{"id":"https://openalex.org/W2116268341","doi":"https://doi.org/10.1109/acc.2007.4282753","title":"Trajectory Control of MEMS Lateral Comb Resonators Under Faulty Conditions","display_name":"Trajectory Control of MEMS Lateral Comb Resonators Under Faulty Conditions","publication_year":2007,"publication_date":"2007-07-01","ids":{"openalex":"https://openalex.org/W2116268341","doi":"https://doi.org/10.1109/acc.2007.4282753","mag":"2116268341"},"language":"en","primary_location":{"id":"doi:10.1109/acc.2007.4282753","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2007.4282753","pdf_url":null,"source":{"id":"https://openalex.org/S4210168941","display_name":"Proceedings of the ... American Control Conference/Proceedings of the American Control Conference","issn_l":"0743-1619","issn":["0743-1619","2378-5861"],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 American Control Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5026769663","display_name":"Afshin Izadian","orcid":"https://orcid.org/0000-0001-9156-8926"},"institutions":[{"id":"https://openalex.org/I12097938","display_name":"West Virginia University","ror":"https://ror.org/011vxgd24","country_code":"US","type":"education","lineage":["https://openalex.org/I12097938"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Afshin Izadian","raw_affiliation_strings":["Department of CSEE, West Virginia University, USA","West Virginia Univ. Morgantown"],"affiliations":[{"raw_affiliation_string":"Department of CSEE, West Virginia University, USA","institution_ids":["https://openalex.org/I12097938"]},{"raw_affiliation_string":"West Virginia Univ. Morgantown","institution_ids":["https://openalex.org/I12097938"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026536186","display_name":"Lawrence A. Hornak","orcid":"https://orcid.org/0000-0002-0181-1687"},"institutions":[{"id":"https://openalex.org/I12097938","display_name":"West Virginia University","ror":"https://ror.org/011vxgd24","country_code":"US","type":"education","lineage":["https://openalex.org/I12097938"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Lawrence A. Hornak","raw_affiliation_strings":["Department of CSEE, West Virginia University, USA","West Virginia Univ. Morgantown"],"affiliations":[{"raw_affiliation_string":"Department of CSEE, West Virginia University, USA","institution_ids":["https://openalex.org/I12097938"]},{"raw_affiliation_string":"West Virginia Univ. Morgantown","institution_ids":["https://openalex.org/I12097938"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111526002","display_name":"Parviz Famouri","orcid":null},"institutions":[{"id":"https://openalex.org/I12097938","display_name":"West Virginia University","ror":"https://ror.org/011vxgd24","country_code":"US","type":"education","lineage":["https://openalex.org/I12097938"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Parviz Famouri","raw_affiliation_strings":["Department of CSEE, West Virginia University, USA","West Virginia Univ. Morgantown"],"affiliations":[{"raw_affiliation_string":"Department of CSEE, West Virginia University, USA","institution_ids":["https://openalex.org/I12097938"]},{"raw_affiliation_string":"West Virginia Univ. Morgantown","institution_ids":["https://openalex.org/I12097938"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5026769663"],"corresponding_institution_ids":["https://openalex.org/I12097938"],"apc_list":null,"apc_paid":null,"fwci":2.9367,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.90281513,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":"ac 23","issue":null,"first_page":"3198","last_page":"3203"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.7142690420150757},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.6139103770256042},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.6104053854942322},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5735352039337158},{"id":"https://openalex.org/keywords/trajectory","display_name":"Trajectory","score":0.5318975448608398},{"id":"https://openalex.org/keywords/comb-drive","display_name":"Comb drive","score":0.4753527343273163},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.44761496782302856},{"id":"https://openalex.org/keywords/position","display_name":"Position (finance)","score":0.4199824333190918},{"id":"https://openalex.org/keywords/block","display_name":"Block (permutation group theory)","score":0.41373735666275024},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3834449052810669},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.35499781370162964},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.21568563580513},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.20042410492897034},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1721993088722229},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.11679276823997498},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.0885673463344574}],"concepts":[{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.7142690420150757},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.6139103770256042},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.6104053854942322},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5735352039337158},{"id":"https://openalex.org/C13662910","wikidata":"https://www.wikidata.org/wiki/Q193139","display_name":"Trajectory","level":2,"score":0.5318975448608398},{"id":"https://openalex.org/C155840801","wikidata":"https://www.wikidata.org/wiki/Q5150581","display_name":"Comb drive","level":4,"score":0.4753527343273163},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.44761496782302856},{"id":"https://openalex.org/C198082294","wikidata":"https://www.wikidata.org/wiki/Q3399648","display_name":"Position (finance)","level":2,"score":0.4199824333190918},{"id":"https://openalex.org/C2777210771","wikidata":"https://www.wikidata.org/wiki/Q4927124","display_name":"Block (permutation group theory)","level":2,"score":0.41373735666275024},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3834449052810669},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.35499781370162964},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.21568563580513},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.20042410492897034},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1721993088722229},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.11679276823997498},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.0885673463344574},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C10138342","wikidata":"https://www.wikidata.org/wiki/Q43015","display_name":"Finance","level":1,"score":0.0},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/acc.2007.4282753","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2007.4282753","pdf_url":null,"source":{"id":"https://openalex.org/S4210168941","display_name":"Proceedings of the ... American Control Conference/Proceedings of the American Control Conference","issn_l":"0743-1619","issn":["0743-1619","2378-5861"],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 American Control Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320306101","display_name":"National Aeronautics and Space Administration","ror":"https://ror.org/027ka1x80"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":28,"referenced_works":["https://openalex.org/W586922167","https://openalex.org/W1487127700","https://openalex.org/W1516289514","https://openalex.org/W1866588859","https://openalex.org/W1944245640","https://openalex.org/W1997573833","https://openalex.org/W2101136244","https://openalex.org/W2104377276","https://openalex.org/W2108525977","https://openalex.org/W2109349754","https://openalex.org/W2113817513","https://openalex.org/W2116288835","https://openalex.org/W2117181723","https://openalex.org/W2118672864","https://openalex.org/W2124227348","https://openalex.org/W2148522412","https://openalex.org/W2163712607","https://openalex.org/W3159483641","https://openalex.org/W3207774177","https://openalex.org/W3212814358","https://openalex.org/W4236163578","https://openalex.org/W6629040409","https://openalex.org/W6634697820","https://openalex.org/W6641000814","https://openalex.org/W6677293743","https://openalex.org/W6678639501","https://openalex.org/W6738778693","https://openalex.org/W6804031867"],"related_works":["https://openalex.org/W1650140711","https://openalex.org/W2537716684","https://openalex.org/W2152087047","https://openalex.org/W4205892980","https://openalex.org/W2750888884","https://openalex.org/W2741863900","https://openalex.org/W2076313080","https://openalex.org/W2148180101","https://openalex.org/W3022929460","https://openalex.org/W2795753116"],"abstract_inverted_index":{"Electrostatic":[0],"force":[1,73],"generation":[2],"in":[3,23,57,103,147],"MEMS":[4],"Lateral":[5,122],"Comb":[6,123],"Resonators":[7,124],"is":[8,109,118,145,153],"not":[9],"a":[10,112],"function":[11],"of":[12,15,26,51,60,82,89,111,160],"the":[13,16,19,24,27,37,43,48,55,65,77,80,87,100,104,148,158,161],"distance":[14],"stationary":[17],"and":[18,32,53,97,117,127,152],"moving":[20,68],"plate":[21,69],"(shuttle)":[22],"direction":[25,50],"movement.":[28],"However,":[29],"manufacturing":[30],"imperfections":[31],"sometimes":[33],"faulty":[34,128],"conditions":[35],"make":[36],"device":[38,56,78],"operate":[39],"asymmetrically":[40],"which":[41,75],"cause":[42],"rotational":[44],"movement,":[45],"orthogonal":[46],"to":[47,93,98,120,138,156],"conventional":[49],"movement":[52],"put":[54],"unstable":[58],"region":[59,81],"operation.":[61],"In":[62],"this":[63],"case,":[64],"rotated":[66],"lateral":[67],"experiences":[70],"an":[71],"extra":[72],"generated":[74],"pulls":[76],"into":[79],"instability.":[83],"This":[84],"paper":[85],"illustrates":[86],"application":[88],"variable":[90],"structure":[91],"controllers":[92],"correct":[94],"such":[95],"behavior":[96],"compensate":[99],"uncertainties":[101],"exist":[102],"microsystem":[105],"parameters.":[106],"The":[107,130,143],"controller":[108,131,144],"composed":[110],"self-tuning":[113],"parameter":[114],"estimation":[115],"block":[116],"designed":[119],"control":[121,150,162],"under":[125,163],"healthy":[126],"conditions.":[129,166],"utilizes":[132],"through":[133],"wafer":[134],"optical":[135],"monitoring":[136],"techniques":[137],"provide":[139],"position":[140],"feedback":[141],"signal.":[142],"implemented":[146],"real-time":[149],"board":[151],"experimentally":[154],"tested":[155],"demonstrate":[157],"effectiveness":[159],"different":[164],"operating":[165]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}