790586","https://openalex.org/W2018879842","https://openalex.org/W3144504424"],"abstract_inverted_index":{"Vibration":[0],"suppression":[1,55,187],"is":[2,104,120,137,150,163,188,200],"critical":[3],"in":[4,14,25,36,190],"precision":[5],"mechatronic":[6],"systems":[7],"for":[8,97,152],"nanofabrication.":[9],"For":[10],"automated":[11],"wafer":[12],"handling":[13],"semiconductor":[15,39],"plants,":[16],"Overhead":[17],"Hoist":[18],"Transport":[19],"(OHT)":[20],"vehicles":[21,87],"transport":[22],"wafers":[23,33],"carried":[24,83],"Front":[26],"Opening":[27],"Unified":[28],"Pods":[29],"(FOUPs);":[30],"while":[31],"the":[32,57,65,85,118,123,168,171,176,191,204,207],"are":[34,41,70],"transported":[35],"a":[37,77,94,147],"FOUP,":[38],"chips":[40],"at":[42],"risk":[43],"of":[44,56,129,175,184,206],"damage":[45],"by":[46,84],"excited":[47],"small":[48],"particles":[49],"due":[50],"to":[51,63,121,139,202],"mechanical":[52],"vibration.":[53],"Active":[54],"FOUP":[58,125,185],"vibrations":[59],"has":[60],"been":[61],"proposed":[62,208],"improve":[64],"production":[66],"yield.":[67],"However,":[68],"there":[69],"two":[71],"main":[72],"challenges":[73],"that":[74],"make":[75],"it":[76],"non-trivial":[78],"problem.":[79],"First,":[80],"moving":[81],"FOUPs":[82],"OHT":[86,177,192],"have":[88],"no":[89,101],"external":[90],"anchoring":[91],"point":[92],"as":[93],"momentum":[95],"source":[96],"control":[98,112],"efforts.":[99],"Second,":[100],"sensor":[102],"attachment":[103],"permitted":[105],"on":[106,167],"mass-production":[107],"FOUPs,":[108],"which":[109],"makes":[110],"feedback":[111],"more":[113],"challenging":[114],"without":[115],"measurement.":[116],"Since":[117],"goal":[119],"suppress":[122],"large":[124],"acceleration":[126],"peaks":[127],"instead":[128],"eliminating":[130],"all":[131],"vibration,":[132],"an":[133],"inertia-based":[134],"counterbalancing":[135],"system":[136],"designed":[138,151],"address":[140],"these":[141],"challenges.":[142],"To":[143],"validate":[144],"this":[145],"idea,":[146],"custom":[148],"testbed":[149],"multi-axis":[153,196],"vibration":[154,180],"generation":[155],"and":[156,165],"suppression.":[157],"A":[158],"Disturbance":[159],"Observer-Based":[160],"Controller":[161],"(DOBC)":[162],"developed":[164],"implemented":[166],"hardware.":[169],"During":[170],"experiment,":[172],"38":[173],"percent":[174,183],"hand":[178],"unit":[179],"(and":[181],"42":[182],"vibration)":[186],"achieved":[189,201],"travel":[193],"direction.":[194],"Moreover,":[195],"FOUP-level":[197],"acceleration-peak":[198],"reduction":[199],"verify":[203],"effectiveness":[205],"method.":[209]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}