{"id":"https://openalex.org/W2111239616","doi":"https://doi.org/10.1109/acc.2009.5160202","title":"Model predictive control of film porosity in thin film deposition","display_name":"Model predictive control of film porosity in thin film deposition","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W2111239616","doi":"https://doi.org/10.1109/acc.2009.5160202","mag":"2111239616"},"language":"en","primary_location":{"id":"doi:10.1109/acc.2009.5160202","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2009.5160202","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 American Control Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5052225834","display_name":"Gangshi Hu","orcid":null},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"education","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Gangshi Hu","raw_affiliation_strings":["Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, CA, USA","Department of Chemical and Biomolecular Engineering, University of California, Los Angeles 90095, USA"],"affiliations":[{"raw_affiliation_string":"Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]},{"raw_affiliation_string":"Department of Chemical and Biomolecular Engineering, University of California, Los Angeles 90095, USA","institution_ids":["https://openalex.org/I161318765"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012189317","display_name":"Gerassimos Orkoulas","orcid":null},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"education","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Gerassimos Orkoulas","raw_affiliation_strings":["Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, CA, USA","Department of Chemical and Biomolecular Engineering, University of California, Los Angeles 90095, USA"],"affiliations":[{"raw_affiliation_string":"Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]},{"raw_affiliation_string":"Department of Chemical and Biomolecular Engineering, University of California, Los Angeles 90095, USA","institution_ids":["https://openalex.org/I161318765"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5002367171","display_name":"Panagiotis D. Christofides","orcid":"https://orcid.org/0000-0002-8772-4348"},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"education","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Panagiotis D. Christofides","raw_affiliation_strings":["Department of Chemical and Biomolecular Engineering, Department of Electrical Engineering, University of California, Los Angeles, CA, USA","Department of Chemical and Biomolecular Engineering and the Department of Electrical Engineering, University of California, Los Angeles, 90095 USA"],"affiliations":[{"raw_affiliation_string":"Department of Chemical and Biomolecular Engineering, Department of Electrical Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]},{"raw_affiliation_string":"Department of Chemical and Biomolecular Engineering and the Department of Electrical Engineering, University of California, Los Angeles, 90095 USA","institution_ids":["https://openalex.org/I161318765"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5052225834"],"corresponding_institution_ids":["https://openalex.org/I161318765"],"apc_list":null,"apc_paid":null,"fwci":0.1561,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.51754201,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"44","issue":null,"first_page":"4797","last_page":"4804"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10192","display_name":"Catalytic Processes in Materials Science","score":0.9340999722480774,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10192","display_name":"Catalytic Processes in Materials Science","score":0.9340999722480774,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12080","display_name":"Injection Molding Process and Properties","score":0.9262999892234802,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9047999978065491,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ode","display_name":"Ode","score":0.7942699790000916},{"id":"https://openalex.org/keywords/porosity","display_name":"Porosity","score":0.7310988903045654},{"id":"https://openalex.org/keywords/deposition","display_name":"Deposition (geology)","score":0.6590940952301025},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5527170300483704},{"id":"https://openalex.org/keywords/kinetic-monte-carlo","display_name":"Kinetic Monte Carlo","score":0.530122697353363},{"id":"https://openalex.org/keywords/context","display_name":"Context (archaeology)","score":0.5137466192245483},{"id":"https://openalex.org/keywords/monte-carlo-method","display_name":"Monte Carlo method","score":0.5071325302124023},{"id":"https://openalex.org/keywords/model-predictive-control","display_name":"Model predictive control","score":0.4844243824481964},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.4830263555049896},{"id":"https://openalex.org/keywords/statistical-physics","display_name":"Statistical physics","score":0.379222571849823},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.3650861084461212},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3549705147743225},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.3510655164718628},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.27667927742004395},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.22978171706199646},{"id":"https://openalex.org/keywords/applied-mathematics","display_name":"Applied mathematics","score":0.22350281476974487},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.20562857389450073},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.19727495312690735},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.11019983887672424},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.0978291928768158},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.09521910548210144}],"concepts":[{"id":"https://openalex.org/C34862557","wikidata":"https://www.wikidata.org/wiki/Q178985","display_name":"Ode","level":2,"score":0.7942699790000916},{"id":"https://openalex.org/C6648577","wikidata":"https://www.wikidata.org/wiki/Q622669","display_name":"Porosity","level":2,"score":0.7310988903045654},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.6590940952301025},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5527170300483704},{"id":"https://openalex.org/C45786274","wikidata":"https://www.wikidata.org/wiki/Q3333611","display_name":"Kinetic Monte Carlo","level":3,"score":0.530122697353363},{"id":"https://openalex.org/C2779343474","wikidata":"https://www.wikidata.org/wiki/Q3109175","display_name":"Context (archaeology)","level":2,"score":0.5137466192245483},{"id":"https://openalex.org/C19499675","wikidata":"https://www.wikidata.org/wiki/Q232207","display_name":"Monte Carlo method","level":2,"score":0.5071325302124023},{"id":"https://openalex.org/C172205157","wikidata":"https://www.wikidata.org/wiki/Q1782962","display_name":"Model predictive control","level":3,"score":0.4844243824481964},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.4830263555049896},{"id":"https://openalex.org/C121864883","wikidata":"https://www.wikidata.org/wiki/Q677916","display_name":"Statistical physics","level":1,"score":0.379222571849823},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.3650861084461212},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3549705147743225},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.3510655164718628},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.27667927742004395},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.22978171706199646},{"id":"https://openalex.org/C28826006","wikidata":"https://www.wikidata.org/wiki/Q33521","display_name":"Applied mathematics","level":1,"score":0.22350281476974487},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20562857389450073},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.19727495312690735},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.11019983887672424},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0978291928768158},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.09521910548210144},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/acc.2009.5160202","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2009.5160202","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 American Control Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":24,"referenced_works":["https://openalex.org/W1536997931","https://openalex.org/W1905852331","https://openalex.org/W1982115118","https://openalex.org/W1991609705","https://openalex.org/W1996225983","https://openalex.org/W2001620602","https://openalex.org/W2010701932","https://openalex.org/W2016665910","https://openalex.org/W2021548931","https://openalex.org/W2042321087","https://openalex.org/W2047425478","https://openalex.org/W2057809108","https://openalex.org/W2062502080","https://openalex.org/W2063326440","https://openalex.org/W2071123162","https://openalex.org/W2078763459","https://openalex.org/W2078878011","https://openalex.org/W2117742551","https://openalex.org/W2132372499","https://openalex.org/W2137971290","https://openalex.org/W2140045399","https://openalex.org/W2149396049","https://openalex.org/W2171594132","https://openalex.org/W4241366409"],"related_works":["https://openalex.org/W2371448224","https://openalex.org/W3134495997","https://openalex.org/W2363680170","https://openalex.org/W2376428685","https://openalex.org/W4256082577","https://openalex.org/W625783435","https://openalex.org/W2048742619","https://openalex.org/W2611915572","https://openalex.org/W2012570191","https://openalex.org/W2319528889"],"abstract_inverted_index":{"A":[0],"model":[1,140],"predictive":[2,141],"controller":[3],"is":[4,21],"developed":[5,128],"to":[6,47,76,91,155],"regulate":[7,156],"film":[8,16,52,60,69,78,97,150,161,181],"porosity":[9,182],"and":[10,39,41,45,71,81,99,152,167,176],"minimize":[11],"its":[12,72,100,153],"fluctuation":[13,73],"in":[14,185],"thin":[15],"deposition.":[17],"The":[18,33,102,127],"deposition":[19,122,190],"process":[20,123,191],"modeled":[22],"via":[23],"kinetic":[24],"Monte":[25],"Carlo":[26],"(kMC)":[27],"simulation":[28],"on":[29,110,148],"a":[30,164],"triangular":[31],"lattice.":[32],"microscopic":[34],"events":[35],"involve":[36],"atom":[37],"adsorption":[38],"migration":[40],"allow":[42],"for":[43,136],"vacancies":[44],"overhangs":[46],"develop.":[48],"Appropriate":[49],"definitions":[50],"of":[51,59,68,96,104,113,120,139,160,178,188],"site":[53],"occupancy":[54],"ratio":[55],"(SOR),":[56],"i.e.,":[57],"fraction":[58],"sites":[61],"occupied":[62],"by":[63],"particles":[64],"over":[65],"total":[66],"number":[67],"sites,":[70],"are":[74,88,108,131],"introduced":[75],"describe":[77,92],"porosity.":[79],"Deterministic":[80],"stochastic":[82],"ordinary":[83],"differential":[84],"equation":[85],"(ODE)":[86],"models":[87,107,130],"also":[89],"constructed":[90],"the":[93,105,111,117,121,134,137,149,157,174,179,186,189],"time":[94],"evolution":[95],"SOR":[98,151,162],"fluctuation.":[101],"coefficients":[103],"ODE":[106,129],"estimated":[109],"basis":[112,135],"data":[114],"obtained":[115],"from":[116],"kMC":[118],"simulator":[119],"using":[124],"least-square":[125],"methods.":[126],"used":[132],"as":[133],"design":[138],"control":[142,183],"(MPC)":[143],"algorithms":[144],"that":[145],"include":[146],"penalty":[147],"variance":[154],"expected":[158],"value":[159],"at":[163],"desired":[165],"level":[166],"reduce":[168],"run-to-run":[169],"fluctuations.":[170],"Simulation":[171],"results":[172],"demonstrate":[173],"applicability":[175],"effectiveness":[177],"proposed":[180],"method":[184],"context":[187],"under":[192],"consideration.":[193]},"counts_by_year":[{"year":2013,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}