{"id":"https://openalex.org/W3084270716","doi":"https://doi.org/10.1109/access.2020.3022275","title":"Adaptive Abstraction-Level Conversion Framework for Accelerated Discrete-Event Simulation in Smart Semiconductor Manufacturing","display_name":"Adaptive Abstraction-Level Conversion Framework for Accelerated Discrete-Event Simulation in Smart Semiconductor Manufacturing","publication_year":2020,"publication_date":"2020-01-01","ids":{"openalex":"https://openalex.org/W3084270716","doi":"https://doi.org/10.1109/access.2020.3022275","mag":"3084270716"},"language":"en","primary_location":{"id":"doi:10.1109/access.2020.3022275","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2020.3022275","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8948470/09187270.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://ieeexplore.ieee.org/ielx7/6287639/8948470/09187270.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5081703172","display_name":"Moon Gi Seok","orcid":"https://orcid.org/0000-0002-8159-9910"},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":true,"raw_author_name":"Moon Gi Seok","raw_affiliation_strings":["School of Compute Science and Engineering (SCSE), Nanyang Technological University, Singapore","[School of Compute Science and Engineering (SCSE), Nanyang Technological University, Singapore]"],"affiliations":[{"raw_affiliation_string":"School of Compute Science and Engineering (SCSE), Nanyang Technological University, Singapore","institution_ids":["https://openalex.org/I172675005"]},{"raw_affiliation_string":"[School of Compute Science and Engineering (SCSE), Nanyang Technological University, Singapore]","institution_ids":["https://openalex.org/I172675005"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036580072","display_name":"Wentong Cai","orcid":"https://orcid.org/0000-0002-0183-3835"},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Wentong Cai","raw_affiliation_strings":["School of Compute Science and Engineering (SCSE), Nanyang Technological University, Singapore","[School of Compute Science and Engineering (SCSE), Nanyang Technological University, Singapore]"],"affiliations":[{"raw_affiliation_string":"School of Compute Science and Engineering (SCSE), Nanyang Technological University, Singapore","institution_ids":["https://openalex.org/I172675005"]},{"raw_affiliation_string":"[School of Compute Science and Engineering (SCSE), Nanyang Technological University, Singapore]","institution_ids":["https://openalex.org/I172675005"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053876673","display_name":"Hessam S. Sarjoughian","orcid":"https://orcid.org/0000-0002-1326-9485"},"institutions":[{"id":"https://openalex.org/I55732556","display_name":"Arizona State University","ror":"https://ror.org/03efmqc40","country_code":"US","type":"education","lineage":["https://openalex.org/I55732556"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Hessam S. Sarjoughian","raw_affiliation_strings":["Arizona Center for Integrative Modeling and Simulation (ACIMS), Arizona State University, Tempe, USA","[Arizona Center for Integrative Modeling and Simulation (ACIMS), Arizona State University, Tempe, USA]"],"affiliations":[{"raw_affiliation_string":"Arizona Center for Integrative Modeling and Simulation (ACIMS), Arizona State University, Tempe, USA","institution_ids":["https://openalex.org/I55732556"]},{"raw_affiliation_string":"[Arizona Center for Integrative Modeling and Simulation (ACIMS), Arizona State University, Tempe, USA]","institution_ids":["https://openalex.org/I55732556"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5030304824","display_name":"Daejin Park","orcid":"https://orcid.org/0000-0002-5560-873X"},"institutions":[{"id":"https://openalex.org/I31419693","display_name":"Kyungpook National University","ror":"https://ror.org/040c17130","country_code":"KR","type":"education","lineage":["https://openalex.org/I31419693"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Daejin Park","raw_affiliation_strings":["School of Electronics Engineering, Kyungpook National University, Daegu, South Korea","School of Electronics engineering, Kyungpook National University, Daegu, South Korea"],"affiliations":[{"raw_affiliation_string":"School of Electronics Engineering, Kyungpook National University, Daegu, South Korea","institution_ids":["https://openalex.org/I31419693"]},{"raw_affiliation_string":"School of Electronics engineering, Kyungpook National University, Daegu, South Korea","institution_ids":["https://openalex.org/I31419693"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5081703172"],"corresponding_institution_ids":["https://openalex.org/I172675005"],"apc_list":{"value":1850,"currency":"USD","value_usd":1850},"apc_paid":{"value":1850,"currency":"USD","value_usd":1850},"fwci":0.9262,"has_fulltext":true,"cited_by_count":5,"citation_normalized_percentile":{"value":0.78564659,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":"8","issue":null,"first_page":"165247","last_page":"165262"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11195","display_name":"Simulation Techniques and Applications","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/1803","display_name":"Management Science and Operations Research"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},"topics":[{"id":"https://openalex.org/T11195","display_name":"Simulation Techniques and Applications","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/1803","display_name":"Management Science and Operations Research"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11181","display_name":"Advanced Data Storage Technologies","score":0.9939000010490417,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/queueing-theory","display_name":"Queueing theory","score":0.7699724435806274},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6888857483863831},{"id":"https://openalex.org/keywords/abstraction","display_name":"Abstraction","score":0.6836480498313904},{"id":"https://openalex.org/keywords/discrete-event-simulation","display_name":"Discrete event simulation","score":0.6652001142501831},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.6585390567779541},{"id":"https://openalex.org/keywords/wafer-fabrication","display_name":"Wafer fabrication","score":0.6545812487602234},{"id":"https://openalex.org/keywords/speedup","display_name":"Speedup","score":0.6419788599014282},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.5574084520339966},{"id":"https://openalex.org/keywords/abstraction-layer","display_name":"Abstraction layer","score":0.5134871602058411},{"id":"https://openalex.org/keywords/throughput","display_name":"Throughput","score":0.4825426936149597},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.47717180848121643},{"id":"https://openalex.org/keywords/event","display_name":"Event (particle physics)","score":0.47657108306884766},{"id":"https://openalex.org/keywords/convergence","display_name":"Convergence (economics)","score":0.42518192529678345},{"id":"https://openalex.org/keywords/semiconductor-device-modeling","display_name":"Semiconductor device modeling","score":0.41655024886131287},{"id":"https://openalex.org/keywords/real-time-computing","display_name":"Real-time computing","score":0.3906068205833435},{"id":"https://openalex.org/keywords/simulation","display_name":"Simulation","score":0.3732902407646179},{"id":"https://openalex.org/keywords/parallel-computing","display_name":"Parallel computing","score":0.24086859822273254},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.21686989068984985},{"id":"https://openalex.org/keywords/software","display_name":"Software","score":0.13164499402046204},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.11461213231086731}],"concepts":[{"id":"https://openalex.org/C22684755","wikidata":"https://www.wikidata.org/wiki/Q847526","display_name":"Queueing theory","level":2,"score":0.7699724435806274},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6888857483863831},{"id":"https://openalex.org/C124304363","wikidata":"https://www.wikidata.org/wiki/Q673661","display_name":"Abstraction","level":2,"score":0.6836480498313904},{"id":"https://openalex.org/C147203929","wikidata":"https://www.wikidata.org/wiki/Q574814","display_name":"Discrete event simulation","level":2,"score":0.6652001142501831},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.6585390567779541},{"id":"https://openalex.org/C35750839","wikidata":"https://www.wikidata.org/wiki/Q7959421","display_name":"Wafer fabrication","level":3,"score":0.6545812487602234},{"id":"https://openalex.org/C68339613","wikidata":"https://www.wikidata.org/wiki/Q1549489","display_name":"Speedup","level":2,"score":0.6419788599014282},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5574084520339966},{"id":"https://openalex.org/C147358964","wikidata":"https://www.wikidata.org/wiki/Q1200992","display_name":"Abstraction layer","level":3,"score":0.5134871602058411},{"id":"https://openalex.org/C157764524","wikidata":"https://www.wikidata.org/wiki/Q1383412","display_name":"Throughput","level":3,"score":0.4825426936149597},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.47717180848121643},{"id":"https://openalex.org/C2779662365","wikidata":"https://www.wikidata.org/wiki/Q5416694","display_name":"Event (particle physics)","level":2,"score":0.47657108306884766},{"id":"https://openalex.org/C2777303404","wikidata":"https://www.wikidata.org/wiki/Q759757","display_name":"Convergence (economics)","level":2,"score":0.42518192529678345},{"id":"https://openalex.org/C4775677","wikidata":"https://www.wikidata.org/wiki/Q7449393","display_name":"Semiconductor device modeling","level":3,"score":0.41655024886131287},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.3906068205833435},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.3732902407646179},{"id":"https://openalex.org/C173608175","wikidata":"https://www.wikidata.org/wiki/Q232661","display_name":"Parallel computing","level":1,"score":0.24086859822273254},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.21686989068984985},{"id":"https://openalex.org/C2777904410","wikidata":"https://www.wikidata.org/wiki/Q7397","display_name":"Software","level":2,"score":0.13164499402046204},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.11461213231086731},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C50522688","wikidata":"https://www.wikidata.org/wiki/Q189833","display_name":"Economic growth","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C555944384","wikidata":"https://www.wikidata.org/wiki/Q249","display_name":"Wireless","level":2,"score":0.0},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C111472728","wikidata":"https://www.wikidata.org/wiki/Q9471","display_name":"Epistemology","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/access.2020.3022275","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2020.3022275","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8948470/09187270.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:3908912631df4791b528295c73a5f5f6","is_oa":true,"landing_page_url":"https://doaj.org/article/3908912631df4791b528295c73a5f5f6","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 8, Pp 165247-165262 (2020)","raw_type":"article"},{"id":"pmh:oai:dr.ntu.edu.sg:10356/145810","is_oa":true,"landing_page_url":"https://hdl.handle.net/10356/145810","pdf_url":null,"source":{"id":"https://openalex.org/S4306402609","display_name":"DR-NTU (Nanyang Technological University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I172675005","host_organization_name":"Nanyang Technological University","host_organization_lineage":["https://openalex.org/I172675005"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Journal Article"}],"best_oa_location":{"id":"doi:10.1109/access.2020.3022275","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2020.3022275","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8948470/09187270.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/16","display_name":"Peace, Justice and strong institutions","score":0.6299999952316284}],"awards":[{"id":"https://openalex.org/G1395206239","display_name":null,"funder_award_id":"A19C1a0018","funder_id":"https://openalex.org/F4320320696","funder_display_name":"Agency for Science, Technology and Research"},{"id":"https://openalex.org/G1577046994","display_name":null,"funder_award_id":"2018R1A6A1A03025109","funder_id":"https://openalex.org/F4320322120","funder_display_name":"National Research Foundation of Korea"},{"id":"https://openalex.org/G342704958","display_name":null,"funder_award_id":"funded","funder_id":"https://openalex.org/F4320322120","funder_display_name":"National Research Foundation of Korea"},{"id":"https://openalex.org/G3972180651","display_name":null,"funder_award_id":"IAF-PP","funder_id":"https://openalex.org/F4320320696","funder_display_name":"Agency for Science, Technology and Research"},{"id":"https://openalex.org/G7685055460","display_name":null,"funder_award_id":"Grant","funder_id":"https://openalex.org/F4320328359","funder_display_name":"Ministry of Science and ICT, South Korea"},{"id":"https://openalex.org/G7815765994","display_name":null,"funder_award_id":"NRF2019","funder_id":"https://openalex.org/F4320322120","funder_display_name":"National Research Foundation of Korea"}],"funders":[{"id":"https://openalex.org/F4320320671","display_name":"National Research Foundation","ror":"https://ror.org/05s0g1g46"},{"id":"https://openalex.org/F4320320696","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09"},{"id":"https://openalex.org/F4320322120","display_name":"National Research Foundation of Korea","ror":"https://ror.org/013aysd81"},{"id":"https://openalex.org/F4320328359","display_name":"Ministry of Science and ICT, South Korea","ror":"https://ror.org/01wpjm123"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3084270716.pdf","grobid_xml":"https://content.openalex.org/works/W3084270716.grobid-xml"},"referenced_works_count":33,"referenced_works":["https://openalex.org/W1623768750","https://openalex.org/W1892940637","https://openalex.org/W2003179771","https://openalex.org/W2027697249","https://openalex.org/W2036274411","https://openalex.org/W2042168130","https://openalex.org/W2047193217","https://openalex.org/W2059937103","https://openalex.org/W2091518887","https://openalex.org/W2096452703","https://openalex.org/W2100542249","https://openalex.org/W2108838780","https://openalex.org/W2126396815","https://openalex.org/W2146066852","https://openalex.org/W2162826299","https://openalex.org/W2170726572","https://openalex.org/W2248184567","https://openalex.org/W2616804298","https://openalex.org/W2799143448","https://openalex.org/W2971578677","https://openalex.org/W2990287530","https://openalex.org/W3006988708","https://openalex.org/W3033874253","https://openalex.org/W3144094128","https://openalex.org/W3147403225","https://openalex.org/W3151072322","https://openalex.org/W4229834812","https://openalex.org/W4230545252","https://openalex.org/W4233686761","https://openalex.org/W4237509315","https://openalex.org/W6676324542","https://openalex.org/W6678641344","https://openalex.org/W6691316931"],"related_works":["https://openalex.org/W1849611347","https://openalex.org/W2027697249","https://openalex.org/W2146435486","https://openalex.org/W2006086900","https://openalex.org/W1965337273","https://openalex.org/W2117033844","https://openalex.org/W2098276944","https://openalex.org/W4365790995","https://openalex.org/W2063211596","https://openalex.org/W2149504766"],"abstract_inverted_index":{"Speeding":[0],"up":[1,232],"the":[2,30,53,56,66,95,103,113,121,123,129,137,153,157,168,175,189,205,213],"simulation":[3,26,50,230],"of":[4,92,115,132,140,225],"discrete-event":[5,45],"wafer-fabrication":[6],"models":[7,47,158],"is":[8,151,192],"essential":[9],"for":[10,44],"fast":[11],"decision-making":[12],"to":[13,48,70,135,161,171,195,211,221,233,239],"handle":[14],"unexpected":[15],"events":[16,210],"in":[17,94,111],"smart":[18],"semiconductor":[19],"manufacturing":[20,32],"because":[21],"decision-parameter":[22],"optimization":[23],"requires":[24],"repeated":[25],"execution":[27],"based":[28,101],"on":[29,102],"current":[31],"situation.":[33],"In":[34],"this":[35,72],"paper,":[36],"we":[37],"present":[38],"a":[39,62,76,81,147,163,172,187],"runtime":[40],"abstraction-level":[41,125],"conversion":[42],"approach":[43],"fab":[46],"gain":[49],"speedup.":[51],"During":[52,201],"simulation,":[54],"if":[55],"fab's":[57],"machine":[58,214],"group":[59,73,96,170,199],"model":[60,74,78,191],"reaches":[61],"steady":[63],"state,":[64],"then":[65],"proposed":[67,124,217],"method":[68,218],"attempts":[69],"substitute":[71],"with":[75,237],"mean-delay":[77],"(MDM)":[79],"as":[80],"high":[82],"abstraction":[83],"level":[84,150,203],"model.":[85,200],"The":[86,216],"MDM":[87],"abstracts":[88],"detailed":[89],"event-driven":[90],"operations":[91],"subcomponents":[93],"into":[97],"an":[98],"average":[99],"delay":[100],"queuing":[104,117,130],"modeling,":[105],"which":[106],"can":[107],"guarantee":[108],"acceptable":[109],"accuracy":[110,241],"predicting":[112],"performance":[114],"steady-state":[116],"systems.":[118],"To":[119],"detect":[120],"steadiness,":[122],"converter":[126],"(ALC)":[127],"observes":[128],"parameters":[131],"low-level":[133,169,198],"groups":[134],"identify":[136],"statistical":[138],"convergence":[139],"each":[141],"group's":[142,148],"work-in-progress":[143],"(WIP)":[144],"level.":[145],"When":[146,174],"WIP":[149],"converged,":[152],"output-to-input":[154],"couplings":[155],"between":[156],"are":[159],"revised":[160],"change":[162,185],"wafer-lot":[164,209],"process":[165],"flow":[166],"from":[167],"MDM.":[173],"ALC":[176,206],"detects":[177],"lot-arrival":[178],"changes":[179],"or":[180],"any":[181],"wafer":[182],"processing":[183],"status":[184],"(e.g.,":[186],"machine-down),":[188],"high-level":[190],"switched":[193],"back":[194],"its":[196],"corresponding":[197],"high-to-low":[202],"conversion,":[204],"generates":[207],"dummy":[208],"re-initialize":[212],"states.":[215],"was":[219],"applied":[220],"various":[222],"case":[223],"studies":[224],"wafer-fab":[226],"systems":[227],"and":[228],"achieved":[229],"speedups":[231],"about":[234],"4":[235],"times":[236],"0.6":[238],"8.3%":[240],"degradations.":[242]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":2}],"updated_date":"2026-03-27T05:58:40.876381","created_date":"2025-10-10T00:00:00"}