{"id":"https://openalex.org/W2147657105","doi":"https://doi.org/10.1109/acc.2009.5160007","title":"Modeling and compensation of asymmetric hysteresis in a piezo actuated metrological AFM","display_name":"Modeling and compensation of asymmetric hysteresis in a piezo actuated metrological AFM","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W2147657105","doi":"https://doi.org/10.1109/acc.2009.5160007","mag":"2147657105"},"language":"en","primary_location":{"id":"doi:10.1109/acc.2009.5160007","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2009.5160007","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 American Control Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5110272227","display_name":"Roel Merry","orcid":null},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Roel Merry","raw_affiliation_strings":["Department of Mechanical Engineering, Control Systems Technology group, Eindhovan University of Technology, Eindhoven, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Control Systems Technology group, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038889602","display_name":"Mustafa Uyanik","orcid":null},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Mustafa Uyanik","raw_affiliation_strings":["Department of Mechanical Engineering, Control Systems Technology group, Eindhovan University of Technology, Eindhoven, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Control Systems Technology group, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033596147","display_name":"Ren\u00e9 van de Molengraft","orcid":"https://orcid.org/0000-0002-5095-4297"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Rene van de Molengraft","raw_affiliation_strings":["Department of Mechanical Engineering, Control Systems Technology group, Eindhovan University of Technology, Eindhoven, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Control Systems Technology group, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026038138","display_name":"M. Steinbuch","orcid":"https://orcid.org/0000-0002-1469-1696"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Maarten Steinbuch","raw_affiliation_strings":["Department of Mechanical Engineering, Control Systems Technology group, Eindhovan University of Technology, Eindhoven, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Control Systems Technology group, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058011573","display_name":"Richard Koops","orcid":null},"institutions":[{"id":"https://openalex.org/I4210164637","display_name":"VSL Dutch Metrology Institute","ror":"https://ror.org/05ap1vt50","country_code":"NL","type":"facility","lineage":["https://openalex.org/I4210164637"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Richard Koops","raw_affiliation_strings":["Department of Length, NMI Van Swinden Laboratorium B. V, Delft, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Length, NMI Van Swinden Laboratorium B. V, Delft, Netherlands","institution_ids":["https://openalex.org/I4210164637"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5087458969","display_name":"Marijn van Veghel","orcid":"https://orcid.org/0000-0003-1676-2379"},"institutions":[{"id":"https://openalex.org/I4210164637","display_name":"VSL Dutch Metrology Institute","ror":"https://ror.org/05ap1vt50","country_code":"NL","type":"facility","lineage":["https://openalex.org/I4210164637"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Marijn van Veghel","raw_affiliation_strings":["Department of Length, NMI Van Swinden Laboratorium B. V, Delft, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Length, NMI Van Swinden Laboratorium B. V, Delft, Netherlands","institution_ids":["https://openalex.org/I4210164637"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.6931,"has_fulltext":false,"cited_by_count":10,"citation_normalized_percentile":{"value":0.72201486,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"967","last_page":"972"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10188","display_name":"Advanced machining processes and optimization","score":0.9934999942779541,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.7804958820343018},{"id":"https://openalex.org/keywords/hysteresis","display_name":"Hysteresis","score":0.7613898515701294},{"id":"https://openalex.org/keywords/feed-forward","display_name":"Feed forward","score":0.755957841873169},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.6777021288871765},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.6402438282966614},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.5803190469741821},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.5797032117843628},{"id":"https://openalex.org/keywords/asymmetry","display_name":"Asymmetry","score":0.5497074127197266},{"id":"https://openalex.org/keywords/dimensional-metrology","display_name":"Dimensional metrology","score":0.49692896008491516},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.4672565162181854},{"id":"https://openalex.org/keywords/stack","display_name":"Stack (abstract data type)","score":0.4487423896789551},{"id":"https://openalex.org/keywords/offset","display_name":"Offset (computer science)","score":0.4382167160511017},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3913475573062897},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2722960114479065},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.2683648467063904},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2630612552165985},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2417294979095459},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.20478728413581848},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.19778335094451904},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.18459591269493103},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.09844818711280823}],"concepts":[{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.7804958820343018},{"id":"https://openalex.org/C123299182","wikidata":"https://www.wikidata.org/wiki/Q190837","display_name":"Hysteresis","level":2,"score":0.7613898515701294},{"id":"https://openalex.org/C38858127","wikidata":"https://www.wikidata.org/wiki/Q5441228","display_name":"Feed forward","level":2,"score":0.755957841873169},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6777021288871765},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.6402438282966614},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.5803190469741821},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.5797032117843628},{"id":"https://openalex.org/C38976095","wikidata":"https://www.wikidata.org/wiki/Q752641","display_name":"Asymmetry","level":2,"score":0.5497074127197266},{"id":"https://openalex.org/C165880335","wikidata":"https://www.wikidata.org/wiki/Q5277273","display_name":"Dimensional metrology","level":3,"score":0.49692896008491516},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.4672565162181854},{"id":"https://openalex.org/C9395851","wikidata":"https://www.wikidata.org/wiki/Q177929","display_name":"Stack (abstract data type)","level":2,"score":0.4487423896789551},{"id":"https://openalex.org/C175291020","wikidata":"https://www.wikidata.org/wiki/Q1156822","display_name":"Offset (computer science)","level":2,"score":0.4382167160511017},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3913475573062897},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2722960114479065},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.2683648467063904},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2630612552165985},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2417294979095459},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.20478728413581848},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.19778335094451904},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.18459591269493103},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.09844818711280823},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.1109/acc.2009.5160007","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2009.5160007","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 American Control Conference","raw_type":"proceedings-article"},{"id":"pmh:oai:pure.tue.nl:openaire_cris_publications/a3170ca1-26ad-4758-a744-e10b3b2298e6","is_oa":false,"landing_page_url":"https://research.tue.nl/en/publications/a3170ca1-26ad-4758-a744-e10b3b2298e6","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Merry, R J E, Uyanik, M, Koops, K R, Molengraft, van de, M J G, Veghel, van, M G A & Steinbuch, M 2009, Modeling and compensation of asymmetric hysteresis in a piezo actuated metrological AFM. in Proceedings of the 28th American Control Conference, (ACC '09) 10 - 12 June 2009, St. Louis, MO, USA. Institute of Electrical and Electronics Engineers, Piscataway, NJ, pp. 967-972. https://doi.org/10.1109/ACC.2009.5160007","raw_type":"info:eu-repo/semantics/publishedVersion"},{"id":"pmh:660236","is_oa":false,"landing_page_url":"http://library.tue.nl/csp/dare/LinkToRepository.csp?recordnumber=660236","pdf_url":null,"source":{"id":"https://openalex.org/S4406923046","display_name":"TU/e Research Portal (Eindhoven University of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":""},{"id":"pmh:oai:library.tue.nl:660236","is_oa":false,"landing_page_url":"http://repository.tue.nl/660236","pdf_url":null,"source":{"id":"https://openalex.org/S4406923046","display_name":"TU/e Research Portal (Eindhoven University of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":""},{"id":"pmh:tue:oai:pure.tue.nl:publications/a3170ca1-26ad-4758-a744-e10b3b2298e6","is_oa":false,"landing_page_url":"https://research.tue.nl/nl/publications/a3170ca1-26ad-4758-a744-e10b3b2298e6","pdf_url":null,"source":{"id":"https://openalex.org/S4306401843","display_name":"Data Archiving and Networked Services (DANS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1322597698","host_organization_name":"Royal Netherlands Academy of Arts and Sciences","host_organization_lineage":["https://openalex.org/I1322597698"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Proceedings of the 28th American Control Conference, (ACC '09) 10 - 12 June 2009, St. Louis, MO, USA, 967 - 972","raw_type":"info:eu-repo/semantics/conferencepaper"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.7900000214576721,"display_name":"Peace, Justice and strong institutions","id":"https://metadata.un.org/sdg/16"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W611561342","https://openalex.org/W1888908880","https://openalex.org/W1988809026","https://openalex.org/W1996837265","https://openalex.org/W2000876094","https://openalex.org/W2001992881","https://openalex.org/W2020358125","https://openalex.org/W2025264580","https://openalex.org/W2027450255","https://openalex.org/W2043494041","https://openalex.org/W2081549908","https://openalex.org/W2143283580","https://openalex.org/W2146467343","https://openalex.org/W2148773127","https://openalex.org/W2171438948","https://openalex.org/W2739094986","https://openalex.org/W3150248096","https://openalex.org/W3179488886","https://openalex.org/W6681540480","https://openalex.org/W6741508060","https://openalex.org/W6798606242"],"related_works":["https://openalex.org/W2061967405","https://openalex.org/W2392646414","https://openalex.org/W2008976958","https://openalex.org/W2082858021","https://openalex.org/W4248596843","https://openalex.org/W2155564425","https://openalex.org/W2022123040","https://openalex.org/W1553022279","https://openalex.org/W2069864959","https://openalex.org/W2602154734"],"abstract_inverted_index":{"The":[0,33,60,75,107],"manipulation":[1],"of":[2,57,123,144],"samples":[3],"in":[4],"atomic":[5],"force":[6],"microscopes":[7],"(AFMs)":[8],"is":[9,31,68,95,133],"often":[10],"performed":[11],"using":[12],"piezoelectric":[13],"actuators.":[14],"In":[15],"this":[16],"paper,":[17],"a":[18,22,47,78,129],"metrological":[19,138],"AFM":[20,139],"with":[21,120],"3":[23,61],"degree-of-freedom":[24],"(DOF)":[25],"stage":[26,63],"driven":[27],"by":[28,70],"piezo-stack":[29],"actuators":[30,35],"considered.":[32],"piezo":[34],"exhibit":[36],"hysteresis,":[37,66],"which":[38,67],"can":[39],"change":[40],"the":[41,51,55,58,72,87,99,113,127,137,142,145,150],"system":[42],"dynamics":[43],"and/or":[44],"acts":[45],"as":[46],"non-linear":[48],"disturbance":[49],"on":[50,126,136],"system.":[52],"This":[53],"deteriorates":[54],"performance":[56],"AFM.":[59],"DOF":[62],"exhibits":[64],"asymmetric":[65,114],"modeled":[69],"extending":[71],"Coleman-Hodgdon":[73,110],"model.":[74],"asymmetry":[76,85],"includes":[77],"scan":[79,105,118],"range":[80],"dependent":[81],"offset":[82],"and":[83,89],"an":[84,121],"between":[86],"trace":[88],"retrace":[90],"directions.":[91],"Non-linear":[92],"multi-variable":[93],"optimization":[94],"employed":[96],"to":[97],"derive":[98],"optimal":[100],"generic":[101],"model":[102,111],"for":[103],"all":[104,117],"ranges.":[106],"proposed":[108],"extended":[109],"describes":[112],"hysteresis":[115,146],"over":[116],"ranges":[119],"accuracy":[122],"97%.":[124],"Based":[125],"model,":[128],"feedforward":[130,147],"compensation":[131],"method":[132],"developed.":[134],"Experiments":[135],"show":[140],"that":[141],"application":[143],"largely":[148],"improves":[149],"scanning":[151],"accuracy.":[152]},"counts_by_year":[{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}