{"id":"https://openalex.org/W4380881493","doi":"https://doi.org/10.1109/access.2023.3287148","title":"Strained Si Nanosheet pFET Based on SiC Strain Relaxed Buffer Layer for High Performance and Low Power Logic Applications","display_name":"Strained Si Nanosheet pFET Based on SiC Strain Relaxed Buffer Layer for High Performance and Low Power Logic Applications","publication_year":2023,"publication_date":"2023-01-01","ids":{"openalex":"https://openalex.org/W4380881493","doi":"https://doi.org/10.1109/access.2023.3287148"},"language":"en","primary_location":{"id":"doi:10.1109/access.2023.3287148","is_oa":true,"landing_page_url":"http://dx.doi.org/10.1109/access.2023.3287148","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/10154003.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/10154003.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5051855359","display_name":"Kun Chen","orcid":"https://orcid.org/0000-0002-4606-7599"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I2802974365","display_name":"Shanghai Innovative Research Center of Traditional Chinese Medicine","ror":"https://ror.org/01gnagj68","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2802974365"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Kun Chen","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","School of Microelectronics, State Key Laboratory of ASIC and System, Fudan University, Shanghai, China","Shanghai Integrated Circuit Manufacturing Innovation Center CO. LTD, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"School of Microelectronics, State Key Laboratory of ASIC and System, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"Shanghai Integrated Circuit Manufacturing Innovation Center CO. LTD, Shanghai, China","institution_ids":["https://openalex.org/I2802974365"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038032685","display_name":"Jingwen Yang","orcid":"https://orcid.org/0000-0002-6268-0254"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jingwen Yang","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","School of Microelectronics, State Key Laboratory of ASIC and System, Fudan University, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"School of Microelectronics, State Key Laboratory of ASIC and System, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067","https://openalex.org/I4391767673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101545129","display_name":"Chunlei Wu","orcid":"https://orcid.org/0000-0002-6630-0757"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I2802974365","display_name":"Shanghai Innovative Research Center of Traditional Chinese Medicine","ror":"https://ror.org/01gnagj68","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2802974365"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chunlei Wu","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","Shanghai Integrated Circuit Manufacturing Innovation Center CO. LTD, Shanghai, China","Zhangjiang Fudan International Innovation Center, Shanghai, China","School of Microelectronics, State Key Laboratory of ASIC and System, Fudan University, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"Shanghai Integrated Circuit Manufacturing Innovation Center CO. LTD, Shanghai, China","institution_ids":["https://openalex.org/I2802974365"]},{"raw_affiliation_string":"Zhangjiang Fudan International Innovation Center, Shanghai, China","institution_ids":["https://openalex.org/I2802974365"]},{"raw_affiliation_string":"School of Microelectronics, State Key Laboratory of ASIC and System, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067","https://openalex.org/I4391767673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100337630","display_name":"Chen Wang","orcid":"https://orcid.org/0000-0002-9380-8898"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I2802974365","display_name":"Shanghai Innovative Research Center of Traditional Chinese Medicine","ror":"https://ror.org/01gnagj68","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2802974365"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chen Wang","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","Zhangjiang Fudan International Innovation Center, Shanghai, China","Shanghai Integrated Circuit Manufacturing Innovation Center CO. LTD, Shanghai, China","School of Microelectronics, State Key Laboratory of ASIC and System, Fudan University, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"Zhangjiang Fudan International Innovation Center, Shanghai, China","institution_ids":["https://openalex.org/I2802974365"]},{"raw_affiliation_string":"Shanghai Integrated Circuit Manufacturing Innovation Center CO. LTD, Shanghai, China","institution_ids":["https://openalex.org/I2802974365"]},{"raw_affiliation_string":"School of Microelectronics, State Key Laboratory of ASIC and System, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067","https://openalex.org/I4391767673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000807861","display_name":"Min Xu","orcid":"https://orcid.org/0000-0002-0881-5891"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I2802974365","display_name":"Shanghai Innovative Research Center of Traditional Chinese Medicine","ror":"https://ror.org/01gnagj68","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2802974365"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Min Xu","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","Shanghai Integrated Circuit Manufacturing Innovation Center CO. LTD, Shanghai, China","School of Microelectronics, State Key Laboratory of ASIC and System, Fudan University, Shanghai, China","Zhangjiang Fudan International Innovation Center, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"Shanghai Integrated Circuit Manufacturing Innovation Center CO. LTD, Shanghai, China","institution_ids":["https://openalex.org/I2802974365"]},{"raw_affiliation_string":"School of Microelectronics, State Key Laboratory of ASIC and System, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"Zhangjiang Fudan International Innovation Center, Shanghai, China","institution_ids":["https://openalex.org/I2802974365"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111519882","display_name":"David Wei Zhang","orcid":null},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I2802974365","display_name":"Shanghai Innovative Research Center of Traditional Chinese Medicine","ror":"https://ror.org/01gnagj68","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2802974365"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"David Wei Zhang","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","Zhangjiang Fudan International Innovation Center, Shanghai, China","School of Microelectronics, State Key Laboratory of ASIC and System, Fudan University, Shanghai, China","Shanghai Integrated Circuit Manufacturing Innovation Center CO. LTD, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"Zhangjiang Fudan International Innovation Center, Shanghai, China","institution_ids":["https://openalex.org/I2802974365"]},{"raw_affiliation_string":"School of Microelectronics, State Key Laboratory of ASIC and System, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"Shanghai Integrated Circuit Manufacturing Innovation Center CO. LTD, Shanghai, China","institution_ids":["https://openalex.org/I2802974365"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5051855359"],"corresponding_institution_ids":["https://openalex.org/I24943067","https://openalex.org/I2802974365","https://openalex.org/I4210132426","https://openalex.org/I4391767673"],"apc_list":{"value":1850,"currency":"USD","value_usd":1850},"apc_paid":{"value":1850,"currency":"USD","value_usd":1850},"fwci":0.2612,"has_fulltext":true,"cited_by_count":2,"citation_normalized_percentile":{"value":0.52178914,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":96},"biblio":{"volume":"11","issue":null,"first_page":"65491","last_page":"65495"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10361","display_name":"Silicon Carbide Semiconductor Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/pmos-logic","display_name":"PMOS logic","score":0.9190731048583984},{"id":"https://openalex.org/keywords/nanosheet","display_name":"Nanosheet","score":0.881671667098999},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7944115996360779},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.6193404197692871},{"id":"https://openalex.org/keywords/logic-gate","display_name":"Logic gate","score":0.5887792110443115},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.5584831237792969},{"id":"https://openalex.org/keywords/nmos-logic","display_name":"NMOS logic","score":0.5220270752906799},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5191797018051147},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.48016566038131714},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.37155407667160034},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3411080241203308},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.27927112579345703},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.16238310933113098},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.11223706603050232}],"concepts":[{"id":"https://openalex.org/C27050352","wikidata":"https://www.wikidata.org/wiki/Q173605","display_name":"PMOS logic","level":4,"score":0.9190731048583984},{"id":"https://openalex.org/C51967427","wikidata":"https://www.wikidata.org/wiki/Q17148232","display_name":"Nanosheet","level":2,"score":0.881671667098999},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7944115996360779},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6193404197692871},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.5887792110443115},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.5584831237792969},{"id":"https://openalex.org/C197162436","wikidata":"https://www.wikidata.org/wiki/Q83908","display_name":"NMOS logic","level":4,"score":0.5220270752906799},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5191797018051147},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.48016566038131714},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.37155407667160034},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3411080241203308},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.27927112579345703},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.16238310933113098},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.11223706603050232},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/access.2023.3287148","is_oa":true,"landing_page_url":"http://dx.doi.org/10.1109/access.2023.3287148","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/10154003.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:cf404c6a3c16411b81156c4ba6e4a3dd","is_oa":true,"landing_page_url":"https://doaj.org/article/cf404c6a3c16411b81156c4ba6e4a3dd","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 11, Pp 65491-65495 (2023)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1109/access.2023.3287148","is_oa":true,"landing_page_url":"http://dx.doi.org/10.1109/access.2023.3287148","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/10154003.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","score":0.44999998807907104,"display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4380881493.pdf","grobid_xml":"https://content.openalex.org/works/W4380881493.grobid-xml"},"referenced_works_count":16,"referenced_works":["https://openalex.org/W1620751206","https://openalex.org/W2003113417","https://openalex.org/W2023263522","https://openalex.org/W2042458968","https://openalex.org/W2046440873","https://openalex.org/W2065549580","https://openalex.org/W2073043961","https://openalex.org/W2525736734","https://openalex.org/W2541106729","https://openalex.org/W2584199973","https://openalex.org/W2611605980","https://openalex.org/W2744406216","https://openalex.org/W2763263761","https://openalex.org/W3005570787","https://openalex.org/W4281622790","https://openalex.org/W6732726840"],"related_works":["https://openalex.org/W4386261925","https://openalex.org/W2082944690","https://openalex.org/W2263373136","https://openalex.org/W1914349328","https://openalex.org/W2104885411","https://openalex.org/W2023334077","https://openalex.org/W2005494397","https://openalex.org/W2160067645","https://openalex.org/W3212329783","https://openalex.org/W2006330903"],"abstract_inverted_index":{"The":[0,59],"application":[1],"of":[2,75],"SiC-based":[3],"strain-relaxed":[4],"buffers":[5],"(SRB)":[6],"technology":[7,62],"in":[8],"gate-all-around":[9],"(GAA)":[10],"pMOS":[11],"nanosheet":[12],"transistors":[13],"(NS-FETs)":[14],"fabrication":[15],"has":[16,36],"been":[17,37],"systematically":[18],"investigated.":[19],"TCAD":[20],"simulation":[21],"results":[22],"show":[23],"that":[24],"SiC":[25,48,60],"SRB":[26,61],"can":[27,52],"effectively":[28],"enhance":[29],"the":[30,55,71],"p-channel":[31],"stress,":[32],"up":[33],"to":[34],"3.8Gpa":[35],"achieved":[38],"without":[39],"S/D":[40],"parasitic":[41,57],"RC":[42],"degradation.":[43],"Furthermore,":[44],"introducing":[45],"a":[46,64,79],"wide-bandgap":[47],"layer":[49],"underneath":[50],"NS-FET":[51,85],"help":[53],"suppress":[54],"bottom":[56],"transistor.":[58],"presents":[63],"integrated":[65],"and":[66,77,88],"streamlined":[67],"approach":[68],"for":[69,82],"addressing":[70],"major":[72],"performance":[73],"bottlenecks":[74],"NS-FETs":[76],"is":[78],"potential":[80],"solution":[81],"developing":[83],"future":[84],"based":[86],"high-performance":[87],"low-power":[89],"logic":[90],"applications.":[91]},"counts_by_year":[{"year":2024,"cited_by_count":2}],"updated_date":"2026-03-27T14:29:43.386196","created_date":"2025-10-10T00:00:00"}
