{"id":"https://openalex.org/W2162082081","doi":"https://doi.org/10.1109/acc.2007.4282545","title":"Robust Control for Linear Stages in Electronic Manufacturing","display_name":"Robust Control for Linear Stages in Electronic Manufacturing","publication_year":2007,"publication_date":"2007-07-01","ids":{"openalex":"https://openalex.org/W2162082081","doi":"https://doi.org/10.1109/acc.2007.4282545","mag":"2162082081"},"language":"en","primary_location":{"id":"doi:10.1109/acc.2007.4282545","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2007.4282545","pdf_url":null,"source":{"id":"https://openalex.org/S4210168941","display_name":"Proceedings of the ... American Control Conference/Proceedings of the American Control Conference","issn_l":"0743-1619","issn":["0743-1619","2378-5861"],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 American Control Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103551252","display_name":"Rafael Quintanilla","orcid":null},"institutions":[{"id":"https://openalex.org/I165799507","display_name":"Rensselaer Polytechnic Institute","ror":"https://ror.org/01rtyzb94","country_code":"US","type":"education","lineage":["https://openalex.org/I165799507"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Rafael Quintanilla","raw_affiliation_strings":["Center for Automation Technologies and Systems, Department of Electrical Computer & Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA"],"affiliations":[{"raw_affiliation_string":"Center for Automation Technologies and Systems, Department of Electrical Computer & Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA","institution_ids":["https://openalex.org/I165799507"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074830403","display_name":"John T. Wen","orcid":"https://orcid.org/0000-0002-5123-5411"},"institutions":[{"id":"https://openalex.org/I165799507","display_name":"Rensselaer Polytechnic Institute","ror":"https://ror.org/01rtyzb94","country_code":"US","type":"education","lineage":["https://openalex.org/I165799507"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"John T. Wen","raw_affiliation_strings":["Center for Automation Technologies and Systems, Department of Electrical Computer & Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA"],"affiliations":[{"raw_affiliation_string":"Center for Automation Technologies and Systems, Department of Electrical Computer & Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA","institution_ids":["https://openalex.org/I165799507"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025743742","display_name":"Murat Arcak","orcid":"https://orcid.org/0000-0001-9060-4032"},"institutions":[{"id":"https://openalex.org/I165799507","display_name":"Rensselaer Polytechnic Institute","ror":"https://ror.org/01rtyzb94","country_code":"US","type":"education","lineage":["https://openalex.org/I165799507"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Murat Arcak","raw_affiliation_strings":["Center for Automation Technologies and Systems, Department of Electrical Computer & Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA"],"affiliations":[{"raw_affiliation_string":"Center for Automation Technologies and Systems, Department of Electrical Computer & Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA","institution_ids":["https://openalex.org/I165799507"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026893328","display_name":"Joe Frankel","orcid":null},"institutions":[{"id":"https://openalex.org/I134782154","display_name":"Electro Scientific Industries (United States)","ror":"https://ror.org/02620c122","country_code":"US","type":"company","lineage":["https://openalex.org/I134782154","https://openalex.org/I4210092805"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Joe Frankel","raw_affiliation_strings":["Electro Scientific Industries, Inc., Portland, OR, USA"],"affiliations":[{"raw_affiliation_string":"Electro Scientific Industries, Inc., Portland, OR, USA","institution_ids":["https://openalex.org/I134782154"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5098227194","display_name":"Mark Peeples","orcid":null},"institutions":[{"id":"https://openalex.org/I134782154","display_name":"Electro Scientific Industries (United States)","ror":"https://ror.org/02620c122","country_code":"US","type":"company","lineage":["https://openalex.org/I134782154","https://openalex.org/I4210092805"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mark Peeples","raw_affiliation_strings":["Electro Scientific Industries, Inc., Portland, OR, USA"],"affiliations":[{"raw_affiliation_string":"Electro Scientific Industries, Inc., Portland, OR, USA","institution_ids":["https://openalex.org/I134782154"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5001393750","display_name":"Mark Unrath","orcid":null},"institutions":[{"id":"https://openalex.org/I134782154","display_name":"Electro Scientific Industries (United States)","ror":"https://ror.org/02620c122","country_code":"US","type":"company","lineage":["https://openalex.org/I134782154","https://openalex.org/I4210092805"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mark Unrath","raw_affiliation_strings":["Electro Scientific Industries, Inc., Portland, OR, USA"],"affiliations":[{"raw_affiliation_string":"Electro Scientific Industries, Inc., Portland, OR, USA","institution_ids":["https://openalex.org/I134782154"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5103551252"],"corresponding_institution_ids":["https://openalex.org/I165799507"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.28328804,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1269","last_page":"1274"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9972000122070312,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/weighting","display_name":"Weighting","score":0.7652838230133057},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.7473965287208557},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.6822316646575928},{"id":"https://openalex.org/keywords/gain-scheduling","display_name":"Gain scheduling","score":0.6805952787399292},{"id":"https://openalex.org/keywords/robust-control","display_name":"Robust control","score":0.6671444773674011},{"id":"https://openalex.org/keywords/workspace","display_name":"Workspace","score":0.5648290514945984},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5074760317802429},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.5041431188583374},{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.42712926864624023},{"id":"https://openalex.org/keywords/robustness","display_name":"Robustness (evolution)","score":0.41103214025497437},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3240022659301758},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.2479015290737152},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.16215106844902039},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.150271475315094}],"concepts":[{"id":"https://openalex.org/C183115368","wikidata":"https://www.wikidata.org/wiki/Q856577","display_name":"Weighting","level":2,"score":0.7652838230133057},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.7473965287208557},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.6822316646575928},{"id":"https://openalex.org/C97090092","wikidata":"https://www.wikidata.org/wiki/Q764612","display_name":"Gain scheduling","level":3,"score":0.6805952787399292},{"id":"https://openalex.org/C31531917","wikidata":"https://www.wikidata.org/wiki/Q915157","display_name":"Robust control","level":3,"score":0.6671444773674011},{"id":"https://openalex.org/C58581272","wikidata":"https://www.wikidata.org/wiki/Q12741163","display_name":"Workspace","level":3,"score":0.5648290514945984},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5074760317802429},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.5041431188583374},{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.42712926864624023},{"id":"https://openalex.org/C63479239","wikidata":"https://www.wikidata.org/wiki/Q7353546","display_name":"Robustness (evolution)","level":3,"score":0.41103214025497437},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3240022659301758},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.2479015290737152},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.16215106844902039},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.150271475315094},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C104317684","wikidata":"https://www.wikidata.org/wiki/Q7187","display_name":"Gene","level":2,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C126838900","wikidata":"https://www.wikidata.org/wiki/Q77604","display_name":"Radiology","level":1,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/acc.2007.4282545","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2007.4282545","pdf_url":null,"source":{"id":"https://openalex.org/S4210168941","display_name":"Proceedings of the ... American Control Conference/Proceedings of the American Control Conference","issn_l":"0743-1619","issn":["0743-1619","2378-5861"],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 American Control Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.4399999976158142}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W1564283866","https://openalex.org/W1990777642","https://openalex.org/W2016061395","https://openalex.org/W2048945369","https://openalex.org/W2062691475","https://openalex.org/W2065313971","https://openalex.org/W2102642497","https://openalex.org/W2163918931","https://openalex.org/W2475764707","https://openalex.org/W2492791808","https://openalex.org/W2749477450","https://openalex.org/W3195133498","https://openalex.org/W4210556961","https://openalex.org/W6643981991","https://openalex.org/W6665960101","https://openalex.org/W6676095690","https://openalex.org/W6722805207","https://openalex.org/W6800164818"],"related_works":["https://openalex.org/W1992503747","https://openalex.org/W2371519816","https://openalex.org/W2043154226","https://openalex.org/W2369529107","https://openalex.org/W2329043542","https://openalex.org/W2109948066","https://openalex.org/W1678858522","https://openalex.org/W3195090107","https://openalex.org/W2026694384","https://openalex.org/W2081452858"],"abstract_inverted_index":{"This":[0],"paper":[1],"considers":[2],"the":[3,18,29,37,58,86,89,92,108,113,128],"control":[4,19,49,53],"of":[5,17,78,88],"an":[6],"x-y":[7],"linear":[8,63],"stage":[9],"commonly":[10],"used":[11],"in":[12],"electronic":[13],"manufacturing.":[14],"The":[15,76],"challenge":[16],"problem":[20],"includes":[21],"coupled":[22],"and":[23,41,54,81],"nonlinear":[24,71,114],"dynamics,":[25,32],"flexibility":[26],"due":[27,35],"to":[28,36],"air":[30],"bearing":[31],"geometric":[33],"nonlinearity":[34],"interferometer":[38],"position":[39],"measurement,":[40],"tight":[42],"cross-axis":[43],"positioning":[44],"requirements.":[45],"We":[46],"evaluate":[47],"two":[48],"design":[50,66],"approaches:":[51],"robust":[52,59,97],"gain":[55,93],"scheduling.":[56],"For":[57,91],"controller,":[60],"a":[61],"nominal":[62],"time":[64],"invariant":[65],"model":[67],"is":[68,117,125],"chosen":[69],"with":[70,120],"dynamics":[72],"considered":[73],"as":[74],"uncertainties.":[75],"choice":[77],"uncertainty":[79],"characterization":[80],"weighting":[82],"functions":[83],"significantly":[84],"affect":[85],"performance":[87,124],"controller.":[90],"scheduling":[94],"controller":[95],"design,":[96],"controllers":[98],"based":[99],"on":[100],"linearized":[101],"models":[102],"at":[103],"several":[104],"operating":[105],"points":[106],"within":[107],"workspace":[109],"are":[110],"combined.":[111],"From":[112],"simulation,":[115],"it":[116],"shown":[118],"that":[119],"suitable":[121],"tuning,":[122],"good":[123],"obtained":[126],"throughout":[127],"work":[129],"volume.":[130]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}