{"id":"https://openalex.org/W4409560659","doi":"https://doi.org/10.1109/access.2025.3561805","title":"Ultrasonic Transmit Beam Steering Using Slitted Transducer Design","display_name":"Ultrasonic Transmit Beam Steering Using Slitted Transducer Design","publication_year":2025,"publication_date":"2025-01-01","ids":{"openalex":"https://openalex.org/W4409560659","doi":"https://doi.org/10.1109/access.2025.3561805"},"language":"en","primary_location":{"id":"doi:10.1109/access.2025.3561805","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2025.3561805","pdf_url":null,"source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://doi.org/10.1109/access.2025.3561805","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Yinuo Enoch Zhao","orcid":"https://orcid.org/0009-0008-7757-2513"},"institutions":[{"id":"https://openalex.org/I4210097286","display_name":"Hwa Chong Institution","ror":"https://ror.org/00rrrfr24","country_code":"SG","type":"education","lineage":["https://openalex.org/I4210097286"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Yinuo Enoch Zhao","raw_affiliation_strings":["Hwa Chong Institution, 661 Bukit Timah Rd, Singapore","Hwa Chong Institution, 661 Bukit Timah Rd, Singapore, Republic of Singapore"],"raw_orcid":"https://orcid.org/0009-0008-7757-2513","affiliations":[{"raw_affiliation_string":"Hwa Chong Institution, 661 Bukit Timah Rd, Singapore","institution_ids":["https://openalex.org/I4210097286"]},{"raw_affiliation_string":"Hwa Chong Institution, 661 Bukit Timah Rd, Singapore, Republic of Singapore","institution_ids":["https://openalex.org/I4210097286"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073349250","display_name":"Zheng Jie Tan","orcid":"https://orcid.org/0000-0002-6147-8054"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Zheng Jie Tan","raw_affiliation_strings":["Advanced Remanufacturing and Technology Centre (ARTC), Agency for Science, 3 Cleantech Loop, Singapore","Advanced Remanufacturing and Technology Centre (ARTC), Agency for Science, Technology and Research (A*STAR), 3 Cleantech Loop, CleanTech Two #01/01, Singapore, Republic of Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Advanced Remanufacturing and Technology Centre (ARTC), Agency for Science, 3 Cleantech Loop, Singapore","institution_ids":["https://openalex.org/I115228651"]},{"raw_affiliation_string":"Advanced Remanufacturing and Technology Centre (ARTC), Agency for Science, Technology and Research (A*STAR), 3 Cleantech Loop, CleanTech Two #01/01, Singapore, Republic of Singapore","institution_ids":["https://openalex.org/I115228651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050111553","display_name":"Wei-Bin Ewe","orcid":"https://orcid.org/0000-0002-4600-0634"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I3004594783","display_name":"Institute of High Performance Computing","ror":"https://ror.org/02n0ejh50","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I3004594783","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Wei-Bin Ewe","raw_affiliation_strings":["Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Wy, Singapore","Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Way, Connexis #16-16, Singapore, Republic of Singapore"],"raw_orcid":"https://orcid.org/0000-0002-4600-0634","affiliations":[{"raw_affiliation_string":"Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Wy, Singapore","institution_ids":["https://openalex.org/I3004594783"]},{"raw_affiliation_string":"Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Way, Connexis #16-16, Singapore, Republic of Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I3004594783"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Wai Siang Yeoh","orcid":null},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I3004594783","display_name":"Institute of High Performance Computing","ror":"https://ror.org/02n0ejh50","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I3004594783","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Wai Siang Yeoh","raw_affiliation_strings":["Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Wy, Singapore","Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Way, Connexis #16-16, Singapore, Republic of Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Wy, Singapore","institution_ids":["https://openalex.org/I3004594783"]},{"raw_affiliation_string":"Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Way, Connexis #16-16, Singapore, Republic of Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I3004594783"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112735951","display_name":"R. Senthilkumar","orcid":null},"institutions":[{"id":"https://openalex.org/I4210110591","display_name":"A*STAR Joint Council Office","ror":"https://ror.org/01pz9tv63","country_code":"SG","type":"other","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210110591"]},{"id":"https://openalex.org/I4210156274","display_name":"St. Joseph Medical Center","ror":"https://ror.org/052vt9742","country_code":"US","type":"healthcare","lineage":["https://openalex.org/I14285509","https://openalex.org/I2802797007","https://openalex.org/I4210156274"]}],"countries":["SG","US"],"is_corresponding":false,"raw_author_name":"Rahul Singaram Senthilkumar","raw_affiliation_strings":["St. Joseph’s Institution, 38 Malcolm Rd, Singapore","St. Joseph’s Institution, 38 Malcolm Rd, Singapore, Republic of Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"St. Joseph’s Institution, 38 Malcolm Rd, Singapore","institution_ids":["https://openalex.org/I4210156274"]},{"raw_affiliation_string":"St. Joseph’s Institution, 38 Malcolm Rd, Singapore, Republic of Singapore","institution_ids":["https://openalex.org/I4210110591"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103207791","display_name":"Viet Phuong Bui","orcid":"https://orcid.org/0000-0003-2906-051X"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I3004594783","display_name":"Institute of High Performance Computing","ror":"https://ror.org/02n0ejh50","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I3004594783","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Viet Phuong Bui","raw_affiliation_strings":["Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Wy, Singapore","Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Way, Connexis #16-16, Singapore, Republic of Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Wy, Singapore","institution_ids":["https://openalex.org/I3004594783"]},{"raw_affiliation_string":"Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Way, Connexis #16-16, Singapore, Republic of Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I3004594783"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080137851","display_name":"Daniel Ssu-Han Chen","orcid":"https://orcid.org/0000-0003-0806-9638"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I4210123095","display_name":"Institute of Materials Research and Engineering","ror":"https://ror.org/02sepg748","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210123095","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Daniel Ssu-Han Chen","raw_affiliation_strings":["Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, Singapore","Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, Innovis #08-02, Singapore, Republic of Singapore"],"raw_orcid":"https://orcid.org/0000-0003-0806-9638","affiliations":[{"raw_affiliation_string":"Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I4210123095"]},{"raw_affiliation_string":"Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, Innovis #08-02, Singapore, Republic of Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5014000203","display_name":"Xing Haw Marvin Tan","orcid":"https://orcid.org/0000-0002-5674-2906"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I3004594783","display_name":"Institute of High Performance Computing","ror":"https://ror.org/02n0ejh50","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I3004594783","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Xing Haw Marvin Tan","raw_affiliation_strings":["Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Wy, Singapore","Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Way, Connexis #16-16, Singapore, Republic of Singapore"],"raw_orcid":"https://orcid.org/0000-0002-5674-2906","affiliations":[{"raw_affiliation_string":"Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Wy, Singapore","institution_ids":["https://openalex.org/I3004594783"]},{"raw_affiliation_string":"Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Way, Connexis #16-16, Singapore, Republic of Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I3004594783"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":7,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2075,"currency":"USD","value_usd":2075},"apc_paid":{"value":2075,"currency":"USD","value_usd":2075},"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.06393557,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"13","issue":null,"first_page":"71133","last_page":"71147"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9035999774932861,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9035999774932861,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.7465174198150635},{"id":"https://openalex.org/keywords/ultrasonic-sensor","display_name":"Ultrasonic sensor","score":0.6480075120925903},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.605430006980896},{"id":"https://openalex.org/keywords/beam-steering","display_name":"Beam steering","score":0.6045302152633667},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.5665867328643799},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.47385886311531067},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.25215452909469604},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.23301911354064941}],"concepts":[{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.7465174198150635},{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.6480075120925903},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.605430006980896},{"id":"https://openalex.org/C143148639","wikidata":"https://www.wikidata.org/wiki/Q4876192","display_name":"Beam steering","level":3,"score":0.6045302152633667},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.5665867328643799},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.47385886311531067},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.25215452909469604},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.23301911354064941}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/access.2025.3561805","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2025.3561805","pdf_url":null,"source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:b2acc34a802346c1aba87a2e6669ac8c","is_oa":true,"landing_page_url":"https://doaj.org/article/b2acc34a802346c1aba87a2e6669ac8c","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 13, Pp 71133-71147 (2025)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1109/access.2025.3561805","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2025.3561805","pdf_url":null,"source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.8500000238418579,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G2020602454","display_name":null,"funder_award_id":"232D800031","funder_id":"https://openalex.org/F4320320696","funder_display_name":"Agency for Science, Technology and Research"},{"id":"https://openalex.org/G24847180","display_name":null,"funder_award_id":"C233312003","funder_id":"https://openalex.org/F4320320696","funder_display_name":"Agency for Science, Technology and Research"},{"id":"https://openalex.org/G4800615413","display_name":null,"funder_award_id":"I24D1AG026","funder_id":"https://openalex.org/F4320320709","funder_display_name":"National Research Foundation Singapore"},{"id":"https://openalex.org/G7745599103","display_name":null,"funder_award_id":"I24D1AG026","funder_id":"https://openalex.org/F4320320696","funder_display_name":"Agency for Science, Technology and Research"}],"funders":[{"id":"https://openalex.org/F4320320696","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09"},{"id":"https://openalex.org/F4320320709","display_name":"National Research Foundation Singapore","ror":"https://ror.org/03cpyc314"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":25,"referenced_works":["https://openalex.org/W1987427413","https://openalex.org/W2009707640","https://openalex.org/W2044680521","https://openalex.org/W2062110360","https://openalex.org/W2124726994","https://openalex.org/W2322006961","https://openalex.org/W2790749309","https://openalex.org/W2925472559","https://openalex.org/W2925537513","https://openalex.org/W2969890465","https://openalex.org/W2969971495","https://openalex.org/W2981072882","https://openalex.org/W3015634790","https://openalex.org/W3022237966","https://openalex.org/W3037904635","https://openalex.org/W3137946860","https://openalex.org/W3139374061","https://openalex.org/W4200108827","https://openalex.org/W4224272513","https://openalex.org/W4310584719","https://openalex.org/W4360999373","https://openalex.org/W4376602881","https://openalex.org/W4388466990","https://openalex.org/W4388736769","https://openalex.org/W4405517515"],"related_works":["https://openalex.org/W2366424944","https://openalex.org/W2089829884","https://openalex.org/W3034962873","https://openalex.org/W2383068986","https://openalex.org/W2090275562","https://openalex.org/W3152005513","https://openalex.org/W2020960496","https://openalex.org/W1266100159","https://openalex.org/W2088920587","https://openalex.org/W2380594826"],"abstract_inverted_index":{"Advancements":[0],"in":[1,9,102,189,198,226],"ultrasonic":[2],"imaging":[3,137,202],"sensors":[4],"(UISs),":[5],"such":[6],"as":[7],"improvements":[8],"cost-effectiveness,":[10],"low":[11],"power":[12],"consumption,":[13],"and":[14,73,123,131,139,201,206,211,223],"suitability":[15],"for":[16,22,204],"challenging":[17],"environments,":[18],"have":[19,114],"been":[20],"useful":[21],"drone":[23],"navigation.":[24],"However,":[25],"existing":[26,170],"microelectromechanical":[27],"systems":[28],"(MEMS)":[29],"transducer":[30,59,96,111,161],"arrays":[31],"suffer":[32],"from":[33],"limitations":[34],"due":[35],"to":[36,81,92,165,175,178,219],"the":[37,42,47,65,75,78,94,129,136,144,155,160,185,190,193],"non-uniform":[38],"stress":[39,107],"distribution":[40],"of":[41,50,77,125,143,154],"thin-film":[43],"layers,":[44],"which":[45,63,98],"changes":[46],"resonant":[48,79,103],"frequency":[49,80],"devices.":[51],"To":[52],"address":[53],"this,":[54],"a":[55],"novel":[56],"sector":[57],"slitted":[58,95],"design":[60,157],"was":[61,90],"proposed,":[62],"enhances":[64],"acoustic":[66,182],"pressure":[67,183],"output":[68],"while":[69,172],"maintaining":[70],"mechanical":[71],"stability":[72],"reduces":[74],"sensitivity":[76],"residual":[82],"stresses.":[83],"In":[84],"this":[85],"study,":[86],"finite":[87],"element":[88],"analysis":[89],"used":[91],"model":[93],"design,":[97],"demonstrated":[99],"minimal":[100],"variation":[101],"frequencies":[104],"under":[105],"different":[106,120],"conditions.":[108],"The":[109,151],"MEMS":[110],"array":[112,145,162,194],"simulations":[113],"displayed":[115],"effective":[116],"beam-steering":[117],"capabilities":[118],"using":[119],"phase":[121],"profiles":[122],"validation":[124],"performance":[126,197],"metrics":[127],"through":[128],"Fresnel":[130],"Fraunhofer":[132],"diffraction":[133],"propagations.":[134],"Both":[135],"resolution":[138],"signal-to-noise":[140],"ratio":[141],"(SNR)":[142],"were":[146],"evaluated":[147],"over":[148],"various":[149],"distances.":[150],"figures-of-merit":[152],"(FoM)":[153],"sector-slitted":[156],"indicate":[158],"that":[159],"is":[163],"1.6":[164],"30":[166],"times":[167,180],"smaller":[168],"than":[169,184],"designs":[171,187],"being":[173],"able":[174],"generate":[176],"26":[177],"965":[179],"greater":[181],"other":[186],"reported":[188],"literature.":[191],"Thus,":[192],"promises":[195],"enhanced":[196],"3D":[199],"range-finding":[200],"applications":[203,214],"drones":[205],"mobile":[207],"devices,":[208],"offering":[209],"compactness":[210],"efficiency.":[212],"Future":[213],"could":[215],"leverage":[216],"these":[217],"advancements":[218],"improve":[220],"autonomous":[221],"navigation":[222],"environmental":[224],"sensing":[225],"complex":[227],"scenarios.":[228]},"counts_by_year":[],"updated_date":"2026-08-21T09:56:20.448147","created_date":"2025-10-10T00:00:00"}