{"id":"https://openalex.org/W2134288761","doi":"https://doi.org/10.1109/acc.2007.4282987","title":"A General Framework for State Estimation in High-Mix Semiconductor Manufacturing","display_name":"A General Framework for State Estimation in High-Mix Semiconductor Manufacturing","publication_year":2007,"publication_date":"2007-07-01","ids":{"openalex":"https://openalex.org/W2134288761","doi":"https://doi.org/10.1109/acc.2007.4282987","mag":"2134288761"},"language":"en","primary_location":{"id":"doi:10.1109/acc.2007.4282987","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2007.4282987","pdf_url":null,"source":{"id":"https://openalex.org/S4210168941","display_name":"Proceedings of the ... American Control Conference/Proceedings of the American Control Conference","issn_l":"0743-1619","issn":["0743-1619","2378-5861"],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 American Control Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100346183","display_name":"Jin Wang","orcid":"https://orcid.org/0000-0002-7638-8537"},"institutions":[{"id":"https://openalex.org/I82497590","display_name":"Auburn University","ror":"https://ror.org/02v80fc35","country_code":"US","type":"education","lineage":["https://openalex.org/I82497590"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Jin Wang","raw_affiliation_strings":["Department of Chemical Engineering, Aubum University, Auburn, AL, USA","Auburn Univ-Auburn#TAB#"],"affiliations":[{"raw_affiliation_string":"Department of Chemical Engineering, Aubum University, Auburn, AL, USA","institution_ids":["https://openalex.org/I82497590"]},{"raw_affiliation_string":"Auburn Univ-Auburn#TAB#","institution_ids":["https://openalex.org/I82497590"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050980626","display_name":"Q. Peter He","orcid":"https://orcid.org/0000-0002-2474-5950"},"institutions":[{"id":"https://openalex.org/I6026837","display_name":"Tuskegee University","ror":"https://ror.org/0137n4m74","country_code":"US","type":"education","lineage":["https://openalex.org/I6026837"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Q. Peter He","raw_affiliation_strings":["Department of Chemical Engineering, Tuskegee University, Tuskegee, AL, USA","Department of Chemical Engineering, Tuskegee University, Tuskegee, AL 36088, USA. qhe@tuskegee.edu"],"affiliations":[{"raw_affiliation_string":"Department of Chemical Engineering, Tuskegee University, Tuskegee, AL, USA","institution_ids":["https://openalex.org/I6026837"]},{"raw_affiliation_string":"Department of Chemical Engineering, Tuskegee University, Tuskegee, AL 36088, USA. qhe@tuskegee.edu","institution_ids":["https://openalex.org/I6026837"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110887286","display_name":"Thomas F. Edgar","orcid":null},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Thomas F. Edgar","raw_affiliation_strings":["Department of Chemical Engineering, University of Texas, Austin, Austin, TX, USA","Department of Chemical Engineering, The University of Texas at Austin, Austin, TX 78712, USA. edgar@che.utexas.edu"],"affiliations":[{"raw_affiliation_string":"Department of Chemical Engineering, University of Texas, Austin, Austin, TX, USA","institution_ids":["https://openalex.org/I86519309"]},{"raw_affiliation_string":"Department of Chemical Engineering, The University of Texas at Austin, Austin, TX 78712, USA. edgar@che.utexas.edu","institution_ids":["https://openalex.org/I86519309"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5100346183"],"corresponding_institution_ids":["https://openalex.org/I82497590"],"apc_list":null,"apc_paid":null,"fwci":2.7459,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.89490741,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"3636","last_page":"3641"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.9959999918937683,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T11236","display_name":"Control Systems and Identification","score":0.9922999739646912,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/kalman-filter","display_name":"Kalman filter","score":0.801863431930542},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.633857250213623},{"id":"https://openalex.org/keywords/recursive-least-squares-filter","display_name":"Recursive least squares filter","score":0.6194009184837341},{"id":"https://openalex.org/keywords/state","display_name":"State (computer science)","score":0.560302197933197},{"id":"https://openalex.org/keywords/recursive-bayesian-estimation","display_name":"Recursive Bayesian estimation","score":0.5439874529838562},{"id":"https://openalex.org/keywords/estimation","display_name":"Estimation","score":0.4849405586719513},{"id":"https://openalex.org/keywords/least-squares-function-approximation","display_name":"Least-squares function approximation","score":0.4761926233768463},{"id":"https://openalex.org/keywords/extended-kalman-filter","display_name":"Extended Kalman filter","score":0.45791804790496826},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.4524362087249756},{"id":"https://openalex.org/keywords/markov-process","display_name":"Markov process","score":0.45144930481910706},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4214667081832886},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.4118993282318115},{"id":"https://openalex.org/keywords/bayesian-probability","display_name":"Bayesian probability","score":0.4071105718612671},{"id":"https://openalex.org/keywords/adaptive-filter","display_name":"Adaptive filter","score":0.3179503083229065},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.21283629536628723},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.20215538144111633},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.17264729738235474},{"id":"https://openalex.org/keywords/estimator","display_name":"Estimator","score":0.15892192721366882},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.1363142728805542}],"concepts":[{"id":"https://openalex.org/C157286648","wikidata":"https://www.wikidata.org/wiki/Q846780","display_name":"Kalman filter","level":2,"score":0.801863431930542},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.633857250213623},{"id":"https://openalex.org/C145249878","wikidata":"https://www.wikidata.org/wiki/Q2835868","display_name":"Recursive least squares filter","level":3,"score":0.6194009184837341},{"id":"https://openalex.org/C48103436","wikidata":"https://www.wikidata.org/wiki/Q599031","display_name":"State (computer science)","level":2,"score":0.560302197933197},{"id":"https://openalex.org/C40343088","wikidata":"https://www.wikidata.org/wiki/Q3059012","display_name":"Recursive Bayesian estimation","level":3,"score":0.5439874529838562},{"id":"https://openalex.org/C96250715","wikidata":"https://www.wikidata.org/wiki/Q965330","display_name":"Estimation","level":2,"score":0.4849405586719513},{"id":"https://openalex.org/C9936470","wikidata":"https://www.wikidata.org/wiki/Q6510405","display_name":"Least-squares function approximation","level":3,"score":0.4761926233768463},{"id":"https://openalex.org/C206833254","wikidata":"https://www.wikidata.org/wiki/Q5421817","display_name":"Extended Kalman filter","level":3,"score":0.45791804790496826},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.4524362087249756},{"id":"https://openalex.org/C159886148","wikidata":"https://www.wikidata.org/wiki/Q176645","display_name":"Markov process","level":2,"score":0.45144930481910706},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4214667081832886},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.4118993282318115},{"id":"https://openalex.org/C107673813","wikidata":"https://www.wikidata.org/wiki/Q812534","display_name":"Bayesian probability","level":2,"score":0.4071105718612671},{"id":"https://openalex.org/C102248274","wikidata":"https://www.wikidata.org/wiki/Q168388","display_name":"Adaptive filter","level":2,"score":0.3179503083229065},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.21283629536628723},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.20215538144111633},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.17264729738235474},{"id":"https://openalex.org/C185429906","wikidata":"https://www.wikidata.org/wiki/Q1130160","display_name":"Estimator","level":2,"score":0.15892192721366882},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.1363142728805542},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C201995342","wikidata":"https://www.wikidata.org/wiki/Q682496","display_name":"Systems engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/acc.2007.4282987","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2007.4282987","pdf_url":null,"source":{"id":"https://openalex.org/S4210168941","display_name":"Proceedings of the ... American Control Conference/Proceedings of the American Control Conference","issn_l":"0743-1619","issn":["0743-1619","2378-5861"],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 American Control Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":25,"referenced_works":["https://openalex.org/W1970982546","https://openalex.org/W1974333170","https://openalex.org/W1974669302","https://openalex.org/W1984269500","https://openalex.org/W2003433935","https://openalex.org/W2052786390","https://openalex.org/W2073296645","https://openalex.org/W2076949538","https://openalex.org/W2101949001","https://openalex.org/W2104897439","https://openalex.org/W2106983387","https://openalex.org/W2118806609","https://openalex.org/W2130621851","https://openalex.org/W2131483600","https://openalex.org/W2134610525","https://openalex.org/W2154180415","https://openalex.org/W2159375928","https://openalex.org/W2164128846","https://openalex.org/W2165673758","https://openalex.org/W2170836716","https://openalex.org/W2170909262","https://openalex.org/W2913465992","https://openalex.org/W4232239282","https://openalex.org/W4250223708","https://openalex.org/W6759043479"],"related_works":["https://openalex.org/W2081837274","https://openalex.org/W2027630946","https://openalex.org/W3119704784","https://openalex.org/W2544484136","https://openalex.org/W2529395309","https://openalex.org/W2164852895","https://openalex.org/W4282823030","https://openalex.org/W3134357585","https://openalex.org/W3040496336","https://openalex.org/W4242740646"],"abstract_inverted_index":{"In":[0],"this":[1],"work,":[2],"the":[3,17,36,46,65,76,95,107,110],"characteristics":[4],"inherent":[5],"in":[6],"non-":[7],"threaded":[8],"state":[9,13,38,58],"estimation":[10,14,39,59],"problems,":[11],"i.e.,":[12],"without":[15],"segregating":[16],"process":[18],"data":[19],"into":[20],"different":[21],"bins,":[22],"are":[23,73,82,101],"analyzed":[24,74],"for":[25,35,94],"high-mix":[26],"semiconductor":[27],"manufacturing":[28],"processes.":[29],"A":[30],"general":[31,77],"framework":[32,42],"is":[33,43],"introduced":[34],"non-threaded":[37,57],"methods.":[40,113],"The":[41,79],"based":[44,61],"on":[45,62],"best":[47],"linear":[48],"unbiased":[49],"estimate":[50],"(BLUE)":[51],"of":[52,109],"a":[53,88],"Gauss-Markov":[54],"model,":[55],"and":[56,68,85,98,103],"methods":[60,81,100],"least":[63,70],"squares,":[64],"Kalman":[66,96],"filter":[67],"recursive":[69],"squares":[71],"(RLS)":[72],"using":[75,87],"framework.":[78],"three":[80],"compared":[83],"analytically":[84],"by":[86],"simulation":[89],"example.":[90],"Bayesian-enhanced":[91],"adaptive":[92,112],"versions":[93],"filter-based":[97],"RLS-based":[99],"proposed":[102,111],"several":[104],"examples":[105],"demonstrate":[106],"effectiveness":[108]},"counts_by_year":[{"year":2016,"cited_by_count":1},{"year":2013,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}