{"id":"https://openalex.org/W2981009500","doi":"https://doi.org/10.1109/access.2019.2947570","title":"A Universal High-Sensitivity Area-Variation Capacitive Displacement Transducer (CDT) Based on Fringe Effect","display_name":"A Universal High-Sensitivity Area-Variation Capacitive Displacement Transducer (CDT) Based on Fringe Effect","publication_year":2019,"publication_date":"2019-01-01","ids":{"openalex":"https://openalex.org/W2981009500","doi":"https://doi.org/10.1109/access.2019.2947570","mag":"2981009500"},"language":"en","primary_location":{"id":"doi:10.1109/access.2019.2947570","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2019.2947570","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8600701/08873587.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://ieeexplore.ieee.org/ielx7/6287639/8600701/08873587.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100675927","display_name":"Qiu Wang","orcid":"https://orcid.org/0000-0002-6324-872X"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Qiu Wang","raw_affiliation_strings":["MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":"https://orcid.org/0000-0002-6324-872X","affiliations":[{"raw_affiliation_string":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011927041","display_name":"Shitao Yan","orcid":"https://orcid.org/0000-0002-3863-7352"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shitao Yan","raw_affiliation_strings":["MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034546565","display_name":"Qiangwei Xu","orcid":"https://orcid.org/0000-0002-3303-5539"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qiangwei Xu","raw_affiliation_strings":["MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080004695","display_name":"Shaolin Zhang","orcid":"https://orcid.org/0000-0002-2259-7704"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shaolin Zhang","raw_affiliation_strings":["MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101462728","display_name":"Xiaoxiao Song","orcid":"https://orcid.org/0000-0002-3303-7817"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaoxiao Song","raw_affiliation_strings":["MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015526066","display_name":"Chun Zhao","orcid":"https://orcid.org/0000-0002-6936-1424"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chun Zhao","raw_affiliation_strings":["MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076178990","display_name":"Fangjing Hu","orcid":"https://orcid.org/0000-0002-3804-0740"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Fangjing Hu","raw_affiliation_strings":["MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100725636","display_name":"Huafeng Liu","orcid":"https://orcid.org/0000-0003-0757-2362"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Huafeng Liu","raw_affiliation_strings":["MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":"https://orcid.org/0000-0003-0757-2362","affiliations":[{"raw_affiliation_string":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5064697095","display_name":"Liangcheng Tu","orcid":"https://orcid.org/0000-0003-1014-9784"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Liangcheng Tu","raw_affiliation_strings":["MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":9,"corresponding_author_ids":["https://openalex.org/A5100675927"],"corresponding_institution_ids":["https://openalex.org/I47720641"],"apc_list":{"value":1850,"currency":"USD","value_usd":1850},"apc_paid":{"value":1850,"currency":"USD","value_usd":1850},"fwci":0.7265,"has_fulltext":true,"cited_by_count":19,"citation_normalized_percentile":{"value":0.72467769,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"7","issue":null,"first_page":"153650","last_page":"153659"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.7489712238311768},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6565053462982178},{"id":"https://openalex.org/keywords/linearity","display_name":"Linearity","score":0.6355741620063782},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.6080070734024048},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.5884718298912048},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5437104105949402},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.5252825021743774},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.517616868019104},{"id":"https://openalex.org/keywords/microscale-chemistry","display_name":"Microscale chemistry","score":0.5053635239601135},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.4189678132534027},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.408210426568985},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3299407362937927},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.23236340284347534},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2301757037639618},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.16684845089912415},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.12737101316452026}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7489712238311768},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6565053462982178},{"id":"https://openalex.org/C77170095","wikidata":"https://www.wikidata.org/wiki/Q1753188","display_name":"Linearity","level":2,"score":0.6355741620063782},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.6080070734024048},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.5884718298912048},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5437104105949402},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.5252825021743774},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.517616868019104},{"id":"https://openalex.org/C179428855","wikidata":"https://www.wikidata.org/wiki/Q1069216","display_name":"Microscale chemistry","level":2,"score":0.5053635239601135},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4189678132534027},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.408210426568985},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3299407362937927},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.23236340284347534},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2301757037639618},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16684845089912415},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.12737101316452026},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C145420912","wikidata":"https://www.wikidata.org/wiki/Q853077","display_name":"Mathematics education","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/access.2019.2947570","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2019.2947570","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8600701/08873587.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:e509895378704b8284e72d55520f096c","is_oa":true,"landing_page_url":"https://doaj.org/article/e509895378704b8284e72d55520f096c","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 7, Pp 153650-153659 (2019)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1109/access.2019.2947570","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2019.2947570","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8600701/08873587.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.4300000071525574}],"awards":[{"id":"https://openalex.org/G1029632930","display_name":null,"funder_award_id":"2017YFC0601603","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G1080011373","display_name":null,"funder_award_id":"61306095","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G3104570291","display_name":null,"funder_award_id":"2018YFC0603301","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G4545420952","display_name":null,"funder_award_id":"61574067","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G860470221","display_name":null,"funder_award_id":"2019CFB108","funder_id":"https://openalex.org/F4320322186","funder_display_name":"Natural Science Foundation of Hubei Province"}],"funders":[{"id":"https://openalex.org/F4320320277","display_name":"University of Southampton","ror":"https://ror.org/01ryk1543"},{"id":"https://openalex.org/F4320320283","display_name":"Imperial College London","ror":"https://ror.org/041kmwe10"},{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321547","display_name":"China University of Petroleum, Beijing","ror":"https://ror.org/041qf4r12"},{"id":"https://openalex.org/F4320321760","display_name":"Henan University of Science and Technology","ror":"https://ror.org/05d80kz58"},{"id":"https://openalex.org/F4320321883","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53"},{"id":"https://openalex.org/F4320322186","display_name":"Natural Science Foundation of Hubei Province","ror":null},{"id":"https://openalex.org/F4320322878","display_name":"Henan University","ror":"https://ror.org/003xyzq10"},{"id":"https://openalex.org/F4320323292","display_name":"University of Electronic Science and Technology of China","ror":"https://ror.org/04qr3zq92"},{"id":"https://openalex.org/F4320324776","display_name":"North University of China","ror":"https://ror.org/047bp1713"},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null},{"id":"https://openalex.org/F4320336427","display_name":"Beijing Institute of Spacecraft Environment Engineering","ror":null}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2981009500.pdf","grobid_xml":"https://content.openalex.org/works/W2981009500.grobid-xml"},"referenced_works_count":23,"referenced_works":["https://openalex.org/W1558285529","https://openalex.org/W2010684297","https://openalex.org/W2016475729","https://openalex.org/W2018883250","https://openalex.org/W2088843519","https://openalex.org/W2129358243","https://openalex.org/W2149128480","https://openalex.org/W2164010209","https://openalex.org/W2164889311","https://openalex.org/W2296090656","https://openalex.org/W2306405487","https://openalex.org/W2543233601","https://openalex.org/W2755939603","https://openalex.org/W2769787163","https://openalex.org/W2884780119","https://openalex.org/W2909970508","https://openalex.org/W2943235069","https://openalex.org/W2948851209","https://openalex.org/W2955532077","https://openalex.org/W3004456029","https://openalex.org/W4252175165","https://openalex.org/W6679340546","https://openalex.org/W6773490021"],"related_works":["https://openalex.org/W2348740411","https://openalex.org/W2051563071","https://openalex.org/W1966596465","https://openalex.org/W2337947459","https://openalex.org/W4386858602","https://openalex.org/W2118205267","https://openalex.org/W2126912594","https://openalex.org/W1988444705","https://openalex.org/W4365794569","https://openalex.org/W4292622326"],"abstract_inverted_index":{"Capacitive":[0],"displacement":[1,26,253],"transducers":[2],"(CDTs)":[3],"have":[4,24,48,62],"been":[5],"widely":[6],"used":[7],"in":[8,192],"many":[9],"physical":[10],"sensors,":[11],"attributing":[12],"to":[13,29,113,141,185,224],"high-resolution,":[14],"simple":[15],"electricity":[16],"and":[17,42,52,108,147,158,179,202,210],"easy":[18],"manufacturing":[19],"process.":[20],"Gap-variation":[21],"CDTs":[22,47,61,162],"generally":[23],"higher":[25,99],"resolution":[27],"due":[28,140],"small":[30],"electrode":[31,64,70,83,150,176],"gaps":[32],"but":[33],"suffer":[34],"from":[35,127],"the":[36,39,58,63,69,77,115,119,134,142,159,169,207,256],"pull-in":[37],"effect,":[38],"nonlinear":[40],"effect":[41],"squeeze-film":[43],"damping;":[44],"whereas":[45],"area-variation":[46,60,94,161],"intrinsically":[49],"good":[50],"linearity":[51],"much":[53,66,98,129],"smaller":[54],"slide-film":[55],"damping.":[56],"However,":[57],"parallel-plate-based":[59,138],"width":[65],"larger":[67,130],"than":[68,133],"gap":[71],"with":[72,96,187,198],"negligible":[73],"fringe":[74,145],"effect;":[75],"therefore,":[76],"sensitivity":[78,100,132],"is":[79,259],"limited":[80],"by":[81],"periodic":[82,136],"numbers.":[84],"In":[85],"this":[86],"paper,":[87],"we":[88],"introduce":[89],"a":[90,97,102,128,225,234],"novel":[91],"fringe-effect":[92],"dominated":[93],"CDT":[95,120,125,171,220,258],"within":[101],"certain":[103],"electrode-deployable":[104],"area.":[105],"Both":[106],"theoretical":[107],"numerical":[109],"analysis":[110],"are":[111,156,163,221],"applied":[112,184,223],"investigate":[114],"working":[116],"principle":[117],"of":[118,154,255],"design.":[121],"The":[122,217,251],"proposed":[123,160,170,218,257],"fringe-effect-based":[124,219],"benefits":[126],"capacitance-to-displacement":[131],"traditional":[135],"array":[137],"CDT,":[139],"more":[143,148],"displacement-sensitive":[144],"field":[146],"deployable":[149],"periods.":[151],"A":[152],"set":[153],"experiments":[155],"designed,":[157],"evaluated.":[164],"Experimental":[165],"results":[166],"suggested":[167],"that":[168],"design,":[172],"which":[173,205],"had":[174],"equal":[175],"width,":[177],"separation":[178],"gap,":[180],"could":[181],"universally":[182],"be":[183,213],"sensors":[186],"different":[188],"featured":[189],"dimensions":[190],"either":[191],"macroscale":[193],"or":[194,215],"microscale.":[195],"Angular":[196],"misalignments":[197],"both":[199],"out-of-plane":[200],"tilts":[201],"in-plane":[203,227],"rotations,":[204],"affect":[206],"output":[208],"offset":[209],"sensitivity,":[211],"should":[212],"minimized":[214],"alleviated.":[216],"successfully":[222],"single-axis":[226],"sensing":[228],"micro-electromechanical":[229],"systems":[230],"(MEMS)":[231],"accelerometer,":[232],"showing":[233],"noise":[235,254],"floor":[236],"as":[237,239],"low":[238],"0.25":[240],"ng/Hz":[241],"<inline-formula":[242,262],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[243,263],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">":[244,264],"<tex-math":[245,265],"notation=\"LaTeX\">$^{\\mathrm":[246,266],"{1/2}}$":[247,267],"</tex-math></inline-formula>":[248,268],"@1":[249],"Hz.":[250],"corresponding":[252],"0.1":[260],"pm/Hz":[261],".":[269]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":7},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":3}],"updated_date":"2026-05-06T08:25:59.206177","created_date":"2025-10-10T00:00:00"}
