{"id":"https://openalex.org/W2011046799","doi":"https://doi.org/10.1109/aim.2014.6878290","title":"Development of a MEMS position transducer using bulk piezoresistivity of suspensions","display_name":"Development of a MEMS position transducer using bulk piezoresistivity of suspensions","publication_year":2014,"publication_date":"2014-07-01","ids":{"openalex":"https://openalex.org/W2011046799","doi":"https://doi.org/10.1109/aim.2014.6878290","mag":"2011046799"},"language":"en","primary_location":{"id":"doi:10.1109/aim.2014.6878290","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim.2014.6878290","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5060280580","display_name":"Ali Bazaei","orcid":"https://orcid.org/0000-0001-9509-4860"},"institutions":[{"id":"https://openalex.org/I78757542","display_name":"University of Newcastle Australia","ror":"https://ror.org/00eae9z71","country_code":"AU","type":"education","lineage":["https://openalex.org/I78757542"]}],"countries":["AU"],"is_corresponding":true,"raw_author_name":"Ali Bazaei","raw_affiliation_strings":["Faculty of Engineering and Built Environment, University Drive, Callaghan, NSW, Australia","Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia"],"affiliations":[{"raw_affiliation_string":"Faculty of Engineering and Built Environment, University Drive, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]},{"raw_affiliation_string":"Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041882764","display_name":"Mohammad Maroufi","orcid":"https://orcid.org/0000-0001-7127-5026"},"institutions":[{"id":"https://openalex.org/I78757542","display_name":"University of Newcastle Australia","ror":"https://ror.org/00eae9z71","country_code":"AU","type":"education","lineage":["https://openalex.org/I78757542"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Mohammad Maroufi","raw_affiliation_strings":["Faculty of Engineering and Built Environment, University Drive, Callaghan, NSW, Australia","Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia"],"affiliations":[{"raw_affiliation_string":"Faculty of Engineering and Built Environment, University Drive, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]},{"raw_affiliation_string":"Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044893087","display_name":"Ali Mohammadi","orcid":"https://orcid.org/0000-0002-2950-3512"},"institutions":[{"id":"https://openalex.org/I78757542","display_name":"University of Newcastle Australia","ror":"https://ror.org/00eae9z71","country_code":"AU","type":"education","lineage":["https://openalex.org/I78757542"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Ali Mohammadi","raw_affiliation_strings":["Faculty of Engineering and Built Environment, University Drive, Callaghan, NSW, Australia","Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia"],"affiliations":[{"raw_affiliation_string":"Faculty of Engineering and Built Environment, University Drive, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]},{"raw_affiliation_string":"Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061619957","display_name":"S. O. Reza Moheimani","orcid":"https://orcid.org/0000-0002-1225-4126"},"institutions":[{"id":"https://openalex.org/I78757542","display_name":"University of Newcastle Australia","ror":"https://ror.org/00eae9z71","country_code":"AU","type":"education","lineage":["https://openalex.org/I78757542"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"S. O. Reza Moheimani","raw_affiliation_strings":["Faculty of Engineering and Built Environment, University Drive, Callaghan, NSW, Australia","Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia"],"affiliations":[{"raw_affiliation_string":"Faculty of Engineering and Built Environment, University Drive, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]},{"raw_affiliation_string":"Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5060280580"],"corresponding_institution_ids":["https://openalex.org/I78757542"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.07105551,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.8648141026496887},{"id":"https://openalex.org/keywords/wheatstone-bridge","display_name":"Wheatstone bridge","score":0.8603776097297668},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.7818306088447571},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.776813805103302},{"id":"https://openalex.org/keywords/monocrystalline-silicon","display_name":"Monocrystalline silicon","score":0.7685589790344238},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5837339162826538},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.5298927426338196},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.5246679782867432},{"id":"https://openalex.org/keywords/polycrystalline-silicon","display_name":"Polycrystalline silicon","score":0.5087328553199768},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.45014435052871704},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.4498266279697418},{"id":"https://openalex.org/keywords/position-sensor","display_name":"Position sensor","score":0.43247905373573303},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4213593006134033},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4055469036102295},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.34454959630966187},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.25408220291137695},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.18496167659759521},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1461476981639862},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.13030919432640076}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.8648141026496887},{"id":"https://openalex.org/C104713690","wikidata":"https://www.wikidata.org/wiki/Q245133","display_name":"Wheatstone bridge","level":4,"score":0.8603776097297668},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.7818306088447571},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.776813805103302},{"id":"https://openalex.org/C26953177","wikidata":"https://www.wikidata.org/wiki/Q3960534","display_name":"Monocrystalline silicon","level":3,"score":0.7685589790344238},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5837339162826538},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.5298927426338196},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.5246679782867432},{"id":"https://openalex.org/C2780565262","wikidata":"https://www.wikidata.org/wiki/Q737038","display_name":"Polycrystalline silicon","level":4,"score":0.5087328553199768},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.45014435052871704},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.4498266279697418},{"id":"https://openalex.org/C29258643","wikidata":"https://www.wikidata.org/wiki/Q2937669","display_name":"Position sensor","level":3,"score":0.43247905373573303},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4213593006134033},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4055469036102295},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.34454959630966187},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.25408220291137695},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.18496167659759521},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1461476981639862},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.13030919432640076},{"id":"https://openalex.org/C108439606","wikidata":"https://www.wikidata.org/wiki/Q3305038","display_name":"Angular displacement","level":2,"score":0.0},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.0},{"id":"https://openalex.org/C137488568","wikidata":"https://www.wikidata.org/wiki/Q5321","display_name":"Resistor","level":3,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C87359718","wikidata":"https://www.wikidata.org/wiki/Q1271916","display_name":"Thin-film transistor","level":3,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/aim.2014.6878290","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim.2014.6878290","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.7599999904632568}],"awards":[],"funders":[{"id":"https://openalex.org/F4320320963","display_name":"University of Newcastle Australia","ror":"https://ror.org/00eae9z71"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":29,"referenced_works":["https://openalex.org/W568674712","https://openalex.org/W1973880537","https://openalex.org/W1986769160","https://openalex.org/W1988971817","https://openalex.org/W1999382492","https://openalex.org/W2006111522","https://openalex.org/W2006661615","https://openalex.org/W2023618805","https://openalex.org/W2033262978","https://openalex.org/W2035394251","https://openalex.org/W2058674350","https://openalex.org/W2063027204","https://openalex.org/W2072457111","https://openalex.org/W2073056363","https://openalex.org/W2091012868","https://openalex.org/W2091474803","https://openalex.org/W2095243602","https://openalex.org/W2102968101","https://openalex.org/W2103620228","https://openalex.org/W2115489808","https://openalex.org/W2124227251","https://openalex.org/W2124698549","https://openalex.org/W2144273206","https://openalex.org/W2149128480","https://openalex.org/W2162158227","https://openalex.org/W2170556374","https://openalex.org/W2175963763","https://openalex.org/W4236706032","https://openalex.org/W6674469237"],"related_works":["https://openalex.org/W2323653612","https://openalex.org/W3119258731","https://openalex.org/W2378386980","https://openalex.org/W2110357888","https://openalex.org/W2122551138","https://openalex.org/W2081793799","https://openalex.org/W1998975346","https://openalex.org/W2080085392","https://openalex.org/W2076424200","https://openalex.org/W2092806878"],"abstract_inverted_index":{"This":[0],"paper":[1],"addresses":[2],"a":[3,11,25,33,81],"new":[4],"position":[5],"transducer":[6],"for":[7],"nanopositioners":[8],"fabricated":[9],"through":[10],"standard":[12],"micro-electromechanical":[13],"systems":[14],"(MEMS)":[15],"process.":[16],"The":[17,36],"sensor":[18],"works":[19],"based":[20],"on":[21],"bulk":[22],"piezoresistivity":[23],"of":[24,27,75],"pair":[26],"single-crystal":[28],"silicon":[29,89],"beams,":[30],"which":[31],"suspend":[32],"nanopositioner":[34],"stage.":[35],"beams":[37],"are":[38],"deliberately":[39],"angled":[40],"to":[41],"experience":[42],"opposite":[43,50],"axial":[44],"forces":[45],"during":[46],"the":[47,65,68,72,76,94],"motion,":[48],"yielding":[49],"piezoresistive":[51],"changes":[52,66],"in":[53,67],"their":[54],"resistances.":[55],"A":[56],"Wheatstone":[57],"bridge":[58],"and":[59,104,112],"an":[60],"instrumentation":[61],"amplifier":[62],"differentially":[63],"transform":[64],"beam":[69,91],"resistances":[70],"into":[71],"output":[73],"voltage":[74],"sensor.":[77],"In":[78],"comparison":[79],"with":[80],"sensors":[82],"employing":[83],"just":[84],"one":[85],"monocrystalline":[86],"or":[87],"polycrystalline":[88],"flexible":[90],"as":[92,107,109],"piezoresistor,":[93],"proposed":[95],"design":[96],"has":[97],"considerably":[98],"more":[99],"linear":[100],"characteristics,":[101],"higher":[102],"resolution":[103],"dynamic":[105],"range,":[106],"well":[108],"lower":[110],"noise":[111],"drift.":[113]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}