{"id":"https://openalex.org/W2104289457","doi":"https://doi.org/10.1109/acc.2007.4282885","title":"Moving horizon estimation for in situ monitoring of chemical vapor deposition process","display_name":"Moving horizon estimation for in situ monitoring of chemical vapor deposition process","publication_year":2007,"publication_date":"2007-07-01","ids":{"openalex":"https://openalex.org/W2104289457","doi":"https://doi.org/10.1109/acc.2007.4282885","mag":"2104289457"},"language":"en","primary_location":{"id":"doi:10.1109/acc.2007.4282885","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2007.4282885","pdf_url":null,"source":{"id":"https://openalex.org/S4210168941","display_name":"Proceedings of the ... American Control Conference/Proceedings of the American Control Conference","issn_l":"0743-1619","issn":["0743-1619","2378-5861"],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 American Control Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5006328497","display_name":"Rentian Xiong","orcid":null},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Rentian Xiong","raw_affiliation_strings":["School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, GA, USA","Georgia Institute of Technology , Atlanta#TAB#"],"affiliations":[{"raw_affiliation_string":"School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Georgia Institute of Technology , Atlanta#TAB#","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108397629","display_name":"Martha A. Gallivan","orcid":null},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Martha A. Gallivan","raw_affiliation_strings":["Faculty of the School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, GA, USA","Faculty of the School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0100, USA. mgallivan@chbe.gatech.edu"],"affiliations":[{"raw_affiliation_string":"Faculty of the School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Faculty of the School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0100, USA. mgallivan@chbe.gatech.edu","institution_ids":["https://openalex.org/I130701444"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5006328497"],"corresponding_institution_ids":["https://openalex.org/I130701444"],"apc_list":null,"apc_paid":null,"fwci":2.3494,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.86892595,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"64","issue":null,"first_page":"3648","last_page":"3653"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9768000245094299,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9768000245094299,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11087","display_name":"Solidification and crystal growth phenomena","score":0.9693999886512756,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9605000019073486,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/chemical-vapor-deposition","display_name":"Chemical vapor deposition","score":0.5963041186332703},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5580920577049255},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.5460947751998901},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.5320635437965393},{"id":"https://openalex.org/keywords/extinction","display_name":"Extinction (optical mineralogy)","score":0.530208945274353},{"id":"https://openalex.org/keywords/weighting","display_name":"Weighting","score":0.4809236228466034},{"id":"https://openalex.org/keywords/molar-absorptivity","display_name":"Molar absorptivity","score":0.4660647213459015},{"id":"https://openalex.org/keywords/metalorganic-vapour-phase-epitaxy","display_name":"Metalorganic vapour phase epitaxy","score":0.46333563327789307},{"id":"https://openalex.org/keywords/deposition","display_name":"Deposition (geology)","score":0.44843098521232605},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4304659962654114},{"id":"https://openalex.org/keywords/growth-rate","display_name":"Growth rate","score":0.4283781945705414},{"id":"https://openalex.org/keywords/in-situ","display_name":"In situ","score":0.424360990524292},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3694854974746704},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.3598143756389618},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.34921300411224365},{"id":"https://openalex.org/keywords/mineralogy","display_name":"Mineralogy","score":0.3261643350124359},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.2693723440170288},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.22420570254325867},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.1939479410648346},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.18179169297218323},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1519021987915039},{"id":"https://openalex.org/keywords/geology","display_name":"Geology","score":0.11873000860214233},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.11860373616218567},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.10127115249633789},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.08866119384765625}],"concepts":[{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.5963041186332703},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5580920577049255},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.5460947751998901},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.5320635437965393},{"id":"https://openalex.org/C101991246","wikidata":"https://www.wikidata.org/wiki/Q5422078","display_name":"Extinction (optical mineralogy)","level":2,"score":0.530208945274353},{"id":"https://openalex.org/C183115368","wikidata":"https://www.wikidata.org/wiki/Q856577","display_name":"Weighting","level":2,"score":0.4809236228466034},{"id":"https://openalex.org/C76046532","wikidata":"https://www.wikidata.org/wiki/Q900239","display_name":"Molar absorptivity","level":2,"score":0.4660647213459015},{"id":"https://openalex.org/C175665537","wikidata":"https://www.wikidata.org/wiki/Q1924991","display_name":"Metalorganic vapour phase epitaxy","level":4,"score":0.46333563327789307},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.44843098521232605},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4304659962654114},{"id":"https://openalex.org/C2778312390","wikidata":"https://www.wikidata.org/wiki/Q4139973","display_name":"Growth rate","level":2,"score":0.4283781945705414},{"id":"https://openalex.org/C2777822432","wikidata":"https://www.wikidata.org/wiki/Q216681","display_name":"In situ","level":2,"score":0.424360990524292},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3694854974746704},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3598143756389618},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.34921300411224365},{"id":"https://openalex.org/C199289684","wikidata":"https://www.wikidata.org/wiki/Q83353","display_name":"Mineralogy","level":1,"score":0.3261643350124359},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2693723440170288},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.22420570254325867},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.1939479410648346},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.18179169297218323},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1519021987915039},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.11873000860214233},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.11860373616218567},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.10127115249633789},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.08866119384765625},{"id":"https://openalex.org/C110738630","wikidata":"https://www.wikidata.org/wiki/Q1135540","display_name":"Epitaxy","level":3,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/acc.2007.4282885","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2007.4282885","pdf_url":null,"source":{"id":"https://openalex.org/S4210168941","display_name":"Proceedings of the ... American Control Conference/Proceedings of the American Control Conference","issn_l":"0743-1619","issn":["0743-1619","2378-5861"],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 American Control Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W1979397344","https://openalex.org/W1981726496","https://openalex.org/W1998610569","https://openalex.org/W2006644469","https://openalex.org/W2017273309","https://openalex.org/W2033498488","https://openalex.org/W2037914955","https://openalex.org/W2050372511","https://openalex.org/W2057184806","https://openalex.org/W2059281084","https://openalex.org/W2064298218","https://openalex.org/W2094507953","https://openalex.org/W2129276668","https://openalex.org/W2143558629","https://openalex.org/W2158861758","https://openalex.org/W2162123284","https://openalex.org/W2165243626"],"related_works":["https://openalex.org/W1969480571","https://openalex.org/W2180954594","https://openalex.org/W366812453","https://openalex.org/W2052835778","https://openalex.org/W2108016968","https://openalex.org/W3011748890","https://openalex.org/W1984904947","https://openalex.org/W1968428222","https://openalex.org/W2005350204","https://openalex.org/W2783314482"],"abstract_inverted_index":{"A":[0],"moving":[1],"horizon":[2,195],"estimation":[3],"(MHE)":[4],"technique":[5],"was":[6,141,186,190],"used":[7],"to":[8,72],"estimate":[9,98,157],"thin":[10,139],"film":[11,47,63,75,80,104,140,159,172],"growth":[12,48,64,76,81,105,117],"rate,":[13],"thickness,":[14],"and":[15,50,53,67,83,107,119,124,183,188],"high":[16],"temperature":[17],"optical":[18,51],"constants":[19],"in":[20,56,78,130],"situ":[21,57],"from":[22],"a":[23,73,96,136,144,193,200],"normal":[24],"reflectance":[25],"measurement.":[26],"The":[27,90,122],"advantage":[28],"of":[29,45,59,103,158,171,197,203],"MHE":[30,66,94,123,165,182,204],"over":[31],"the":[32,43,101,155,162,168,175,178,181],"virtual":[33],"interface":[34],"(VI)":[35],"method":[36,112,185],"is":[37,199],"that":[38,93,192],"it":[39,189],"does":[40],"not":[41],"require":[42],"assumption":[44],"constant":[46],"rate":[49,82,106,118],"properties,":[52],"this":[54],"allows":[55],"monitoring":[58],"more":[60],"general":[61],"dynamic":[62,169],"processes.":[65],"VI":[68,111,125,184,198],"methods":[69,126,152],"were":[70,127],"applied":[71],"simulated":[74],"process":[77],"which":[79],"extinction":[84,108,120],"coefficient":[85],"are":[86,209],"changing":[87],"with":[88],"time.":[89],"result":[91],"indicated":[92],"gave":[95,114,153],"better":[97],"by":[99,147],"capturing":[100],"change":[102,170],"coefficient,":[109],"while":[110],"only":[113],"an":[115,131],"averaged":[116],"coefficient.":[121],"also":[128],"compared":[129],"experimental":[132],"CVD":[133],"testbed":[134],"where":[135],"polycrystalline":[137],"yttria":[138],"deposited":[142],"on":[143],"silicon":[145],"substrate":[146],"MOCVD.":[148],"Although":[149],"these":[150],"two":[151],"roughly":[154],"same":[156],"properties":[160,173],"at":[161],"end":[163],"point,":[164],"additionally":[166],"estimated":[167],"during":[174],"deposition.":[176],"Finally":[177],"connection":[179],"between":[180],"discussed":[187],"shown":[191],"finite":[194],"implementation":[196],"special":[201],"case":[202],"when":[205],"certain":[206],"weighting":[207],"matrices":[208],"discarded.":[210]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}