{"id":"https://openalex.org/W4313065019","doi":"https://doi.org/10.1109/access.2022.3228552","title":"GAN-Based Framework for Unified Estimation of Process-Induced Random Variation in FinFET","display_name":"GAN-Based Framework for Unified Estimation of Process-Induced Random Variation in FinFET","publication_year":2022,"publication_date":"2022-01-01","ids":{"openalex":"https://openalex.org/W4313065019","doi":"https://doi.org/10.1109/access.2022.3228552"},"language":"en","primary_location":{"id":"doi:10.1109/access.2022.3228552","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2022.3228552","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09982433.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09982433.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5060738807","display_name":"Taeeon Park","orcid":"https://orcid.org/0000-0001-5880-9740"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Taeeon Park","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea"],"raw_orcid":"https://orcid.org/0000-0001-5880-9740","affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015964231","display_name":"Jihwan Kwak","orcid":null},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jihwan Kwak","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024628582","display_name":"Hongjoon Ahn","orcid":null},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Hongjoon Ahn","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101443857","display_name":"Jinwoong Lee","orcid":"https://orcid.org/0000-0001-7062-452X"},"institutions":[{"id":"https://openalex.org/I848706","display_name":"Sungkyunkwan University","ror":"https://ror.org/04q78tk20","country_code":"KR","type":"education","lineage":["https://openalex.org/I848706"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jinwoong Lee","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea","institution_ids":["https://openalex.org/I848706"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050511621","display_name":"Jaehyuk Lim","orcid":"https://orcid.org/0000-0003-1636-8865"},"institutions":[{"id":"https://openalex.org/I848706","display_name":"Sungkyunkwan University","ror":"https://ror.org/04q78tk20","country_code":"KR","type":"education","lineage":["https://openalex.org/I848706"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jaehyuk Lim","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea"],"raw_orcid":"https://orcid.org/0000-0003-1636-8865","affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea","institution_ids":["https://openalex.org/I848706"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034644919","display_name":"Sangho Yu","orcid":null},"institutions":[{"id":"https://openalex.org/I848706","display_name":"Sungkyunkwan University","ror":"https://ror.org/04q78tk20","country_code":"KR","type":"education","lineage":["https://openalex.org/I848706"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Sangho Yu","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea","institution_ids":["https://openalex.org/I848706"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039545794","display_name":"Changhwan Shin","orcid":"https://orcid.org/0000-0001-6057-3773"},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Changhwan Shin","raw_affiliation_strings":["School of Electrical Engineering, Korea University, Seoul, South Korea"],"raw_orcid":"https://orcid.org/0000-0001-6057-3773","affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Korea University, Seoul, South Korea","institution_ids":["https://openalex.org/I197347611"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5080346989","display_name":"Taesup Moon","orcid":"https://orcid.org/0000-0002-9257-6503"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Taesup Moon","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea","Interdisciplinary Program in Artificial Intelligence (IPAI), Seoul National University, Seoul, Korea","Automation and Systems Research Institute (ASRI), Seoul National University, Seoul, Korea"],"raw_orcid":"https://orcid.org/0000-0002-9257-6503","affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Interdisciplinary Program in Artificial Intelligence (IPAI), Seoul National University, Seoul, Korea","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Automation and Systems Research Institute (ASRI), Seoul National University, Seoul, Korea","institution_ids":["https://openalex.org/I139264467"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5060738807"],"corresponding_institution_ids":["https://openalex.org/I139264467"],"apc_list":{"value":1850,"currency":"USD","value_usd":1850},"apc_paid":{"value":1850,"currency":"USD","value_usd":1850},"fwci":0.4618,"has_fulltext":true,"cited_by_count":6,"citation_normalized_percentile":{"value":0.62039973,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":98},"biblio":{"volume":"10","issue":null,"first_page":"130001","last_page":"130023"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9972000122070312,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9972000122070312,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12495","display_name":"Electrostatic Discharge in Electronics","score":0.9955000281333923,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9940999746322632,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.6112895011901855},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.567579448223114},{"id":"https://openalex.org/keywords/process-variation","display_name":"Process variation","score":0.4698046147823334},{"id":"https://openalex.org/keywords/gaussian-process","display_name":"Gaussian process","score":0.4535149931907654},{"id":"https://openalex.org/keywords/generalization","display_name":"Generalization","score":0.4491066634654999},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.4377206861972809},{"id":"https://openalex.org/keywords/variation","display_name":"Variation (astronomy)","score":0.42966118454933167},{"id":"https://openalex.org/keywords/independence","display_name":"Independence (probability theory)","score":0.41701456904411316},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4059973955154419},{"id":"https://openalex.org/keywords/gaussian","display_name":"Gaussian","score":0.40352463722229004},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.37772828340530396},{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.35185590386390686},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.2554755210876465},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.18547198176383972},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1843835711479187},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.13597670197486877},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.11449328064918518}],"concepts":[{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.6112895011901855},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.567579448223114},{"id":"https://openalex.org/C93389723","wikidata":"https://www.wikidata.org/wiki/Q7247313","display_name":"Process variation","level":3,"score":0.4698046147823334},{"id":"https://openalex.org/C61326573","wikidata":"https://www.wikidata.org/wiki/Q1496376","display_name":"Gaussian process","level":3,"score":0.4535149931907654},{"id":"https://openalex.org/C177148314","wikidata":"https://www.wikidata.org/wiki/Q170084","display_name":"Generalization","level":2,"score":0.4491066634654999},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.4377206861972809},{"id":"https://openalex.org/C2778334786","wikidata":"https://www.wikidata.org/wiki/Q1586270","display_name":"Variation (astronomy)","level":2,"score":0.42966118454933167},{"id":"https://openalex.org/C35651441","wikidata":"https://www.wikidata.org/wiki/Q625303","display_name":"Independence (probability theory)","level":2,"score":0.41701456904411316},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4059973955154419},{"id":"https://openalex.org/C163716315","wikidata":"https://www.wikidata.org/wiki/Q901177","display_name":"Gaussian","level":2,"score":0.40352463722229004},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.37772828340530396},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.35185590386390686},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.2554755210876465},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.18547198176383972},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1843835711479187},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.13597670197486877},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.11449328064918518},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0},{"id":"https://openalex.org/C44870925","wikidata":"https://www.wikidata.org/wiki/Q37547","display_name":"Astrophysics","level":1,"score":0.0},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/access.2022.3228552","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2022.3228552","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09982433.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:96e8bc7f94734aaeba94bc655f99e2a9","is_oa":true,"landing_page_url":"https://doaj.org/article/96e8bc7f94734aaeba94bc655f99e2a9","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 10, Pp 130001-130023 (2022)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1109/access.2022.3228552","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2022.3228552","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09982433.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G1132655936","display_name":null,"funder_award_id":"20003551","funder_id":"https://openalex.org/F4320330746","funder_display_name":"Korea Semiconductor Research Consortium"},{"id":"https://openalex.org/G2206812781","display_name":null,"funder_award_id":"2021-0-02068","funder_id":"https://openalex.org/F4320321292","funder_display_name":"Seoul National University"},{"id":"https://openalex.org/G3182571072","display_name":null,"funder_award_id":"20003551","funder_id":"https://openalex.org/F4320321681","funder_display_name":"Ministry of Trade, Industry and Energy"}],"funders":[{"id":"https://openalex.org/F4320321292","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542"},{"id":"https://openalex.org/F4320321681","display_name":"Ministry of Trade, Industry and Energy","ror":"https://ror.org/008nkqk13"},{"id":"https://openalex.org/F4320330746","display_name":"Korea Semiconductor Research Consortium","ror":null}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4313065019.pdf","grobid_xml":"https://content.openalex.org/works/W4313065019.grobid-xml"},"referenced_works_count":94,"referenced_works":["https://openalex.org/W1522301498","https://openalex.org/W1535973324","https://openalex.org/W1585160083","https://openalex.org/W1909809860","https://openalex.org/W1959608418","https://openalex.org/W1965618765","https://openalex.org/W1966450051","https://openalex.org/W1976315218","https://openalex.org/W2007978820","https://openalex.org/W2020394510","https://openalex.org/W2023970490","https://openalex.org/W2024849762","https://openalex.org/W2032585166","https://openalex.org/W2059631927","https://openalex.org/W2066629327","https://openalex.org/W2073199141","https://openalex.org/W2088368145","https://openalex.org/W2096952471","https://openalex.org/W2099057450","https://openalex.org/W2113329640","https://openalex.org/W2114131053","https://openalex.org/W2115073796","https://openalex.org/W2116790095","https://openalex.org/W2117068879","https://openalex.org/W2123085386","https://openalex.org/W2123402141","https://openalex.org/W2125389028","https://openalex.org/W2125865219","https://openalex.org/W2132170989","https://openalex.org/W2143668817","https://openalex.org/W2163605009","https://openalex.org/W2167634079","https://openalex.org/W2194775991","https://openalex.org/W2288338221","https://openalex.org/W2306295156","https://openalex.org/W2486387808","https://openalex.org/W2536017107","https://openalex.org/W2546066744","https://openalex.org/W2625219738","https://openalex.org/W2672007292","https://openalex.org/W2765340009","https://openalex.org/W2779183054","https://openalex.org/W2786015036","https://openalex.org/W2888466606","https://openalex.org/W2894996849","https://openalex.org/W2896457183","https://openalex.org/W2897869348","https://openalex.org/W2951523806","https://openalex.org/W2962793481","https://openalex.org/W2963090522","https://openalex.org/W2963373786","https://openalex.org/W2963647337","https://openalex.org/W2981017910","https://openalex.org/W2982710590","https://openalex.org/W3007646528","https://openalex.org/W3082043105","https://openalex.org/W3082772348","https://openalex.org/W3091030962","https://openalex.org/W3121122991","https://openalex.org/W3130828980","https://openalex.org/W3172099631","https://openalex.org/W4205206005","https://openalex.org/W4214868041","https://openalex.org/W4248721357","https://openalex.org/W4287126800","https://openalex.org/W4288567655","https://openalex.org/W4293403276","https://openalex.org/W4295312788","https://openalex.org/W4301206121","https://openalex.org/W4320013936","https://openalex.org/W4385245566","https://openalex.org/W6610566761","https://openalex.org/W6621378261","https://openalex.org/W6631190155","https://openalex.org/W6640963894","https://openalex.org/W6674887261","https://openalex.org/W6678814708","https://openalex.org/W6678815747","https://openalex.org/W6684191040","https://openalex.org/W6696589332","https://openalex.org/W6718379498","https://openalex.org/W6729001083","https://openalex.org/W6730038108","https://openalex.org/W6739901393","https://openalex.org/W6745907911","https://openalex.org/W6748348399","https://openalex.org/W6755207826","https://openalex.org/W6765779288","https://openalex.org/W6766978945","https://openalex.org/W6767457696","https://openalex.org/W6785870135","https://openalex.org/W6791026367","https://openalex.org/W6803376173","https://openalex.org/W7047410558"],"related_works":["https://openalex.org/W3162204513","https://openalex.org/W3125750421","https://openalex.org/W2371138613","https://openalex.org/W2048963458","https://openalex.org/W43109613","https://openalex.org/W2359952343","https://openalex.org/W2239445980","https://openalex.org/W2080152487","https://openalex.org/W3083152911","https://openalex.org/W3022347918"],"abstract_inverted_index":{"For":[0],"higher":[1],"density":[2],"of":[3,18,59,75,93,153,214,285,291],"transistors":[4,287],"in":[5,22,218],"Integrated":[6],"Circuit":[7],"(IC),":[8],"various":[9,180],"scaling":[10,70],"technologies":[11],"have":[12,64],"been":[13],"introduced.":[14],"In":[15],"the":[16,19,27,40,54,60,72,94,99,121,151,199,212,222,247,253,282,296],"light":[17],"physical":[20,73],"limit":[21],"advancing":[23],"single-gate":[24],"transistor":[25,76],"architecture,":[26],"structural":[28],"transition":[29],"from":[30,82,161],"planar":[31],"device":[32,36,86],"architecture":[33,37],"toward":[34],"3D":[35,85],"(of":[38],"which":[39,210],"representative":[41],"one":[42],"is":[43,111,159,235,239,266],"Fin-shaped":[44],"Field-Effect":[45],"Transistor,":[46],"or":[47,140],"FinFET)":[48],"manifests":[49],"itself.":[50],"However,":[51],"during":[52],"fabrication,":[53],"unexpected":[55],"process-induced":[56,154],"random":[57,95,155,254,283],"variations":[58,96,284],"transistor\u2019s":[61],"electrical":[62],"characteristics":[63],"become":[65],"more":[66,169],"extreme":[67],"with":[68,80,288],"aggressively":[69],"down":[71],"dimension":[74],"as":[77,79],"well":[78],"evolving":[81],"2D":[83],"to":[84,119,179,184,241,246,268,272,279,295],"structure.":[87],"Consequently,":[88],"accurate":[89],"and":[90,109,131,227,238,258,275],"rapid":[91],"estimation":[92,152],"conditioned":[97],"on":[98,129,188,225],"variation":[100,181],"sources":[101],"(":[102,134],"<italic":[103,135,174],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[104,136,175],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">e.g</i>":[105,137],".,":[106,138,177],"LER,":[107],"RDF,":[108],"WFV)":[110],"required.":[112],"Recently,":[113],"machine":[114],"learning-based":[115],"approaches":[116],"were":[117,126],"utilized":[118],"estimate":[120,281],"LER-induced":[122],"variations,":[123,255],"but":[124],"they":[125],"highly":[127],"dependent":[128],"modeling":[130],"evaluation":[132,208,223],"assumptions":[133],"Gaussian":[139],"independence).":[141],"To":[142],"that":[143,231,251],"end,":[144],"firstly,":[145],"we":[146,191,205],"introduce":[147,206],"GAN-based":[148,233,264],"framework":[149,234,265],"for":[150],"variations.":[156],"Since":[157],"GAN":[158,202],"free":[160],"distributional":[162],"assumptions,":[163],"this":[164],"enables":[165,171],"precise":[166],"prediction":[167],"and,":[168],"importantly,":[170],"unified":[172],"estimation,":[173],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">i.e</i>":[176],"adaptable":[178],"source.":[182],"Secondly,":[183],"achieve":[185],"better":[186],"generalization":[187],"unseen":[189],"conditions,":[190],"additionally":[192],"suggest":[193],"a":[194],"two-step":[195],"learning":[196],"strategy":[197],"utilizing":[198],"latest":[200],"Conditional":[201],"models.":[203],"Thirdly,":[204],"sample-based":[207],"procedure":[209],"measures":[211],"difference":[213],"two":[215],"sample":[216],"sets":[217],"probabilistic":[219],"perspective.":[220],"Finally,":[221],"results":[224],"LER":[226],"RDF/WFV":[228],"datasets":[229],"show":[230],"our":[232,263],"computationally":[236],"efficient":[237],"able":[240,278],"generate":[242],"synthetic":[243],"samples":[244,250],"similar":[245],"TCAD":[248,298],"simulated":[249],"contain":[252],"both":[256],"qualitatively":[257],"quantitatively.":[259],"From":[260],"such":[261],"results,":[262],"expected":[267],"be":[269,277],"successfully":[270],"applied":[271],"real":[273],"data,":[274],"consequently":[276],"reliably":[280],"fabricated":[286],"multiple":[289],"orders":[290],"magnitude":[292],"speed-up":[293],"compared":[294],"conventional":[297],"simulation-based":[299],"estimation.":[300]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":3}],"updated_date":"2026-05-06T08:25:59.206177","created_date":"2025-10-10T00:00:00"}