{"id":"https://openalex.org/W4410027513","doi":"https://doi.org/10.1109/access.2025.3566650","title":"Research on Wafer CMP Temperature Online Detection Compensation Algorithm Based on GA-BP Improved Neural Network","display_name":"Research on Wafer CMP Temperature Online Detection Compensation Algorithm Based on GA-BP Improved Neural Network","publication_year":2025,"publication_date":"2025-01-01","ids":{"openalex":"https://openalex.org/W4410027513","doi":"https://doi.org/10.1109/access.2025.3566650"},"language":"en","primary_location":{"id":"doi:10.1109/access.2025.3566650","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2025.3566650","pdf_url":null,"source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://doi.org/10.1109/access.2025.3566650","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Binjie Li","orcid":"https://orcid.org/0009-0007-0754-3736"},"institutions":[{"id":"https://openalex.org/I55712492","display_name":"Zhejiang University of Technology","ror":"https://ror.org/02djqfd08","country_code":"CN","type":"education","lineage":["https://openalex.org/I55712492"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Binjie Li","raw_affiliation_strings":["College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China"],"raw_orcid":"https://orcid.org/0009-0007-0754-3736","affiliations":[{"raw_affiliation_string":"College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China","institution_ids":["https://openalex.org/I55712492"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059525869","display_name":"Kuan Shen","orcid":null},"institutions":[{"id":"https://openalex.org/I55712492","display_name":"Zhejiang University of Technology","ror":"https://ror.org/02djqfd08","country_code":"CN","type":"education","lineage":["https://openalex.org/I55712492"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kuan Shen","raw_affiliation_strings":["College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China"],"raw_orcid":"https://orcid.org/0009-0008-2231-1164","affiliations":[{"raw_affiliation_string":"College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China","institution_ids":["https://openalex.org/I55712492"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Zhilong Song","orcid":"https://orcid.org/0009-0009-4100-5346"},"institutions":[{"id":"https://openalex.org/I55712492","display_name":"Zhejiang University of Technology","ror":"https://ror.org/02djqfd08","country_code":"CN","type":"education","lineage":["https://openalex.org/I55712492"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhilong Song","raw_affiliation_strings":["College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China"],"raw_orcid":"https://orcid.org/0009-0009-4100-5346","affiliations":[{"raw_affiliation_string":"College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China","institution_ids":["https://openalex.org/I55712492"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068099159","display_name":"Binghai Lyu","orcid":"https://orcid.org/0000-0002-1628-1084"},"institutions":[{"id":"https://openalex.org/I55712492","display_name":"Zhejiang University of Technology","ror":"https://ror.org/02djqfd08","country_code":"CN","type":"education","lineage":["https://openalex.org/I55712492"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Binghai Lyu","raw_affiliation_strings":["College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China"],"raw_orcid":"https://orcid.org/0000-0002-1628-1084","affiliations":[{"raw_affiliation_string":"College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China","institution_ids":["https://openalex.org/I55712492"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100531665","display_name":"Wenhong Zhao","orcid":null},"institutions":[{"id":"https://openalex.org/I55712492","display_name":"Zhejiang University of Technology","ror":"https://ror.org/02djqfd08","country_code":"CN","type":"education","lineage":["https://openalex.org/I55712492"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenhong Zhao","raw_affiliation_strings":["College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China"],"raw_orcid":"https://orcid.org/0009-0002-8881-166X","affiliations":[{"raw_affiliation_string":"College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China","institution_ids":["https://openalex.org/I55712492"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I55712492"],"apc_list":{"value":1850,"currency":"USD","value_usd":1850},"apc_paid":{"value":1850,"currency":"USD","value_usd":1850},"fwci":2.3336,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.87885938,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":98,"max":99},"biblio":{"volume":"13","issue":null,"first_page":"86498","last_page":"86508"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13717","display_name":"Advanced Algorithms and Applications","score":0.9424999952316284,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13717","display_name":"Advanced Algorithms and Applications","score":0.9424999952316284,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14225","display_name":"Advanced Sensor and Control Systems","score":0.9409999847412109,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9362000226974487,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/artificial-neural-network","display_name":"Artificial neural network","score":0.6732329726219177},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6454750299453735},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6290122270584106},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.5783628225326538},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.45765718817710876},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.2848883271217346},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.23119071125984192},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.16675633192062378}],"concepts":[{"id":"https://openalex.org/C50644808","wikidata":"https://www.wikidata.org/wiki/Q192776","display_name":"Artificial neural network","level":2,"score":0.6732329726219177},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6454750299453735},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6290122270584106},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.5783628225326538},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.45765718817710876},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.2848883271217346},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.23119071125984192},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.16675633192062378},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/access.2025.3566650","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2025.3566650","pdf_url":null,"source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:e90ca30c96b14eef8e959af484aa1d82","is_oa":true,"landing_page_url":"https://doaj.org/article/e90ca30c96b14eef8e959af484aa1d82","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 13, Pp 86498-86508 (2025)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1109/access.2025.3566650","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2025.3566650","pdf_url":null,"source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.4399999976158142}],"awards":[{"id":"https://openalex.org/G7126866730","display_name":null,"funder_award_id":"U20A20293","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":30,"referenced_works":["https://openalex.org/W2014225583","https://openalex.org/W2018792032","https://openalex.org/W2019282798","https://openalex.org/W2044749619","https://openalex.org/W2055834582","https://openalex.org/W2067663090","https://openalex.org/W2078989190","https://openalex.org/W2128597552","https://openalex.org/W2151915045","https://openalex.org/W2226885185","https://openalex.org/W2441112898","https://openalex.org/W2508577522","https://openalex.org/W2612203084","https://openalex.org/W2791001464","https://openalex.org/W2879134261","https://openalex.org/W2915878183","https://openalex.org/W2918588943","https://openalex.org/W2945264879","https://openalex.org/W2973088421","https://openalex.org/W3022167472","https://openalex.org/W3030231285","https://openalex.org/W3084654062","https://openalex.org/W3094474371","https://openalex.org/W3197400406","https://openalex.org/W4220859843","https://openalex.org/W4319978248","https://openalex.org/W4366254670","https://openalex.org/W4386159868","https://openalex.org/W4391614887","https://openalex.org/W4408960647"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W2051487156","https://openalex.org/W2073681303","https://openalex.org/W1998662473","https://openalex.org/W1988252515","https://openalex.org/W2075391483","https://openalex.org/W2742348144","https://openalex.org/W2390279801"],"abstract_inverted_index":{"In":[0],"chemical":[1,15],"mechanical":[2],"polishing":[3,21,50,217],"(CMP),":[4],"temperature":[5,35,63,76,85,167,172,212],"is":[6,45],"a":[7,80,90,105,112,207],"primary":[8],"factor":[9],"that":[10,60,133],"determines":[11],"the":[12,20,49,58,67,124,134,140,160,166,170,188,191],"rate":[13,199],"of":[14,25,41,52,139,149,165,174,190],"reactions,":[16],"which":[17],"directly":[18],"influences":[19],"efficiency":[22],"and":[23,111,120,151,156,200],"quality":[24],"wafers.":[26,54],"Therefore,":[27],"constructing":[28],"an":[29],"online":[30],"monitoring":[31],"system":[32],"for":[33,47,210],"wafer":[34,216],"to":[36,71,74,117,145,154,176,182,202],"enable":[37],"real-time":[38],"feedback":[39],"control":[40],"key":[42],"node":[43],"temperatures":[44],"beneficial":[46],"improving":[48],"yield":[51],"semiconductor":[53],"This":[55,184],"paper":[56],"addresses":[57],"challenge":[59],"non-contact":[61],"infrared":[62],"sensors":[64],"encounter":[65],"in":[66,214],"CMP":[68],"process":[69],"due":[70],"their":[72],"susceptibility":[73],"environmental":[75,171],"interference.":[77],"We":[78],"propose":[79],"backpropagation":[81,99],"(BP)":[82],"neural":[83,101],"network":[84,102],"compensation":[86,125,213],"model":[87,103,185],"optimized":[88],"by":[89],"dynamic":[91,106],"adaptive":[92],"genetic":[93,97],"algorithm.":[94],"The":[95],"improved":[96,128],"algorithm-optimized":[98],"(GA-BP)":[100],"incorporates":[104],"nonlinear":[107],"probability":[108],"adjustment":[109],"mechanism":[110],"fitness":[113],"calibration":[114],"mechanism.":[115],"Compared":[116],"traditional":[118,192],"BP":[119,155,193],"standard":[121],"GA-BP":[122],"models,":[123],"accuracy":[126],"has":[127,143,178],"significantly.":[129],"Experimental":[130],"results":[131],"indicate":[132],"mean":[135],"absolute":[136],"error":[137,164],"(MAE)":[138],"test":[141],"set":[142],"decreased":[144,179],"0.2381\u00b0C,":[146],"representing":[147],"reductions":[148],"82%":[150],"68%":[152],"compared":[153],"GA-BP,":[157],"respectively.":[158],"Furthermore,":[159],"maximum":[161],"relative":[162],"measurement":[163],"sensor":[168,211],"within":[169],"range":[173],"3.8":[175],"75.4\u00b0C":[177],"from":[180],"14%":[181],"2.59%.":[183],"effectively":[186],"mitigates":[187],"shortcomings":[189],"network,":[194],"such":[195],"as":[196],"slow":[197],"convergence":[198],"vulnerability":[201],"local":[203],"optima,":[204],"thereby":[205],"providing":[206],"novel":[208],"approach":[209],"ultra-precision":[215],"applications.":[218]},"counts_by_year":[{"year":2026,"cited_by_count":3}],"updated_date":"2026-03-27T05:58:40.876381","created_date":"2025-10-10T00:00:00"}