{"id":"https://openalex.org/W2009912085","doi":"https://doi.org/10.1109/acc.2010.5530598","title":"An integrated gain scheduled control design for an Electrostatic micro-Actuator with aerodynamic effects","display_name":"An integrated gain scheduled control design for an Electrostatic micro-Actuator with aerodynamic effects","publication_year":2010,"publication_date":"2010-06-01","ids":{"openalex":"https://openalex.org/W2009912085","doi":"https://doi.org/10.1109/acc.2010.5530598","mag":"2009912085"},"language":"en","primary_location":{"id":"doi:10.1109/acc.2010.5530598","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2010.5530598","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2010 American Control Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5064487509","display_name":"Marialena Vagia","orcid":"https://orcid.org/0000-0003-1185-5488"},"institutions":[{"id":"https://openalex.org/I174878644","display_name":"University of Patras","ror":"https://ror.org/017wvtq80","country_code":"GR","type":"education","lineage":["https://openalex.org/I174878644"]}],"countries":["GR"],"is_corresponding":true,"raw_author_name":"Marialena Vagia","raw_affiliation_strings":["Electrical and Computer Engineering Department, University of Patras, Rio Achaia, Greece","Electrical and Computer Engineering Department, University of Patras, 26500 Rio Achaia, Greece"],"affiliations":[{"raw_affiliation_string":"Electrical and Computer Engineering Department, University of Patras, Rio Achaia, Greece","institution_ids":["https://openalex.org/I174878644"]},{"raw_affiliation_string":"Electrical and Computer Engineering Department, University of Patras, 26500 Rio Achaia, Greece","institution_ids":["https://openalex.org/I174878644"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5048765370","display_name":"Anthony Tzes","orcid":"https://orcid.org/0000-0003-3709-2810"},"institutions":[{"id":"https://openalex.org/I174878644","display_name":"University of Patras","ror":"https://ror.org/017wvtq80","country_code":"GR","type":"education","lineage":["https://openalex.org/I174878644"]}],"countries":["GR"],"is_corresponding":false,"raw_author_name":"Anthony Tzes","raw_affiliation_strings":["Electrical and Computer Engineering Department, University of Patras, Rio Achaia, Greece","Electrical and Computer Engineering Department, University of Patras, 26500 Rio Achaia, Greece"],"affiliations":[{"raw_affiliation_string":"Electrical and Computer Engineering Department, University of Patras, Rio Achaia, Greece","institution_ids":["https://openalex.org/I174878644"]},{"raw_affiliation_string":"Electrical and Computer Engineering Department, University of Patras, 26500 Rio Achaia, Greece","institution_ids":["https://openalex.org/I174878644"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5064487509"],"corresponding_institution_ids":["https://openalex.org/I174878644"],"apc_list":null,"apc_paid":null,"fwci":0.2886,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.61378064,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"4175","last_page":"4180"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/aerodynamics","display_name":"Aerodynamics","score":0.727774977684021},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.7091027498245239},{"id":"https://openalex.org/keywords/microactuator","display_name":"Microactuator","score":0.6885876655578613},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.6251994371414185},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.6021257638931274},{"id":"https://openalex.org/keywords/feed-forward","display_name":"Feed forward","score":0.5982816815376282},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.5945519208908081},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.4053880572319031},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.38530147075653076},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.28027862310409546},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.20912989974021912},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.16308990120887756},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.13755905628204346}],"concepts":[{"id":"https://openalex.org/C13393347","wikidata":"https://www.wikidata.org/wiki/Q8424","display_name":"Aerodynamics","level":2,"score":0.727774977684021},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.7091027498245239},{"id":"https://openalex.org/C58373989","wikidata":"https://www.wikidata.org/wiki/Q6839208","display_name":"Microactuator","level":3,"score":0.6885876655578613},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.6251994371414185},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.6021257638931274},{"id":"https://openalex.org/C38858127","wikidata":"https://www.wikidata.org/wiki/Q5441228","display_name":"Feed forward","level":2,"score":0.5982816815376282},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.5945519208908081},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4053880572319031},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.38530147075653076},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.28027862310409546},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20912989974021912},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.16308990120887756},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.13755905628204346},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/acc.2010.5530598","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2010.5530598","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2010 American Control Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.5699999928474426,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":29,"referenced_works":["https://openalex.org/W1596634559","https://openalex.org/W1974144446","https://openalex.org/W1981957086","https://openalex.org/W1984609015","https://openalex.org/W1997377175","https://openalex.org/W2002120082","https://openalex.org/W2015891739","https://openalex.org/W2018886977","https://openalex.org/W2018916127","https://openalex.org/W2020562832","https://openalex.org/W2028969753","https://openalex.org/W2031711324","https://openalex.org/W2041152887","https://openalex.org/W2041419594","https://openalex.org/W2052570296","https://openalex.org/W2059626897","https://openalex.org/W2072661026","https://openalex.org/W2080935127","https://openalex.org/W2081030163","https://openalex.org/W2091916569","https://openalex.org/W2109093699","https://openalex.org/W2112233985","https://openalex.org/W2138841891","https://openalex.org/W2143685478","https://openalex.org/W2151437947","https://openalex.org/W2165286944","https://openalex.org/W2168051750","https://openalex.org/W2172258224","https://openalex.org/W2317666885"],"related_works":["https://openalex.org/W2511326268","https://openalex.org/W53357082","https://openalex.org/W2004080102","https://openalex.org/W2157368250","https://openalex.org/W1554317004","https://openalex.org/W1995089030","https://openalex.org/W2359306353","https://openalex.org/W1963616788","https://openalex.org/W2998653597","https://openalex.org/W1566779402"],"abstract_inverted_index":{"In":[0],"this":[1,100],"article":[2],"an":[3,14,38,62],"integrated":[4],"approach":[5],"regarding":[6],"the":[7,27,35,53,56,70,85,102,106,115,119,135,139,153,161,164],"modeling":[8,24,166],"and":[9,114,167],"control":[10,168],"design":[11],"aspects":[12],"of":[13,26,37,44,84,88,105,163],"electrostatic":[15],"microactuator":[16],"(EmA)":[17],"with":[18],"aerodynamic":[19],"effects":[20],"is":[21,32,50,59,67,81,90,108,131,145],"presented.":[22],"The":[23,47,77,143],"analysis":[25],"squeezed":[28],"film":[29,87],"damping":[30,78],"effect":[31],"investigated":[33],"in":[34],"case":[36],"EmA":[39,107],"composed":[40],"by":[41,61,69,73,92],"a":[42,74,93,123],"set":[43],"two":[45],"plates.":[46,157],"bottom":[48],"plate":[49,58],"clamped":[51],"to":[52,133],"ground,":[54],"while":[55],"moving":[57],"driven":[60],"electrically":[63],"induced":[64],"force":[65,71],"which":[66],"opposed":[68],"exerted":[72],"spring":[75],"element.":[76],"coefficient":[79],"that":[80],"caused":[82],"because":[83],"thin":[86],"air,":[89],"approximated":[91],"frequency":[94],"independent":[95],"nonlinear":[96,103],"static":[97],"term.":[98],"Under":[99],"assumption,":[101],"model":[104],"linearized":[109],"at":[110,147],"various":[111,148],"operating":[112,141,149],"points,":[113],"feedforward":[116],"compensator":[117],"provides":[118],"nominal":[120],"voltage.":[121],"Subsequently":[122],"gain":[124],"scheduled":[125],"H":[126],"<sub":[127],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[128],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">\u221e</sub>":[129],"-controller":[130],"used":[132],"tune":[134],"controller-parameters":[136],"depending":[137],"on":[138,152],"EmA's":[140],"conditions.":[142],"controller":[144],"designed":[146],"points":[150],"based":[151],"distance":[154],"between":[155],"its":[156],"Simulation":[158],"results":[159],"investigate":[160],"efficacy":[162],"suggested":[165],"techniques.":[169]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}