{"id":"https://openalex.org/W4385482605","doi":"https://doi.org/10.1109/aim46323.2023.10196208","title":"A high-bandwidth closed-loop MEMS force sensor with system dynamics adjustment","display_name":"A high-bandwidth closed-loop MEMS force sensor with system dynamics adjustment","publication_year":2023,"publication_date":"2023-06-28","ids":{"openalex":"https://openalex.org/W4385482605","doi":"https://doi.org/10.1109/aim46323.2023.10196208"},"language":"en","primary_location":{"id":"doi:10.1109/aim46323.2023.10196208","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim46323.2023.10196208","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5092581267","display_name":"Diyako Dadkhah","orcid":"https://orcid.org/0009-0007-3149-3230"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Diyako Dadkhah","raw_affiliation_strings":["The University of Texas at Dallas,Erik Jonsson School of Engineering and Computer Science,Richardson,TX,USA,75080"],"affiliations":[{"raw_affiliation_string":"The University of Texas at Dallas,Erik Jonsson School of Engineering and Computer Science,Richardson,TX,USA,75080","institution_ids":["https://openalex.org/I162577319"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061619957","display_name":"S. O. Reza Moheimani","orcid":"https://orcid.org/0000-0002-1225-4126"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. O. Reza Moheimani","raw_affiliation_strings":["The University of Texas at Dallas,Erik Jonsson School of Engineering and Computer Science,Richardson,TX,USA,75080"],"affiliations":[{"raw_affiliation_string":"The University of Texas at Dallas,Erik Jonsson School of Engineering and Computer Science,Richardson,TX,USA,75080","institution_ids":["https://openalex.org/I162577319"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5092581267"],"corresponding_institution_ids":["https://openalex.org/I162577319"],"apc_list":null,"apc_paid":null,"fwci":1.2481,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.78292289,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"79","last_page":"84"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/stiffness","display_name":"Stiffness","score":0.790351152420044},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.7875341176986694},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.7041800022125244},{"id":"https://openalex.org/keywords/mechanical-system","display_name":"Mechanical system","score":0.578463077545166},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5192123055458069},{"id":"https://openalex.org/keywords/control-system","display_name":"Control system","score":0.4537698030471802},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4244334399700165},{"id":"https://openalex.org/keywords/contact-force","display_name":"Contact force","score":0.41388726234436035},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3606071472167969},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.33175140619277954},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.22153794765472412},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.1534806191921234},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.1364728808403015},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.1159752905368805}],"concepts":[{"id":"https://openalex.org/C2779372316","wikidata":"https://www.wikidata.org/wiki/Q569057","display_name":"Stiffness","level":2,"score":0.790351152420044},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.7875341176986694},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.7041800022125244},{"id":"https://openalex.org/C171912257","wikidata":"https://www.wikidata.org/wiki/Q11019","display_name":"Mechanical system","level":2,"score":0.578463077545166},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5192123055458069},{"id":"https://openalex.org/C17500928","wikidata":"https://www.wikidata.org/wiki/Q959968","display_name":"Control system","level":2,"score":0.4537698030471802},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4244334399700165},{"id":"https://openalex.org/C81302111","wikidata":"https://www.wikidata.org/wiki/Q2916417","display_name":"Contact force","level":2,"score":0.41388726234436035},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3606071472167969},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.33175140619277954},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.22153794765472412},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.1534806191921234},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.1364728808403015},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.1159752905368805},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/aim46323.2023.10196208","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim46323.2023.10196208","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6000000238418579,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":24,"referenced_works":["https://openalex.org/W1973880537","https://openalex.org/W1992790951","https://openalex.org/W1996365802","https://openalex.org/W1997093480","https://openalex.org/W1999430248","https://openalex.org/W2019017932","https://openalex.org/W2030076176","https://openalex.org/W2043267873","https://openalex.org/W2048803406","https://openalex.org/W2067711211","https://openalex.org/W2077916801","https://openalex.org/W2085807081","https://openalex.org/W2095458047","https://openalex.org/W2096774643","https://openalex.org/W2125082136","https://openalex.org/W2128403295","https://openalex.org/W2145141397","https://openalex.org/W2288748492","https://openalex.org/W2816192171","https://openalex.org/W2937527491","https://openalex.org/W3016070936","https://openalex.org/W3136212855","https://openalex.org/W4224444010","https://openalex.org/W4285605659"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W1763916368","https://openalex.org/W1451374148","https://openalex.org/W3171403224","https://openalex.org/W2367748908","https://openalex.org/W2475097972","https://openalex.org/W4220774176","https://openalex.org/W2270412851"],"abstract_inverted_index":{"This":[0,51],"paper":[1],"describes":[2],"a":[3,10,28,32,96,106],"high-bandwidth":[4],"control":[5,97,148],"system":[6,47,74,98,138],"design":[7],"procedure":[8],"for":[9,90],"MEMS":[11],"force":[12,22,153],"sensor":[13,23],"equipped":[14],"with":[15,27,105,110],"an":[16,101],"adjustable":[17],"stiffness":[18,33,54,129],"mechanism.":[19],"When":[20],"the":[21,41,46,59,73,82,91,115,128,137,152],"comes":[24],"into":[25],"contact":[26,44],"sample":[29],"that":[30,99,146],"has":[31],"at":[34],"least":[35],"comparable":[36],"to":[37,48,68,80,113,122],"its":[38],"longitudinal":[39],"stiffness,":[40],"resulting":[42],"mechanical":[43],"causes":[45],"become":[49],"stiffer.":[50],"change":[52],"in":[53],"can":[55],"be":[56],"seen":[57],"through":[58],"rising":[60],"resonance":[61],"frequency":[62],"and":[63,142],"falling":[64],"dc-gain.":[65],"In":[66],"order":[67],"maintain":[69],"closed-loop":[70,125],"stability":[71],"of":[72,135],"after":[75,117],"contact,":[76,118],"it":[77],"is":[78],"necessary":[79],"tune":[81],"controller":[83],"parameters":[84],"since":[85],"they":[86],"are":[87],"originally":[88],"designed":[89],"nominal":[92],"system.":[93],"By":[94],"implementing":[95],"combines":[100],"inner":[102],"damping":[103],"loop":[104,108],"tracking":[107,154],"together":[109],"adaptive":[111],"algorithms":[112],"re-tune":[114],"controllers":[116],"we":[119],"were":[120],"able":[121],"obtain":[123],"satisfactory":[124],"performance.":[126],"Also,":[127],"adjustment":[130],"mechanism":[131],"provides":[132],"additional":[133],"means":[134],"tuning":[136],"dynamics.":[139],"The":[140],"numerical":[141],"experimental":[143],"results":[144],"demonstrate":[145],"these":[147],"approaches":[149],"significantly":[150],"increase":[151],"bandwidth.":[155]},"counts_by_year":[{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}