{"id":"https://openalex.org/W2092324692","doi":"https://doi.org/10.1109/aim.2014.6878138","title":"SNR improvement in MEMS electrothermal displacement sensors","display_name":"SNR improvement in MEMS electrothermal displacement sensors","publication_year":2014,"publication_date":"2014-07-01","ids":{"openalex":"https://openalex.org/W2092324692","doi":"https://doi.org/10.1109/aim.2014.6878138","mag":"2092324692"},"language":"en","primary_location":{"id":"doi:10.1109/aim.2014.6878138","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim.2014.6878138","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5044893087","display_name":"Ali Mohammadi","orcid":"https://orcid.org/0000-0002-2950-3512"},"institutions":[{"id":"https://openalex.org/I78757542","display_name":"University of Newcastle Australia","ror":"https://ror.org/00eae9z71","country_code":"AU","type":"education","lineage":["https://openalex.org/I78757542"]}],"countries":["AU"],"is_corresponding":true,"raw_author_name":"A. Mohammadi","raw_affiliation_strings":["School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW, Australia","Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia"],"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]},{"raw_affiliation_string":"Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061619957","display_name":"S. O. Reza Moheimani","orcid":"https://orcid.org/0000-0002-1225-4126"},"institutions":[{"id":"https://openalex.org/I78757542","display_name":"University of Newcastle Australia","ror":"https://ror.org/00eae9z71","country_code":"AU","type":"education","lineage":["https://openalex.org/I78757542"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"S. O. R. Moheimani","raw_affiliation_strings":["School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW, Australia","Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia"],"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]},{"raw_affiliation_string":"Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5010668389","display_name":"Mehmet Rasit Yuce","orcid":"https://orcid.org/0000-0002-4802-391X"},"institutions":[{"id":"https://openalex.org/I56590836","display_name":"Monash University","ror":"https://ror.org/02bfwt286","country_code":"AU","type":"education","lineage":["https://openalex.org/I56590836"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"M. R. Yuce","raw_affiliation_strings":["Electrical and Computer Systems Engineering, Monash University, Clayton, VIC, Australia","Electr. & Comput. Syst. Eng., Monash Univ., Clayton, Vic., Australia"],"affiliations":[{"raw_affiliation_string":"Electrical and Computer Systems Engineering, Monash University, Clayton, VIC, Australia","institution_ids":["https://openalex.org/I56590836"]},{"raw_affiliation_string":"Electr. & Comput. Syst. Eng., Monash Univ., Clayton, Vic., Australia","institution_ids":["https://openalex.org/I56590836"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5044893087"],"corresponding_institution_ids":["https://openalex.org/I78757542"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.12872185,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"566","last_page":"569"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wheatstone-bridge","display_name":"Wheatstone bridge","score":0.9564007520675659},{"id":"https://openalex.org/keywords/transimpedance-amplifier","display_name":"Transimpedance amplifier","score":0.7153350114822388},{"id":"https://openalex.org/keywords/resistor","display_name":"Resistor","score":0.6841150522232056},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6719518899917603},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6658201813697815},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5812582969665527},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.5374681353569031},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.5315485000610352},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.5284371376037598},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.4910855293273926},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4759349822998047},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.4453669786453247},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4301643967628479},{"id":"https://openalex.org/keywords/bridge-circuit","display_name":"Bridge circuit","score":0.4213683605194092},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.33493417501449585},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3338286876678467},{"id":"https://openalex.org/keywords/operational-amplifier","display_name":"Operational amplifier","score":0.3253164291381836},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.3236207365989685},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.23044046759605408},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2170218527317047},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.20477208495140076},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2003518044948578},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.11352282762527466}],"concepts":[{"id":"https://openalex.org/C104713690","wikidata":"https://www.wikidata.org/wiki/Q245133","display_name":"Wheatstone bridge","level":4,"score":0.9564007520675659},{"id":"https://openalex.org/C92631468","wikidata":"https://www.wikidata.org/wiki/Q215437","display_name":"Transimpedance amplifier","level":5,"score":0.7153350114822388},{"id":"https://openalex.org/C137488568","wikidata":"https://www.wikidata.org/wiki/Q5321","display_name":"Resistor","level":3,"score":0.6841150522232056},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6719518899917603},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6658201813697815},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5812582969665527},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.5374681353569031},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.5315485000610352},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.5284371376037598},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.4910855293273926},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4759349822998047},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.4453669786453247},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4301643967628479},{"id":"https://openalex.org/C2775982562","wikidata":"https://www.wikidata.org/wiki/Q996520","display_name":"Bridge circuit","level":3,"score":0.4213683605194092},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.33493417501449585},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3338286876678467},{"id":"https://openalex.org/C145366948","wikidata":"https://www.wikidata.org/wiki/Q178947","display_name":"Operational amplifier","level":4,"score":0.3253164291381836},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.3236207365989685},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.23044046759605408},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2170218527317047},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.20477208495140076},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2003518044948578},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.11352282762527466},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/aim.2014.6878138","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim.2014.6878138","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.8299999833106995}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W598333405","https://openalex.org/W1982697623","https://openalex.org/W2018779124","https://openalex.org/W2020604243","https://openalex.org/W2065323729","https://openalex.org/W2069546923","https://openalex.org/W2091474803","https://openalex.org/W2103171927","https://openalex.org/W2113440850","https://openalex.org/W2155273325","https://openalex.org/W2160489724","https://openalex.org/W3150248096"],"related_works":["https://openalex.org/W2546851953","https://openalex.org/W2086246441","https://openalex.org/W2025150006","https://openalex.org/W2744687610","https://openalex.org/W2022411503","https://openalex.org/W1965927755","https://openalex.org/W2382300401","https://openalex.org/W2019078031","https://openalex.org/W2069718981","https://openalex.org/W4226379990"],"abstract_inverted_index":{"Electrothermal":[0],"displacement":[1,12],"sensors":[2],"are":[3,106,145],"doped":[4],"silicon":[5],"resistors":[6],"used":[7,136],"for":[8],"nanopositioning":[9],"purposes.":[10],"The":[11,30,70,104],"precision":[13],"of":[14,27,32,41,51,72,100,134],"the":[15,21,28,33,39,42,48,52,60,63,68,92,98,132],"nanopositioners":[16],"is":[17,36,77,95],"strongly":[18],"dependent":[19],"on":[20,109,112],"signal":[22],"to":[23,38,66],"noise":[24,50],"ratio":[25],"(SNR)":[26],"sensors.":[29],"sensitivity":[31,133],"electrothermal":[34],"sensor":[35,75,90,102,121],"proportional":[37],"temperature":[40,46],"sensor.":[43],"However,":[44],"higher":[45,158],"increases":[47],"thermal":[49],"device.":[53],"We":[54,147],"propose":[55],"new":[56],"methods":[57],"both":[58],"in":[59,79,129],"device":[61],"and":[62,139,150],"readout":[64,143],"circuit":[65,154],"improve":[67],"SNR.":[69,130],"design":[71],"a":[73,125],"multiple":[74,89],"architecture":[76],"reported":[78],"this":[80],"work.":[81],"Through":[82],"experiments":[83,105],"we":[84,123],"show":[85,148],"that":[86,152],"with":[87],"averaging":[88],"signals":[91],"overall":[93],"SNR":[94],"improved":[96],"by":[97],"number":[99],"averaged":[101],"outputs.":[103],"carried":[107],"out":[108],"SOI":[110],"(Silicon":[111],"Insulator)":[113],"MEMS":[114],"(Microelectromechanical":[115],"Systems)":[116],"nanopositioners.":[117],"By":[118],"combining":[119],"three":[120],"outputs,":[122],"achieved":[124],"4":[126],"dB":[127],"enhancement":[128],"Furthermore,":[131],"commonly":[135],"Wheatstone":[137],"bridge":[138],"transimpedance":[140],"amplifier":[141],"(TA)":[142],"circuits":[144],"investigated.":[146],"analytically":[149],"experimentally":[151],"TA":[153],"offers":[155],"four":[156],"times":[157],"sensitivity.":[159]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}