{"id":"https://openalex.org/W2525062236","doi":"https://doi.org/10.1109/aim.2016.7576900","title":"Modeling and calibration of a capacitive threshold sensor for in situ calibration of MEMS gyroscope","display_name":"Modeling and calibration of a capacitive threshold sensor for in situ calibration of MEMS gyroscope","publication_year":2016,"publication_date":"2016-07-01","ids":{"openalex":"https://openalex.org/W2525062236","doi":"https://doi.org/10.1109/aim.2016.7576900","mag":"2525062236"},"language":"en","primary_location":{"id":"doi:10.1109/aim.2016.7576900","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim.2016.7576900","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100419282","display_name":"Yi Chen","orcid":"https://orcid.org/0000-0003-1429-0451"},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yi Chen","raw_affiliation_strings":["Department of Mechanical Engineering, University of Michigan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, University of Michigan","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019926303","display_name":"Ethem Erkan Aktakka","orcid":null},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ethem Erkan Aktakka","raw_affiliation_strings":["Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI, USA","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103405708","display_name":"Jong-Kwan Woo","orcid":null},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jong-Kwan Woo","raw_affiliation_strings":["Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI, USA","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5032749727","display_name":"Kenn R. Oldham","orcid":"https://orcid.org/0000-0002-5962-3056"},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Kenn Richard Oldham","raw_affiliation_strings":["Department of Mechanical Engineering, University of Michigan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, University of Michigan","institution_ids":["https://openalex.org/I27837315"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I27837315"],"apc_list":null,"apc_paid":null,"fwci":0.372,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.66696584,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"999","last_page":"1004"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.9021041393280029},{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.7267444729804993},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.6709624528884888},{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.6686588525772095},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.4827003479003906},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.43247273564338684},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.37510204315185547},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3557945787906647},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2402041256427765},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23374956846237183},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.12434282898902893},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.06602516770362854}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.9021041393280029},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.7267444729804993},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.6709624528884888},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.6686588525772095},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.4827003479003906},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.43247273564338684},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.37510204315185547},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3557945787906647},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2402041256427765},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23374956846237183},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.12434282898902893},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.06602516770362854},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/aim.2016.7576900","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim.2016.7576900","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.7400000095367432,"display_name":"Peace, Justice and strong institutions","id":"https://metadata.un.org/sdg/16"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320309652","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1862660820","https://openalex.org/W1968279037","https://openalex.org/W1972753191","https://openalex.org/W1974181160","https://openalex.org/W2087439288","https://openalex.org/W2122334231","https://openalex.org/W2140170998","https://openalex.org/W2166486841","https://openalex.org/W2290503000"],"related_works":["https://openalex.org/W2348740411","https://openalex.org/W1966596465","https://openalex.org/W2051563071","https://openalex.org/W2080828231","https://openalex.org/W4386858602","https://openalex.org/W2337947459","https://openalex.org/W2118205267","https://openalex.org/W2126912594","https://openalex.org/W1988444705","https://openalex.org/W4292622326"],"abstract_inverted_index":{"A":[0],"capacitive":[1,108,122,143],"sensor":[2,65,123,144],"design":[3],"is":[4,66,124],"introduced":[5],"with":[6,68,131],"an":[7,72,148],"associated":[8],"method":[9],"for":[10,48,152],"constructing":[11],"a":[12,39,79],"trusted":[13],"threshold":[14],"crossing":[15,95],"angle":[16,61],"(\u03b8":[17],"<sub":[18,87,137],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[19,88,138],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">TH</sub>":[20,89,139],")":[21],"from":[22,104,141],"the":[23,31,64,69,83,94,98,110,120,128,135],"capacitance":[24,58,100],"profile":[25],"to":[26,126],"perform":[27],"precise":[28],"measurement":[29,103],"of":[30,38,42,52,63,71,82,97,156],"out-of-plane":[32],"(X":[33],"and":[34,78],"Y)":[35],"tilting":[36,60,129],"angles":[37],"6":[40],"degree":[41],"freedom":[43],"(DOF)":[44],"piezoelectric":[45],"actuation":[46],"stage":[47],"in":[49],"situ":[50],"calibration":[51,155],"micro":[53],"electromechanical":[54],"(MEMS)":[55],"gyroscopes.":[56,158],"The":[57,85,115],"vs.":[59],"relationship":[62],"calibrated":[67],"assist":[70],"external":[73],"Laser":[74],"Doppler":[75],"vibrometer":[76],"(LDV)":[77],"closed-form":[80],"model":[81],"sensor.":[84],"\u03b8":[86,136],"are":[90],"extracted":[91,140],"by":[92],"detecting":[93],"location":[96],"reconstructed":[99],"trajectories":[101],"using":[102],"LDV":[105],"or":[106],"on-chip":[107,121,142],"sensor,":[109],"comparison":[111],"shows":[112],"close":[113],"agreements.":[114],"experimental":[116],"results":[117],"demonstrate:":[118],"(a)":[119],"able":[125],"track":[127],"motion":[130],"high":[132],"accuracy;":[133],"(b)":[134],"can":[145],"serve":[146],"as":[147],"invariant":[149],"reference":[150],"point":[151],"scale":[153],"factor":[154],"MEMS":[157]},"counts_by_year":[{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2025-10-10T00:00:00"}