{"id":"https://openalex.org/W2044263908","doi":"https://doi.org/10.1109/acc.2014.6859357","title":"Cross-coupling effect compensation of an AFM piezoelectric tube scanner for improved nanopositioning","display_name":"Cross-coupling effect compensation of an AFM piezoelectric tube scanner for improved nanopositioning","publication_year":2014,"publication_date":"2014-06-01","ids":{"openalex":"https://openalex.org/W2044263908","doi":"https://doi.org/10.1109/acc.2014.6859357","mag":"2044263908"},"language":"en","primary_location":{"id":"doi:10.1109/acc.2014.6859357","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2014.6859357","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 American Control Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5029160855","display_name":"M. S. Ra\u00f1a","orcid":"https://orcid.org/0000-0001-7220-3067"},"institutions":[{"id":"https://openalex.org/I188329596","display_name":"University of Canberra","ror":"https://ror.org/04s1nv328","country_code":"AU","type":"education","lineage":["https://openalex.org/I188329596"]},{"id":"https://openalex.org/I31746571","display_name":"UNSW Sydney","ror":"https://ror.org/03r8z3t63","country_code":"AU","type":"education","lineage":["https://openalex.org/I31746571"]}],"countries":["AU"],"is_corresponding":true,"raw_author_name":"M. S. Rana","raw_affiliation_strings":["School of Engineering and Information Technology (SEIT), The University of New South Wales, Canberra, ACT 2600, Australia"],"affiliations":[{"raw_affiliation_string":"School of Engineering and Information Technology (SEIT), The University of New South Wales, Canberra, ACT 2600, Australia","institution_ids":["https://openalex.org/I188329596","https://openalex.org/I31746571"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005915031","display_name":"H. R. Pota","orcid":"https://orcid.org/0000-0002-9612-714X"},"institutions":[{"id":"https://openalex.org/I188329596","display_name":"University of Canberra","ror":"https://ror.org/04s1nv328","country_code":"AU","type":"education","lineage":["https://openalex.org/I188329596"]},{"id":"https://openalex.org/I31746571","display_name":"UNSW Sydney","ror":"https://ror.org/03r8z3t63","country_code":"AU","type":"education","lineage":["https://openalex.org/I31746571"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"H. R. Pota","raw_affiliation_strings":["School of Engineering and Information Technology (SEIT), The University of New South Wales, Canberra, ACT 2600, Australia"],"affiliations":[{"raw_affiliation_string":"School of Engineering and Information Technology (SEIT), The University of New South Wales, Canberra, ACT 2600, Australia","institution_ids":["https://openalex.org/I188329596","https://openalex.org/I31746571"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5083785005","display_name":"Idar Petersen","orcid":null},"institutions":[{"id":"https://openalex.org/I31746571","display_name":"UNSW Sydney","ror":"https://ror.org/03r8z3t63","country_code":"AU","type":"education","lineage":["https://openalex.org/I31746571"]},{"id":"https://openalex.org/I188329596","display_name":"University of Canberra","ror":"https://ror.org/04s1nv328","country_code":"AU","type":"education","lineage":["https://openalex.org/I188329596"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"I. R. Petersen","raw_affiliation_strings":["School of Engineering and Information Technology (SEIT), The University of New South Wales, Canberra, ACT 2600, Australia"],"affiliations":[{"raw_affiliation_string":"School of Engineering and Information Technology (SEIT), The University of New South Wales, Canberra, ACT 2600, Australia","institution_ids":["https://openalex.org/I188329596","https://openalex.org/I31746571"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5029160855"],"corresponding_institution_ids":["https://openalex.org/I188329596","https://openalex.org/I31746571"],"apc_list":null,"apc_paid":null,"fwci":1.2309,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.82658358,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"2456","last_page":"2461"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.993399977684021,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/scanner","display_name":"Scanner","score":0.699635922908783},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.6675416827201843},{"id":"https://openalex.org/keywords/coupling","display_name":"Coupling (piping)","score":0.6404368877410889},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.6338147521018982},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.6298679709434509},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5752226710319519},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5065523386001587},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.5035530924797058},{"id":"https://openalex.org/keywords/mimo","display_name":"MIMO","score":0.4892241954803467},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.47711852192878723},{"id":"https://openalex.org/keywords/scanning-probe-microscopy","display_name":"Scanning probe microscopy","score":0.4101569652557373},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.2925005555152893},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2612293064594269},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2579360604286194},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.2385644018650055},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2363516390323639},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.20890361070632935},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.20144891738891602},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.14945873618125916},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.12241533398628235},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.10956704616546631}],"concepts":[{"id":"https://openalex.org/C2779751349","wikidata":"https://www.wikidata.org/wiki/Q1474480","display_name":"Scanner","level":2,"score":0.699635922908783},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.6675416827201843},{"id":"https://openalex.org/C131584629","wikidata":"https://www.wikidata.org/wiki/Q4308705","display_name":"Coupling (piping)","level":2,"score":0.6404368877410889},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.6338147521018982},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.6298679709434509},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5752226710319519},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5065523386001587},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.5035530924797058},{"id":"https://openalex.org/C207987634","wikidata":"https://www.wikidata.org/wiki/Q176862","display_name":"MIMO","level":3,"score":0.4892241954803467},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.47711852192878723},{"id":"https://openalex.org/C36628996","wikidata":"https://www.wikidata.org/wiki/Q907287","display_name":"Scanning probe microscopy","level":2,"score":0.4101569652557373},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.2925005555152893},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2612293064594269},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2579360604286194},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.2385644018650055},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2363516390323639},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20890361070632935},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.20144891738891602},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.14945873618125916},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.12241533398628235},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.10956704616546631},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0},{"id":"https://openalex.org/C54197355","wikidata":"https://www.wikidata.org/wiki/Q5782992","display_name":"Beamforming","level":2,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/acc.2014.6859357","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2014.6859357","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 American Control Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.8500000238418579}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W1987659326","https://openalex.org/W1990965192","https://openalex.org/W1999430248","https://openalex.org/W2000350616","https://openalex.org/W2005508062","https://openalex.org/W2020328222","https://openalex.org/W2026855453","https://openalex.org/W2027050895","https://openalex.org/W2042028590","https://openalex.org/W2069215377","https://openalex.org/W2070360188","https://openalex.org/W2085837966","https://openalex.org/W2102023741","https://openalex.org/W2114515197","https://openalex.org/W2126461033","https://openalex.org/W2143399365","https://openalex.org/W2144651557","https://openalex.org/W2146409279","https://openalex.org/W2494197051","https://openalex.org/W3143835017","https://openalex.org/W3150248096","https://openalex.org/W6647186750"],"related_works":["https://openalex.org/W120386264","https://openalex.org/W4232857084","https://openalex.org/W4245233074","https://openalex.org/W2167384162","https://openalex.org/W2001485867","https://openalex.org/W4402492658","https://openalex.org/W2255520312","https://openalex.org/W1997008433","https://openalex.org/W2029367975","https://openalex.org/W1993703324"],"abstract_inverted_index":{"The":[0,59],"imaging":[1,35],"performance":[2],"of":[3,20,37,61,71,94,106],"an":[4,38,67],"atomic":[5],"force":[6],"microscope":[7],"(AFM)":[8],"at":[9,97],"high":[10],"scanning":[11,22],"speeds":[12],"is":[13,49,64,79],"limited":[14],"due":[15],"to":[16,32,54,90],"the":[17,25,34,52,72,84,88,92,95,98,104,107],"cross-coupling":[18,57],"properties":[19],"its":[21,56],"unit;":[23],"i.e.,":[24],"piezoelectric":[26],"tube":[27],"scanner":[28],"(PTS).":[29],"In":[30],"order":[31],"increase":[33],"speed":[36],"AFM,":[39],"a":[40,76],"multi-input":[41],"multi-output":[42],"(MIMO)":[43],"model":[44,70],"predictive":[45],"control":[46],"(MPC)":[47],"scheme":[48],"used":[50],"for":[51],"PTS":[53,96],"reduce":[55],"effect.":[58],"design":[60],"this":[62],"controller":[63],"based":[65],"on":[66],"identified":[68],"MIMO":[69],"AFM":[73],"PTS.":[74],"Also,":[75],"damping":[77],"compensator":[78],"designed":[80],"and":[81],"included":[82],"in":[83],"feedback":[85],"loop":[86],"with":[87],"plant":[89],"suppress":[91],"vibration":[93],"resonant":[99],"frequency.":[100],"Experimental":[101],"results":[102],"confirm":[103],"efficacy":[105],"proposed":[108],"controller.":[109]},"counts_by_year":[{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}