{"id":"https://openalex.org/W3017331425","doi":"https://doi.org/10.1109/access.2020.2987825","title":"Argon Precursor Ion Implantation Used to Activate Boron Atoms in Silicon at Low Temperatures","display_name":"Argon Precursor Ion Implantation Used to Activate Boron Atoms in Silicon at Low Temperatures","publication_year":2020,"publication_date":"2020-01-01","ids":{"openalex":"https://openalex.org/W3017331425","doi":"https://doi.org/10.1109/access.2020.2987825","mag":"3017331425"},"language":"en","primary_location":{"id":"doi:10.1109/access.2020.2987825","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2020.2987825","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8948470/09066978.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://ieeexplore.ieee.org/ielx7/6287639/8948470/09066978.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5004287897","display_name":"Toshiyuki Sameshima","orcid":"https://orcid.org/0000-0003-2915-2385"},"institutions":[{"id":"https://openalex.org/I92614990","display_name":"Tokyo University of Agriculture and Technology","ror":"https://ror.org/00qg0kr10","country_code":"JP","type":"education","lineage":["https://openalex.org/I92614990"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Toshiyuki Sameshima","raw_affiliation_strings":["Graduate School of Engineering, Tokyo University of Agriculture and Technology, Tokyo, Japan"],"raw_orcid":"https://orcid.org/0000-0003-2915-2385","affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Tokyo University of Agriculture and Technology, Tokyo, Japan","institution_ids":["https://openalex.org/I92614990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108468604","display_name":"Tomokazu Nagao","orcid":null},"institutions":[{"id":"https://openalex.org/I4210141143","display_name":"Nissin Kogyo (Japan)","ror":"https://ror.org/03j9hxf30","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210141143"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tomokazu Nagao","raw_affiliation_strings":["Nissin Ion Equipment Company, Ltd., Kyoto, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nissin Ion Equipment Company, Ltd., Kyoto, Japan","institution_ids":["https://openalex.org/I4210141143"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011224453","display_name":"Erika Sekiguchi","orcid":null},"institutions":[{"id":"https://openalex.org/I92614990","display_name":"Tokyo University of Agriculture and Technology","ror":"https://ror.org/00qg0kr10","country_code":"JP","type":"education","lineage":["https://openalex.org/I92614990"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Erika Sekiguchi","raw_affiliation_strings":["Graduate School of Engineering, Tokyo University of Agriculture and Technology, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Tokyo University of Agriculture and Technology, Tokyo, Japan","institution_ids":["https://openalex.org/I92614990"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5062393631","display_name":"Masahiko Hasumi","orcid":"https://orcid.org/0000-0002-2273-6292"},"institutions":[{"id":"https://openalex.org/I92614990","display_name":"Tokyo University of Agriculture and Technology","ror":"https://ror.org/00qg0kr10","country_code":"JP","type":"education","lineage":["https://openalex.org/I92614990"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masahiko Hasumi","raw_affiliation_strings":["Graduate School of Engineering, Tokyo University of Agriculture and Technology, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Tokyo University of Agriculture and Technology, Tokyo, Japan","institution_ids":["https://openalex.org/I92614990"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":1850,"currency":"USD","value_usd":1850},"apc_paid":{"value":1850,"currency":"USD","value_usd":1850},"fwci":0.0,"has_fulltext":true,"cited_by_count":1,"citation_normalized_percentile":{"value":0.03048338,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"8","issue":null,"first_page":"72598","last_page":"72606"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.35680529475212097},{"id":"https://openalex.org/keywords/stereochemistry","display_name":"Stereochemistry","score":0.3229896128177643},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.23175936937332153}],"concepts":[{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.35680529475212097},{"id":"https://openalex.org/C71240020","wikidata":"https://www.wikidata.org/wiki/Q186011","display_name":"Stereochemistry","level":1,"score":0.3229896128177643},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.23175936937332153}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/access.2020.2987825","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2020.2987825","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8948470/09066978.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:959c7477fbe74e24b527411c9cbaa0f6","is_oa":true,"landing_page_url":"https://doaj.org/article/959c7477fbe74e24b527411c9cbaa0f6","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 8, Pp 72598-72606 (2020)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1109/access.2020.2987825","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2020.2987825","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8948470/09066978.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.5099999904632568,"id":"https://metadata.un.org/sdg/6","display_name":"Clean water and sanitation"}],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3017331425.pdf","grobid_xml":"https://content.openalex.org/works/W3017331425.grobid-xml"},"referenced_works_count":18,"referenced_works":["https://openalex.org/W922565823","https://openalex.org/W1975751377","https://openalex.org/W1977317410","https://openalex.org/W2005079553","https://openalex.org/W2029030207","https://openalex.org/W2042466445","https://openalex.org/W2049683472","https://openalex.org/W2050332038","https://openalex.org/W2053006767","https://openalex.org/W2058615325","https://openalex.org/W2063169213","https://openalex.org/W2085551930","https://openalex.org/W2234073406","https://openalex.org/W2538168493","https://openalex.org/W2539299549","https://openalex.org/W2793788171","https://openalex.org/W2887526571","https://openalex.org/W3004025947"],"related_works":["https://openalex.org/W2935759653","https://openalex.org/W3105167352","https://openalex.org/W54078636","https://openalex.org/W2954470139","https://openalex.org/W1501425562","https://openalex.org/W2902782467","https://openalex.org/W3084825885","https://openalex.org/W2298861036","https://openalex.org/W3148032049","https://openalex.org/W2271181815"],"abstract_inverted_index":{"The":[0,43,149,175],"two-step":[1],"implantation":[2,44],"of":[3,45,53,76,105,122,129,158,185,189],"argon":[4],"precursor":[5],"ion":[6,15],"(Ar":[7],"<sup":[8,17,47,57,61,82,89,93,192],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[9,18,48,58,62,73,83,90,94,102,120,144,193],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">+</sup>":[10,19,49,84],")":[11,20],"followed":[12,40,79,134],"by":[13,35,41,80,135,152,171],"boron":[14,32,198],"(B":[16],"in":[21,164,196],"single":[22],"crystalline":[23,109],"silicon":[24],"at":[25,38,50,64,85],"room":[26],"temperature":[27],"is":[28],"discussed":[29],"to":[30,146,168],"activate":[31],"implanted":[33,199],"region":[34,160],"post":[36,127,154,173],"heating":[37,128,155],"300":[39],"400\u00b0C.":[42],"Ar":[46],"a":[51,68,186],"dose":[52],"6.0":[54],"\u00d7":[55,87],"10":[56,88],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">13</sup>":[59],"cm":[60,92,191],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-2</sup>":[63,95],"70":[65],"keV":[66,98],"with":[67,99,112,162],"projected":[69],"range":[70],"R":[71,100],"<sub":[72,101,119,143],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">p</sub>":[74,103],"(Ar)":[75],"80":[77],"nm":[78,107],"B":[81],"1.0":[86],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">15</sup>":[91],"and":[96],"15":[97],"(B)":[104],"62":[106],"caused":[108],"disordered":[110,115],"states":[111],"the":[113,126,153,165,172,183,197],"effective":[114,150],"amorphous":[116],"depth":[117],"A":[118,142],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">eff</sub>":[121,145],"32":[123],"nm,":[124],"while":[125],"300\u00b0C":[130],"for":[131,137],"90":[132],"min":[133,139],"400\u00b0C":[136],"30":[138],"markedly":[140],"decreased":[141],"1.8":[147],"nm.":[148],"recrystallization":[151],"promoted":[156],"activation":[157,176],"doped":[159],"associated":[161],"decrease":[163],"sheet":[166],"resistivity":[167],"189":[169],"\u03a9/sq":[170],"heating.":[174],"ratio":[177],"was":[178],"estimated":[179],"as":[180],"0.33":[181],"under":[182],"assumption":[184],"hole":[187],"mobility":[188],"50":[190],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[194],"/Vs":[195],"region.":[200]},"counts_by_year":[{"year":2024,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}