{"id":"https://openalex.org/W2940802703","doi":"https://doi.org/10.1109/access.2019.2909657","title":"Dynamic Modeling, Simulation, and Experimental Verification of a Wafer Handling SCARA Robot With Decoupling Servo Control","display_name":"Dynamic Modeling, Simulation, and Experimental Verification of a Wafer Handling SCARA Robot With Decoupling Servo Control","publication_year":2019,"publication_date":"2019-01-01","ids":{"openalex":"https://openalex.org/W2940802703","doi":"https://doi.org/10.1109/access.2019.2909657","mag":"2940802703"},"language":"en","primary_location":{"id":"doi:10.1109/access.2019.2909657","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2019.2909657","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8600701/08682121.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://ieeexplore.ieee.org/ielx7/6287639/8600701/08682121.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5018009457","display_name":"Yunbo He","orcid":"https://orcid.org/0000-0002-6933-1209"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yunbo He","raw_affiliation_strings":["Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025394689","display_name":"Xiquan Mai","orcid":"https://orcid.org/0000-0002-2311-2764"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiquan Mai","raw_affiliation_strings":["Guangdong University of Technology, Guangzhou, China"],"raw_orcid":"https://orcid.org/0000-0002-2311-2764","affiliations":[{"raw_affiliation_string":"Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005762426","display_name":"Chengqiang Cui","orcid":"https://orcid.org/0000-0002-8337-4985"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chengqiang Cui","raw_affiliation_strings":["Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028795816","display_name":"Jian Gao","orcid":"https://orcid.org/0000-0001-5625-7751"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jian Gao","raw_affiliation_strings":["Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066914548","display_name":"Zhijun Yang","orcid":"https://orcid.org/0000-0003-1927-1209"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhijun Yang","raw_affiliation_strings":["Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013478278","display_name":"Kai Zhang","orcid":"https://orcid.org/0000-0001-7683-3488"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kai Zhang","raw_affiliation_strings":["Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100451609","display_name":"Xun Chen","orcid":"https://orcid.org/0000-0003-2547-9022"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xun Chen","raw_affiliation_strings":["Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100416547","display_name":"Yun Chen","orcid":"https://orcid.org/0000-0002-4988-8894"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yun Chen","raw_affiliation_strings":["Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5009718960","display_name":"Hui Tang","orcid":"https://orcid.org/0000-0003-2155-5235"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hui Tang","raw_affiliation_strings":["Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I139024713"],"apc_list":{"value":1850,"currency":"USD","value_usd":1850},"apc_paid":{"value":1850,"currency":"USD","value_usd":1850},"fwci":1.7794,"has_fulltext":true,"cited_by_count":32,"citation_normalized_percentile":{"value":0.82915362,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":"7","issue":null,"first_page":"47143","last_page":"47153"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12784","display_name":"Modular Robots and Swarm Intelligence","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12784","display_name":"Modular Robots and Swarm Intelligence","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10571","display_name":"Robotic Mechanisms and Dynamics","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10868","display_name":"Soft Robotics and Applications","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/scara","display_name":"SCARA","score":0.9601131081581116},{"id":"https://openalex.org/keywords/decoupling","display_name":"Decoupling (probability)","score":0.6662981510162354},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6390781402587891},{"id":"https://openalex.org/keywords/servo","display_name":"Servo","score":0.5831574201583862},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.5665251612663269},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5016500949859619},{"id":"https://openalex.org/keywords/servomotor","display_name":"Servomotor","score":0.4827553629875183},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.4627532958984375},{"id":"https://openalex.org/keywords/dynamic-simulation","display_name":"Dynamic simulation","score":0.4311107397079468},{"id":"https://openalex.org/keywords/servo-control","display_name":"Servo control","score":0.4163973033428192},{"id":"https://openalex.org/keywords/simulation","display_name":"Simulation","score":0.3403412997722626},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.3388584852218628},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.19424837827682495},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.15039575099945068}],"concepts":[{"id":"https://openalex.org/C158732272","wikidata":"https://www.wikidata.org/wiki/Q1484792","display_name":"SCARA","level":3,"score":0.9601131081581116},{"id":"https://openalex.org/C205606062","wikidata":"https://www.wikidata.org/wiki/Q5249645","display_name":"Decoupling (probability)","level":2,"score":0.6662981510162354},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6390781402587891},{"id":"https://openalex.org/C107354338","wikidata":"https://www.wikidata.org/wiki/Q1937153","display_name":"Servo","level":2,"score":0.5831574201583862},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.5665251612663269},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5016500949859619},{"id":"https://openalex.org/C109441226","wikidata":"https://www.wikidata.org/wiki/Q1137255","display_name":"Servomotor","level":2,"score":0.4827553629875183},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.4627532958984375},{"id":"https://openalex.org/C149808339","wikidata":"https://www.wikidata.org/wiki/Q5319019","display_name":"Dynamic simulation","level":2,"score":0.4311107397079468},{"id":"https://openalex.org/C32731416","wikidata":"https://www.wikidata.org/wiki/Q7455930","display_name":"Servo control","level":3,"score":0.4163973033428192},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.3403412997722626},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.3388584852218628},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.19424837827682495},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.15039575099945068}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/access.2019.2909657","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2019.2909657","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8600701/08682121.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:4ea680c4e1fc4b2c9e269f8616bd519c","is_oa":true,"landing_page_url":"https://doaj.org/article/4ea680c4e1fc4b2c9e269f8616bd519c","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 7, Pp 47143-47153 (2019)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1109/access.2019.2909657","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2019.2909657","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8600701/08682121.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G1216107658","display_name":null,"funder_award_id":"51675106","funder_id":"https://openalex.org/F4320321921","funder_display_name":"Natural Science Foundation of Guangdong Province"},{"id":"https://openalex.org/G1831769911","display_name":null,"funder_award_id":"17ZK0091","funder_id":"https://openalex.org/F4320321921","funder_display_name":"Natural Science Foundation of Guangdong Province"},{"id":"https://openalex.org/G2657739692","display_name":null,"funder_award_id":"2015B010133005","funder_id":"https://openalex.org/F4320321921","funder_display_name":"Natural Science Foundation of Guangdong Province"},{"id":"https://openalex.org/G4623527484","display_name":null,"funder_award_id":"2015B010104006","funder_id":"https://openalex.org/F4320321921","funder_display_name":"Natural Science Foundation of Guangdong Province"},{"id":"https://openalex.org/G5279211704","display_name":null,"funder_award_id":"U1601202","funder_id":"https://openalex.org/F4320321921","funder_display_name":"Natural Science Foundation of Guangdong Province"},{"id":"https://openalex.org/G6849537751","display_name":"\u9ad8\u52a8\u6001\u5de5\u51b5\u4e0b\u5c01\u88c5\u88c5\u5907\u632f\u52a8\u80fd\u91cf\u5feb\u901f\u8870\u51cf\u673a\u5236\u53ca\u7cbe\u5ea6\u751f\u6210","funder_award_id":"51675106","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6923131023","display_name":null,"funder_award_id":"U1601202","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G8436806590","display_name":null,"funder_award_id":"2016A030308016","funder_id":"https://openalex.org/F4320321921","funder_display_name":"Natural Science Foundation of Guangdong Province"},{"id":"https://openalex.org/G8859743815","display_name":null,"funder_award_id":"2015A030312008","funder_id":"https://openalex.org/F4320321921","funder_display_name":"Natural Science Foundation of Guangdong Province"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321921","display_name":"Natural Science Foundation of Guangdong Province","ror":null}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2940802703.pdf","grobid_xml":"https://content.openalex.org/works/W2940802703.grobid-xml"},"referenced_works_count":32,"referenced_works":["https://openalex.org/W568089843","https://openalex.org/W1647034634","https://openalex.org/W1718628674","https://openalex.org/W1857974543","https://openalex.org/W1927904773","https://openalex.org/W1985986090","https://openalex.org/W1986182534","https://openalex.org/W1992336075","https://openalex.org/W2022312934","https://openalex.org/W2079586085","https://openalex.org/W2107556236","https://openalex.org/W2147777238","https://openalex.org/W2303006894","https://openalex.org/W2313173000","https://openalex.org/W2396640061","https://openalex.org/W2404344057","https://openalex.org/W2474079536","https://openalex.org/W2499503105","https://openalex.org/W2515786855","https://openalex.org/W2540679115","https://openalex.org/W2543004239","https://openalex.org/W2578154675","https://openalex.org/W2594103313","https://openalex.org/W2601901109","https://openalex.org/W2739137541","https://openalex.org/W2786955539","https://openalex.org/W2794807962","https://openalex.org/W2933401410","https://openalex.org/W6616188819","https://openalex.org/W6637043090","https://openalex.org/W6713472489","https://openalex.org/W6734311199"],"related_works":["https://openalex.org/W2376469465","https://openalex.org/W2133614587","https://openalex.org/W2088603790","https://openalex.org/W2020441249","https://openalex.org/W2051011957","https://openalex.org/W2546583032","https://openalex.org/W597209009","https://openalex.org/W891366759","https://openalex.org/W2903247355","https://openalex.org/W1976622387"],"abstract_inverted_index":{"In":[0],"this":[1,54],"paper,":[2],"we":[3],"propose":[4],"a":[5,17,159],"novel":[6],"coordinated":[7],"control":[8,14,88,122,151],"method":[9],"based":[10],"on":[11,89],"decoupling":[12,30,87,121,150],"servo":[13,31],"to":[15,65,78,176],"design":[16],"4-DOF":[18],"direct-drive":[19],"SCARA":[20,38,55,83,102,155],"robot":[21,39,103,156],"for":[22],"wafer":[23,141],"handling":[24,142],"purpose.":[25],"As":[26],"the":[27,33,37,45,82,101,110,124,132,140,149,154,169],"basis":[28],"of":[29,36,53,81,100],"control,":[32],"dynamic":[34,56,165],"model":[35,68],"is":[40,58,104],"obtained":[41],"with":[42,86,131],"two":[43,62],"methods,":[44],"Newton-Euler":[46],"equation,":[47],"and":[48,67,109,120,135,168],"Lagrangian":[49],"equation.":[50],"The":[51,97,144,161],"validity":[52],"equation":[57],"confirmed":[59],"by":[60,106,174],"these":[61],"methods.":[63],"Due":[64],"disturbance":[66],"uncertainty,":[69],"three":[70,79,90],"PD":[71,116],"plus":[72,117],"robust":[73,118],"controllers":[74,119],"are":[75,172],"individually":[76],"applied":[77],"axes":[80],"robot,":[84],"together":[85],"physically":[91],"dynamically":[92],"highly":[93],"coupled":[94],"robotic":[95],"arms.":[96],"inverse":[98],"dynamics":[99],"analyzed":[105],"feedback":[107],"linearization,":[108],"experimental":[111,145],"results":[112],"show":[113],"that":[114,148],"above":[115],"reduce":[123],"position":[125,162],"tracking":[126,166],"error":[127],"effectively.":[128],"Performance":[129],"meets":[130],"high":[133,136],"speed":[134],"precision":[137],"requirements":[138],"in":[139],"process.":[143],"data":[146],"shows":[147],"algorithm":[152],"makes":[153],"performance":[157],"improved":[158],"lot.":[160],"errors":[163,171],"during":[164],"movement":[167],"static":[170],"reduced":[173],"4":[175],"20":[177],"times.":[178]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":9},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":6},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":6},{"year":2019,"cited_by_count":1}],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2025-10-10T00:00:00"}