{"id":"https://openalex.org/W2153472907","doi":"https://doi.org/10.1109/acc.2012.6314685","title":"Next-generation wafer stage motion control: Connecting system identification and robust control","display_name":"Next-generation wafer stage motion control: Connecting system identification and robust control","publication_year":2012,"publication_date":"2012-06-01","ids":{"openalex":"https://openalex.org/W2153472907","doi":"https://doi.org/10.1109/acc.2012.6314685","mag":"2153472907"},"language":"en","primary_location":{"id":"doi:10.1109/acc.2012.6314685","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2012.6314685","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 American Control Conference (ACC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://pure.tue.nl/ws/files/3513525/361900210069569.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5050892930","display_name":"Tom Oomen","orcid":"https://orcid.org/0000-0001-7721-4566"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]},{"id":"https://openalex.org/I4210122849","display_name":"Philips (Netherlands)","ror":"https://ror.org/02p2bgp27","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210122849"]}],"countries":["NL"],"is_corresponding":true,"raw_author_name":"T. Oomen","raw_affiliation_strings":["Philips Applied Technologies, Eindhovan University of Technology, Eindhoven, Netherlands"],"affiliations":[{"raw_affiliation_string":"Philips Applied Technologies, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370","https://openalex.org/I4210122849"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066431636","display_name":"Robbert van Herpen","orcid":null},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]},{"id":"https://openalex.org/I4210122849","display_name":"Philips (Netherlands)","ror":"https://ror.org/02p2bgp27","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210122849"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"R. van Herpen","raw_affiliation_strings":["Philips Applied Technologies, Eindhovan University of Technology, Eindhoven, Netherlands"],"affiliations":[{"raw_affiliation_string":"Philips Applied Technologies, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370","https://openalex.org/I4210122849"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010168670","display_name":"Sander Quist","orcid":null},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]},{"id":"https://openalex.org/I4210122849","display_name":"Philips (Netherlands)","ror":"https://ror.org/02p2bgp27","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210122849"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"S. Quist","raw_affiliation_strings":["Philips Applied Technologies, Eindhovan University of Technology, Eindhoven, Netherlands"],"affiliations":[{"raw_affiliation_string":"Philips Applied Technologies, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370","https://openalex.org/I4210122849"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022324167","display_name":"Marc van de Wal","orcid":null},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]},{"id":"https://openalex.org/I4210122849","display_name":"Philips (Netherlands)","ror":"https://ror.org/02p2bgp27","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210122849"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"M. van de Wal","raw_affiliation_strings":["Philips Applied Technologies, Eindhovan University of Technology, Eindhoven, Netherlands"],"affiliations":[{"raw_affiliation_string":"Philips Applied Technologies, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370","https://openalex.org/I4210122849"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108425404","display_name":"\u041e.H. Bosgra","orcid":null},"institutions":[{"id":"https://openalex.org/I4210122849","display_name":"Philips (Netherlands)","ror":"https://ror.org/02p2bgp27","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210122849"]},{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"O. Bosgra","raw_affiliation_strings":["Philips Applied Technologies, Eindhovan University of Technology, Eindhoven, Netherlands"],"affiliations":[{"raw_affiliation_string":"Philips Applied Technologies, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370","https://openalex.org/I4210122849"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5026038138","display_name":"M. Steinbuch","orcid":"https://orcid.org/0000-0002-1469-1696"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]},{"id":"https://openalex.org/I4210122849","display_name":"Philips (Netherlands)","ror":"https://ror.org/02p2bgp27","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210122849"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"M. Steinbuch","raw_affiliation_strings":["Philips Applied Technologies, Eindhovan University of Technology, Eindhoven, Netherlands"],"affiliations":[{"raw_affiliation_string":"Philips Applied Technologies, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370","https://openalex.org/I4210122849"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5050892930"],"corresponding_institution_ids":["https://openalex.org/I4210122849","https://openalex.org/I83019370"],"apc_list":null,"apc_paid":null,"fwci":1.1341,"has_fulltext":true,"cited_by_count":8,"citation_normalized_percentile":{"value":0.83679779,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"2455","last_page":"2460"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13644","display_name":"Control Systems in Engineering","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11372","display_name":"Hydraulic and Pneumatic Systems","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/motion-control","display_name":"Motion control","score":0.7607239484786987},{"id":"https://openalex.org/keywords/multivariable-calculus","display_name":"Multivariable calculus","score":0.707224428653717},{"id":"https://openalex.org/keywords/identification","display_name":"Identification (biology)","score":0.6290881633758545},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5774067044258118},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.5771777033805847},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.5524652004241943},{"id":"https://openalex.org/keywords/robust-control","display_name":"Robust control","score":0.5172532200813293},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5135433673858643},{"id":"https://openalex.org/keywords/control-system","display_name":"Control system","score":0.4934016764163971},{"id":"https://openalex.org/keywords/throughput","display_name":"Throughput","score":0.4742107689380646},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.4611388146877289},{"id":"https://openalex.org/keywords/system-identification","display_name":"System identification","score":0.4610231816768646},{"id":"https://openalex.org/keywords/motion","display_name":"Motion (physics)","score":0.4494202435016632},{"id":"https://openalex.org/keywords/motion-controller","display_name":"Motion controller","score":0.43853700160980225},{"id":"https://openalex.org/keywords/motion-system","display_name":"Motion system","score":0.43791669607162476},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.41367191076278687},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.32866954803466797},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.14064037799835205},{"id":"https://openalex.org/keywords/data-modeling","display_name":"Data modeling","score":0.1166543960571289}],"concepts":[{"id":"https://openalex.org/C145565327","wikidata":"https://www.wikidata.org/wiki/Q852514","display_name":"Motion control","level":3,"score":0.7607239484786987},{"id":"https://openalex.org/C117312493","wikidata":"https://www.wikidata.org/wiki/Q2035437","display_name":"Multivariable calculus","level":2,"score":0.707224428653717},{"id":"https://openalex.org/C116834253","wikidata":"https://www.wikidata.org/wiki/Q2039217","display_name":"Identification (biology)","level":2,"score":0.6290881633758545},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5774067044258118},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.5771777033805847},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.5524652004241943},{"id":"https://openalex.org/C31531917","wikidata":"https://www.wikidata.org/wiki/Q915157","display_name":"Robust control","level":3,"score":0.5172532200813293},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5135433673858643},{"id":"https://openalex.org/C17500928","wikidata":"https://www.wikidata.org/wiki/Q959968","display_name":"Control system","level":2,"score":0.4934016764163971},{"id":"https://openalex.org/C157764524","wikidata":"https://www.wikidata.org/wiki/Q1383412","display_name":"Throughput","level":3,"score":0.4742107689380646},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.4611388146877289},{"id":"https://openalex.org/C119247159","wikidata":"https://www.wikidata.org/wiki/Q1366192","display_name":"System identification","level":3,"score":0.4610231816768646},{"id":"https://openalex.org/C104114177","wikidata":"https://www.wikidata.org/wiki/Q79782","display_name":"Motion (physics)","level":2,"score":0.4494202435016632},{"id":"https://openalex.org/C2778420160","wikidata":"https://www.wikidata.org/wiki/Q6917780","display_name":"Motion controller","level":4,"score":0.43853700160980225},{"id":"https://openalex.org/C100673868","wikidata":"https://www.wikidata.org/wiki/Q6917799","display_name":"Motion system","level":3,"score":0.43791669607162476},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.41367191076278687},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.32866954803466797},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.14064037799835205},{"id":"https://openalex.org/C67186912","wikidata":"https://www.wikidata.org/wiki/Q367664","display_name":"Data modeling","level":2,"score":0.1166543960571289},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.0},{"id":"https://openalex.org/C555944384","wikidata":"https://www.wikidata.org/wiki/Q249","display_name":"Wireless","level":2,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C77088390","wikidata":"https://www.wikidata.org/wiki/Q8513","display_name":"Database","level":1,"score":0.0},{"id":"https://openalex.org/C59822182","wikidata":"https://www.wikidata.org/wiki/Q441","display_name":"Botany","level":1,"score":0.0},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.1109/acc.2012.6314685","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2012.6314685","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 American Control Conference (ACC)","raw_type":"proceedings-article"},{"id":"pmh:oai:pure.tue.nl:openaire/36e22dbc-ca42-4c33-a3b5-b4cbf43d8a64","is_oa":true,"landing_page_url":"https://research.tue.nl/en/publications/36e22dbc-ca42-4c33-a3b5-b4cbf43d8a64","pdf_url":"https://pure.tue.nl/ws/files/3513525/361900210069569.pdf","source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Oomen, T A E, Herpen, van, R M A, Quist, S J, Wal, van de, M M J, Bosgra, O H & Steinbuch, M 2012, Next-generation wafer stage motion control : connecting system identification and robust control. in Proceedings of the 2012 American Control Conference, 27-29 Juni 2012, Montreal, Canada. Institute of Electrical and Electronics Engineers, Piscataway, pp. 2455-2460.","raw_type":"info:eu-repo/semantics/publishedVersion"},{"id":"pmh:oai:library.tue.nl:736548","is_oa":false,"landing_page_url":"http://repository.tue.nl/736548","pdf_url":null,"source":{"id":"https://openalex.org/S4406923046","display_name":"TU/e Research Portal (Eindhoven University of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":""},{"id":"pmh:tue:oai:pure.tue.nl:publications/36e22dbc-ca42-4c33-a3b5-b4cbf43d8a64","is_oa":true,"landing_page_url":"https://research.tue.nl/nl/publications/36e22dbc-ca42-4c33-a3b5-b4cbf43d8a64","pdf_url":null,"source":{"id":"https://openalex.org/S4306401843","display_name":"Data Archiving and Networked Services (DANS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1322597698","host_organization_name":"Royal Netherlands Academy of Arts and Sciences","host_organization_lineage":["https://openalex.org/I1322597698"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Proceedings of the 2012 American Control Conference, 27-29 Juni 2012, Montreal, Canada, 2455 - 2460","raw_type":"info:eu-repo/semantics/conferencepaper"}],"best_oa_location":{"id":"pmh:oai:pure.tue.nl:openaire/36e22dbc-ca42-4c33-a3b5-b4cbf43d8a64","is_oa":true,"landing_page_url":"https://research.tue.nl/en/publications/36e22dbc-ca42-4c33-a3b5-b4cbf43d8a64","pdf_url":"https://pure.tue.nl/ws/files/3513525/361900210069569.pdf","source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Oomen, T A E, Herpen, van, R M A, Quist, S J, Wal, van de, M M J, Bosgra, O H & Steinbuch, M 2012, Next-generation wafer stage motion control : connecting system identification and robust control. in Proceedings of the 2012 American Control Conference, 27-29 Juni 2012, Montreal, Canada. Institute of Electrical and Electronics Engineers, Piscataway, pp. 2455-2460.","raw_type":"info:eu-repo/semantics/publishedVersion"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2153472907.pdf","grobid_xml":"https://content.openalex.org/works/W2153472907.grobid-xml"},"referenced_works_count":21,"referenced_works":["https://openalex.org/W1515361063","https://openalex.org/W1964949272","https://openalex.org/W2001575886","https://openalex.org/W2015400448","https://openalex.org/W2024039457","https://openalex.org/W2041774163","https://openalex.org/W2054815431","https://openalex.org/W2069983741","https://openalex.org/W2091744997","https://openalex.org/W2103116139","https://openalex.org/W2103313140","https://openalex.org/W2131588967","https://openalex.org/W2132877957","https://openalex.org/W2137202178","https://openalex.org/W2137525473","https://openalex.org/W2138163143","https://openalex.org/W2139874362","https://openalex.org/W2157920349","https://openalex.org/W2171943640","https://openalex.org/W4249762338","https://openalex.org/W6673287005"],"related_works":["https://openalex.org/W2376683934","https://openalex.org/W2354203711","https://openalex.org/W2370564582","https://openalex.org/W2351921801","https://openalex.org/W2366480026","https://openalex.org/W2369719130","https://openalex.org/W2166679682","https://openalex.org/W2371508054","https://openalex.org/W2214501612","https://openalex.org/W2352184066"],"abstract_inverted_index":{"Next-generation":[0],"precision":[1],"motion":[2,31,63],"systems":[3,16],"are":[4,55],"lightweight":[5,15],"to":[6,42,71],"meet":[7],"stringent":[8],"requirements":[9],"regarding":[10],"throughput":[11],"and":[12,30,52,57],"accuracy.":[13],"Such":[14],"typically":[17],"exhibit":[18],"lightly":[19],"damped":[20],"flexible":[21,45],"dynamics":[22],"in":[23],"the":[24,38,44],"controller":[25],"cross-over":[26],"region.":[27],"State-of-the-art":[28],"modeling":[29],"control":[32,43,53,64],"design":[33],"procedures":[34],"do":[35],"not":[36],"deliver":[37],"required":[39],"model":[40],"fidelity":[41],"dynamical":[46],"behavior.":[47],"In":[48],"this":[49],"paper,":[50],"identification":[51],"challenges":[54],"investigated":[56],"a":[58,72,77],"novel":[59],"approach":[60],"for":[61],"next-generation":[62],"is":[65,69],"presented.":[66],"The":[67],"procedure":[68],"applied":[70],"multivariable":[73],"wafer":[74],"stage,":[75],"confirming":[76],"significant":[78],"performance":[79],"improvement.":[80]},"counts_by_year":[{"year":2021,"cited_by_count":2},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":1},{"year":2013,"cited_by_count":2}],"updated_date":"2026-04-04T16:13:02.066488","created_date":"2025-10-10T00:00:00"}