{"id":"https://openalex.org/W2034455584","doi":"https://doi.org/10.1109/acc.2010.5530950","title":"Ultra-fast dual-stage vertical positioning for high performance SPMs","display_name":"Ultra-fast dual-stage vertical positioning for high performance SPMs","publication_year":2010,"publication_date":"2010-06-01","ids":{"openalex":"https://openalex.org/W2034455584","doi":"https://doi.org/10.1109/acc.2010.5530950","mag":"2034455584"},"language":"en","primary_location":{"id":"doi:10.1109/acc.2010.5530950","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2010.5530950","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2010 American Control Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5055319905","display_name":"Andrew J. Fleming","orcid":"https://orcid.org/0000-0001-7132-8458"},"institutions":[{"id":"https://openalex.org/I78757542","display_name":"University of Newcastle Australia","ror":"https://ror.org/00eae9z71","country_code":"AU","type":"education","lineage":["https://openalex.org/I78757542"]}],"countries":["AU"],"is_corresponding":true,"raw_author_name":"A J Fleming","raw_affiliation_strings":["School of Electrical Engineering and Computer Science, University of Newcastle, NSW, Australia","School of Electrical Engineering and Computer Science, The University of Newcastle, NSW 2300, Australia"],"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Computer Science, University of Newcastle, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]},{"raw_affiliation_string":"School of Electrical Engineering and Computer Science, The University of Newcastle, NSW 2300, Australia","institution_ids":["https://openalex.org/I78757542"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032723378","display_name":"Brian J. Kenton","orcid":null},"institutions":[{"id":"https://openalex.org/I134113660","display_name":"University of Nevada, Reno","ror":"https://ror.org/01keh0577","country_code":"US","type":"education","lineage":["https://openalex.org/I134113660"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"B J Kenton","raw_affiliation_strings":["Department of Mechanical Engineering, University of Nevada,\uc2a0Reno, Reno, NV, USA","Department of Mechanical Engineering, University of Nevada, Reno, NV, 89557-0312, USA"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, University of Nevada,\uc2a0Reno, Reno, NV, USA","institution_ids":["https://openalex.org/I134113660"]},{"raw_affiliation_string":"Department of Mechanical Engineering, University of Nevada, Reno, NV, 89557-0312, USA","institution_ids":["https://openalex.org/I134113660"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5027538794","display_name":"Kam K. Leang","orcid":"https://orcid.org/0000-0003-1189-1673"},"institutions":[{"id":"https://openalex.org/I134113660","display_name":"University of Nevada, Reno","ror":"https://ror.org/01keh0577","country_code":"US","type":"education","lineage":["https://openalex.org/I134113660"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K K Leang","raw_affiliation_strings":["Department of Mechanical Engineering, University of Nevada,\uc2a0Reno, Reno, NV, USA","Department of Mechanical Engineering, University of Nevada, Reno, NV, 89557-0312, USA"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, University of Nevada,\uc2a0Reno, Reno, NV, USA","institution_ids":["https://openalex.org/I134113660"]},{"raw_affiliation_string":"Department of Mechanical Engineering, University of Nevada, Reno, NV, 89557-0312, USA","institution_ids":["https://openalex.org/I134113660"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5055319905"],"corresponding_institution_ids":["https://openalex.org/I78757542"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.12293302,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"4975","last_page":"4980"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/scanner","display_name":"Scanner","score":0.722363293170929},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.7122429609298706},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.6538110375404358},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.48166024684906006},{"id":"https://openalex.org/keywords/dual","display_name":"Dual (grammatical number)","score":0.45925092697143555},{"id":"https://openalex.org/keywords/resonance","display_name":"Resonance (particle physics)","score":0.44389608502388},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.430591344833374},{"id":"https://openalex.org/keywords/microscope","display_name":"Microscope","score":0.41871732473373413},{"id":"https://openalex.org/keywords/scanning-tunneling-microscope","display_name":"Scanning tunneling microscope","score":0.41691118478775024},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3862946629524231},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3746148645877838},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.3554390072822571},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3475998342037201},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.32186535000801086},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.24953171610832214},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.18693530559539795},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.1790301501750946},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.17134630680084229},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.09669220447540283},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.09032317996025085}],"concepts":[{"id":"https://openalex.org/C2779751349","wikidata":"https://www.wikidata.org/wiki/Q1474480","display_name":"Scanner","level":2,"score":0.722363293170929},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.7122429609298706},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.6538110375404358},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.48166024684906006},{"id":"https://openalex.org/C2780980858","wikidata":"https://www.wikidata.org/wiki/Q110022","display_name":"Dual (grammatical number)","level":2,"score":0.45925092697143555},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.44389608502388},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.430591344833374},{"id":"https://openalex.org/C67649825","wikidata":"https://www.wikidata.org/wiki/Q196538","display_name":"Microscope","level":2,"score":0.41871732473373413},{"id":"https://openalex.org/C6518042","wikidata":"https://www.wikidata.org/wiki/Q175646","display_name":"Scanning tunneling microscope","level":2,"score":0.41691118478775024},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3862946629524231},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3746148645877838},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.3554390072822571},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3475998342037201},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.32186535000801086},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.24953171610832214},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.18693530559539795},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1790301501750946},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.17134630680084229},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.09669220447540283},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.09032317996025085},{"id":"https://openalex.org/C142362112","wikidata":"https://www.wikidata.org/wiki/Q735","display_name":"Art","level":0,"score":0.0},{"id":"https://openalex.org/C109214941","wikidata":"https://www.wikidata.org/wiki/Q18334","display_name":"Particle physics","level":1,"score":0.0},{"id":"https://openalex.org/C124952713","wikidata":"https://www.wikidata.org/wiki/Q8242","display_name":"Literature","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/acc.2010.5530950","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2010.5530950","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2010 American Control Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.75,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320308710","display_name":"Nevada Space Grant Consortium","ror":"https://ror.org/04eehbt36"},{"id":"https://openalex.org/F4320334704","display_name":"Australian Research Council","ror":"https://ror.org/05mmh0f86"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":27,"referenced_works":["https://openalex.org/W621430747","https://openalex.org/W1965748797","https://openalex.org/W1984883693","https://openalex.org/W1987015208","https://openalex.org/W1994120921","https://openalex.org/W1994450559","https://openalex.org/W2005642911","https://openalex.org/W2006657616","https://openalex.org/W2009461444","https://openalex.org/W2021287976","https://openalex.org/W2027537383","https://openalex.org/W2040585455","https://openalex.org/W2043494041","https://openalex.org/W2047970238","https://openalex.org/W2058209887","https://openalex.org/W2072875265","https://openalex.org/W2080215056","https://openalex.org/W2089035586","https://openalex.org/W2107814067","https://openalex.org/W2133226734","https://openalex.org/W2137870064","https://openalex.org/W2142203322","https://openalex.org/W2143862071","https://openalex.org/W2158423484","https://openalex.org/W2171278492","https://openalex.org/W2328268736","https://openalex.org/W4234163810"],"related_works":["https://openalex.org/W4232857084","https://openalex.org/W4245233074","https://openalex.org/W2167384162","https://openalex.org/W2001485867","https://openalex.org/W4402492658","https://openalex.org/W1517555227","https://openalex.org/W2653993779","https://openalex.org/W2911295078","https://openalex.org/W762151464","https://openalex.org/W2255520312"],"abstract_inverted_index":{"A":[0],"major":[1],"speed":[2,89],"limitation":[3],"of":[4,77,91],"Scanning":[5],"Probe":[6],"Microscopes":[7],"(SPMs)":[8],"is":[9,81,98],"the":[10,17,26,45,56,78],"low":[11],"vertical":[12,22,46,66],"feedback":[13,23,47],"bandwidth":[14],"imposed":[15],"by":[16],"mechanical":[18],"scanner":[19],"resonances.":[20],"The":[21,73,95],"controller":[24],"regulates":[25],"tip-sample":[27],"interaction":[28],"in":[29],"application":[30],"modes":[31],"such":[32],"as":[33],"constant-current":[34],"scanning":[35],"tunneling":[36],"microscopy":[37],"and":[38,68,101],"constant-force":[39],"atomic":[40],"force":[41],"microscopy.":[42],"To":[43],"increase":[44,55,90],"bandwidth,":[48],"dual-stage":[49,65,79,96],"actuators":[50],"have":[51],"been":[52],"proposed":[53],"to":[54,105],"first":[57,74],"resonance":[58,75],"frequency.":[59],"In":[60],"this":[61],"work,":[62],"an":[63],"ultra-fast":[64],"positioner":[67,80],"control":[69],"system":[70,97],"are":[71],"described.":[72],"frequency":[76],"88":[82],"kHz":[83],"which":[84],"permits":[85],"a":[86,92],"one-hundred":[87],"fold":[88],"commercial":[93,108],"AFM.":[94],"simple,":[99],"low-cost":[100],"can":[102],"be":[103],"retrofitted":[104],"almost":[106],"any":[107],"SPM.":[109]},"counts_by_year":[{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}