{"id":"https://openalex.org/W2008564597","doi":"https://doi.org/10.1109/aim.2014.6878068","title":"Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom","display_name":"Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom","publication_year":2014,"publication_date":"2014-07-01","ids":{"openalex":"https://openalex.org/W2008564597","doi":"https://doi.org/10.1109/aim.2014.6878068","mag":"2008564597"},"language":"en","primary_location":{"id":"doi:10.1109/aim.2014.6878068","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim.2014.6878068","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103123404","display_name":"Satoru Goto","orcid":"https://orcid.org/0000-0001-8492-8233"},"institutions":[{"id":"https://openalex.org/I92614990","display_name":"Tokyo University of Agriculture and Technology","ror":"https://ror.org/00qg0kr10","country_code":"JP","type":"education","lineage":["https://openalex.org/I92614990"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Satoru Goto","raw_affiliation_strings":["Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo, Japan","Grad. Sch. of Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo, Japan","institution_ids":["https://openalex.org/I92614990"]},{"raw_affiliation_string":"Grad. Sch. of Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan","institution_ids":["https://openalex.org/I92614990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100999959","display_name":"Yukinori Nakamura","orcid":null},"institutions":[{"id":"https://openalex.org/I92614990","display_name":"Tokyo University of Agriculture and Technology","ror":"https://ror.org/00qg0kr10","country_code":"JP","type":"education","lineage":["https://openalex.org/I92614990"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yukinori Nakamura","raw_affiliation_strings":["Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo, Japan","[Inst. of Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo, Japan","institution_ids":["https://openalex.org/I92614990"]},{"raw_affiliation_string":"[Inst. of Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan]","institution_ids":["https://openalex.org/I92614990"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113504950","display_name":"Shinji Wakui","orcid":null},"institutions":[{"id":"https://openalex.org/I92614990","display_name":"Tokyo University of Agriculture and Technology","ror":"https://ror.org/00qg0kr10","country_code":"JP","type":"education","lineage":["https://openalex.org/I92614990"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shinji Wakui","raw_affiliation_strings":["Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo, Japan","[Inst. of Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo, Japan","institution_ids":["https://openalex.org/I92614990"]},{"raw_affiliation_string":"[Inst. of Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan]","institution_ids":["https://openalex.org/I92614990"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.8614,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.84724842,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"137","last_page":"142"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11372","display_name":"Hydraulic and Pneumatic Systems","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11372","display_name":"Hydraulic and Pneumatic Systems","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12206","display_name":"Vibration and Dynamic Analysis","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.6830528974533081},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.6790978312492371},{"id":"https://openalex.org/keywords/overshoot","display_name":"Overshoot (microwave communication)","score":0.6550531387329102},{"id":"https://openalex.org/keywords/input-shaping","display_name":"Input shaping","score":0.6066040396690369},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.5961817502975464},{"id":"https://openalex.org/keywords/table","display_name":"Table (database)","score":0.5017337799072266},{"id":"https://openalex.org/keywords/trajectory","display_name":"Trajectory","score":0.5007398128509521},{"id":"https://openalex.org/keywords/vibration-isolation","display_name":"Vibration isolation","score":0.49018508195877075},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.4659512937068939},{"id":"https://openalex.org/keywords/vibration-control","display_name":"Vibration control","score":0.4612535238265991},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.41864562034606934},{"id":"https://openalex.org/keywords/motion-control","display_name":"Motion control","score":0.4114011228084564},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.36806029081344604},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.3361152410507202},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.20754516124725342},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.15034976601600647},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.09371563792228699}],"concepts":[{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.6830528974533081},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6790978312492371},{"id":"https://openalex.org/C2780323453","wikidata":"https://www.wikidata.org/wiki/Q7113957","display_name":"Overshoot (microwave communication)","level":2,"score":0.6550531387329102},{"id":"https://openalex.org/C2778512855","wikidata":"https://www.wikidata.org/wiki/Q6036808","display_name":"Input shaping","level":4,"score":0.6066040396690369},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.5961817502975464},{"id":"https://openalex.org/C45235069","wikidata":"https://www.wikidata.org/wiki/Q278425","display_name":"Table (database)","level":2,"score":0.5017337799072266},{"id":"https://openalex.org/C13662910","wikidata":"https://www.wikidata.org/wiki/Q193139","display_name":"Trajectory","level":2,"score":0.5007398128509521},{"id":"https://openalex.org/C45799244","wikidata":"https://www.wikidata.org/wiki/Q109968206","display_name":"Vibration isolation","level":3,"score":0.49018508195877075},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.4659512937068939},{"id":"https://openalex.org/C49240428","wikidata":"https://www.wikidata.org/wiki/Q3305953","display_name":"Vibration control","level":3,"score":0.4612535238265991},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.41864562034606934},{"id":"https://openalex.org/C145565327","wikidata":"https://www.wikidata.org/wiki/Q852514","display_name":"Motion control","level":3,"score":0.4114011228084564},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.36806029081344604},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.3361152410507202},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.20754516124725342},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15034976601600647},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.09371563792228699},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/aim.2014.6878068","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim.2014.6878068","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Peace, Justice and strong institutions","score":0.7699999809265137,"id":"https://metadata.un.org/sdg/16"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1487432464","https://openalex.org/W1974984002","https://openalex.org/W1981987908","https://openalex.org/W1984376061","https://openalex.org/W2008818530","https://openalex.org/W2019300927","https://openalex.org/W2030791216","https://openalex.org/W2043984446","https://openalex.org/W2048310110","https://openalex.org/W2049552945","https://openalex.org/W2084746270","https://openalex.org/W6629199304"],"related_works":["https://openalex.org/W2386408459","https://openalex.org/W2540667912","https://openalex.org/W2120199465","https://openalex.org/W2141186795","https://openalex.org/W2315860213","https://openalex.org/W2041887387","https://openalex.org/W2157380773","https://openalex.org/W2407854120","https://openalex.org/W3208794089","https://openalex.org/W2032537850"],"abstract_inverted_index":{"Pneumatic":[0],"anti-vibration":[1],"apparatuses":[2],"(AVAs),":[3],"which":[4,83],"have":[5],"air":[6,31],"springs,":[7],"are":[8],"needed":[9],"for":[10,77,91],"the":[11,21,27,30,34,45,49,57,60,78,97,101,110],"precision":[12],"positioning":[13],"of":[14,23,29,38,48,59,96,100],"wafer":[15],"stages":[16],"in":[17,26,87],"lithography":[18],"equipment.":[19],"However,":[20],"difference":[22,52],"time":[24,53],"delays":[25],"response":[28],"springs":[32],"causes":[33],"undesirable":[35],"rotational":[36,98],"motion":[37],"an":[39],"isolated":[40,61,102],"table.":[41],"This":[42],"paper":[43],"considers":[44],"attitude":[46],"control":[47],"AVA":[50],"including":[51],"delays.":[54],"To":[55],"avoid":[56],"rotation":[58],"table,":[62],"a":[63],"Smith":[64],"predictor":[65],"is":[66,69,84],"employed.":[67],"It":[68],"verified":[70],"that":[71],"this":[72],"approach":[73],"can":[74,104],"be":[75,105],"used":[76,86],"AVAs":[79],"with":[80],"mode":[81],"control,":[82],"often":[85],"vibration":[88],"isolation":[89],"systems":[90],"semiconductor":[92],"manufacturing.":[93],"The":[94],"overshoot":[95],"angle":[99],"table":[103],"further":[106],"reduced":[107],"by":[108],"shaping":[109],"reference":[111],"trajectory.":[112]},"counts_by_year":[{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":2}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}