{"id":"https://openalex.org/W3153378117","doi":"https://doi.org/10.1109/access.2021.3073618","title":"Hierarchical Aggregation/Disaggregation for Adaptive Abstraction-Level Conversion in Digital Twin-Based Smart Semiconductor Manufacturing","display_name":"Hierarchical Aggregation/Disaggregation for Adaptive Abstraction-Level Conversion in Digital Twin-Based Smart Semiconductor Manufacturing","publication_year":2021,"publication_date":"2021-01-01","ids":{"openalex":"https://openalex.org/W3153378117","doi":"https://doi.org/10.1109/access.2021.3073618","mag":"3153378117"},"language":"en","primary_location":{"id":"doi:10.1109/access.2021.3073618","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2021.3073618","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/9312710/09405655.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://ieeexplore.ieee.org/ielx7/6287639/9312710/09405655.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5081703172","display_name":"Moon Gi Seok","orcid":"https://orcid.org/0000-0002-8159-9910"},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Moon Gi Seok","raw_affiliation_strings":["School of Computer Science and Engineering, Nanyang Technological University, Singapore","ORCiD"],"raw_orcid":"https://orcid.org/0000-0002-8159-9910","affiliations":[{"raw_affiliation_string":"School of Computer Science and Engineering, Nanyang Technological University, Singapore","institution_ids":["https://openalex.org/I172675005"]},{"raw_affiliation_string":"ORCiD","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036580072","display_name":"Wentong Cai","orcid":"https://orcid.org/0000-0002-0183-3835"},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Wentong Cai","raw_affiliation_strings":["School of Computer Science and Engineering, Nanyang Technological University, Singapore","ORCiD"],"raw_orcid":"https://orcid.org/0000-0002-0183-3835","affiliations":[{"raw_affiliation_string":"School of Computer Science and Engineering, Nanyang Technological University, Singapore","institution_ids":["https://openalex.org/I172675005"]},{"raw_affiliation_string":"ORCiD","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5030304824","display_name":"Daejin Park","orcid":"https://orcid.org/0000-0002-5560-873X"},"institutions":[{"id":"https://openalex.org/I31419693","display_name":"Kyungpook National University","ror":"https://ror.org/040c17130","country_code":"KR","type":"education","lineage":["https://openalex.org/I31419693"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Daejin Park","raw_affiliation_strings":["School of Electronics Engineering, Kyungpook National University, Daegu, Republic of Korea","ORCiD"],"raw_orcid":"https://orcid.org/0000-0002-5560-873X","affiliations":[{"raw_affiliation_string":"School of Electronics Engineering, Kyungpook National University, Daegu, Republic of Korea","institution_ids":["https://openalex.org/I31419693"]},{"raw_affiliation_string":"ORCiD","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":1850,"currency":"USD","value_usd":1850},"apc_paid":{"value":1850,"currency":"USD","value_usd":1850},"fwci":2.0405,"has_fulltext":true,"cited_by_count":15,"citation_normalized_percentile":{"value":0.88093689,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"9","issue":null,"first_page":"71145","last_page":"71158"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10763","display_name":"Digital Transformation in Industry","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10763","display_name":"Digital Transformation in Industry","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.994700014591217,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9922999739646912,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/abstraction","display_name":"Abstraction","score":0.6895561814308167},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.632975697517395},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.442728728055954},{"id":"https://openalex.org/keywords/computer-architecture","display_name":"Computer architecture","score":0.34789013862609863},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.15020522475242615},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.13722515106201172}],"concepts":[{"id":"https://openalex.org/C124304363","wikidata":"https://www.wikidata.org/wiki/Q673661","display_name":"Abstraction","level":2,"score":0.6895561814308167},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.632975697517395},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.442728728055954},{"id":"https://openalex.org/C118524514","wikidata":"https://www.wikidata.org/wiki/Q173212","display_name":"Computer architecture","level":1,"score":0.34789013862609863},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.15020522475242615},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.13722515106201172},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.0},{"id":"https://openalex.org/C111472728","wikidata":"https://www.wikidata.org/wiki/Q9471","display_name":"Epistemology","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/access.2021.3073618","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2021.3073618","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/9312710/09405655.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:25d616f99d6b4f82bd018c5154c5e055","is_oa":true,"landing_page_url":"https://doaj.org/article/25d616f99d6b4f82bd018c5154c5e055","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 9, Pp 71145-71158 (2021)","raw_type":"article"},{"id":"pmh:oai:dr.ntu.edu.sg:10356/154073","is_oa":true,"landing_page_url":"https://hdl.handle.net/10356/154073","pdf_url":null,"source":{"id":"https://openalex.org/S4306402609","display_name":"DR-NTU (Nanyang Technological University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I172675005","host_organization_name":"Nanyang Technological University","host_organization_lineage":["https://openalex.org/I172675005"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Journal Article"}],"best_oa_location":{"id":"doi:10.1109/access.2021.3073618","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2021.3073618","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/9312710/09405655.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","score":0.5,"id":"https://metadata.un.org/sdg/9"}],"awards":[{"id":"https://openalex.org/G1395206239","display_name":null,"funder_award_id":"A19C1a0018","funder_id":"https://openalex.org/F4320320696","funder_display_name":"Agency for Science, Technology and Research"},{"id":"https://openalex.org/G1879979130","display_name":null,"funder_award_id":"NRF2018R1A6A1A03025109","funder_id":"https://openalex.org/F4320322030","funder_display_name":"Ministry of Science, ICT and Future Planning"},{"id":"https://openalex.org/G6891773046","display_name":null,"funder_award_id":"NRF2019R1A2C2005099","funder_id":"https://openalex.org/F4320322030","funder_display_name":"Ministry of Science, ICT and Future Planning"},{"id":"https://openalex.org/G8219488318","display_name":null,"funder_award_id":"RIE2020","funder_id":"https://openalex.org/F4320320671","funder_display_name":"National Research Foundation"}],"funders":[{"id":"https://openalex.org/F4320320671","display_name":"National Research Foundation","ror":"https://ror.org/05s0g1g46"},{"id":"https://openalex.org/F4320320696","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09"},{"id":"https://openalex.org/F4320322030","display_name":"Ministry of Science, ICT and Future Planning","ror":"https://ror.org/032e49973"},{"id":"https://openalex.org/F4320322120","display_name":"National Research Foundation of Korea","ror":"https://ror.org/013aysd81"},{"id":"https://openalex.org/F4320328359","display_name":"Ministry of Science and ICT, South Korea","ror":"https://ror.org/01wpjm123"},{"id":"https://openalex.org/F4320334747","display_name":"Singapore Institute of Manufacturing Technology","ror":"https://ror.org/00f44np30"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3153378117.pdf","grobid_xml":"https://content.openalex.org/works/W3153378117.grobid-xml"},"referenced_works_count":43,"referenced_works":["https://openalex.org/W1623768750","https://openalex.org/W1892940637","https://openalex.org/W2003179771","https://openalex.org/W2027697249","https://openalex.org/W2029548118","https://openalex.org/W2036274411","https://openalex.org/W2042168130","https://openalex.org/W2047193217","https://openalex.org/W2059937103","https://openalex.org/W2091518887","https://openalex.org/W2095996288","https://openalex.org/W2096452703","https://openalex.org/W2100542249","https://openalex.org/W2108838780","https://openalex.org/W2120619887","https://openalex.org/W2126396815","https://openalex.org/W2133041887","https://openalex.org/W2146066852","https://openalex.org/W2162826299","https://openalex.org/W2170726572","https://openalex.org/W2248184567","https://openalex.org/W2616804298","https://openalex.org/W2758340329","https://openalex.org/W2783013665","https://openalex.org/W2783918566","https://openalex.org/W2799143448","https://openalex.org/W2966069238","https://openalex.org/W2971578677","https://openalex.org/W2990287530","https://openalex.org/W3006685767","https://openalex.org/W3006988708","https://openalex.org/W3033874253","https://openalex.org/W3084270716","https://openalex.org/W3144094128","https://openalex.org/W3147403225","https://openalex.org/W3151072322","https://openalex.org/W4229834812","https://openalex.org/W4230545252","https://openalex.org/W4233686761","https://openalex.org/W4237509315","https://openalex.org/W6676324542","https://openalex.org/W6678641344","https://openalex.org/W6691316931"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W2390279801","https://openalex.org/W4391913857","https://openalex.org/W2358668433","https://openalex.org/W4396701345","https://openalex.org/W2045155990","https://openalex.org/W2376932109","https://openalex.org/W4313163053"],"abstract_inverted_index":{"In":[0],"smart":[1],"manufacturing,":[2],"engineers":[3],"typically":[4],"analyze":[5],"unexpected":[6,242],"real-time":[7],"problems":[8],"using":[9,183],"digitally":[10],"cloned":[11],"discrete-event":[12],"(DE)":[13],"models":[14,64],"for":[15,39,115,169,230,255],"wafer":[16],"fabrication.":[17],"To":[18,160],"achieve":[19],"a":[20,49,77,91,228,239,253],"faster":[21],"response":[22],"to":[23,28,117,179,193,198,217,262,285,291],"problems,":[24],"it":[25,111,279],"is":[26,260],"essential":[27],"increase":[29],"the":[30,41,87,97,102,113,129,134,144,153,162,170,181,195,200,212,218,222,235,246,264],"speed":[31],"of":[32,136,146,164,211,221,249,257,283],"DE":[33,78,155,201],"simulations":[34],"because":[35],"making":[36],"optimal":[37],"decisions":[38],"addressing":[40],"issues":[42],"requires":[43],"repeated":[44],"simulations.":[45],"This":[46,268],"paper":[47],"presents":[48],"hierarchical":[50],"aggregation/disaggregation":[51],"(A/D)":[52],"method":[53,178,229,254,270],"that":[54,233],"substitutes":[55],"complex":[56],"event-driven":[57],"operations":[58],"with":[59,289],"two-layered":[60],"abstracted":[61],"models\u2014single-group":[62],"mean-delay":[63,84],"(SMDMs)":[65],"and":[66,142,158,278],"multi-group":[67],"MDMs":[68],"(MMDMs)\u2014to":[69],"gain":[70],"simulation":[71],"speedup.":[72],"The":[73,94,126],"SMDM":[74],"dynamically":[75,171],"abstracts":[76],"machine":[79],"group\u2019s":[80,148,188,214,241],"behaviors":[81],"into":[82,90],"observed":[83],"constants":[85],"when":[86],"group":[88],"converges":[89],"steady":[92],"state.":[93],"MMDM":[95,137],"fast-forwards":[96],"input":[98,149],"lots":[99,114],"by":[100,151],"bypassing":[101],"chained":[103],"processing":[104],"steps":[105],"in":[106,207,274,294],"multiple":[107],"steady-state":[108,187],"groups":[109,120],"until":[110],"schedules":[112],"delivery":[116],"subsequent":[118],"unsteady":[119],"after":[121],"corresponding":[122],"multi-step":[123,167,247],"mean":[124],"delays.":[125],"key":[127],"component,":[128],"abstraction-level":[130],"converter":[131],"(ALC),":[132],"has":[133,271,280],"roles":[135],"allocation,":[138],"deallocation,":[139],"extension,":[140],"splitting,":[141],"controls":[143],"flow":[145],"each":[147],"lot":[150],"deciding":[152],"destination":[154],"model,":[156],"SMDM,":[157],"MMDMs.":[159],"maximize":[161],"reuse":[163],"previously":[165,250],"computed":[166],"delays":[168,182,248],"changing":[172],"MMDMs,":[173],"we":[174,226],"propose":[175,227],"an":[176],"efficient":[177],"manage":[180],"two-level":[184],"caches.":[185],"Each":[186],"ALC":[189],"performs":[190],"statistical":[191],"testing":[192],"detect":[194],"lot-arrival":[196],"change":[197,245],"reactivate":[199],"model.":[202],"However,":[203],"fast-forwarding":[204],"(FF)":[205],"results":[206,210],"incorrect":[208],"test":[209],"bypassed":[213,223,240],"ALCs":[215],"due":[216],"missed":[219],"observations":[220],"lots.":[224],"Thus,":[225],"test-sample":[231],"reinitialization":[232],"considers":[234],"bypassing.":[236],"Moreover,":[237],"since":[238],"divergence":[243],"can":[244],"scheduled":[251],"events,":[252],"examination":[256],"FF":[258],"history":[259],"designed":[261],"trace":[263],"highly":[265],"influenced":[266],"events.":[267],"proposed":[269],"been":[272],"applied":[273],"various":[275],"case":[276],"studies,":[277],"achieved":[281],"speedups":[282],"up":[284],"about":[286],"5.9":[287],"times,":[288],"2.5":[290],"8.3%":[292],"degradation":[293],"accuracy.":[295]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":7},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":1}],"updated_date":"2026-03-27T05:58:40.876381","created_date":"2025-10-10T00:00:00"}