{"id":"https://openalex.org/W3014197912","doi":"https://doi.org/10.1109/access.2020.2984058","title":"Analysis for an Improved Nanomechanical Microcantilever Sensor on Optical Waveguides","display_name":"Analysis for an Improved Nanomechanical Microcantilever Sensor on Optical Waveguides","publication_year":2020,"publication_date":"2020-01-01","ids":{"openalex":"https://openalex.org/W3014197912","doi":"https://doi.org/10.1109/access.2020.2984058","mag":"3014197912"},"language":"en","primary_location":{"id":"doi:10.1109/access.2020.2984058","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2020.2984058","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8948470/09050462.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://ieeexplore.ieee.org/ielx7/6287639/8948470/09050462.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5044294001","display_name":"Yachao Jing","orcid":"https://orcid.org/0000-0003-0547-2958"},"institutions":[{"id":"https://openalex.org/I21193070","display_name":"Beijing Jiaotong University","ror":"https://ror.org/01yj56c84","country_code":"CN","type":"education","lineage":["https://openalex.org/I21193070"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Yachao Jing","raw_affiliation_strings":["Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0003-0547-2958","affiliations":[{"raw_affiliation_string":"Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China","institution_ids":["https://openalex.org/I21193070"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019284475","display_name":"Guofang Fan","orcid":"https://orcid.org/0000-0003-1833-4909"},"institutions":[{"id":"https://openalex.org/I21193070","display_name":"Beijing Jiaotong University","ror":"https://ror.org/01yj56c84","country_code":"CN","type":"education","lineage":["https://openalex.org/I21193070"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guofang Fan","raw_affiliation_strings":["Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China","institution_ids":["https://openalex.org/I21193070"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102952256","display_name":"Rongwei Wang","orcid":"https://orcid.org/0009-0009-0694-6992"},"institutions":[{"id":"https://openalex.org/I21193070","display_name":"Beijing Jiaotong University","ror":"https://ror.org/01yj56c84","country_code":"CN","type":"education","lineage":["https://openalex.org/I21193070"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Rongwei Wang","raw_affiliation_strings":["Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China","institution_ids":["https://openalex.org/I21193070"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037834151","display_name":"Zeping Zhang","orcid":"https://orcid.org/0000-0003-2006-9569"},"institutions":[{"id":"https://openalex.org/I21193070","display_name":"Beijing Jiaotong University","ror":"https://ror.org/01yj56c84","country_code":"CN","type":"education","lineage":["https://openalex.org/I21193070"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zeping Zhang","raw_affiliation_strings":["Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China","institution_ids":["https://openalex.org/I21193070"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043201047","display_name":"Muguang Wang","orcid":"https://orcid.org/0000-0003-4915-2083"},"institutions":[{"id":"https://openalex.org/I21193070","display_name":"Beijing Jiaotong University","ror":"https://ror.org/01yj56c84","country_code":"CN","type":"education","lineage":["https://openalex.org/I21193070"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Muguang Wang","raw_affiliation_strings":["Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0003-4915-2083","affiliations":[{"raw_affiliation_string":"Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China","institution_ids":["https://openalex.org/I21193070"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076950139","display_name":"Xiaoyu Cai","orcid":"https://orcid.org/0000-0002-1418-7270"},"institutions":[{"id":"https://openalex.org/I4210105460","display_name":"Shanghai Institute of Measurement and Testing Technology","ror":"https://ror.org/00zcefp03","country_code":"CN","type":"nonprofit","lineage":["https://openalex.org/I4210105460"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaoyu Cai","raw_affiliation_strings":["National Center of Testing Technology, National Center of Measurement and Testing for East China, Shanghai Institute of Measurement and Testing Technology, Shanghai, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Center of Testing Technology, National Center of Measurement and Testing for East China, Shanghai Institute of Measurement and Testing Technology, Shanghai, China","institution_ids":["https://openalex.org/I4210105460"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009774099","display_name":"Jiasi Wei","orcid":null},"institutions":[{"id":"https://openalex.org/I4210105460","display_name":"Shanghai Institute of Measurement and Testing Technology","ror":"https://ror.org/00zcefp03","country_code":"CN","type":"nonprofit","lineage":["https://openalex.org/I4210105460"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiasi Wei","raw_affiliation_strings":["National Center of Testing Technology, National Center of Measurement and Testing for East China, Shanghai Institute of Measurement and Testing Technology, Shanghai, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Center of Testing Technology, National Center of Measurement and Testing for East China, Shanghai Institute of Measurement and Testing Technology, Shanghai, China","institution_ids":["https://openalex.org/I4210105460"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100613520","display_name":"Xin Chen","orcid":"https://orcid.org/0000-0002-5675-0738"},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xin Chen","raw_affiliation_strings":["Department of Instrument Science and Engineering, Shanghai Jiao Tong University, Shanghai, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Instrument Science and Engineering, Shanghai Jiao Tong University, Shanghai, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100402308","display_name":"Hongyu Li","orcid":"https://orcid.org/0000-0003-0795-9188"},"institutions":[{"id":"https://openalex.org/I80143920","display_name":"Shandong University of Science and Technology","ror":"https://ror.org/04gtjhw98","country_code":"CN","type":"education","lineage":["https://openalex.org/I80143920"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hongyu Li","raw_affiliation_strings":["College of Mechanical and Electronic Engineering, Shandong University of Science and Technology, Qingdao, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Mechanical and Electronic Engineering, Shandong University of Science and Technology, Qingdao, China","institution_ids":["https://openalex.org/I80143920"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100390957","display_name":"Yuan Li","orcid":"https://orcid.org/0000-0003-4743-7261"},"institutions":[{"id":"https://openalex.org/I4210105460","display_name":"Shanghai Institute of Measurement and Testing Technology","ror":"https://ror.org/00zcefp03","country_code":"CN","type":"nonprofit","lineage":["https://openalex.org/I4210105460"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yuan Li","raw_affiliation_strings":["National Center of Testing Technology, National Center of Measurement and Testing for East China, Shanghai Institute of Measurement and Testing Technology, Shanghai, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Center of Testing Technology, National Center of Measurement and Testing for East China, Shanghai Institute of Measurement and Testing Technology, Shanghai, China","institution_ids":["https://openalex.org/I4210105460"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":10,"corresponding_author_ids":["https://openalex.org/A5044294001"],"corresponding_institution_ids":["https://openalex.org/I21193070"],"apc_list":{"value":1850,"currency":"USD","value_usd":1850},"apc_paid":{"value":1850,"currency":"USD","value_usd":1850},"fwci":0.8343,"has_fulltext":true,"cited_by_count":10,"citation_normalized_percentile":{"value":0.71755483,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"8","issue":null,"first_page":"63856","last_page":"63861"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5400629043579102},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5251421928405762}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5400629043579102},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5251421928405762}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/access.2020.2984058","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2020.2984058","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8948470/09050462.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:f787f063004e4f40a3474665629309e7","is_oa":true,"landing_page_url":"https://doaj.org/article/f787f063004e4f40a3474665629309e7","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 8, Pp 63856-63861 (2020)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1109/access.2020.2984058","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2020.2984058","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8948470/09050462.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.6600000262260437}],"awards":[{"id":"https://openalex.org/G7238422159","display_name":null,"funder_award_id":"2014YQ090709","funder_id":"https://openalex.org/F4320335765","funder_display_name":"National Key Scientific Instrument and Equipment Development Projects of China"}],"funders":[{"id":"https://openalex.org/F4320335765","display_name":"National Key Scientific Instrument and Equipment Development Projects of China","ror":null}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3014197912.pdf","grobid_xml":"https://content.openalex.org/works/W3014197912.grobid-xml"},"referenced_works_count":29,"referenced_works":["https://openalex.org/W151505382","https://openalex.org/W602454751","https://openalex.org/W1711714041","https://openalex.org/W1969191458","https://openalex.org/W1989713521","https://openalex.org/W1998211416","https://openalex.org/W2002650650","https://openalex.org/W2030552522","https://openalex.org/W2032727964","https://openalex.org/W2051769513","https://openalex.org/W2082416097","https://openalex.org/W2149610002","https://openalex.org/W2189220783","https://openalex.org/W2226796780","https://openalex.org/W2277293565","https://openalex.org/W2290193123","https://openalex.org/W2613418011","https://openalex.org/W2620138318","https://openalex.org/W2767182013","https://openalex.org/W2779209057","https://openalex.org/W2791923912","https://openalex.org/W2791983748","https://openalex.org/W2793888504","https://openalex.org/W2899075075","https://openalex.org/W2930640644","https://openalex.org/W2979751457","https://openalex.org/W4211190533","https://openalex.org/W4238923493","https://openalex.org/W6637650330"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W4404995717","https://openalex.org/W2016187641","https://openalex.org/W4404725684","https://openalex.org/W4246450666","https://openalex.org/W4388998267","https://openalex.org/W2898370298","https://openalex.org/W2137437058","https://openalex.org/W4405893659","https://openalex.org/W4404784341"],"abstract_inverted_index":{"An":[0,17,92],"analysis":[1,37],"model":[2],"for":[3,47,141],"an":[4,31,75,125,145],"optical":[5,13,19,52,57,77,94,118,126,146],"waveguide":[6,20,50,53,58,63,67,78,95,119,127,147],"microcantilever":[7,21,96,120],"sensor":[8,22,69,80,97,129],"is":[9,26,70,81,110,130],"developed":[10],"combining":[11],"the":[12,36,45,48,56,61,65,85,142],"and":[14,28,41,55,90],"mechanical":[15],"models.":[16],"improved":[18,66,76,93,111],"with":[23,115],"a":[24,100,103,116,131],"buffer":[25,101],"provided":[27],"taken":[29],"as":[30],"example":[32],"to":[33,51,60],"explore":[34],"using":[35],"model.":[38],"A":[39],"systematic":[40],"detailed":[42],"discussion":[43],"about":[44],"couplers":[46],"input":[49],"cantilever":[54,59,68,79,128,148],"output":[62],"of":[64,74,105,124,133,144],"presented.":[71],"The":[72,122],"sensitivity":[73,104],"evaluated":[82],"by":[83,98,112],"analyzing":[84],"input/output":[86],"waveguide,":[87],"buffer,":[88],"microcantilever,":[89],"gap.":[91],"adding":[99],"shows":[102],"5.7":[106],"\u00d7":[107],"10-4nm-1,":[108],"which":[109],"51.3%,":[113],"compared":[114],"conventional":[117],"sensor.":[121,149],"design":[123,135],"trade-off":[132],"different":[134],"parameters.":[136],"These":[137],"will":[138],"be":[139],"helpful":[140],"study":[143]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":3},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":1}],"updated_date":"2026-05-06T08:25:59.206177","created_date":"2025-10-10T00:00:00"}