{"id":"https://openalex.org/W3107494195","doi":"https://doi.org/10.1109/access.2020.3039257","title":"Diffusion Barrier Prediction of Graphene and Boron Nitride for Copper Interconnects by Deep Learning","display_name":"Diffusion Barrier Prediction of Graphene and Boron Nitride for Copper Interconnects by Deep Learning","publication_year":2020,"publication_date":"2020-01-01","ids":{"openalex":"https://openalex.org/W3107494195","doi":"https://doi.org/10.1109/access.2020.3039257","mag":"3107494195"},"language":"en","primary_location":{"id":"doi:10.1109/access.2020.3039257","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2020.3039257","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09264169.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09264169.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5061360439","display_name":"Manareldeen Ahmed","orcid":"https://orcid.org/0000-0002-1734-7241"},"institutions":[{"id":"https://openalex.org/I4210123185","display_name":"Zhejiang Lab","ror":"https://ror.org/02m2h7991","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210123185"]},{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Manareldeen Ahmed","raw_affiliation_strings":["College of Information Science and Electronics Engineering, Zhejiang University, Haining, China","Zhejiang Provincial Key Laboratory of Advanced Microelectronic Intelligent Systems and Applications, Hangzhou, China"],"raw_orcid":"https://orcid.org/0000-0002-1734-7241","affiliations":[{"raw_affiliation_string":"College of Information Science and Electronics Engineering, Zhejiang University, Haining, China","institution_ids":["https://openalex.org/I76130692"]},{"raw_affiliation_string":"Zhejiang Provincial Key Laboratory of Advanced Microelectronic Intelligent Systems and Applications, Hangzhou, China","institution_ids":["https://openalex.org/I4210123185"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100380417","display_name":"Yan Li","orcid":"https://orcid.org/0000-0003-1809-1695"},"institutions":[{"id":"https://openalex.org/I4210123185","display_name":"Zhejiang Lab","ror":"https://ror.org/02m2h7991","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210123185"]},{"id":"https://openalex.org/I55538621","display_name":"China Jiliang University","ror":"https://ror.org/05v1y0t93","country_code":"CN","type":"education","lineage":["https://openalex.org/I55538621"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yan Li","raw_affiliation_strings":["Key Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering, China Jiliang University, Hangzhou, China","Zhejiang Provincial Key Laboratory of Advanced Microelectronic Intelligent Systems and Applications, Hangzhou, China"],"raw_orcid":"https://orcid.org/0000-0003-1809-1695","affiliations":[{"raw_affiliation_string":"Key Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering, China Jiliang University, Hangzhou, China","institution_ids":["https://openalex.org/I55538621"]},{"raw_affiliation_string":"Zhejiang Provincial Key Laboratory of Advanced Microelectronic Intelligent Systems and Applications, Hangzhou, China","institution_ids":["https://openalex.org/I4210123185"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100651075","display_name":"Wenchao Chen","orcid":"https://orcid.org/0000-0001-7613-1734"},"institutions":[{"id":"https://openalex.org/I4210123185","display_name":"Zhejiang Lab","ror":"https://ror.org/02m2h7991","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210123185"]},{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenchao Chen","raw_affiliation_strings":["College of Information Science and Electronics Engineering, Zhejiang University, Haining, China","Zhejiang Provincial Key Laboratory of Advanced Microelectronic Intelligent Systems and Applications, Hangzhou, China"],"raw_orcid":"https://orcid.org/0000-0001-7613-1734","affiliations":[{"raw_affiliation_string":"College of Information Science and Electronics Engineering, Zhejiang University, Haining, China","institution_ids":["https://openalex.org/I76130692"]},{"raw_affiliation_string":"Zhejiang Provincial Key Laboratory of Advanced Microelectronic Intelligent Systems and Applications, Hangzhou, China","institution_ids":["https://openalex.org/I4210123185"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5072017129","display_name":"Er\u2010Ping Li","orcid":"https://orcid.org/0000-0002-5006-7399"},"institutions":[{"id":"https://openalex.org/I4210123185","display_name":"Zhejiang Lab","ror":"https://ror.org/02m2h7991","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210123185"]},{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Er-Ping Li","raw_affiliation_strings":["College of Information Science and Electronics Engineering, Zhejiang University, Haining, China","Zhejiang Provincial Key Laboratory of Advanced Microelectronic Intelligent Systems and Applications, Hangzhou, China"],"raw_orcid":"https://orcid.org/0000-0002-5006-7399","affiliations":[{"raw_affiliation_string":"College of Information Science and Electronics Engineering, Zhejiang University, Haining, China","institution_ids":["https://openalex.org/I76130692"]},{"raw_affiliation_string":"Zhejiang Provincial Key Laboratory of Advanced Microelectronic Intelligent Systems and Applications, Hangzhou, China","institution_ids":["https://openalex.org/I4210123185"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5061360439"],"corresponding_institution_ids":["https://openalex.org/I4210123185","https://openalex.org/I76130692"],"apc_list":{"value":1850,"currency":"USD","value_usd":1850},"apc_paid":{"value":1850,"currency":"USD","value_usd":1850},"fwci":0.326,"has_fulltext":true,"cited_by_count":14,"citation_normalized_percentile":{"value":0.51547374,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":"8","issue":null,"first_page":"210542","last_page":"210549"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10083","display_name":"Graphene research and applications","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10083","display_name":"Graphene research and applications","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/graphene","display_name":"Graphene","score":0.7947938442230225},{"id":"https://openalex.org/keywords/diffusion-barrier","display_name":"Diffusion barrier","score":0.7725880146026611},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6870487332344055},{"id":"https://openalex.org/keywords/boron-nitride","display_name":"Boron nitride","score":0.6323559880256653},{"id":"https://openalex.org/keywords/diffusion","display_name":"Diffusion","score":0.5503484606742859},{"id":"https://openalex.org/keywords/vacancy-defect","display_name":"Vacancy defect","score":0.5228683948516846},{"id":"https://openalex.org/keywords/boron","display_name":"Boron","score":0.4255828559398651},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.34983572363853455},{"id":"https://openalex.org/keywords/condensed-matter-physics","display_name":"Condensed matter physics","score":0.32035622000694275},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1759016513824463},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.14382493495941162}],"concepts":[{"id":"https://openalex.org/C30080830","wikidata":"https://www.wikidata.org/wiki/Q169917","display_name":"Graphene","level":2,"score":0.7947938442230225},{"id":"https://openalex.org/C2778836790","wikidata":"https://www.wikidata.org/wiki/Q5275435","display_name":"Diffusion barrier","level":3,"score":0.7725880146026611},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6870487332344055},{"id":"https://openalex.org/C2780243435","wikidata":"https://www.wikidata.org/wiki/Q410193","display_name":"Boron nitride","level":2,"score":0.6323559880256653},{"id":"https://openalex.org/C69357855","wikidata":"https://www.wikidata.org/wiki/Q163214","display_name":"Diffusion","level":2,"score":0.5503484606742859},{"id":"https://openalex.org/C114221277","wikidata":"https://www.wikidata.org/wiki/Q899743","display_name":"Vacancy defect","level":2,"score":0.5228683948516846},{"id":"https://openalex.org/C501308230","wikidata":"https://www.wikidata.org/wiki/Q618","display_name":"Boron","level":2,"score":0.4255828559398651},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.34983572363853455},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.32035622000694275},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1759016513824463},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.14382493495941162},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/access.2020.3039257","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2020.3039257","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09264169.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:e63f1032b82f45799c22190f07e420e1","is_oa":true,"landing_page_url":"https://doaj.org/article/e63f1032b82f45799c22190f07e420e1","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 8, Pp 210542-210549 (2020)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1109/access.2020.3039257","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2020.3039257","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/6514899/09264169.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.8799999952316284,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G5904317076","display_name":null,"funder_award_id":"LD21F010002","funder_id":"https://openalex.org/F4320338464","funder_display_name":"Natural Science Foundation of Zhejiang Province"},{"id":"https://openalex.org/G8315848876","display_name":"\u4eba\u5de5\u667a\u80fd\u6fc0\u53d1\u5f0f\u7c7b\u8111\u82af\u7247\u7535\u78c1\u5b8c\u6574\u6027\u5173\u952e\u6280\u672f\u57fa\u7840\u7814\u7a76","funder_award_id":"62071424","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"},{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320338464","display_name":"Natural Science Foundation of Zhejiang Province","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3107494195.pdf","grobid_xml":"https://content.openalex.org/works/W3107494195.grobid-xml"},"referenced_works_count":46,"referenced_works":["https://openalex.org/W1522301498","https://openalex.org/W1597355861","https://openalex.org/W1598925253","https://openalex.org/W1686810756","https://openalex.org/W1970127494","https://openalex.org/W1974677122","https://openalex.org/W1979544533","https://openalex.org/W1981368803","https://openalex.org/W1989189480","https://openalex.org/W2022110233","https://openalex.org/W2024269528","https://openalex.org/W2033787523","https://openalex.org/W2036908078","https://openalex.org/W2046530548","https://openalex.org/W2055876373","https://openalex.org/W2076929295","https://openalex.org/W2077830630","https://openalex.org/W2078274065","https://openalex.org/W2091806582","https://openalex.org/W2114351820","https://openalex.org/W2115096214","https://openalex.org/W2120145199","https://openalex.org/W2121216335","https://openalex.org/W2150687058","https://openalex.org/W2158851230","https://openalex.org/W2160133893","https://openalex.org/W2320638497","https://openalex.org/W2325329149","https://openalex.org/W2337082154","https://openalex.org/W2343462019","https://openalex.org/W2347129741","https://openalex.org/W2509907061","https://openalex.org/W2570655795","https://openalex.org/W2742472595","https://openalex.org/W2765676951","https://openalex.org/W2775674826","https://openalex.org/W2914843043","https://openalex.org/W2915603306","https://openalex.org/W3012873558","https://openalex.org/W3034519476","https://openalex.org/W4301410080","https://openalex.org/W6635627964","https://openalex.org/W6670160554","https://openalex.org/W6677084303","https://openalex.org/W6704141441","https://openalex.org/W7024780066"],"related_works":["https://openalex.org/W2606452130","https://openalex.org/W3149465128","https://openalex.org/W3196929922","https://openalex.org/W2377562106","https://openalex.org/W3103904106","https://openalex.org/W2081887179","https://openalex.org/W4321795992","https://openalex.org/W2328592354","https://openalex.org/W3033906315","https://openalex.org/W1578765583"],"abstract_inverted_index":{"The":[0,86,124],"continuous":[1],"scaling-down":[2],"size":[3],"of":[4,41,60,82,89,156,183,202],"interconnects":[5],"should":[6],"be":[7,166],"accompanied":[8],"with":[9,28,58,195],"ultra-thin":[10],"diffusion":[11,20,56,73,83],"barrier":[12,26,84,88,117,127,182,224,234],"layers,":[13,225],"which":[14,75],"is":[15,76,103,110,128,176],"used":[16,167,177],"to":[17,35,118,130,178,230],"suppress":[18],"Cu":[19,55,72,90,119,135,184],"into":[21,70],"the":[22,39,131,153,180,232],"dielectrics.":[23],"Unfortunately,":[24],"conventional":[25],"layers":[27],"thicknesses":[29,59],"less":[30],"than":[31,120],"4":[32],"nm":[33],"fail":[34],"perform":[36],"well.":[37],"With":[38],"advent":[40],"2D":[42,221,233],"layered":[43],"materials,":[44],"graphene":[45,98,113,140,190],"and":[46,99,136,147,160,191,226],"hexagonal":[47,100,121,192],"boron":[48,101,122,193],"nitride":[49,102,194],"have":[50],"been":[51],"proposed":[52],"as":[53,66,141,223],"alternative":[54],"barriers":[57,155],"\u22481":[61],"nm.":[62],"However,":[63],"defects":[64],"such":[65],"vacancies":[67],"may":[68],"evolve":[69],"a":[71,77,94,162],"path,":[74],"challenging":[78],"problem":[79],"in":[80,97,139],"design":[81],"layers.":[85],"energy":[87,116,126,154,181],"atom":[91],"diffused":[92],"through":[93,186],"di-vacancy":[95],"defect":[96],"calculated":[104],"by":[105,143],"density":[106,145],"functional":[107],"theory.":[108],"It":[109],"found":[111],"that":[112,164],"offers":[114],"higher":[115,125],"nitride.":[123],"attributed":[129],"stronger":[132],"interaction":[133],"between":[134,220],"C":[137],"atoms":[138],"shown":[142],"charge":[144],"difference":[146],"Bader\u2019s":[148],"charge.":[149],"Furthermore,":[150],"we":[151],"use":[152],"different":[157],"vacancy":[158],"structures":[159],"generate":[161],"dataset":[163],"will":[165],"for":[168,204],"machine":[169],"learning.":[170],"Our":[171],"trained":[172],"convolutional":[173],"neural":[174],"network":[175],"predict":[179,231],"migration":[185],"randomly":[187],"configured":[188],"defected":[189],"<inline-formula":[196,205],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[197,206],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">":[198,207],"<tex-math":[199,208],"notation=\"LaTeX\">$R^{2}$":[200],"</tex-math></inline-formula>":[201,212],">99%":[203],"notation=\"LaTeX\">$4":[209],"\\times":[210],"4$":[211],"supercell.":[213],"These":[214],"results":[215],"provide":[216],"guides":[217],"on":[218],"choosing":[219],"materials":[222],"applying":[227],"deep":[228],"learning":[229],"performance.":[235]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":6},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":3}],"updated_date":"2026-06-06T09:05:17.133730","created_date":"2025-10-10T00:00:00"}