{"id":"https://openalex.org/W4285218140","doi":"https://doi.org/10.1109/access.2022.3188661","title":"A Low-Power Digital Capacitive MEMS Microphone Based on a Triple-Sampling Delta-Sigma ADC With Embedded Gain","display_name":"A Low-Power Digital Capacitive MEMS Microphone Based on a Triple-Sampling Delta-Sigma ADC With Embedded Gain","publication_year":2022,"publication_date":"2022-01-01","ids":{"openalex":"https://openalex.org/W4285218140","doi":"https://doi.org/10.1109/access.2022.3188661"},"language":"en","primary_location":{"id":"doi:10.1109/access.2022.3188661","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2022.3188661","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09815231.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09815231.pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5073052361","display_name":"Byunggyu Lee","orcid":"https://orcid.org/0000-0002-0481-4269"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Byunggyu Lee","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea"],"raw_orcid":"https://orcid.org/0000-0002-0481-4269","affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045541234","display_name":"Jin\u2010Ho Yang","orcid":"https://orcid.org/0000-0002-9472-4442"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jinho Yang","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea"],"raw_orcid":"https://orcid.org/0000-0002-9472-4442","affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073800818","display_name":"Jun Soo Cho","orcid":"https://orcid.org/0000-0003-4916-4658"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jun Soo Cho","raw_affiliation_strings":["GwanakAnalog Company Ltd., Seoul, South Korea"],"raw_orcid":"https://orcid.org/0000-0003-4916-4658","affiliations":[{"raw_affiliation_string":"GwanakAnalog Company Ltd., Seoul, South Korea","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5080332152","display_name":"Suhwan Kim","orcid":"https://orcid.org/0000-0001-9107-2963"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Suhwan Kim","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea"],"raw_orcid":"https://orcid.org/0000-0001-9107-2963","affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea","institution_ids":["https://openalex.org/I139264467"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":1850,"currency":"USD","value_usd":1850},"apc_paid":{"value":1850,"currency":"USD","value_usd":1850},"fwci":0.8728,"has_fulltext":true,"cited_by_count":11,"citation_normalized_percentile":{"value":0.68647717,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":96,"max":98},"biblio":{"volume":"10","issue":null,"first_page":"75323","last_page":"75330"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sampling","display_name":"Sampling (signal processing)","score":0.6378136873245239},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.6319172978401184},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.5602317452430725},{"id":"https://openalex.org/keywords/microphone","display_name":"Microphone","score":0.5532886981964111},{"id":"https://openalex.org/keywords/delta-sigma-modulation","display_name":"Delta-sigma modulation","score":0.5322316288948059},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.5172182321548462},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.492738276720047},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.46719881892204285},{"id":"https://openalex.org/keywords/correlated-double-sampling","display_name":"Correlated double sampling","score":0.4569871425628662},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.44954296946525574},{"id":"https://openalex.org/keywords/switched-capacitor","display_name":"Switched capacitor","score":0.4416850209236145},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.42374375462532043},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.4218662679195404},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.4168272614479065},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3971985876560211},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3834916055202484},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2996233105659485},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.18459001183509827},{"id":"https://openalex.org/keywords/detector","display_name":"Detector","score":0.18153610825538635},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.09680542349815369}],"concepts":[{"id":"https://openalex.org/C140779682","wikidata":"https://www.wikidata.org/wiki/Q210868","display_name":"Sampling (signal processing)","level":3,"score":0.6378136873245239},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.6319172978401184},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.5602317452430725},{"id":"https://openalex.org/C2778263558","wikidata":"https://www.wikidata.org/wiki/Q46384","display_name":"Microphone","level":3,"score":0.5532886981964111},{"id":"https://openalex.org/C68754193","wikidata":"https://www.wikidata.org/wiki/Q1184820","display_name":"Delta-sigma modulation","level":3,"score":0.5322316288948059},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.5172182321548462},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.492738276720047},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.46719881892204285},{"id":"https://openalex.org/C118277053","wikidata":"https://www.wikidata.org/wiki/Q5172837","display_name":"Correlated double sampling","level":4,"score":0.4569871425628662},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.44954296946525574},{"id":"https://openalex.org/C103357873","wikidata":"https://www.wikidata.org/wiki/Q572656","display_name":"Switched capacitor","level":4,"score":0.4416850209236145},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.42374375462532043},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.4218662679195404},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.4168272614479065},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3971985876560211},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3834916055202484},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2996233105659485},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.18459001183509827},{"id":"https://openalex.org/C94915269","wikidata":"https://www.wikidata.org/wiki/Q1834857","display_name":"Detector","level":2,"score":0.18153610825538635},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.09680542349815369},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C157138929","wikidata":"https://www.wikidata.org/wiki/Q570","display_name":"Loudspeaker","level":2,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/access.2022.3188661","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2022.3188661","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09815231.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:4127e8a1a55b41a0bd6dff098f9c44ab","is_oa":false,"landing_page_url":"https://doaj.org/article/4127e8a1a55b41a0bd6dff098f9c44ab","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 10, Pp 75323-75330 (2022)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1109/access.2022.3188661","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2022.3188661","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09815231.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.8899999856948853}],"awards":[{"id":"https://openalex.org/G3286785630","display_name":null,"funder_award_id":"2020-0-01300","funder_id":"https://openalex.org/F4320322030","funder_display_name":"Ministry of Science, ICT and Future Planning"},{"id":"https://openalex.org/G3309186092","display_name":null,"funder_award_id":"2022-0-01013","funder_id":"https://openalex.org/F4320322030","funder_display_name":"Ministry of Science, ICT and Future Planning"},{"id":"https://openalex.org/G5221915550","display_name":null,"funder_award_id":"H2A1078119","funder_id":"https://openalex.org/F4320322030","funder_display_name":"Ministry of Science, ICT and Future Planning"},{"id":"https://openalex.org/G753985915","display_name":null,"funder_award_id":"2020M3","funder_id":"https://openalex.org/F4320322030","funder_display_name":"Ministry of Science, ICT and Future Planning"}],"funders":[{"id":"https://openalex.org/F4320322030","display_name":"Ministry of Science, ICT and Future Planning","ror":"https://ror.org/032e49973"},{"id":"https://openalex.org/F4320322120","display_name":"National Research Foundation of Korea","ror":"https://ror.org/013aysd81"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4285218140.pdf","grobid_xml":"https://content.openalex.org/works/W4285218140.grobid-xml"},"referenced_works_count":14,"referenced_works":["https://openalex.org/W127983321","https://openalex.org/W1984534938","https://openalex.org/W2020687294","https://openalex.org/W2052102926","https://openalex.org/W2110010544","https://openalex.org/W2111323554","https://openalex.org/W2147823186","https://openalex.org/W2167017502","https://openalex.org/W2592333491","https://openalex.org/W2742879744","https://openalex.org/W2803198736","https://openalex.org/W3043704821","https://openalex.org/W4299973078","https://openalex.org/W6605214171"],"related_works":["https://openalex.org/W2102712905","https://openalex.org/W2044524120","https://openalex.org/W2493585380","https://openalex.org/W2999366224","https://openalex.org/W1977097430","https://openalex.org/W2620866998","https://openalex.org/W3176485570","https://openalex.org/W2153484902","https://openalex.org/W2547307700","https://openalex.org/W2028683025"],"abstract_inverted_index":{"A":[0,72],"triple-sampling":[1,50,109],"&#x0394;&#x03A3;":[2],"ADC":[3],"can":[4,25],"replace":[5],"the":[6,13,39,43],"programmable":[7],"gain":[8],"amplifier":[9],"commonly":[10],"used":[11],"in":[12,53,80],"readout":[14,55,77],"circuit":[15,56],"for":[16],"a":[17,31,46,54,68,81],"digital":[18],"capacitive":[19],"MEMS":[20,73],"microphone.":[21],"The":[22],"input":[23,36],"voltage":[24],"then":[26],"be":[27],"multiplied":[28],"by":[29],"subtracting":[30],"further":[32],"half-period":[33],"delayed":[34],"differential":[35],"and":[37,59],"using":[38],"feedback":[40],"capacitor":[41],"of":[42,89,96],"DAC":[44],"as":[45],"sampling":[47],"capacitor.":[48],"This":[49],"technique":[51],"results":[52],"with":[57,67,102],"sensitivity":[58],"noise":[60],"performance":[61],"comparable":[62],"to":[63,107,112],"recent":[64],"designs,":[65],"but":[66],"reduced":[69],"power":[70],"requirement.":[71],"microphone":[74],"incorporating":[75],"this":[76],"circuit,":[78],"fabricated":[79],"0.18":[82],"&#x03BC;m":[83],"CMOS":[84],"process,":[85],"had":[86],"an":[87,93],"area":[88],"0.98":[90],"mm<sup>2</sup>,":[91],"achieved":[92],"A-weighted":[94],"SNR":[95],"62.1":[97],"dBA":[98],"at":[99],"94":[100],"dBSPL":[101],"520":[103],"&#x03BC;A":[104],"current":[105],"consumption,":[106],"which":[108],"was":[110],"shown":[111],"contribute":[113],"4.5":[114],"dBA.":[115]},"counts_by_year":[{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":5}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}