{"id":"https://openalex.org/W1999382492","doi":"https://doi.org/10.1109/aim.2013.6584114","title":"Design, fabrication and characterization of a high-bandwidth 2DOF MEMS nanopositioner","display_name":"Design, fabrication and characterization of a high-bandwidth 2DOF MEMS nanopositioner","publication_year":2013,"publication_date":"2013-07-01","ids":{"openalex":"https://openalex.org/W1999382492","doi":"https://doi.org/10.1109/aim.2013.6584114","mag":"1999382492"},"language":"en","primary_location":{"id":"doi:10.1109/aim.2013.6584114","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim.2013.6584114","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5041882764","display_name":"Mohammad Maroufi","orcid":"https://orcid.org/0000-0001-7127-5026"},"institutions":[{"id":"https://openalex.org/I78757542","display_name":"University of Newcastle Australia","ror":"https://ror.org/00eae9z71","country_code":"AU","type":"education","lineage":["https://openalex.org/I78757542"]}],"countries":["AU"],"is_corresponding":true,"raw_author_name":"M. Maroufi","raw_affiliation_strings":["School of Electrical Engineering and Computer Science, University of Newcastle, NSW, Australia","Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia"],"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Computer Science, University of Newcastle, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]},{"raw_affiliation_string":"Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061619957","display_name":"S. O. Reza Moheimani","orcid":"https://orcid.org/0000-0002-1225-4126"},"institutions":[{"id":"https://openalex.org/I78757542","display_name":"University of Newcastle Australia","ror":"https://ror.org/00eae9z71","country_code":"AU","type":"education","lineage":["https://openalex.org/I78757542"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"S. O. R. Moheimani","raw_affiliation_strings":["School of Electrical Engineering and Computer Science, University of Newcastle, NSW, Australia","Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia"],"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Computer Science, University of Newcastle, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]},{"raw_affiliation_string":"Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5041882764"],"corresponding_institution_ids":["https://openalex.org/I78757542"],"apc_list":null,"apc_paid":null,"fwci":2.36059943,"has_fulltext":false,"cited_by_count":20,"citation_normalized_percentile":{"value":0.91087355,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"335","last_page":"340"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8443513512611389},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6224151849746704},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.5837167501449585},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5600355267524719},{"id":"https://openalex.org/keywords/kinematics","display_name":"Kinematics","score":0.5458893179893494},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.5428727269172668},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.49637848138809204},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4793577790260315},{"id":"https://openalex.org/keywords/perpendicular","display_name":"Perpendicular","score":0.431841105222702},{"id":"https://openalex.org/keywords/comb-drive","display_name":"Comb drive","score":0.4299038052558899},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.41813671588897705},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.35375362634658813},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3409428000450134},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3337916135787964},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22154325246810913},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1761600375175476},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.15195035934448242}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8443513512611389},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6224151849746704},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.5837167501449585},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5600355267524719},{"id":"https://openalex.org/C39920418","wikidata":"https://www.wikidata.org/wiki/Q11476","display_name":"Kinematics","level":2,"score":0.5458893179893494},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.5428727269172668},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.49637848138809204},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4793577790260315},{"id":"https://openalex.org/C199631012","wikidata":"https://www.wikidata.org/wiki/Q205034","display_name":"Perpendicular","level":2,"score":0.431841105222702},{"id":"https://openalex.org/C155840801","wikidata":"https://www.wikidata.org/wiki/Q5150581","display_name":"Comb drive","level":4,"score":0.4299038052558899},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.41813671588897705},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.35375362634658813},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3409428000450134},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3337916135787964},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22154325246810913},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1761600375175476},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15195035934448242},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/aim.2013.6584114","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim.2013.6584114","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.5099999904632568,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":24,"referenced_works":["https://openalex.org/W656628492","https://openalex.org/W1980754428","https://openalex.org/W1982697623","https://openalex.org/W1987528344","https://openalex.org/W2007452222","https://openalex.org/W2042028590","https://openalex.org/W2043708915","https://openalex.org/W2052886083","https://openalex.org/W2058209887","https://openalex.org/W2060002772","https://openalex.org/W2066652629","https://openalex.org/W2069401367","https://openalex.org/W2075916174","https://openalex.org/W2091012868","https://openalex.org/W2102023741","https://openalex.org/W2103620228","https://openalex.org/W2143399365","https://openalex.org/W2144651557","https://openalex.org/W2150678217","https://openalex.org/W2155273325","https://openalex.org/W2171612630","https://openalex.org/W3159670636","https://openalex.org/W4252615289","https://openalex.org/W6645667308"],"related_works":["https://openalex.org/W1650140711","https://openalex.org/W1559034281","https://openalex.org/W2096981997","https://openalex.org/W2089389693","https://openalex.org/W4205892980","https://openalex.org/W2750888884","https://openalex.org/W1976628706","https://openalex.org/W2092911180","https://openalex.org/W2741863900","https://openalex.org/W2374446834"],"abstract_inverted_index":{"There":[0],"is":[1,152],"a":[2,9,28,48,117,124,144,172,178],"need":[3],"for":[4],"2":[5,118],"DOF":[6,119],"scanners":[7],"in":[8,13,16,51,61,75,93,100,140,164,186],"variety":[10],"of":[11,40,45,80,96,116,134,161,168,175,182],"applications":[12],"nanotechnology,":[14],"particularly":[15],"the":[17,36,76,88,94,114,138,162,169,187],"Atomic":[18],"Force":[19],"Microscope":[20],"(AFM).":[21],"An":[22],"ideal":[23],"AFM":[24],"stage":[25,139,163],"should":[26],"have":[27,72],"high":[29,63,67],"resonance":[30,98,180],"frequency,":[31],"low":[32],"cross":[33],"coupling":[34],"between":[35],"two":[37,141],"perpendicular":[38],"axes":[39],"motion":[41],"and":[42,85,177,189],"be":[43],"capable":[44],"moving":[46],"over":[47],"large":[49],"range":[50,174],"either":[52],"direction.":[53],"To":[54,136],"achieve":[55],"these":[56,165],"specifications,":[57],"which":[58],"are":[59,156],"crucial":[60],"obtaining":[62],"quality":[64],"images":[65],"at":[66],"scan":[68,130],"speeds,":[69],"various":[70],"designs":[71],"been":[73],"proposed":[74],"literature.":[77],"The":[78,129],"use":[79],"Microelectromechanical":[81],"Systems":[82],"(MEMS)":[83],"technology":[84],"silicon":[86],"as":[87],"structural":[89],"material":[90],"has":[91,132],"resulted":[92],"achievement":[95],"higher":[97],"frequencies":[99],"nanopositioning":[101],"stages":[102],"compared":[103],"to":[104,158],"many":[105],"other":[106],"conventional":[107],"technologies.":[108],"In":[109],"this":[110],"paper":[111],"we":[112],"report":[113],"design":[115],"MEMS":[120],"stage,":[121],"fabricated":[122],"using":[123],"Silicon":[125],"on":[126],"Insulator":[127],"process.":[128],"table":[131],"dimensions":[133],"1.6mm\u00d71.6mm.":[135],"move":[137],"orthogonal":[142],"directions,":[143],"parallel":[145],"kinematic":[146],"mechanism":[147],"utilizing":[148],"electrostatic":[149],"comb":[150],"actuators":[151],"used.":[153],"Electrothermal":[154],"sensors":[155],"incorporated":[157],"detect":[159],"displacements":[160],"directions.":[166,191],"Characterization":[167],"device":[170],"reveals":[171],"displacement":[173],"\u00b16\u03bcm":[176],"first":[179],"frequency":[181],"approximately":[183],"5200":[184],"Hz":[185],"X":[188],"Y":[190]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":4},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":7},{"year":2014,"cited_by_count":4},{"year":2013,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}