{"id":"https://openalex.org/W3190173292","doi":"https://doi.org/10.1109/access.2021.3103235","title":"The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing","display_name":"The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing","publication_year":2021,"publication_date":"2021-01-01","ids":{"openalex":"https://openalex.org/W3190173292","doi":"https://doi.org/10.1109/access.2021.3103235","mag":"3190173292"},"language":"en","primary_location":{"id":"doi:10.1109/access.2021.3103235","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2021.3103235","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09508983.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09508983.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5006061758","display_name":"Tze Chiang Tin","orcid":"https://orcid.org/0000-0002-6055-5628"},"institutions":[{"id":"https://openalex.org/I173029219","display_name":"Multimedia University","ror":"https://ror.org/04zrbnc33","country_code":"MY","type":"education","lineage":["https://openalex.org/I173029219"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Tze Chiang Tin","raw_affiliation_strings":["Faculty of Computing and Informatics, Multimedia University, Cyberjaya, Malaysia"],"raw_orcid":"https://orcid.org/0000-0002-6055-5628","affiliations":[{"raw_affiliation_string":"Faculty of Computing and Informatics, Multimedia University, Cyberjaya, Malaysia","institution_ids":["https://openalex.org/I173029219"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Saw Chin Tan","orcid":null},"institutions":[{"id":"https://openalex.org/I173029219","display_name":"Multimedia University","ror":"https://ror.org/04zrbnc33","country_code":"MY","type":"education","lineage":["https://openalex.org/I173029219"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Saw Chin Tan","raw_affiliation_strings":["Faculty of Computing and Informatics, Multimedia University, Cyberjaya, Malaysia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Faculty of Computing and Informatics, Multimedia University, Cyberjaya, Malaysia","institution_ids":["https://openalex.org/I173029219"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056561693","display_name":"Hing Yong","orcid":"https://orcid.org/0000-0002-1235-2850"},"institutions":[{"id":"https://openalex.org/I4210106414","display_name":"Forest Department Sarawak","ror":"https://ror.org/01n67jr26","country_code":"MY","type":"government","lineage":["https://openalex.org/I4210106414"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Hing Yong","raw_affiliation_strings":["X-FAB Sarawak Sdn. Bhd., Kuching, Sarawak, Malaysia"],"raw_orcid":"https://orcid.org/0000-0002-1235-2850","affiliations":[{"raw_affiliation_string":"X-FAB Sarawak Sdn. Bhd., Kuching, Sarawak, Malaysia","institution_ids":["https://openalex.org/I4210106414"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057352390","display_name":"Jimmy Ook Hyun Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I4210106414","display_name":"Forest Department Sarawak","ror":"https://ror.org/01n67jr26","country_code":"MY","type":"government","lineage":["https://openalex.org/I4210106414"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Jimmy Ook Hyun Kim","raw_affiliation_strings":["X-FAB Sarawak Sdn. Bhd., Kuching, Sarawak, Malaysia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"X-FAB Sarawak Sdn. Bhd., Kuching, Sarawak, Malaysia","institution_ids":["https://openalex.org/I4210106414"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011730286","display_name":"Eric Ken Yong Teo","orcid":null},"institutions":[{"id":"https://openalex.org/I4210106414","display_name":"Forest Department Sarawak","ror":"https://ror.org/01n67jr26","country_code":"MY","type":"government","lineage":["https://openalex.org/I4210106414"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Eric Ken Yong Teo","raw_affiliation_strings":["X-FAB Sarawak Sdn. Bhd., Kuching, Sarawak, Malaysia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"X-FAB Sarawak Sdn. Bhd., Kuching, Sarawak, Malaysia","institution_ids":["https://openalex.org/I4210106414"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064944890","display_name":"Joanne Ching Yee Wong","orcid":null},"institutions":[{"id":"https://openalex.org/I4210106414","display_name":"Forest Department Sarawak","ror":"https://ror.org/01n67jr26","country_code":"MY","type":"government","lineage":["https://openalex.org/I4210106414"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Joanne Ching Yee Wong","raw_affiliation_strings":["X-FAB Sarawak Sdn. Bhd., Kuching, Sarawak, Malaysia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"X-FAB Sarawak Sdn. Bhd., Kuching, Sarawak, Malaysia","institution_ids":["https://openalex.org/I4210106414"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102790967","display_name":"Ching Kwang Lee","orcid":null},"institutions":[{"id":"https://openalex.org/I173029219","display_name":"Multimedia University","ror":"https://ror.org/04zrbnc33","country_code":"MY","type":"education","lineage":["https://openalex.org/I173029219"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Ching Kwang Lee","raw_affiliation_strings":["Faculty of Engineering, Multimedia University, Cyberjaya, Malaysia"],"raw_orcid":"https://orcid.org/0000-0001-6696-8741","affiliations":[{"raw_affiliation_string":"Faculty of Engineering, Multimedia University, Cyberjaya, Malaysia","institution_ids":["https://openalex.org/I173029219"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002374912","display_name":"Peter Than","orcid":null},"institutions":[{"id":"https://openalex.org/I4210106414","display_name":"Forest Department Sarawak","ror":"https://ror.org/01n67jr26","country_code":"MY","type":"government","lineage":["https://openalex.org/I4210106414"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Peter Than","raw_affiliation_strings":["X-FAB Sarawak Sdn. Bhd., Kuching, Sarawak, Malaysia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"X-FAB Sarawak Sdn. Bhd., Kuching, Sarawak, Malaysia","institution_ids":["https://openalex.org/I4210106414"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023859021","display_name":"Angela Pei San Tan","orcid":null},"institutions":[{"id":"https://openalex.org/I4210106414","display_name":"Forest Department Sarawak","ror":"https://ror.org/01n67jr26","country_code":"MY","type":"government","lineage":["https://openalex.org/I4210106414"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Angela Pei San Tan","raw_affiliation_strings":["X-FAB Sarawak Sdn. Bhd., Kuching, Sarawak, Malaysia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"X-FAB Sarawak Sdn. Bhd., Kuching, Sarawak, Malaysia","institution_ids":["https://openalex.org/I4210106414"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5022610728","display_name":"Siew Chee Phang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210106414","display_name":"Forest Department Sarawak","ror":"https://ror.org/01n67jr26","country_code":"MY","type":"government","lineage":["https://openalex.org/I4210106414"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Siew Chee Phang","raw_affiliation_strings":["X-FAB Sarawak Sdn. Bhd., Kuching, Sarawak, Malaysia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"X-FAB Sarawak Sdn. Bhd., Kuching, Sarawak, Malaysia","institution_ids":["https://openalex.org/I4210106414"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":10,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":1850,"currency":"USD","value_usd":1850},"apc_paid":{"value":1850,"currency":"USD","value_usd":1850},"fwci":0.4535,"has_fulltext":true,"cited_by_count":4,"citation_normalized_percentile":{"value":0.70197694,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":"9","issue":null,"first_page":"114255","last_page":"114266"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.996999979019165,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.9836000204086304,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.6160063743591309},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5794283151626587},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.5653132796287537},{"id":"https://openalex.org/keywords/scheme","display_name":"Scheme (mathematics)","score":0.5279026627540588},{"id":"https://openalex.org/keywords/sampling","display_name":"Sampling (signal processing)","score":0.4812209904193878},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.20247846841812134},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.13241687417030334},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.11517038941383362},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.10755223035812378},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.0750034749507904}],"concepts":[{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.6160063743591309},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5794283151626587},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.5653132796287537},{"id":"https://openalex.org/C77618280","wikidata":"https://www.wikidata.org/wiki/Q1155772","display_name":"Scheme (mathematics)","level":2,"score":0.5279026627540588},{"id":"https://openalex.org/C140779682","wikidata":"https://www.wikidata.org/wiki/Q210868","display_name":"Sampling (signal processing)","level":3,"score":0.4812209904193878},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.20247846841812134},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.13241687417030334},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.11517038941383362},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.10755223035812378},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0750034749507904},{"id":"https://openalex.org/C94915269","wikidata":"https://www.wikidata.org/wiki/Q1834857","display_name":"Detector","level":2,"score":0.0},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/access.2021.3103235","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2021.3103235","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09508983.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:shdl.mmu.edu.my:9611","is_oa":false,"landing_page_url":null,"pdf_url":null,"source":{"id":"https://openalex.org/S4377196753","display_name":"Siti Hasmah Digital Library-MMU Institutiona Repository (Multimedia University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I173029219","host_organization_name":"Multimedia University","host_organization_lineage":["https://openalex.org/I173029219"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":null,"raw_type":"NonPeerReviewed"},{"id":"pmh:oai:doaj.org/article:1af0ef8f16bd4ef98eb015984544eed7","is_oa":true,"landing_page_url":"https://doaj.org/article/1af0ef8f16bd4ef98eb015984544eed7","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 9, Pp 114255-114266 (2021)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1109/access.2021.3103235","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2021.3103235","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09508983.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure","score":0.5600000023841858}],"awards":[],"funders":[{"id":"https://openalex.org/F4320313202","display_name":"Multimedia University","ror":"https://ror.org/04zrbnc33"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3190173292.pdf","grobid_xml":"https://content.openalex.org/works/W3190173292.grobid-xml"},"referenced_works_count":9,"referenced_works":["https://openalex.org/W1966218581","https://openalex.org/W1994432757","https://openalex.org/W2016210396","https://openalex.org/W2068574400","https://openalex.org/W2132870739","https://openalex.org/W2139833307","https://openalex.org/W2538623560","https://openalex.org/W2895083706","https://openalex.org/W3158100850"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W2151505334","https://openalex.org/W2507812949","https://openalex.org/W2115540908","https://openalex.org/W4256167503","https://openalex.org/W2600422794","https://openalex.org/W2060880752","https://openalex.org/W1876981296","https://openalex.org/W1980441280"],"abstract_inverted_index":{"Virtual":[0],"metrology":[1,14,23,42,201],"(VM)":[2],"is":[3,96,230],"an":[4],"enabling":[5],"technology":[6],"capable":[7,231],"of":[8,16,19,33,39,120,162,174,185,208,239,251,267,281,291],"performing":[9],"virtual":[10],"inspection":[11],"on":[12,29,46],"the":[13,22,30,37,40,58,62,100,143,154,167,171,175,178,182,186,199,206,215,242,254,261,265,279,282,289],"quality":[15,173],"wafers.":[17],"Instead":[18],"physically":[20],"acquiring":[21],"measurements,":[24],"VM":[25,48,78,89,110,135],"applies":[26],"conjecture":[27,63,164],"models":[28,79],"process":[31,59],"data":[32,56,60,68,105],"wafers":[34,187],"to":[35,72,98,198,232,263,277],"estimate":[36],"measurements":[38],"targeted":[41],"variables.":[43],"Prior":[44],"works":[45],"overlay":[47,134,172,183,191],"system":[49,74,90,283],"utilized":[50],"fault":[51],"detection":[52],"and":[53,108,177,218,245,275],"classification":[54,243],"(FDC)":[55],"as":[57],"for":[61,133,241,253],"models.":[64],"Hence,":[65],"when":[66],"FDC":[67,73,104],"are":[69,196,222],"unavailable":[70],"owing":[71],"enhancement":[75,269],"works,":[76,270],"FDC-based":[77,109],"would":[80],"be":[81],"rendered":[82],"inefficacious.":[83],"During":[84],"such":[85],"events,":[86],"a":[87,92,116,121,127,146,209,234],"competent":[88],"using":[91,214],"different":[93],"modeling":[94,131],"approach":[95,132],"required":[97],"sustain":[99],"production":[101,112,118],"line":[102],"until":[103],"resumes":[106],"availability":[107],"reaches":[111],"state.":[113],"Motivated":[114],"by":[115],"real-world":[117],"environment":[119],"200mm":[122],"semiconductor":[123],"manufacturing":[124],"plant":[125],"(fab),":[126],"novel":[128],"wafer":[129],"lot-level":[130],"was":[136,150],"proposed":[137,144],"in":[138,153],"our":[139],"prior":[140],"work.":[141,156],"Using":[142],"modeling,":[145],"smart":[147,158,210],"sampling":[148,159,211],"scheme":[149,160,217],"also":[151],"designed":[152,216],"same":[155],"The":[157,193,224,257],"consists":[161],"two":[163],"tasks,":[165],"with":[166,189],"first":[168],"task":[169,180,244],"classifies":[170],"wafers,":[176],"second":[179],"estimates":[181],"errors":[184],"classified":[188],"normal":[190],"quality.":[192],"abnormal":[194],"ones":[195],"diverted":[197],"physical":[200],"station.":[202],"In":[203],"this":[204],"paper,":[205],"implementation":[207],"system,":[212],"C2O,":[213],"its":[219,286],"experimental":[220,225],"results":[221,226,259],"presented.":[223],"showed":[227],"that":[228,285],"C2O":[229],"achieve":[233],"true":[235],"positive":[236],"rate":[237],"(TPR)":[238],"71.34%":[240],"mean":[246],"absolute":[247],"scaled":[248],"error":[249],"(MASE)":[250],"9.59":[252],"regression":[255],"task.":[256],"obtained":[258],"set":[260],"baseline":[262],"measure":[264],"efficacy":[266],"future":[268],"which":[271],"have":[272],"been":[273],"enlisted":[274],"underway":[276],"augment":[278],"performance":[280],"so":[284],"competency":[287],"meets":[288],"requirements":[290],"real":[292],"fab.":[293]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}