{"id":"https://openalex.org/W2918244089","doi":"https://doi.org/10.1109/access.2018.2889724","title":"New Analytical Capacitance Modeling of the Perforated Switch Considering the Fringing Effect","display_name":"New Analytical Capacitance Modeling of the Perforated Switch Considering the Fringing Effect","publication_year":2019,"publication_date":"2019-01-01","ids":{"openalex":"https://openalex.org/W2918244089","doi":"https://doi.org/10.1109/access.2018.2889724","mag":"2918244089"},"language":"en","primary_location":{"id":"doi:10.1109/access.2018.2889724","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2018.2889724","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8600701/08657690.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://ieeexplore.ieee.org/ielx7/6287639/8600701/08657690.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5054858388","display_name":"K. Srinivasa Rao","orcid":"https://orcid.org/0000-0003-1239-5196"},"institutions":[{"id":"https://openalex.org/I875944469","display_name":"Koneru Lakshmaiah Education Foundation","ror":"https://ror.org/02k949197","country_code":"IN","type":"education","lineage":["https://openalex.org/I875944469"]}],"countries":["IN"],"is_corresponding":true,"raw_author_name":"K. Srinivasa Rao","raw_affiliation_strings":["MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India"],"raw_orcid":"https://orcid.org/0000-0003-1239-5196","affiliations":[{"raw_affiliation_string":"MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India","institution_ids":["https://openalex.org/I875944469"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084714886","display_name":"B. V. S. Sailaja","orcid":null},"institutions":[{"id":"https://openalex.org/I875944469","display_name":"Koneru Lakshmaiah Education Foundation","ror":"https://ror.org/02k949197","country_code":"IN","type":"education","lineage":["https://openalex.org/I875944469"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"B. V. S. Sailaja","raw_affiliation_strings":["MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India","institution_ids":["https://openalex.org/I875944469"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084467918","display_name":"K. Girija Sravani","orcid":"https://orcid.org/0000-0002-9927-1833"},"institutions":[{"id":"https://openalex.org/I875944469","display_name":"Koneru Lakshmaiah Education Foundation","ror":"https://ror.org/02k949197","country_code":"IN","type":"education","lineage":["https://openalex.org/I875944469"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"K. Girija Sravani","raw_affiliation_strings":["MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India"],"raw_orcid":"https://orcid.org/0000-0002-9927-1833","affiliations":[{"raw_affiliation_string":"MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India","institution_ids":["https://openalex.org/I875944469"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102792573","display_name":"K. V. Vineetha","orcid":"https://orcid.org/0000-0002-5051-9754"},"institutions":[{"id":"https://openalex.org/I875944469","display_name":"Koneru Lakshmaiah Education Foundation","ror":"https://ror.org/02k949197","country_code":"IN","type":"education","lineage":["https://openalex.org/I875944469"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"K. V. Vineetha","raw_affiliation_strings":["MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India","institution_ids":["https://openalex.org/I875944469"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112429295","display_name":"P. Ashok Kumar","orcid":null},"institutions":[{"id":"https://openalex.org/I875944469","display_name":"Koneru Lakshmaiah Education Foundation","ror":"https://ror.org/02k949197","country_code":"IN","type":"education","lineage":["https://openalex.org/I875944469"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"P. Ashok Kumar","raw_affiliation_strings":["MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India","institution_ids":["https://openalex.org/I875944469"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013934562","display_name":"D. Prathyusha","orcid":null},"institutions":[{"id":"https://openalex.org/I875944469","display_name":"Koneru Lakshmaiah Education Foundation","ror":"https://ror.org/02k949197","country_code":"IN","type":"education","lineage":["https://openalex.org/I875944469"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"D. Prathyusha","raw_affiliation_strings":["MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India","institution_ids":["https://openalex.org/I875944469"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066209994","display_name":"G. Sai Lakshmi","orcid":"https://orcid.org/0000-0003-3851-3234"},"institutions":[{"id":"https://openalex.org/I875944469","display_name":"Koneru Lakshmaiah Education Foundation","ror":"https://ror.org/02k949197","country_code":"IN","type":"education","lineage":["https://openalex.org/I875944469"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"G. Sai Lakshmi","raw_affiliation_strings":["MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India","institution_ids":["https://openalex.org/I875944469"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059931401","display_name":"Ch. Gopi Chand","orcid":null},"institutions":[{"id":"https://openalex.org/I875944469","display_name":"Koneru Lakshmaiah Education Foundation","ror":"https://ror.org/02k949197","country_code":"IN","type":"education","lineage":["https://openalex.org/I875944469"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"C. H. Gopi Chand","raw_affiliation_strings":["MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS Research Center, Koneru Lakshmaiah Education Foundation (Deemed to be University), Guntur, India","institution_ids":["https://openalex.org/I875944469"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5091334730","display_name":"Koushik Guha","orcid":"https://orcid.org/0000-0002-5046-2786"},"institutions":[{"id":"https://openalex.org/I151903974","display_name":"National Institute Of Technology Silchar","ror":"https://ror.org/001ws2a36","country_code":"IN","type":"education","lineage":["https://openalex.org/I151903974"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Koushik Guha","raw_affiliation_strings":["National MEMS Design Center, National Institute of Technology, Silchar, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National MEMS Design Center, National Institute of Technology, Silchar, India","institution_ids":["https://openalex.org/I151903974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":9,"corresponding_author_ids":["https://openalex.org/A5054858388"],"corresponding_institution_ids":["https://openalex.org/I875944469"],"apc_list":{"value":1850,"currency":"USD","value_usd":1850},"apc_paid":{"value":1850,"currency":"USD","value_usd":1850},"fwci":0.4843,"has_fulltext":true,"cited_by_count":5,"citation_normalized_percentile":{"value":0.64362586,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"7","issue":null,"first_page":"27026","last_page":"27036"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.839119017124176},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5459964275360107},{"id":"https://openalex.org/keywords/solver","display_name":"Solver","score":0.4996774196624756},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4576430022716522},{"id":"https://openalex.org/keywords/capacitance-probe","display_name":"Capacitance probe","score":0.4192074239253998},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.36763250827789307},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3659139573574066},{"id":"https://openalex.org/keywords/mechanics","display_name":"Mechanics","score":0.3635743260383606},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2755892872810364},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2153666913509369},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.11325225234031677}],"concepts":[{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.839119017124176},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5459964275360107},{"id":"https://openalex.org/C2778770139","wikidata":"https://www.wikidata.org/wiki/Q1966904","display_name":"Solver","level":2,"score":0.4996774196624756},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4576430022716522},{"id":"https://openalex.org/C203455917","wikidata":"https://www.wikidata.org/wiki/Q5034478","display_name":"Capacitance probe","level":4,"score":0.4192074239253998},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.36763250827789307},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3659139573574066},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.3635743260383606},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2755892872810364},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2153666913509369},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.11325225234031677},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/access.2018.2889724","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2018.2889724","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8600701/08657690.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:45d9753a3b5f42a8913a552b33c9f197","is_oa":true,"landing_page_url":"https://doaj.org/article/45d9753a3b5f42a8913a552b33c9f197","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Access, Vol 7, Pp 27026-27036 (2019)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1109/access.2018.2889724","is_oa":true,"landing_page_url":"https://doi.org/10.1109/access.2018.2889724","pdf_url":"https://ieeexplore.ieee.org/ielx7/6287639/8600701/08657690.pdf","source":{"id":"https://openalex.org/S2485537415","display_name":"IEEE Access","issn_l":"2169-3536","issn":["2169-3536"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Access","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2918244089.pdf","grobid_xml":"https://content.openalex.org/works/W2918244089.grobid-xml"},"referenced_works_count":38,"referenced_works":["https://openalex.org/W71575557","https://openalex.org/W975544155","https://openalex.org/W1971821459","https://openalex.org/W1983040264","https://openalex.org/W1986814575","https://openalex.org/W1993320986","https://openalex.org/W2007915900","https://openalex.org/W2009209828","https://openalex.org/W2014532466","https://openalex.org/W2028441526","https://openalex.org/W2040312719","https://openalex.org/W2052943710","https://openalex.org/W2064216995","https://openalex.org/W2074731230","https://openalex.org/W2103720310","https://openalex.org/W2105325326","https://openalex.org/W2110759974","https://openalex.org/W2112063237","https://openalex.org/W2130115599","https://openalex.org/W2139002947","https://openalex.org/W2155226993","https://openalex.org/W2156576069","https://openalex.org/W2165174278","https://openalex.org/W2165883419","https://openalex.org/W2324657945","https://openalex.org/W2329416156","https://openalex.org/W2499311708","https://openalex.org/W2502469439","https://openalex.org/W2545760307","https://openalex.org/W2743821459","https://openalex.org/W3119376770","https://openalex.org/W4230282064","https://openalex.org/W4247159876","https://openalex.org/W6602979017","https://openalex.org/W6648540367","https://openalex.org/W6729038757","https://openalex.org/W6787881108","https://openalex.org/W7036958677"],"related_works":["https://openalex.org/W2061393616","https://openalex.org/W2977483808","https://openalex.org/W1192033379","https://openalex.org/W2223154127","https://openalex.org/W2075182900","https://openalex.org/W2025166522","https://openalex.org/W2371373404","https://openalex.org/W2317826517","https://openalex.org/W2058532828","https://openalex.org/W2370220774"],"abstract_inverted_index":{"Movable":[0],"suspended":[1],"microstructures":[2],"are":[3,113,135,157,172,246],"common":[4],"features":[5],"of":[6,13,24,95,132,163,168,180,188,192,240,262],"sensors":[7],"and":[8,51,62,82,152,199,203,222,236,259],"devices":[9],"in":[10],"the":[11,22,28,31,42,48,56,60,67,93,98,118,122,139,145,149,155,165,169,175,181,193,206,249,260],"field":[12],"micro":[14],"electro":[15],"mechanical":[16],"systems":[17],"(MEMS).":[18],"This":[19],"paper":[20,46],"addresses":[21],"study":[23],"approach":[25],"to":[26,137,143,214],"model":[27,211,228],"capacitance":[29,50,53,77,88,100,111,134,194],"for":[30,159,205,217,231,248],"crab-type":[32],"meander-based":[33],"RF":[34],"MEMS":[35,141],"shunt":[36],"switch":[37,142],"with":[38,174,195,255],"etching":[39,57,241],"holes":[40,58],"on":[41,59],"beam.":[43,225],"The":[44,76,86,107,127,178,190,209,226,243],"presented":[45,153,170,182,207],"evaluates":[47],"parallel-plate":[49,87],"fringing-field":[52,99,133],"caused":[54],"by":[55,92,115],"beam":[61],"introduces":[63],"empirical":[64,72,110],"formulae.":[65],"From":[66],"literature":[68],"study,":[69],"an":[70,185],"accurate":[71,109],"formula":[73,171,183],"is":[74,90,102,201,212,229,265],"presented.":[75],"involves":[78],"a":[79,83,160,218,223,232,237],"parallel":[80],"plate":[81],"fringing":[84],"field.":[85],"term":[89,101],"proposed":[91,108,146,244],"authors":[94],"this":[96],"work;":[97],"adopted":[103],"from":[104],"previous":[105],"work.":[106],"formulae":[112,245],"derived":[114],"curve":[116],"fitting":[117],"simulated":[119,166],"values":[120],"through":[121],"commercially":[123],"available":[124],"FEM":[125],"solver.":[126],"two":[128],"existing":[129,150],"benchmark":[130],"models":[131,151],"used":[136],"modify":[138],"perforated":[140],"obtain":[144],"formula.":[147,208],"With":[148],"formula,":[154],"capacitances":[156],"computed":[158],"wide":[161],"range":[162],"dimensions;":[164],"results":[167],"validated":[173],"calculated":[176],"results.":[177],"deviation":[179,261],"has":[184],"error":[186,263],"estimation":[187,264],"\u00b10.1%.":[189],"variation":[191],"different":[196],"deictic":[197],"thicknesses":[198],"errors":[200],"estimated":[202],"analyzed":[204],"Mejis":[210],"found":[213],"be":[215],"satisfactory":[216],"lower":[219],"air":[220,234],"gap":[221,235],"1-\u03bcm-thick":[224],"Yang's":[227],"sufficient":[230],"higher":[233],"large":[238],"number":[239],"holes.":[242],"good":[247],"ligament":[250],"efficiency":[251],"\u03bc":[252],"\u2264":[253],"0.5,":[254],"thickness":[256],">1":[257],"\u03bcm,":[258],"within":[266],"\u00b15%.":[267]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1}],"updated_date":"2026-05-06T08:25:59.206177","created_date":"2025-10-10T00:00:00"}