{"id":"https://openalex.org/W4385482394","doi":"https://doi.org/10.1109/aim46323.2023.10196135","title":"AFM Microcantilever with On-chip Electrothermal and Piezoelectric Transducers: Z-axis Control and Standalone Operation","display_name":"AFM Microcantilever with On-chip Electrothermal and Piezoelectric Transducers: Z-axis Control and Standalone Operation","publication_year":2023,"publication_date":"2023-06-28","ids":{"openalex":"https://openalex.org/W4385482394","doi":"https://doi.org/10.1109/aim46323.2023.10196135"},"language":"en","primary_location":{"id":"doi:10.1109/aim46323.2023.10196135","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim46323.2023.10196135","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5011833047","display_name":"Hazhir Mahmoodi Nasrabadi","orcid":"https://orcid.org/0000-0003-0064-3754"},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Hazhir Mahmoodi Nasrabadi","raw_affiliation_strings":[],"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043525731","display_name":"Nastaran Nikooienejad","orcid":"https://orcid.org/0000-0002-1365-4439"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Nastaran Nikooienejad","raw_affiliation_strings":[],"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102893835","display_name":"K. S. Vikrant","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"K. S. Vikrant","raw_affiliation_strings":[],"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5061619957","display_name":"S. O. Reza Moheimani","orcid":"https://orcid.org/0000-0002-1225-4126"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"S. O. Reza Moheimani","raw_affiliation_strings":[],"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5011833047"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.08868153,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"94","last_page":"98"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.690732479095459},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.667799174785614},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.6631420850753784},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.6560260653495789},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.5756285190582275},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.5583580136299133},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.5083238482475281},{"id":"https://openalex.org/keywords/deflection","display_name":"Deflection (physics)","score":0.5061561465263367},{"id":"https://openalex.org/keywords/throughput","display_name":"Throughput","score":0.48150262236595154},{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.44920408725738525},{"id":"https://openalex.org/keywords/piezoelectric-sensor","display_name":"Piezoelectric sensor","score":0.4237714409828186},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.42344802618026733},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.4123561382293701},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3801192343235016},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3449576497077942},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.2820281684398651},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2554704248905182},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.24219495058059692},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.17226159572601318},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.11100494861602783},{"id":"https://openalex.org/keywords/wireless","display_name":"Wireless","score":0.10328114032745361},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.09080812335014343}],"concepts":[{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.690732479095459},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.667799174785614},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.6631420850753784},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.6560260653495789},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.5756285190582275},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.5583580136299133},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.5083238482475281},{"id":"https://openalex.org/C2781355719","wikidata":"https://www.wikidata.org/wiki/Q2080698","display_name":"Deflection (physics)","level":2,"score":0.5061561465263367},{"id":"https://openalex.org/C157764524","wikidata":"https://www.wikidata.org/wiki/Q1383412","display_name":"Throughput","level":3,"score":0.48150262236595154},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.44920408725738525},{"id":"https://openalex.org/C173677008","wikidata":"https://www.wikidata.org/wiki/Q2094637","display_name":"Piezoelectric sensor","level":3,"score":0.4237714409828186},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.42344802618026733},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.4123561382293701},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3801192343235016},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3449576497077942},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.2820281684398651},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2554704248905182},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.24219495058059692},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.17226159572601318},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.11100494861602783},{"id":"https://openalex.org/C555944384","wikidata":"https://www.wikidata.org/wiki/Q249","display_name":"Wireless","level":2,"score":0.10328114032745361},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.09080812335014343},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/aim46323.2023.10196135","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim46323.2023.10196135","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.4300000071525574,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320332360","display_name":"Office of Energy Efficiency and Renewable Energy","ror":"https://ror.org/02xznz413"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W1628443368","https://openalex.org/W1971939953","https://openalex.org/W1991811230","https://openalex.org/W2036268725","https://openalex.org/W2048122249","https://openalex.org/W2165636045","https://openalex.org/W2287390740","https://openalex.org/W2298883424","https://openalex.org/W2340442732","https://openalex.org/W2343218995","https://openalex.org/W2549164978","https://openalex.org/W2745010214","https://openalex.org/W2883262640","https://openalex.org/W2894155699","https://openalex.org/W2913763077","https://openalex.org/W2993796723","https://openalex.org/W3015337054","https://openalex.org/W3048123591","https://openalex.org/W3120226590","https://openalex.org/W3136212855","https://openalex.org/W4250459844","https://openalex.org/W4285605659"],"related_works":["https://openalex.org/W2107125189","https://openalex.org/W2760996480","https://openalex.org/W2303727101","https://openalex.org/W2368223165","https://openalex.org/W2357307510","https://openalex.org/W2088426103","https://openalex.org/W2000317802","https://openalex.org/W1979288028","https://openalex.org/W2911304091","https://openalex.org/W2997000149"],"abstract_inverted_index":{"The":[0,113],"Atomic":[1],"Force":[2],"microscope":[3],"(AFM)":[4],"has":[5,97],"limited":[6],"throughput,":[7],"which":[8,173],"is":[9,19,120,134],"a":[10,27,36,44,89],"major":[11],"obstacle":[12],"to":[13,21,46,109,155],"its":[14],"widespread":[15],"industrial":[16,182],"application.":[17],"This":[18,160],"due":[20],"the":[22,79,83,93,110,116,129,132,138,142,163,166,177],"conventional":[23],"imaging":[24,77,119],"technique":[25],"where":[26],"single":[28],"AFM":[29,153,171,180],"probe":[30],"interacts":[31],"with":[32,78,149],"each":[33],"point":[34],"on":[35],"sample":[37,133],"sequentially.":[38],"In":[39],"this":[40,47,72],"paper,":[41],"we":[42,74],"propose":[43],"solution":[45],"problem":[48],"by":[49,122,136],"introducing":[50],"an":[51,123,150],"array":[52,143],"of":[53,115,131,144,169,179],"three":[54,64],"active":[55],"microcantilevers":[56,65,145],"that":[57,103],"can":[58,66,174],"operate":[59],"in":[60,71,181],"parallel.":[61],"Although":[62],"all":[63],"be":[67],"used":[68],"for":[69,165],"imaging,":[70],"work,":[73],"only":[75],"report":[76],"central":[80],"microcantilever,":[81],"while":[82],"other":[84],"two":[85],"are":[86],"held":[87],"at":[88],"fixed":[90],"height":[91],"above":[92],"sample.":[94],"Each":[95],"microcantilever":[96],"on-chip":[98,124],"piezoelectric":[99,126],"and":[100,106,128,146],"electrothermal":[101],"actuators":[102],"provide":[104],"high-frequency":[105],"large-range":[107],"Z-motion":[108],"tip,":[111],"respectively.":[112],"deflection":[114],"tip":[117],"during":[118],"measured":[121],"differential":[125],"sensor,":[127],"topography":[130],"determined":[135],"controlling":[137],"deflection.":[139],"We":[140],"microfabricated":[141],"integrated":[147],"them":[148],"in-house":[151],"developed":[152],"set-up":[154],"image":[156],"several":[157],"calibration":[158],"gratings.":[159],"work":[161],"lays":[162],"foundation":[164],"parallel":[167],"operation":[168],"multiple":[170],"probes,":[172],"significantly":[175],"improve":[176],"throughput":[178],"applications.":[183]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}