{"id":"https://openalex.org/W7163702898","doi":"https://doi.org/10.1109/access.2026.3700846","title":"A Comparative Study of Attention-Based Transformer and Deep CNN Architectures for Lithography Hotspot Detection in Advanced Process Nodes","display_name":"A Comparative Study of Attention-Based Transformer and Deep CNN Architectures for Lithography Hotspot Detection in Advanced Process Nodes","publication_year":2026,"publication_date":"2026-01-01","ids":{"openalex":"https://openalex.org/W7163702898","doi":"https://doi.org/10.1109/access.2026.3700846"},"language":"en","primary_location":{"id":"doi:10.1109/access.2026.3700846","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2026.3700846","pdf_url":null,"source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://doi.org/10.1109/access.2026.3700846","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5110356639","display_name":"K C Shet","orcid":null},"institutions":[{"id":"https://openalex.org/I1333540553","display_name":"Nitte University","ror":"https://ror.org/029nydt37","country_code":"IN","type":"education","lineage":["https://openalex.org/I1333540553"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Krishnananda Shet","raw_affiliation_strings":["Department of Electronics and Communication Engineering, Nitte (Deemed to be University), NMAM Institute of Technology (NMAMIT), Nitte, Udupi, India"],"raw_orcid":"https://orcid.org/0000-0002-5151-666X","affiliations":[{"raw_affiliation_string":"Department of Electronics and Communication Engineering, Nitte (Deemed to be University), NMAM Institute of Technology (NMAMIT), Nitte, Udupi, India","institution_ids":["https://openalex.org/I1333540553"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5137945780","display_name":"Manjunath Subramanyam","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154507","display_name":"Mandya Institute of Medical Sciences","ror":"https://ror.org/04wnsdv29","country_code":"IN","type":"education","lineage":["https://openalex.org/I286135121","https://openalex.org/I4210154507"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Manjunath Subramanyam","raw_affiliation_strings":["Department of Electronics and Communication Engineering, P. E. S. College of Engineering, Mandya, Karnataka, India"],"raw_orcid":"https://orcid.org/0000-0003-2830-181X","affiliations":[{"raw_affiliation_string":"Department of Electronics and Communication Engineering, P. E. S. College of Engineering, Mandya, Karnataka, India","institution_ids":["https://openalex.org/I4210154507"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5138002219","display_name":"R. Manjunatha","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154507","display_name":"Mandya Institute of Medical Sciences","ror":"https://ror.org/04wnsdv29","country_code":"IN","type":"education","lineage":["https://openalex.org/I286135121","https://openalex.org/I4210154507"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"R. Manjunatha","raw_affiliation_strings":["Department of Electronics and Communication Engineering, P. E. S. College of Engineering, Mandya, Karnataka, India"],"raw_orcid":"https://orcid.org/0000-0003-4813-8810","affiliations":[{"raw_affiliation_string":"Department of Electronics and Communication Engineering, P. E. S. College of Engineering, Mandya, Karnataka, India","institution_ids":["https://openalex.org/I4210154507"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5137965363","display_name":"S Ganesh","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154507","display_name":"Mandya Institute of Medical Sciences","ror":"https://ror.org/04wnsdv29","country_code":"IN","type":"education","lineage":["https://openalex.org/I286135121","https://openalex.org/I4210154507"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"S. Ganesh","raw_affiliation_strings":["Department of Electronics and Communication Engineering, P. E. S. College of Engineering, Mandya, Karnataka, India"],"raw_orcid":"https://orcid.org/0009-0000-2967-1738","affiliations":[{"raw_affiliation_string":"Department of Electronics and Communication Engineering, P. E. S. College of Engineering, Mandya, Karnataka, India","institution_ids":["https://openalex.org/I4210154507"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017196350","display_name":"Mahesh Koti","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154507","display_name":"Mandya Institute of Medical Sciences","ror":"https://ror.org/04wnsdv29","country_code":"IN","type":"education","lineage":["https://openalex.org/I286135121","https://openalex.org/I4210154507"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Mahesh Koti","raw_affiliation_strings":["Department of Electronics and Communication Engineering, P. E. S. College of Engineering, Mandya, Karnataka, India"],"raw_orcid":"https://orcid.org/0000-0002-7729-7397","affiliations":[{"raw_affiliation_string":"Department of Electronics and Communication Engineering, P. E. S. College of Engineering, Mandya, Karnataka, India","institution_ids":["https://openalex.org/I4210154507"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5137990960","display_name":"Kumar N. Krishna Murthy","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154507","display_name":"Mandya Institute of Medical Sciences","ror":"https://ror.org/04wnsdv29","country_code":"IN","type":"education","lineage":["https://openalex.org/I286135121","https://openalex.org/I4210154507"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Kumar N. Krishna Murthy","raw_affiliation_strings":["Department of Electronics and Communication Engineering, P. E. S. College of Engineering, Mandya, Karnataka, India"],"raw_orcid":"https://orcid.org/0009-0005-7575-1479","affiliations":[{"raw_affiliation_string":"Department of Electronics and Communication Engineering, P. E. S. College of Engineering, Mandya, Karnataka, India","institution_ids":["https://openalex.org/I4210154507"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":1850,"currency":"USD","value_usd":1850},"apc_paid":{"value":1850,"currency":"USD","value_usd":1850},"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.72002405,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"14","issue":null,"first_page":"86956","last_page":"86969"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10036","display_name":"Advanced Neural Network Applications","score":0.2809000015258789,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10036","display_name":"Advanced Neural Network Applications","score":0.2809000015258789,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12357","display_name":"Digital Media Forensic Detection","score":0.10249999910593033,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.09399999678134918,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/hotspot","display_name":"Hotspot (geology)","score":0.7128999829292297},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.6065000295639038},{"id":"https://openalex.org/keywords/transformer","display_name":"Transformer","score":0.5638999938964844},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.41260001063346863},{"id":"https://openalex.org/keywords/computational-lithography","display_name":"Computational lithography","score":0.3555999994277954}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7141000032424927},{"id":"https://openalex.org/C146481406","wikidata":"https://www.wikidata.org/wiki/Q105131","display_name":"Hotspot (geology)","level":2,"score":0.7128999829292297},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.6065000295639038},{"id":"https://openalex.org/C66322947","wikidata":"https://www.wikidata.org/wiki/Q11658","display_name":"Transformer","level":3,"score":0.5638999938964844},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.41260001063346863},{"id":"https://openalex.org/C182873914","wikidata":"https://www.wikidata.org/wiki/Q5157329","display_name":"Computational lithography","level":5,"score":0.3555999994277954},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.34380000829696655},{"id":"https://openalex.org/C2994168587","wikidata":"https://www.wikidata.org/wiki/Q5295","display_name":"Random access memory","level":2,"score":0.3353999853134155},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.28850001096725464},{"id":"https://openalex.org/C9390403","wikidata":"https://www.wikidata.org/wiki/Q3966","display_name":"Computer hardware","level":1,"score":0.2881999909877777},{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.2854999899864197},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.28369998931884766},{"id":"https://openalex.org/C174998907","wikidata":"https://www.wikidata.org/wiki/Q357662","display_name":"Work in process","level":2,"score":0.2554999887943268}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/access.2026.3700846","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2026.3700846","pdf_url":null,"source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:19cd0e986f6f4a3da80fb344956c18c2","is_oa":true,"landing_page_url":"https://doaj.org/article/19cd0e986f6f4a3da80fb344956c18c2","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 14, Pp 86956-86969 (2026)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1109/access.2026.3700846","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2026.3700846","pdf_url":null,"source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":[],"abstract_inverted_index":{"As":[0,179],"VLSI":[1],"technology":[2],"continuously":[3],"expands,":[4],"especially":[5],"below":[6],"the":[7,45,79,105,111,115,177],"10-nm":[8],"node,":[9],"lithography-related":[10],"process":[11,181,194],"variations":[12],"have":[13],"become":[14,203],"a":[15,60,67,91,126],"major":[16],"issue":[17],"in":[18,53,172,222],"semiconductor":[19],"manufacturing.":[20],"Consequently,":[21],"traditional":[22],"physics-based":[23],"verification":[24],"methods":[25],"are":[26,58,167],"becoming":[27],"less":[28],"practical":[29],"for":[30,49,170,220,231],"full-chip":[31],"analysis,":[32],"mainly":[33],"due":[34],"to":[35,102,148,158],"their":[36],"heavy":[37],"computational":[38],"demands":[39],"and":[40,66,76,99,192,210],"timing":[41],"constraints.":[42],"We":[43],"explore":[44],"deep":[46],"learning":[47],"techniques":[48],"lithography":[50],"hotspot":[51],"detection":[52],"this":[54],"work.":[55],"Two":[56],"architectures":[57],"examined:":[59],"Deep":[61],"Convolutional":[62],"Neural":[63],"Network":[64],"(CNN)":[65],"lightweight":[68],"Vision":[69,123],"Transformer":[70,124],"(ViT).":[71],"Both":[72],"models":[73,166,196],"were":[74],"trained":[75],"tested":[77],"on":[78,160,229],"same":[80],"dataset":[81],"of":[82,110,120,198,214],"layout":[83,106,154],"clips.":[84],"The":[85,108,122,206],"input":[86],"data":[87],"is":[88],"represented":[89],"using":[90],"four-channel":[92],"lithography-aware":[93],"format":[94],"that":[95,114],"includes":[96],"both":[97],"intensity":[98],"gradient":[100],"details":[101],"better":[103,168],"capture":[104],"characteristics.":[107],"results":[109],"experiment":[112],"show":[113],"CNN":[116],"has":[117],"an":[118],"accuracy":[119,128],"97.7%.":[121],"gets":[125],"lower":[127],"than":[129],"CNN,":[130],"but":[131],"needs":[132],"only":[133],"27,809":[134],"trainable":[135],"parameters":[136],"which":[137],"makes":[138],"it":[139,147],"considerably":[140],"more":[141],"lightweight.":[142],"Its":[143],"self-attention":[144],"mechanism":[145],"allows":[146],"learn":[149],"long-range":[150],"spatial":[151,174],"relationships":[152,202],"between":[153],"features.":[155],"CNNs":[156],"tend":[157],"focus":[159],"local":[161],"feature":[162,201],"extraction":[163],"while":[164],"Transformer-based":[165,215],"suited":[169],"pulling":[171],"broader":[173],"context":[175],"from":[176],"layout.":[178],"advanced":[180],"nodes":[182],"increasingly":[183],"exhibit":[184],"non-local":[185],"printing":[186],"effects":[187],"driven":[188],"by":[189],"optical":[190],"proximity":[191],"complex":[193],"interactions,":[195],"capable":[197],"capturing":[199],"distant":[200],"particularly":[204],"valuable.":[205],"compact":[207],"size,":[208],"scalability,":[209],"contextual":[211],"reasoning":[212],"capability":[213],"approaches":[216],"indicate":[217],"strong":[218],"potential":[219],"deployment":[221],"next-generation":[223],"Electronic":[224],"Design":[225,230],"Automation":[226],"workflows":[227],"focused":[228],"Manufacturability":[232],"optimization.":[233]},"counts_by_year":[],"updated_date":"2026-06-13T06:13:01.061226","created_date":"2026-06-06T00:00:00"}