{"id":"https://openalex.org/W2153225005","doi":"https://doi.org/10.1109/acc.2011.5991154","title":"Dependence of film surface roughness on surface migration and lattice size in thin film deposition","display_name":"Dependence of film surface roughness on surface migration and lattice size in thin film deposition","publication_year":2011,"publication_date":"2011-06-01","ids":{"openalex":"https://openalex.org/W2153225005","doi":"https://doi.org/10.1109/acc.2011.5991154","mag":"2153225005"},"language":"en","primary_location":{"id":"doi:10.1109/acc.2011.5991154","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2011.5991154","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2011 American Control Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5020710242","display_name":"Jianqiao Huang","orcid":"https://orcid.org/0000-0002-6069-2489"},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"education","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Jianqiao Huang","raw_affiliation_strings":["Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, CA, USA"],"affiliations":[{"raw_affiliation_string":"Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052225834","display_name":"Gangshi Hu","orcid":null},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"education","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Gangshi Hu","raw_affiliation_strings":["Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, CA, USA"],"affiliations":[{"raw_affiliation_string":"Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012189317","display_name":"Gerassimos Orkoulas","orcid":null},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"education","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Gerassimos Orkoulas","raw_affiliation_strings":["Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, CA, USA"],"affiliations":[{"raw_affiliation_string":"Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5002367171","display_name":"Panagiotis D. Christofides","orcid":"https://orcid.org/0000-0002-8772-4348"},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"education","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Panagiotis D. Christofides","raw_affiliation_strings":["Department of Chemical and Biomolecular Engineering and the Department of Electrical Engineering, University of California, Los Angeles, CA, USA"],"affiliations":[{"raw_affiliation_string":"Department of Chemical and Biomolecular Engineering and the Department of Electrical Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5020710242"],"corresponding_institution_ids":["https://openalex.org/I161318765"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.17563598,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"44","issue":null,"first_page":"2957","last_page":"2962"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12141","display_name":"Fluid Dynamics and Thin Films","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12141","display_name":"Fluid Dynamics and Thin Films","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10591","display_name":"Theoretical and Computational Physics","score":0.9919999837875366,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9912999868392944,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/surface-roughness","display_name":"Surface roughness","score":0.7492140531539917},{"id":"https://openalex.org/keywords/deposition","display_name":"Deposition (geology)","score":0.6236878037452698},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6131089925765991},{"id":"https://openalex.org/keywords/grain-size","display_name":"Grain size","score":0.5795347094535828},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.5641441941261292},{"id":"https://openalex.org/keywords/surface-finish","display_name":"Surface finish","score":0.5451111793518066},{"id":"https://openalex.org/keywords/condensed-matter-physics","display_name":"Condensed matter physics","score":0.4968741238117218},{"id":"https://openalex.org/keywords/surface-energy","display_name":"Surface energy","score":0.4966893792152405},{"id":"https://openalex.org/keywords/lattice","display_name":"Lattice (music)","score":0.4770697355270386},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.24706235527992249},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.1568065881729126},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.14790001511573792},{"id":"https://openalex.org/keywords/geology","display_name":"Geology","score":0.11540722846984863}],"concepts":[{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.7492140531539917},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.6236878037452698},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6131089925765991},{"id":"https://openalex.org/C192191005","wikidata":"https://www.wikidata.org/wiki/Q466491","display_name":"Grain size","level":2,"score":0.5795347094535828},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.5641441941261292},{"id":"https://openalex.org/C71039073","wikidata":"https://www.wikidata.org/wiki/Q3439090","display_name":"Surface finish","level":2,"score":0.5451111793518066},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.4968741238117218},{"id":"https://openalex.org/C195839","wikidata":"https://www.wikidata.org/wiki/Q901959","display_name":"Surface energy","level":2,"score":0.4966893792152405},{"id":"https://openalex.org/C2781204021","wikidata":"https://www.wikidata.org/wiki/Q6497091","display_name":"Lattice (music)","level":2,"score":0.4770697355270386},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.24706235527992249},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1568065881729126},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.14790001511573792},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.11540722846984863},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/acc.2011.5991154","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2011.5991154","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2011 American Control Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Reduced inequalities","id":"https://metadata.un.org/sdg/10","score":0.6299999952316284}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":28,"referenced_works":["https://openalex.org/W1972457502","https://openalex.org/W1975642142","https://openalex.org/W1977429366","https://openalex.org/W1983762198","https://openalex.org/W1986593444","https://openalex.org/W1992354569","https://openalex.org/W2016665910","https://openalex.org/W2029743908","https://openalex.org/W2029875922","https://openalex.org/W2050716277","https://openalex.org/W2052421613","https://openalex.org/W2055897220","https://openalex.org/W2059602277","https://openalex.org/W2063271213","https://openalex.org/W2069741452","https://openalex.org/W2071123162","https://openalex.org/W2075825678","https://openalex.org/W2076449545","https://openalex.org/W2078763459","https://openalex.org/W2078878011","https://openalex.org/W2080691976","https://openalex.org/W2086132688","https://openalex.org/W2110044384","https://openalex.org/W2117742551","https://openalex.org/W2171594132","https://openalex.org/W2597246597","https://openalex.org/W2977474616","https://openalex.org/W4241366409"],"related_works":["https://openalex.org/W2386922414","https://openalex.org/W4313638943","https://openalex.org/W1966522691","https://openalex.org/W4304014137","https://openalex.org/W3034740403","https://openalex.org/W2032025132","https://openalex.org/W4297916609","https://openalex.org/W4315490000","https://openalex.org/W2349732462","https://openalex.org/W4378219002"],"abstract_inverted_index":{"This":[0],"work":[1],"focuses":[2],"on":[3,13,90],"the":[4,7,54,57,96,105,113,133,137],"study":[5],"of":[6,9,27,56,86],"dependence":[8,85,129],"film":[10,21,29],"surface":[11,14,43,58,71,87,109],"roughness":[12,50,88],"migration":[15,138],"and":[16,35,46,61,82,98,112],"lattice":[17,91,100],"size":[18,92],"in":[19,32,95,103,132],"thin":[20,28],"deposition":[22,30,41,107],"processes.":[23],"Two":[24],"different":[25],"models":[26],"processes,":[31],"both":[33,104],"one-dimension":[34],"two":[36],"dimensions,":[37],"are":[38,93],"considered:":[39],"random":[40,106],"with":[42,108,116],"relaxation":[44,110],"model":[45,111,115,135],"deposition/migration":[47,114,134],"model.":[48],"Surface":[49],"is":[51,62,130],"defined":[52],"as":[53],"root-mean-squares":[55],"height":[59],"profile":[60],"found":[63,131],"to":[64,74],"evolve":[65],"(starting":[66],"from":[67,121,142],"a":[68,83,126],"flat":[69],"initial":[70],"zero":[72,117],"value)":[73],"steady-state":[75],"values":[76],"at":[77],"large":[78],"times.":[79],"A":[80],"linear":[81],"logarithmic":[84],"square":[89],"observed":[94],"one-dimensional":[97],"two-dimensional":[99],"models,":[101],"respectively,":[102],"activation":[118,139],"energy":[119,140],"contribution":[120,141],"each":[122,143],"neighboring":[123,144],"particle.":[124],"Furthermore,":[125],"stronger":[127],"lattice-size":[128],"when":[136],"particle":[145],"becomes":[146],"significant.":[147]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}